An automatic substrate leveling and correction device

Abstract

This utility model relates to the field of substrate technology and discloses an automatic substrate leveling and correction device, including a processing table, a support frame fixedly installed on the top of the processing table, a cylinder fixedly installed on the top of the support frame, an imprinting device fixedly installed on the bottom of the cylinder, a support platform fixedly installed on the top of the processing table, and a mounting frame fixedly installed on the bottom of the processing table. A fixing component is provided on the surface of the processing table, the fixing component including a servo motor, which is fixedly installed on the bottom of the mounting frame. This automatic substrate leveling and correction device, by setting the fixing component, improves the flexibility and convenience of use, effectively avoiding the inability to adsorb and fix the substrate when its size changes. Therefore, during imprinting and correction, the substrate position does not change due to contact with the imprinting device, ensuring stability during substrate correction and facilitating operation.

Description

Technical Field

[0001] This utility model relates to an automatic substrate leveling and correction device, belonging to the field of substrate technology. Background Technology

[0002] Semiconductors are materials whose conductivity at room temperature is between that of conductors and insulators. The conductivity of semiconductor materials can be changed by doping. The concentration and polarity of impurities doped into the semiconductor will have a great influence on the conductivity of the semiconductor. Semiconductors doped with donor impurities mainly have electrons in the conduction band as the main charge carriers. Semiconductors doped with acceptor impurities are hole-type conductors. When processing semiconductor substrates, planing and correction devices are required.

[0003] Chinese Patent Publication No. CN219533616U discloses a nanoimprinting device and semiconductor equipment with a suction cup having multiple adsorption areas. The device includes: a displacement stage with positioning elements for substrate positioning; an imprinting assembly mounted above the displacement stage for bonding a template to the substrate, the assembly including an upper suction cup with multiple adsorption areas and a pressure regulating device communicating with the multiple adsorption areas for positive and negative pressure switching; and a lifting device for bonding the template to the substrate, the lifting device being connected to the imprinting assembly and driving the imprinting assembly to move up and down along the height of the displacement stage. The nanoimprinting device with a suction cup having multiple adsorption areas effectively prevents air bubbles from forming between the template and the substrate, ensuring uniform and flat force on the template, thereby effectively improving the bonding quality.

[0004] When the above-mentioned device is used to imprint and trim the substrate, it mainly fixes the substrate by adsorption. However, since the position of the adsorption port is relatively fixed and cannot be adjusted, it cannot fix substrates of different sizes and types, which reduces the flexibility and convenience of the equipment and makes it inconvenient for operators to use.

[0005] To address this, an automatic substrate leveling and correction device is proposed. Utility Model Content

[0006] In view of this, the present invention provides an automatic substrate leveling and correction device to solve or alleviate the technical problems existing in the prior art, and at least provides a beneficial option.

[0007] The technical solution of this utility model is implemented as follows: An automatic substrate leveling and correction device includes a processing table, a support frame fixedly installed on the top of the processing table, a cylinder fixedly installed on the top of the support frame, an imprinting device fixedly installed on the bottom of the cylinder, a support platform fixedly installed on the top of the processing table, and an mounting frame fixedly installed on the bottom of the processing table. A fixing component is provided on the surface of the processing table, the fixing component including a servo motor, the servo motor fixedly installed on the bottom of the mounting frame, a screw fixedly connected to the output end of the servo motor, a screw block threadedly connected to the surface of the screw, connecting rods movably connected to the four sides of the surface of the screw block, mounting rods movably connected to the other ends of the four connecting rods, a movable frame fixedly installed on the top of the four mounting rods, an electric suction cup fixedly installed on the inner side of the movable frame, and an suction port fixedly installed on the output end of the electric suction cup.

[0008] More preferably, the number of electric suction cups is four, and the four electric suction cups are arranged at equal intervals in the circumferential direction.

[0009] More preferably, the top of the adsorption port and the top of the support are at the same horizontal level, and the adsorption port is made of rubber.

[0010] More preferably, each of the surfaces of the support platform is provided with a movable groove, and the four movable frames are slidably connected to the inner cavities of the four movable grooves.

[0011] More preferably, the top of each processing table is provided with a guide groove, and the four mounting rods pass through the inner cavity of the four guide grooves and extend to the top of the processing table.

[0012] More preferably, limit rods are fixedly installed on both the left and right sides of the top of the mounting bracket, and the screw block is slidably connected to the surfaces of the two limit rods.

