晶环固定模组、晶环旋转机构和固晶设备

Abstract

本申请提供了一种晶环固定模组、晶环旋转机构和固晶设备，该晶环固定模组包括：支撑环架，用于承载支撑晶环；至少两个夹持块，沿晶环的周向间隔装配于支撑环架上，每个夹持块均设置为位于晶环的径向外侧，并能够在弹力作用下沿晶环的径向靠近晶环运动，并抵接晶环的外周侧。本申请技术方案，既能满足夹紧力要求的同时，又能对晶环进行相应的径向限制，确保晶环不会在跟随晶环固定模组旋转过程中，出现径向晃动的问题。

Claims

1. A crystal ring fixing mold set for achieving clamping and fixing of a crystal ring, characterized in that, The crystal ring fixing module includes: Support ring frame, used to support and carry the crystal ring; At least two clamping blocks are mounted on the support ring frame at circumferential intervals along the crystal ring. Each clamping block is configured to be located radially outside the crystal ring and can move radially toward the crystal ring under elastic force and abut against the outer periphery of the crystal ring.

2. The crystal ring fixing mold set according to claim 1, wherein The clamping block has an arc-shaped abutment surface on the side facing the crystal ring, and the arc-shaped abutment surface is adapted to the outer peripheral side of the crystal ring.

3. The crystal ring fixing module according to claim 2, wherein The crystal ring fixing module includes two clamping blocks, which are arranged radially opposite to each other on the crystal ring. The arc-shaped abutment surface of each clamping block extends 0.3 to 0.5 times the circumference of the outer periphery of the crystal ring.

4. The crystal ring fixing module according to claim 1, wherein The crystal ring fixing module includes three clamping blocks, and the three clamping blocks are equally spaced along the circumference of the crystal ring.

5. The crystal ring fixing module according to any one of claims 1 to 4, wherein The crystal ring fixing module also includes: The unlocking power module includes at least two movable blocks, each of the clamping blocks being connected to one of the movable blocks in a transmission manner, and each of the movable blocks being configured to drive the corresponding clamping block to move radially away from the outer periphery of the crystal ring under power drive.

6. The crystal ring fixing module according to claim 5, wherein the ring fixing module is a ring fixing module for a crystal ring having a diameter of 100 mm or more. The support ring frame is provided with at least two mounting slots spaced apart along the circumference of the crystal ring. Each mounting slot is movably mounted with a movable block along the radial direction of the crystal ring. Each mounting slot is also configured to form an inflatable chamber with one side of the corresponding movable block. Each of the inflatable chambers is configured to generate air pressure that allows the corresponding movable block to move radially away from the outer periphery of the crystal ring by inflation.

7. The crystal ring fixing module according to claim 6, wherein The unlocking power module also includes an annular air supply pipe and an air supply structure. The annular air supply pipe is built into the support ring frame and is arranged around the outer periphery of the crystal ring. The annular air supply pipe is connected to each of the inflatable chambers, and the surface of the supporting ring frame is provided with the air inlet of the annular air supply pipe. The air supply connector of the air supply structure is movably connected to the air inlet.

8. The crystal ring fixing module according to claim 6, wherein the crystal ring fixing module is characterized by comprising: At least one spring is sandwiched between the side of the movable block away from the outer periphery of the crystal ring and the sidewall of the corresponding mounting groove, and each spring extends radially along the crystal ring. The movable block is also fastened to the corresponding clamping block, so that the corresponding clamping block is elastically mounted on the support ring frame along the radial direction of the crystal ring through the cooperation of the corresponding movable block and the spring.

9. A crystal ring rotating mechanism, characterized by comprising: The crystal ring rotation mechanism includes a base, a rotation power assembly, and a crystal ring fixing module as described in any one of claims 1-8. The support ring frame is rotatably mounted on the base, and the rotation power assembly is fixed on the base and is drively connected to the support ring frame.

10. A die bonding apparatus, characterized in that, The die bonding device includes a crystal ring fixing module as described in any one of claims 1-8, or a crystal ring rotating mechanism as described in claim 9.

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