A foolproof device

By installing a foolproof device on the Loadport machine, and utilizing an internal coupling, an external slider, and a transmission system, combined with a silicone coating and sensors, the problem of insufficient fixation of the wafer transfer box on the Loadport machine is solved, achieving stable fixation and safe transmission, reducing the risk of equipment damage, and improving production efficiency.

CN224521619UActive Publication Date: 2026-07-17ZHEJIANG ICSPROUT SEMICONDUCTOR CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
ZHEJIANG ICSPROUT SEMICONDUCTOR CO LTD
Filing Date
2025-07-28
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

The loadport equipment does not provide sufficient fixation for the front-opening wafer transfer box, posing a risk that the wafer transfer box may fall off or be damaged during operation.

Method used

The device employs a foolproof mechanism, including an inner coupling, an outer slider, and a drive shaft. The tightening and loosening of the outer slider is adjusted through a gear transmission system. Combined with a silicone coating and sensor detection, this ensures the stable fixation and correct placement of the wafer transfer box.

Benefits of technology

It effectively prevents the wafer transfer box from falling off and being damaged during operation, improves the fixing effect, reduces the risk of equipment damage, and improves production efficiency and equipment reliability.

✦ Generated by Eureka AI based on patent content.

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    Figure CN224521619U_ABST
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Abstract

This application provides a foolproof device for a Loadport machine. A front-opening wafer transfer box is placed on a mounting platform of the Loadport machine's mounting base. The device includes: an inner coupling within the Loadport machine's mounting base, an outer slider above the mounting base, and a drive shaft connected to the inner coupling and the outer slider via gears. The inner coupling is connected to a drive belt of a drive motor within the Loadport machine's mounting base. When the mounting platform holding the front-opening wafer transfer box moves, triggering the drive motor in the Loadport machine's mounting base, the drive belt drives the inner coupling to rotate. The inner coupling then transmits power to the drive shaft via gears, causing the drive shaft to rotate. The drive shaft, in turn, controls the movement of the outer slider via gears, adjusting the tightening and loosening of the outer slider. The foolproof device is located on both sides of the front-opening wafer transfer box. This application improves the Loadport machine's ability to secure the FOUP (Front-Opening Unit).
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