晶圆贴膜防呆装置

Abstract

本申请涉及半导体设备技术领域，公开了一种晶圆贴膜防呆装置，包括：贴膜平台，其第一表面为工作台面，以及工作台面上设有定位柱；承载环，承载环与工作台面可拆卸连接，用于套装且支撑晶圆，承载环的外侧面与定位柱抵接；贴膜滚轮，贴膜滚轮设于贴膜平台上，贴膜滚轮沿支撑轨在工作台面上方往复滚动，用于对晶圆贴膜；联动防呆件，包括接近开关及蜂鸣器，接近开关设于工作台面上且靠近承载环的外表面，蜂鸣器设于贴膜平台上且与接近开关电性连接，在贴膜平台工作时，当接近开关在工作台面上没有感应到承载环，则蜂鸣器动作并发出警报，以及贴膜滚轮同步停止工作。本申请提高晶圆贴膜可靠性及效率。

Claims

1. A wafer film pasting fool-proof device, characterized by comprising: include: A film application platform, wherein the first surface of the film application platform is a worktable, the worktable accommodates a wafer, and the worktable is provided with positioning posts; A support ring is detachably connected to the worktable surface and is used to mount and support the wafer. The outer side of the support ring abuts against the positioning post. A film-applying roller is provided on the film-applying platform, and support rails are provided on both sides of the film-applying platform. The film-applying roller reciprocates along the support rails above the worktable for applying film to the wafer. The linkage anti-foolproof component includes a proximity switch and a buzzer. The proximity switch is located on the workbench and close to the outer surface of the support ring. The buzzer is located on the film application platform and is electrically connected to the proximity switch. When the film application platform is working, if the proximity switch does not sense the support ring on the workbench, the buzzer will activate and issue an alarm, and the film application roller will stop working synchronously.

2. The wafer film pasting anti-fumble device according to claim 1, wherein, The linkage anti-foolproof component includes a front limit switch, which is located at one end of the support rail and is electrically connected to the proximity switch.

3. The wafer film pasting anti-fumble device according to claim 2, wherein, The linkage anti-foolproof component includes a rear limit switch, which is located at the other end of the support rail and is electrically connected to the proximity switch.

4. The wafer film pasting anti-fumble device according to claim 1, wherein, The buzzer is disposed on the second surface of the film application platform, and the second surface is disposed opposite to the first surface.

5. The wafer film pasting anti-fumble device according to claim 1, wherein, At least three of the positioning posts are arranged on the worktable, and the three positioning posts are not collinear.

6. The wafer film pasting anti-fumble device according to claim 1, wherein, The linkage anti-mistake component includes a warning light, which is located on the side of the film application platform or on the upper surface of the film application roller.

7. The wafer film pasting anti-fumble device according to claim 1, wherein, The wafer is housed at the center of the workbench surface.

8. The wafer film pasting anti-fumble device according to claim 1, wherein, The outer surface of the bearing ring has at least one positioning groove, which matches the positioning post.

9. The wafer film pasting anti-fumble device according to claim 1, wherein, The two support rails are arranged in parallel and symmetrically on the side of the film application platform.

10. The wafer film pasting anti-fumble device according to claim 1, wherein, The worktable surface is parallel to the horizontal plane, and the film-applying roller maintains a preset distance between the worktable surface and the upper surface of the wafer, the preset distance being equal to the film thickness of the wafer.

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