一种晶圆盒的拾取装置
The wafer cassette picking device, which uses multiple motion axes in coordination, solves the problem of wafer cassettes easily falling off in existing technologies by using rollers to lift and rotating downward cylinders to fix the sides, thus achieving stable and reliable wafer cassette gripping.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU XINHUILIAN SEMICON TECH CO LTD
- Filing Date
- 2025-09-09
- Publication Date
- 2026-07-17
AI Technical Summary
Existing wafer cassette gripping methods rely on friction, which can easily cause wafer cassettes to fall due to equipment failure or insufficient friction, affecting handling efficiency and product quality.
The wafer cassette pickup device employs multiple motion axes working in tandem. It uses rollers to lift the bottom arc surface of the wafer cassette, rotates and presses down a cylinder to fix the side, and uses positioning pins to limit the position, ensuring stable gripping.
This ensures the stability and safety of the wafer cassette during the gripping process, preventing it from falling and improving handling efficiency and the reliability of the production process.
Smart Images
Figure CN224521605U_ABST
Abstract
Claims
1. A pick-up device for a wafer cassette, characterized by include: The components connected from bottom to top are: a first transverse component (100), a lifting component (200), a rotating component (300), a second transverse component (400), and a wafer cassette clamping component (500). The top of the first transverse component (100) is fixed to the bottom of the lifting component (200) and is used to drive the lifting component (200) to move within the movable range of the first transverse component (100); The top of the lifting component (200) is fixed to the bottom of the rotating component (300) and is used to drive the rotating component (300) to move up and down. The top of the rotating component (300) is fixed to the bottom of the second transverse component (400) and is used to drive the second transverse component (400) to rotate about the rotating component (300) as the axis. The top of the second transverse component (400) is fixed to the bottom of the wafer cassette clamping component (500) and is used to drive the wafer cassette clamping component (500) to move within the movable range of the second transverse component (400); The wafer cassette clamp assembly (500) is used to clamp and secure the wafer cassette (600).
2. The wafer boat pickup apparatus of claim 1, wherein, The first lateral movement component (100) includes: The main frame (101), linear guide (102), first synchronous belt (103), active synchronous belt pulley assembly (110), driven synchronous belt pulley assembly (111) and adjusting screw (109). The main frame (101) is located at the bottom of the first transverse component (100), the linear guide rail (102) is fixed on the main frame (101), and the two driven synchronous pulley assemblies (111) are respectively fixed at both ends of the linear guide rail (102) and connected by the first synchronous belt (103). One end of the active synchronous pulley assembly (110) is connected to one of the driven synchronous pulley assemblies (111), and the other end of the active synchronous pulley assembly (110) is connected to the drive device; The adjusting screw (109) is disposed on the driven synchronous pulley assembly (111) and is used to adjust the tension of the first synchronous belt (103).
3. The wafer boat pickup apparatus of claim 2, wherein, The active synchronous pulley assembly (110) includes: Synchronous pulley (108), second rotating shaft (112), second synchronous belt (113) and first servo motor (114). The active synchronous pulley assembly (110) is connected to the driven synchronous pulley assembly (111) via the second rotating shaft (112); The two synchronous pulleys (108) are connected by the second synchronous belt (113), and the first servo motor (114) is connected to one of the synchronous pulleys (108).
4. The wafer boat pickup apparatus of claim 2, wherein, The driven synchronous pulley assembly (111) includes: Bearing mounting base (104), base plate (105), first rotating shaft (106), bearing (107) and synchronous pulley (108); The base plate (105) is disposed at the bottom of the driven synchronous pulley assembly (111), and the driven synchronous pulley assembly (111) is fixed to the linear guide rail (102) through the base plate (105); The bearing mounting base (104) is fixed on the base plate (105), and both ends of the bearing (107) are connected to the bearing mounting base (104); The synchronous pulley (108) is connected to the bearing (107) via the first rotating shaft (106) passing through the synchronous pulley (108).