[0013] More preferably, mounting plates are fixedly installed on both the left and right sides of the bottom of the processing table, and anchor bolts are threaded onto the surfaces of the four mounting plates.

[0014] The present invention has the following advantages due to the adoption of the above technical solution:

[0015] I. This utility model, by setting a fixing component and through the output of a servo motor, enables the screw block and connecting rod to cooperate, allowing the moving frame to drive the electric suction cup to move. By adjusting the position of the electric suction cup, it can adsorb and fix substrates of different sizes, improving the flexibility and convenience of use. It effectively avoids the inability to adsorb and fix the substrate when the size of the substrate changes, thus ensuring the stability of substrate correction during imprinting and trimming, preventing changes in the substrate position due to contact with the imprinting equipment. It is also convenient for operators to use.

[0016] Second, this utility model, by setting a movable groove, can limit the movement of the movable frame to prevent it from shifting during movement, thus affecting the adjustment of the electric suction cup position. By setting a guide groove, the movement of the mounting rod can be limited to prevent it from shifting during movement, thus affecting the adsorption and fixation of substrates of different sizes. By setting a limiting rod, the movement of the screw block can be limited to prevent the screw block from rotating synchronously with the screw rod, thus affecting the adsorption of substrates of different sizes. By setting anchor bolts, the overall equipment can be stabilized to prevent the equipment from shaking due to accidental collisions.

[0017] The above overview is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features of the present invention will become readily apparent from the accompanying drawings and the following detailed description. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional front view structural diagram of the present invention;

[0020] Figure 2 This is a schematic diagram of the front planar structure of this utility model;

[0021] Figure 3 This is a schematic diagram of the support structure of this utility model;

[0022] Figure 4 This is a schematic diagram of the fixing component structure of this utility model;

[0023] Figure 5 For the present utility model Figure 4Enlarged structural diagram at point A.

[0024] Reference numerals: 1. Processing table; 2. Fixing component; 201. Servo motor; 202. Screw; 203. Screw block; 204. Connecting rod; 205. Mounting rod; 206. Moving frame; 207. Electric suction cup; 208. Suction port; 209. Moving groove; 210. Guide groove; 211. Limiting rod; 3. Support frame; 4. Cylinder; 5. Imprinting equipment; 6. Support table; 7. Mounting frame; 8. Mounting plate; 9. Anchor bolt. Detailed Implementation

[0025] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0026] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0027] Example 1

[0028] like Figure 1-5 As shown, this utility model embodiment provides an automatic substrate leveling and correction device, including a processing table 1, a support frame 3 fixedly mounted on the top of the processing table 1, a cylinder 4 fixedly mounted on the top of the support frame 3, an imprinting device 5 fixedly mounted on the bottom of the cylinder 4, a support platform 6 fixedly mounted on the top of the processing table 1, a mounting frame 7 fixedly mounted on the bottom of the processing table 1, and a fixing component 2 provided on the surface of the processing table 1. The fixing component 2 includes a servo motor 201, which is fixedly mounted on the bottom of the mounting frame 7. The output end of the servo motor 201 is fixedly connected to a screw 202, and the surface of the screw 202... The screw block 203 is threadedly connected, and connecting rods 204 are movably connected to all four sides of the surface of the screw block 203. The other end of each of the four connecting rods 204 is movably connected to an installation rod 205. A movable frame 206 is fixedly installed on the top of each of the four installation rods 205. An electric suction cup 207 is fixedly installed on the inner side of the movable frame 206. An adsorption port 208 is fixedly installed on the output end of the electric suction cup 207. There are four electric suction cups 207, which are equidistantly arranged in the circumferential direction. The top of the adsorption port 208 and the top of the support 6 are at the same horizontal level. The adsorption port 208 is made of rubber.

[0029] By setting the fixing component 2, the output of the servo motor 201 causes the screw block 203 to cooperate with the connecting rod 204, which allows the moving frame 206 to drive the electric suction cup 207 to move. By adjusting the position of the electric suction cup 207, the electric suction cup 207 can be used to adsorb and fix substrates of different sizes, improving the flexibility and convenience of use. It effectively avoids the inability to adsorb and fix the substrate when the size of the substrate changes. Therefore, when the substrate is pressed and trimmed, the substrate position will change due to the contact of the pressing device 5, ensuring the stability of the substrate correction and making it convenient for operators to use.

