Filtering device and filtering system for alkylaluminum

Abstract

The application discloses a filtering device and filtering system for alkyl aluminum, and belongs to the technical field of filtering devices. The filtering device for alkyl aluminum comprises at least one filtering unit and at least one docking assembly. The filtering unit comprises a first branch pipe and a filter. The docking assembly connects the filter and the first branch pipe. The docking assembly comprises a first docking head, a second docking head and a sealing gasket. The first docking head is connected to the filter, and the second docking head is connected to the first branch pipe. The first docking head and the second docking head are respectively abutted on opposite sides of the sealing gasket. The first docking head and the second docking head are communicated to enable the filter and the first branch pipe to be communicated. The first docking head and the second docking head are respectively abutted on opposite sides of the sealing gasket, the sealing docking between the filter and the first branch pipe is realized, the sealing performance is improved, and leakage is not prone to occurring after long-term use.

Description

Technical Field

[0001] This application belongs to the field of filtration device technology, and specifically relates to a filtration device and filtration system for alkyl aluminum. Background Technology

[0002] Alkyl aluminum (such as trimethylaluminum and triethylaluminum) is an important class of organometallic compounds, widely used as a polymer catalyst and precursor for semiconductor thin film deposition. However, alkyl aluminum has extremely strong reducing properties and chemical reactivity; it spontaneously combusts upon contact with air and reacts violently with water, even exploding, making it an extremely hazardous chemical. Therefore, the transportation and filtration of alkyl aluminum must be carried out in a strictly closed, anhydrous, and oxygen-free environment, and all components in contact with the material must meet extremely high requirements for sealing, corrosion resistance, and pollution-free operation.

[0003] In related technologies, filtration devices for alkyl aluminum often employ conventional chemical filters, with inlet and outlet connections typically using compression fittings, quick couplings, flanges, or standard threaded joints. These connection methods have limited sealing performance and are prone to leakage after prolonged use. Utility Model Content

[0004] One of the objectives of this application is to provide a filtration device for alkyl aluminum that improves sealing performance and is less prone to leakage after long-term use, thereby at least partially solving the aforementioned technical problems.

[0005] Another object of this application is to provide a filtration system including a filtration device for alkyl aluminum.

[0006] To achieve the above objectives, according to a first aspect of this application, a filtration device for alkyl aluminum is provided, comprising:

[0007] At least one filter unit, the filter unit including a first branch pipe and a filter;

[0008] At least one docking assembly connects the filter to the first branch pipe;

[0009] The docking assembly includes a first connector, a second connector, and a sealing gasket. The first connector is connected to the filter, and the second connector is connected to the first branch pipe. The first connector and the second connector respectively abut against the opposite sides of the sealing gasket. The first connector and the second connector are connected to each other so that the filter is connected to the first branch pipe.

[0010] The filtration device for alkyl aluminum includes at least one filter element, which corresponds one-to-one with a docking assembly. The filter element connects the filter to a first branch pipe, and the filter element is detachably connected to the docking assembly.

[0011] The sealing gasket has a through hole, the filter element is connected to the sealing gasket and the through hole is sealed to connect the filter to the first branch pipe.

[0012] In one or more embodiments of this application, the mating assembly includes a first connector and a second connector. The first connector abuts against the side of the first mating head opposite to the sealing gasket along the target axis, and the second connector abuts against the side of the second mating head opposite to the sealing gasket along the target axis. The first connector and the second connector are connected so that the first mating head and the second mating head abut against the two sides of the sealing gasket along the target axis, respectively.

[0013] In one or more embodiments of this application, the first connector and the second connector are detachably connected along a target axis.

[0014] In one or more embodiments of this application, at least a portion of the first connector passes through the second connector, and the sealing gasket is located within the second connector.

[0015] In one or more embodiments of this application, the sealing gasket is a metal sealing gasket.

[0016] In one or more embodiments of this application, the filter includes a plurality of filter elements arranged sequentially along the fluid flow direction, and the mesh size of each filter element increases along the fluid flow direction.

[0017] In one or more embodiments of this application, the filter includes a housing having an inlet end, an outlet end, and a filter chamber, with a filter element located inside the filter chamber, the filter element connecting the inlet end and the outlet end. The filtration device for alkyl aluminum includes a first docking assembly and a second docking assembly, the first docking assembly connecting the inlet end to a first branch pipe, and the second docking assembly connecting the outlet end to the first branch pipe.

[0018] In one or more embodiments of this application, a filtration device for alkyl aluminum includes a first main pipe, a second main pipe, and a plurality of filtration units. Each filtration unit includes a first valve disposed on a first branch pipe such that each filtration unit can selectively connect the first main pipe to the second main pipe.

[0019] In one or more embodiments of this application, a filtration device for alkyl aluminum includes a first main pipe, a second main pipe, a second valve, and a second branch pipe, wherein the second valve is disposed on the second branch pipe so that the second branch pipe can selectively connect the first main pipe and the second main pipe.