5. The wafer boat pickup apparatus of claim 1, wherein, The lifting assembly (200) includes: The lifting shaft base plate (201), the second servo motor (202), the coupling (203), the first ball screw (204), the first linear guide (205), the second linear guide (206), the third linear guide (207), the trapezoidal block (208), and the trapezoidal lifting assembly (209). The lifting assembly (200) is connected to the first transverse assembly (100) via the lifting shaft base plate (201) located at the bottom of the lifting assembly (200). The second servo motor (202) is fixed on the lifting shaft base plate (201). The second servo motor (202) is connected to the output shaft of the first ball screw (204) via the coupling (203). The first linear guide (205) is arranged on both sides of the first ball screw (204) and is horizontally arranged relative to the lifting shaft base plate (201); The second linear guide rail (206) is obliquely arranged relative to the lifting shaft base plate (201), and the third linear guide rail (207) is perpendicularly arranged relative to the lifting shaft base plate (201); The sliders of the first linear guide (205) and the second linear guide (206) are both fixed on the trapezoidal block (208), and the tracks of the first linear guide (205) and the second linear guide (206) are both fixed on the trapezoidal lifting assembly (209). The trapezoidal block (208) is parallel to the trapezoidal inclined surface of the trapezoidal lifting assembly (209).
6. The wafer boat pickup apparatus of claim 1, wherein, The rotating assembly (300) includes a direct drive motor (301); The top of the direct drive motor (301) is fixed to the second transverse assembly (400), and the bottom of the direct drive motor (301) is fixed to the lifting assembly (200).
7. The wafer boat pickup apparatus of claim 1, wherein, The second lateral movement component (400) includes: The fourth linear guide (401), the raised plate (402), the second transverse base plate (403), the second ball screw (404), the drag chain (405), the synchronous belt (406), and the third servo motor; The shim plate (402) is disposed at the bottom of the second transverse component (400); The fourth linear guide rail (401) is connected to the second transverse base plate (403) through the raised plate (402); The second ball screw (404) and the cable chain (405) are both mounted on the second transverse base plate (403); The third servo motor is mounted on the second transverse base plate (403) and drives the second ball screw (404) through the synchronous belt (406) for transmission.
8. The wafer boat pickup apparatus of claim 1, wherein, The wafer cassette clamp assembly (500) includes: The clamp assembly includes a base plate (502), a side plate (505), a front plate (506), a positioning pin (515), a sensor (516), a wafer cassette support element, and a wafer cassette clamp element; The front plate (506) and the side upright plate (505) are both fixed to the base plate (502) of the clamp assembly; The wafer cassette support element is fixed to the base plate (502) of the clamp assembly and passes through the front plate (506), and is used to support the bottom arc surface of the wafer cassette (600); Multiple wafer cassette clamping elements are fixed on the side plate (505) and used to clamp the side protrusions of the wafer cassette (600); The positioning pin (515) and the sensor (516) are both fixed on the front plate (506).
9. The wafer boat pickup apparatus of claim 8, wherein, The wafer cassette support element includes: Lifting roller (503), deep groove ball bearing (507), moving seat (508), fifth linear guide (509), parallel opening and closing pneumatic gripper (511), hydraulic buffer (512) and polyurethane limiter (513). The fifth linear guide rail (509) is fixed on the base plate (502) of the clamp assembly; The movable seat (508) is fixed on the fifth linear guide rail (509), and the movable seat (508) is connected to the parallel opening and closing type pneumatic gripper (511). One end of the lifting roller (503) passes through the front plate (506) and abuts against the wafer cassette (600), and the other end of the lifting roller (503) is fixed to the movable seat (508) by the deep groove ball bearing (507); Both the hydraulic buffer (512) and the polyurethane limiter (513) are mounted on the movable seat (508).
10. The wafer boat pickup apparatus of claim 8, wherein, The wafer cassette clamping element includes: Rotary downward pressure cylinder (501), right-angle seat (504), auxiliary sheet metal (510) and exhaust throttle valve (514); One end of the rotary pressing cylinder (501) is fixed to the side plate (505) through the right angle seat (504), and the other end of the rotary pressing cylinder (501) is connected to the front plate (506) through the auxiliary sheet metal (510). An exhaust throttle valve (514) is provided on the rotary downward cylinder (501).