一种螺杆式压片结构

By designing a screw-type pressing structure, the silicon wafers are stably fixed and released using a purely mechanical method. This solves the problems of magnetic material degradation and magnetic residue in traditional pressing structures under high-temperature environments, improving the stability of silicon wafer transportation and reducing the breakage rate.

CN224521620UActive Publication Date: 2026-07-17JIANGSU HANKE INTELLIGENT EQUIPMENT CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
JIANGSU HANKE INTELLIGENT EQUIPMENT CO LTD
Filing Date
2025-08-20
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Traditional wafer pressing structures are prone to magnetic material degradation under high temperature conditions, leading to adhesion of mechanical parts, increasing the silicon wafer breakage rate, and frequent occurrence of electromagnet magnetic residue, which affects the stability of silicon wafer transportation.

Method used

It adopts a screw-type pressing structure, which uses a purely mechanical structure to achieve automatic opening and closing. Through the cooperation of the screw and the arc groove, combined with the elastic element, the silicon wafer is stably fixed and released, avoiding the use of electromagnets.

Benefits of technology

This improved the stability of silicon wafer transportation, reduced the breakage rate, saved electrical control costs, and ensured the positioning accuracy and stability of silicon wafers.

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Abstract

本实用新型公开了一种螺杆式压片结构，包括：底座，底座上设置旋转座，旋转座内设置弹性元件，旋转座内位于弹性元件之间设置螺杆，螺杆上端活动插接载板，载板上开设有圆弧凹槽，螺杆活动贯穿圆弧凹槽，载板沿螺杆螺旋升降，螺杆上端固定安装压针。本实用新型使用螺杆式的纯机械结构来让压片结构实现自动开合，既满足了其功能性，保证了硅片的定位精度和稳定性，又解决了磁性材料高温劣化及电磁铁磁残留等的风险，降低了碎片率，同时无需电气控制，节省控制成本，极大的改善了硅片运输的稳定性。
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Claims

1. A screw-type tabletting structure comprising: A base (7) is fixedly mounted on the base (7), and an elastic element (5) is provided inside the rotating seat (6); The feature is that: a screw (3) is provided in the rotating seat (6) between the elastic elements (5), the bottom of the screw (3) is fixedly connected to the rotating seat (6), and the upper end of the screw (3) is movably inserted into the carrier plate (4); The carrier plate (4) has an arc groove (41) and the screw (3) moves through the arc groove (41). The carrier plate (4) moves up and down along the screw (3). The upper end of the screw (3) is fixedly installed with a pressure pin (2).

2. A screw-type tabletting structure according to claim 1, wherein The elastic element (5) is a spring structure.

3. A screw-type tabletting structure according to claim 1, wherein The circular groove (41) matches the curvature of the side of the screw (3).

4. A screw-type tabletting structure according to claim 1, wherein The upper end of the elastic element (5) abuts against the carrier plate (4), and the lower end abuts against the rotating seat (6).

5. A screw-type tabletting structure according to claim 4, wherein A right-angle groove is provided on the upper surface of the carrier plate (4), and a silicon wafer (1) is placed in the right-angle groove.