[0020] According to a second aspect of this application, a filtration system is provided, comprising:

[0021] The filtration device for alkyl aluminum described above includes a first main pipe and a second main pipe;

[0022] The feeding device includes a feeding pipe, which is connected to the first main flow pipe;

[0023] The discharge device includes a discharge pipe, which is connected to the second main pipe;

[0024] The discharge device includes a third branch pipe, a fourth branch pipe, a third valve, and a fourth valve. The third valve is located in the third branch pipe so that the third branch pipe can selectively connect a vacuum source to the discharge pipe. The fourth valve is located in the fourth branch pipe so that the fourth branch pipe can selectively connect an inert gas source to the discharge pipe.

[0025] In one or more embodiments of this application, the filtration device for alkyl aluminum includes a third docking assembly and a fourth docking assembly, the third docking assembly connecting the feed pipe to the first main pipe and the fourth docking assembly connecting the discharge pipe to the second main pipe.

[0026] Compared with the prior art, in the filtration device of this application, the first pair of connectors and the second pair of connectors abut against the opposite sides of the sealing gasket to achieve a sealed connection between the filter and the first branch pipe, which improves the sealing performance and makes it less prone to leakage after long-term use. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of a filtering device in one embodiment of this application;

[0029] Figure 2 for Figure 1 Sectional view at point A in the middle;

[0030] Figure 3 This is a schematic diagram of the structure of a filtering system in one embodiment of this application.

[0031] Explanation of reference numerals in the attached figures:

[0032] 1. Filtering device; 11. Filtering unit; 111. First branch pipe; 1111. Inflow section; 1112. Outflow section; 112. Filter; 1121. Filter element; 1122. Housing; 1123. Feed end; 1124. Discharge end; 1125. Filtering chamber; 113. First valve; 12. Connecting assembly; 121. First connecting joint; 122. Second connecting joint; 123. Sealing gasket; 1231. Through hole; 124. First connector; 125. Second connector; 13. Filter element; 14. First connecting assembly; 15. Second connecting assembly; 16. First main pipe; 17. Second main pipe; 18. Second valve; 19. Second branch pipe; 110. Third connecting assembly; 120. Fourth connecting assembly;

[0033] 2. Feeding device; 21. Feeding pipe; 22. Ninth valve;

[0034] 3. Discharge device; 31. Discharge pipe; 32. Third branch pipe; 33. Fourth branch pipe; 34. Third valve; 35. Fourth valve; 36. Fifth branch pipe; 37. Sixth branch pipe; 38. Fifth valve; 39. Sixth valve; 310. Seventh branch pipe; 311. Seventh valve; 312. Eighth valve;

[0035] L, target axis. Detailed Implementation

[0036] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0037] It should be understood that terms such as “having,” “comprising,” and “including” as used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0038] According to the first aspect of this application, referring to Figure 1 This disclosure provides a filtration device 1 for alkyl aluminum, including at least one filtration unit 11 and at least one docking assembly 12.

[0039] In this embodiment, the filter device 1 can be suitable for alkyl aluminum, such as trimethylaluminum (TMA) liquid.

[0040] In some embodiments, the filtration unit 11 includes a first branch pipe 111 and a filter 112, and the docking assembly 12 connects the filter 112 to the first branch pipe 111.

[0041] In this embodiment, by using a docking assembly 12 (e.g., a metal gasket surface sealing structure) to connect the filter 112 to the first branch pipe 111, good sealing performance (e.g., leakage rate ≤ 0.2 × 10⁻⁶) is achieved. -9 Pam 3 ( / s), effectively preventing alkyl aluminum leakage and the infiltration of external air and moisture, and eliminating the safety hazards of combustion and explosion.

[0042] In some embodiments, the docking assembly 12 includes a first connector 121, a second connector 122, and a sealing gasket 123. The first connector 121 is connected to the filter 112, and the second connector 122 is connected to the first branch pipe 111.

[0043] In this embodiment, the first connector 121 and the filter 112 can be connected by welding, and the second connector 122 and the first branch pipe 111 can be connected by welding.

[0044] In some embodiments, the first connector 121 and the second connector 122 respectively abut against the opposite sides of the sealing gasket 123, and the first connector 121 and the second connector 122 are connected to each other so that the filter 112 is connected to the first branch pipe 111.

[0045] In this embodiment, the docking component 12 adopts a metal gasket face seal to achieve a sealed docking between the filter 112 and the first branch pipe 111. Compared with ferrule fittings, quick couplings, flanges, and ordinary threaded fittings, it can better adapt to the special properties of alkyl aluminum (such as high activity, ignition upon contact with air, and explosion upon contact with water).

[0046] Furthermore, by utilizing the interconnection between the first connector 121 and the second connector 122, the filter 112 can be connected to the first branch pipe 111, ensuring the normal operation of the filter unit 11.