[0030] Example 2

[0031] like Figure 1 , Figure 3 , Figure 4 and Figure 5 As shown, in one embodiment, the surface of the support 6 is provided with a moving groove 209, and the four moving frames 206 are slidably connected to the inner cavity of the four moving grooves 209. The top of the processing table 1 is provided with a guide groove 210, and the four mounting rods 205 pass through the inner cavity of the four guide grooves 210 and extend to the top of the processing table 1. Limiting rods 211 are fixedly installed on the left and right sides of the top of the mounting frame 7. The screw block 203 is slidably connected to the surface of the two limiting rods 211. Mounting plates 8 are fixedly installed on the left and right sides of the bottom of the processing table 1, and the surfaces of the four mounting plates 8 are threaded with anchor bolts 9.

[0032] By setting the movable groove 209, the movement of the movable frame 206 can be limited to prevent it from shifting during movement, which would affect the adjustment of the position of the electric suction cup 207. By setting the guide groove 210, the movement of the mounting rod 205 can be limited to prevent it from shifting during movement, which would affect the adsorption and fixation of substrates of different sizes. By setting the limiting rod 211, the movement of the screw block 203 can be limited to prevent the screw block 203 from rotating synchronously with the screw 202, which would affect the adsorption of substrates of different sizes. By setting the anchor bolts 9, the overall equipment can be stabilized to prevent the equipment from shaking due to accidental collisions.

[0033] In operation, this invention works as follows: First, based on the size of the substrate, the screw 202 rotates in either the forward or reverse direction via the output of the servo motor 201. The screw 202 then moves the screw block 203 upward or downward. As the screw block 203 moves, it engages with the connecting rod 204. Simultaneously, the connecting rod 204 moves the mounting rod 205. With the movement of the mounting rod 205, the moving frame 206 and the electric suction cup 207 move synchronously, allowing the electric suction cup 207 to move to the desired fixed position according to the substrate size. The electric suction cup 207 then outputs suction, which is transmitted to the bottom of the substrate through the suction port 208, ensuring the substrate is firmly adhered to the suction port 208. Subsequently, the extension of the cylinder 4 causes the imprinting device 5 to press and correct the substrate downwards, thus achieving the imprinting correction work.

[0034] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various variations or substitutions within the technical scope disclosed in this utility model, and these should all be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A substrate automatic planarization and correction device comprising a processing table (1), characterized in that, A support frame (3) is fixedly installed on the top of the processing table (1), a cylinder (4) is fixedly installed on the top of the support frame (3), an imprinting device (5) is fixedly installed on the bottom of the cylinder (4), a support table (6) is fixedly installed on the top of the processing table (1), a mounting frame (7) is fixedly installed on the bottom of the processing table (1), and a fixing component (2) is provided on the surface of the processing table (1). The fixing component (2) includes a servo motor (201), which is fixedly installed on the bottom of the mounting frame (7). 1) The output end is fixedly connected to a screw (202), the surface of the screw (202) is threadedly connected to a screw block (203), the four sides of the surface of the screw block (203) are movably connected to connecting rods (204), the other end of the four connecting rods (204) is movably connected to an installation rod (205), the top of the four installation rods (205) is fixedly installed with a movable frame (206), the inner side of the movable frame (206) is fixedly installed with an electric suction cup (207), and the output end of the electric suction cup (207) is fixedly installed with an adsorption port (208).

2. A substrate automatic planarization and repair apparatus as recited in claim 1, wherein: The number of electric suction cups (207) is four, and the four electric suction cups (207) are arranged at equal intervals in the circumferential direction.

3. The automatic substrate leveling and correction device according to claim 1, characterized in that: The top of the adsorption port (208) and the top of the support (6) are both in the same horizontal direction, and the adsorption port (208) is made of rubber.

4. The apparatus of claim 1, wherein: The surface of each support (6) is provided with a moving groove (209), and the four moving frames (206) are slidably connected in the inner cavity of the four moving grooves (209).

5. The automatic substrate leveling and correction device according to claim 1, characterized in that: The top of the processing table (1) is provided with guide grooves (210), and the four mounting rods (205) pass through the inner cavity of the four guide grooves (210) and extend to the top of the processing table (1).

6. A substrate automatic planarization and repair apparatus as recited in claim 1, further comprising: Limiting rods (211) are fixedly installed on both the left and right sides of the top of the mounting bracket (7), and the screw block (203) is slidably connected to the surface of the two limiting rods (211).

7. A substrate automatic planarization and repair apparatus as recited in claim 1, further comprising: Mounting plates (8) are fixedly installed on both the left and right sides of the bottom of the processing table (1), and anchor bolts (9) are threaded onto the surfaces of the four mounting plates (8).

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