A wafer stabilizing transport device to prevent detachment

Abstract

This utility model discloses a wafer stabilizing and handling device to prevent wafer detachment, comprising: a base, a slide rail, a carrier, and a piston. The slide rail is horizontally movably disposed above the base, and the carrier is disposed on the slide rail. The carrier has a recessed positioning groove corresponding to the wafer. One end of the carrier has a horizontally disposed piston hole extending below the positioning groove. The piston is horizontally movably disposed in the piston hole. The positioning groove has a negative pressure adsorption hole communicating with the positioning groove. This wafer stabilizing and handling device can perform horizontal wafer handling, improving the stability and safety of the wafer during the handling process.

Description

Technical Field

[0001] This utility model relates to the field of wafer handling technology, and in particular to a wafer stabilization handling device that prevents wafers from falling off. Background Technology

[0002] In the wafer production and inspection process, multiple loading and unloading operations are required. Current technologies often employ robotic arms to handle the wafers, feeding them into inspection or processing equipment, and then sending them out after inspection or processing is complete.

[0003] Wafers are relatively thin and light, making them unstable during handling and prone to detaching from the carrier. To improve the stability of wafer handling, vacuum chucks can be used to hold and hold the wafers in place. However, the suction force of vacuum chucks is difficult to control, and excessive suction can easily damage the wafers, requiring improvement. Utility Model Content

[0004] The purpose of this invention is to provide a wafer stabilization and handling device that prevents wafers from falling off, thereby improving the stability and safety of the handling process.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A wafer stabilizing transport device for preventing wafer detachment includes: a base, a slide rail, a carrier, and a piston. The slide rail is slidably disposed above the base. The carrier is disposed on the slide rail. The carrier has a recessed positioning groove corresponding to the wafer. One end of the carrier has a horizontally disposed piston hole extending below the positioning groove. The piston is slidably disposed in the piston hole. The positioning groove has a negative pressure adsorption hole communicating with the positioning groove.

[0007] The base is equipped with a guide slider that corresponds to the slide rail.

[0008] The base has a gear mounting bracket on one side, and a first gear located below the slide rail is rotatably mounted in the gear mounting bracket. The bottom of the slide rail has a tooth groove or rack that meshes with the first gear.

[0009] The gear mounting bracket is equipped with a first motor, and the shaft of the first motor is equipped with a second gear that meshes with the first gear.

[0010] The carrier is located at the front end of the top of the slide rail, the opening of the piston hole is located at the front end of the carrier, the front end of the carrier is provided with a mounting plate extending downward to the front end of the slide rail, a second motor is vertically arranged on the mounting plate, a turntable is provided at the top of the rotating shaft of the second motor in front of the opening of the piston hole, a pin is eccentrically arranged on the turntable, a pin seat is provided at the tail of the piston, and a connecting rod is provided between the pin and the pin seat.

[0011] The second motor is provided with fastening screws that penetrate the mounting plate and connect to the front end of the slide rail.

[0012] The turntable has several threaded mounting holes corresponding to the pins, spaced radially apart.

[0013] The beneficial effects of this utility model are as follows: A wafer stabilizing transport device that prevents wafers from falling off can be placed in the positioning groove of the carrier and transported horizontally with the lateral movement of the slide rail. By moving the piston outward, a stable negative pressure is formed in the negative pressure adsorption hole to adsorb and fix the wafer. This can not only improve the stability of the wafer during the transport process, but also avoid damage to the wafer. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 yes Figure 1 A schematic diagram of the structure after the slide rail has moved laterally. Detailed Implementation

[0016] The following is combined with Figures 1-2 The technical solution of this utility model will be further illustrated through specific embodiments.

[0017] like Figure 1 The wafer stabilizing transport device shown is used for transporting wafer 20. It includes a base 13, a slide rail 1, a carrier 2, and a piston 6. The slide rail 1 is horizontally movably positioned above the base 13. The carrier 2 is mounted on the slide rail 1. The carrier 2 has a recessed positioning groove 4 corresponding to the wafer 20. The wafer 20 is placed into the positioning groove 4 for precise positioning. However, the positioning groove 4 is relatively shallow, only capable of positioning the wafer 20 and cannot prevent it from flying off during transport; therefore, it requires adsorption and fixation.

[0018] In this embodiment, a guide slider 12 corresponding to the slide rail 1 is provided on the base 13 to guide the lateral movement of the slide rail 1. A gear mounting bracket 21 is provided on one side of the base 13, and a first gear 16 located below the slide rail 1 is rotatably disposed in the gear mounting bracket 21. The bottom of the slide rail 1 is provided with a tooth groove 17 or a rack that meshes with the first gear 16. The lateral movement of the slide rail 1 is driven by the rotation of the first gear 16.

