负压吸附治具

By setting a synergistic adsorption structure of negative pressure through holes and negative pressure blind holes in the mounting head, the problem of insufficient adsorption stability between the mounting head and the chip is solved, and precise chip welding and high yield are achieved.

CN224521630UActive Publication Date: 2026-07-17DONG GUAN GAO WEI GUANG XUE DIAN ZI YOU XIAN GONG SI

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
DONG GUAN GAO WEI GUANG XUE DIAN ZI YOU XIAN GONG SI
Filing Date
2025-08-13
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In the flip-chip packaging process, the adhesion stability between the mounting head fixture and the chip is insufficient, resulting in poor welding position accuracy and low packaging yield.

Method used

A through-hole with negative pressure is provided at the mounting head, and at least two negative pressure blind holes are arranged around the through-hole to form a synergistic adsorption structure. Through the conductive design, the negative pressure blind holes and the through-hole form a multi-level adsorption force field, which expands the adsorption area and forms a compensating adsorption force at the chip edge to avoid the concentration of adsorption force.

Benefits of technology

It improves the adsorption stability between the mounting head and the chip, prevents the chip from shifting or falling off, ensures that the chip is accurately moved to the preset position for soldering, reduces frictional displacement and dust particle generation, and improves the packaging yield.

✦ Generated by Eureka AI based on patent content.

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Abstract

本申请涉及一种负压吸附治具,涉及半导体封装技术领域。以解决芯片倒装封装过程中搭载头治具与芯片之间的吸附稳定性不足所导致芯片焊接位置精度较差且封装成品率较低的问题。该负压吸附治具,包括搭载头,搭载头沿第一方向设有负压通孔。搭载头沿第一方向的一个端面设有至少两个负压盲孔,至少两个负压盲孔绕负压通孔设置,负压盲孔的一端与负压通孔导通。以通过至少两个盲孔提高对芯片的吸附覆盖面积,从而提高对芯片的吸附稳定性。
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Claims

1. A negative pressure suction jig, characterized by, Includes a mounting head (10), wherein the mounting head (10) is provided with a negative pressure through hole (20) along a first direction; The mounting head (10) has at least two negative pressure blind holes (30) on one end face along the first direction. The at least two negative pressure blind holes (30) are arranged around the negative pressure through hole (20), and one end of the negative pressure blind hole (30) is connected to the negative pressure through hole (20).

2. The negative pressure suction jig according to claim 1, wherein On the end face of the mounting head (10) where the negative pressure blind hole (30) is provided, the side of the negative pressure blind hole (30) closer to the negative pressure through hole (20) along the length direction is the inner side, and the side of the negative pressure blind hole (30) away from the negative pressure through hole (20) along the length direction is the outer side; Along the length direction of the negative pressure blind hole (30), the depth dimension of the inner side of the negative pressure blind hole (30) along the first direction is greater than the depth dimension of the outer side of the negative pressure blind hole (30) along the first direction.

3. The negative pressure suction jig according to claim 2, wherein The negative pressure blind hole (30) is provided on the end face of the mounting head (10), and the dimension of the negative pressure blind hole (30) perpendicular to the length direction is the width dimension (B); Along the length direction of the negative pressure blind hole (30), the width dimension (B) of the negative pressure blind hole (30) on the inner side is greater than the width dimension (B) of the negative pressure blind hole (30) on the outer side.

4. The negative pressure suction jig according to claim 1, wherein The negative pressure blind hole (30) is provided on the end face of the mounting head (10), and the cross-sectional shape of the negative pressure blind hole (30) is an arc structure.

5. The negative pressure adsorption fixture according to any one of claims 1-4, characterized in that, The mounting head (10) includes: A connecting rod (11) is used for positioning and mounting the mounting head (10); And an adsorption platform (12), along the first direction, the adsorption platform (12) is connected to one end of the connecting rod (11), and the negative pressure through hole (20) passes through the connecting rod (11) and the adsorption platform (12) in sequence; The adsorption platform (12) has the negative pressure blind hole (30) on the adsorption surface (121) away from the connecting rod (11) along the first direction.

6. The negative pressure suction jig according to claim 5, wherein The shape of the adsorption surface (121) is polygonal, and at least part of the length direction of the negative pressure blind hole (30) is the angle between the negative pressure through hole (20) and the adsorption surface (121).

7. The negative pressure suction jig according to claim 6, wherein The adsorption surface (121) is rectangular in shape, and the number of negative pressure blind holes (30) is four; Two negative pressure blind holes (30) are arranged on opposite sides of the negative pressure through hole (20) along one of the diagonals of the adsorption surface (121), and the other two negative pressure blind holes (30) are arranged on opposite sides of the negative pressure through hole (20) along the other diagonal of the adsorption surface (121).

8. The negative pressure suction jig according to claim 5, wherein The mounting head (10) includes: A bolt platform (13) is connected between the connecting rod (11) and the adsorption platform (12) along the first direction; And an engraving table (14), which is connected between the bolt table (13) and the adsorption table (12) along the first direction, and the engraving table (14) is used to print identification marks.

9. The negative pressure suction jig according to claim 7, wherein The width of the adsorption surface (121) is 5.78-5.82 mm, and the length of the adsorption surface (121) is 7.02-7.06 mm. And / or, within the adsorption surface (121), the width of the smallest rectangular region where the negative pressure blind hole (30) is located is 4.26-4.30 mm, and the length of the smallest rectangular region where the negative pressure blind hole (30) is located is 5.08-5.12 mm.

10. The negative pressure suction jig according to any one of claims 1 to 4, wherein The diameter of the negative pressure through hole (20) is 1.5-2.5 mm.