[0019] like Figure 1As shown, a first motor 15 is mounted on the gear mounting bracket 21. A second gear 14, which meshes with the first gear 16, is mounted on the shaft of the first motor 15. The rotation of the second gear 14, driven by the first motor 15, causes the first gear 16 to rotate and the slide rail 1 to move laterally. The rotation of the first motor 15 can be controlled by a PLC, improving the lateral movement accuracy and automation level of the slide rail 1.

[0020] A piston hole 5 extending below the positioning groove 4 is horizontally provided at one end of the carrier 2. The piston 5 is laterally movable in the piston hole 5. A negative pressure suction hole 3 communicating with the positioning groove 4 is provided in the positioning groove 4. Figure 2 As shown, piston 5 is located in front of negative pressure adsorption hole 3. After piston 5 moves forward, negative pressure is formed in piston hole 5, and a suction force is generated on wafer 20 in negative pressure adsorption hole 3 to prevent wafer 20 from flying off.

[0021] In this embodiment, the carrier 2 is placed at the front end of the top of the slide rail 1, and the opening of the piston hole 5 is also located at the front end of the carrier 2. The front end of the carrier 2 is integrally provided with a mounting plate 11 extending downward to the front end of the slide rail 1. A second motor 10 is vertically arranged on the mounting plate 11. The second motor 10 is provided with a fastening screw 19 that penetrates the mounting plate 11 and connects to the front end of the slide rail 1, so as to realize the connection and fixation of the second motor 10, the mounting plate 11 and the slide rail 1, which facilitates assembly.

[0022] like Figure 1 As shown, a turntable 9 is provided at the top of the shaft of the second motor 10, located in front of the opening of the piston hole 5. A pin 8 is eccentrically mounted on the turntable 9, as shown in the figure. Figure 2 As shown, the piston 6 is provided with a pin seat 18 at its tail end, and a connecting rod 7 is provided between the pin shaft 8 and the pin seat 18. By rotating the second motor 10 180 degrees, the piston 6 can move forward and the negative pressure environment of the piston hole 5 can be maintained, which improves the stability of the wafer 20 during the forward and backward movement and transportation process.

[0023] The rotation control of the second motor 10 can be achieved using a PLC, thereby improving the level of automation. In addition, in this embodiment, the turntable 9 is provided with several threaded mounting holes corresponding to the pin 8 at radial intervals, which facilitates the installation of the pin 8 and the adjustment of the eccentric distance, thereby changing the forward movement distance of the piston 6 and thus changing the magnitude of the negative pressure in the piston hole 5, avoiding adsorption damage to the wafer 20.

[0024] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A wafer stabilizing transport device to prevent wafer detachment, used for transporting wafers, characterized in that, include: The device comprises a base, a slide rail, a carrier, and a piston. The slide rail is slidably disposed above the base. The carrier is disposed on the slide rail. The carrier has a recessed positioning groove corresponding to the wafer. One end of the carrier has a horizontally disposed piston hole extending below the positioning groove. The piston is slidably disposed in the piston hole. The positioning groove has a negative pressure adsorption hole communicating with the positioning groove.

2. The anti-drop wafer stable carrying device according to claim 1, wherein, The base is equipped with guide sliders that correspond to the slide rails.

3. The anti-drop wafer stable carrying device according to claim 1, wherein, A gear mounting bracket is provided on one side of the base, and a first gear located below the slide rail is rotatably mounted in the gear mounting bracket. The bottom of the slide rail is provided with a tooth groove or rack that meshes with the first gear.

4. The anti-drop wafer stable carrying device according to claim 3, wherein, The gear mounting bracket is equipped with a first motor, and the shaft of the first motor is equipped with a second gear that meshes with the first gear.

5. The anti-drop wafer stable carrying device according to claim 1, wherein, The carrier is positioned at the front end of the top of the slide rail. The opening of the piston hole is located at the front end of the carrier. The front end of the carrier is provided with a mounting plate extending downward to the front end of the slide rail. A second motor is vertically mounted on the mounting plate. A turntable is located in front of the opening of the piston hole at the top of the rotating shaft of the second motor. A pin is eccentrically mounted on the turntable. A pin seat is provided at the tail end of the piston. A connecting rod is provided between the pin and the pin seat.

6. The wafer stabilizing transport device for preventing detachment according to claim 5, characterized in that, The second motor is provided with fastening screws that penetrate the mounting plate and connect to the front end of the slide rail.

7. The anti-drop wafer stabilizing handling device according to claim 5, wherein The turntable has several threaded mounting holes at radial intervals corresponding to the pins.

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