[0047] In some embodiments, in conjunction with reference Figure 1 and Figure 2 As shown, the filter device 1 includes at least one filter element 13, which corresponds one-to-one with the docking assembly 12. The filter element 13 connects the filter 112 to the first branch pipe 111, and the filter element 13 is detachably connected to the docking assembly 12.

[0048] In this embodiment, by setting a detachable filter element 13 in the docking assembly 12, the user can quickly replace the filter element 13 with different filtration precision (e.g., metal filter with pore size of 10μm, 5μm or 1μm) according to the impurity content of the alkyl aluminum raw material or the different purity requirements of the downstream process, without disassembling or replacing the entire filter 112, thus realizing flexible adjustment of filtration precision and improving the process adaptability of the device.

[0049] In this embodiment, the filter element 13 is an independent, small, and easily consumable component, and its manufacturing cost is much lower than that of the entire filter 112 or the internal multi-stage filter element 1121. When the filter element 13 becomes clogged or reaches the end of its service life, only the small filter element 13 needs to be replaced, without scrapping the entire filter 112 or replacing the internal filter element 1121, thus reducing consumable costs.

[0050] In some embodiments, continue to refer to Figure 1 and Figure 2 As shown, the sealing gasket 123 has a through hole 1231, and the filter element 13 is connected to the sealing gasket 123. The filter element 13 blocks the through hole 1231 to connect the filter 112 to the first branch pipe 111.

[0051] In this embodiment, the filter element 13 and the sealing gasket 123 are integrated into a single component. During installation, both sealing and filtration functions can be completed in a single operation, and they can be removed together during disassembly. This simplifies the operation steps, reduces the number of sealing surfaces, lowers the risk of leakage, and facilitates inventory management and consumable replacement.

[0052] For example, the sealing gasket 123 and the filter element 13 are integrated. The sealing gasket 123 is annular with a through hole 1231 in the center. The filter element 13 is fixedly connected to the sealing gasket 123 by welding, sintering, or mechanical pressing, and completely blocks the through hole 1231. That is, the filter element 13 covers the through hole 1231, so that alkyl aluminum flowing from the first connector 121 to the second connector 122 must pass through the filter element 13 to pass through.

[0053] In some embodiments, continue to refer to Figure 1 and Figure 2 As shown, the docking assembly 12 includes a first connector 124 and a second connector 125. The first connector 124 abuts against the side of the first mating head 121 along the target axis L away from the sealing gasket 123, and the second connector 125 abuts against the side of the second mating head 122 along the target axis L away from the sealing gasket 123. The first connector 124 and the second connector 125 are connected so that the first mating head 121 and the second mating head 122 abut against the two sides of the sealing gasket 123 along the target axis L, respectively.

[0054] In this embodiment, the first connector 124 and the second connector 125 provide a clamping force along the target axis L, so that the first connector 121 and the second connector 122 press the sealing gasket 123, which is simple in structure and easy to operate.

[0055] For example, the first connector 121 extends radially to form a shoulder, and the axial end of the first connector 124 abuts against the shoulder. The second connector 125 is sleeved on the outer periphery of the second connector 122, and the inner wall of the second connector 125 is provided with a stepped surface, which abuts against the shoulder of the second connector 122.

[0056] For example, when the first connector 124 and the second connector 125 move toward each other, they respectively push the first pair of connectors 121 and the second pair of connectors 122 to come closer to each other, thereby pressing the sealing gasket 123.

[0057] In some embodiments, continue to refer to Figure 1 and Figure 2 As shown, the first connector 124 and the second connector 125 are detachably connected so that the first connector 124 and the second connector 125 can move relative to each other along the target axis L.

[0058] In this embodiment, the first connector 124 and the second connector 125 are detachably connected, allowing the filter 112 to be easily separated from the piping system for cleaning, replacement of the filter element 1121 inside the filter 112, or maintenance of the filter 112 body. Operators can complete the disassembly and assembly without damaging the piping, reducing maintenance difficulty and time costs.

[0059] In this embodiment, when the first connector 124 and the second connector 125 move relative to each other along the target axis L (e.g., by rotating the thread to bring them closer axially), they respectively push the first mating head 121 and the second mating head 122 towards the central sealing gasket 123, thereby generating sufficient axial clamping force to cause the sealing gasket 123 (e.g., a metal sealing gasket) to undergo plastic deformation, forming a reliable metal-to-metal seal. This clamping force can be precisely controlled, avoiding leakage due to insufficient clamping force or component damage due to excessive clamping force.

[0060] In this embodiment, since the first connector 124 and the second connector 125 are detachably connected, each time the filter is reinstalled, only a new sealing gasket 123 (including the filter element 13 connected to the sealing gasket 123) needs to be replaced, and the original sealing performance can be restored by applying pressure again through relative movement. This allows the filter 112 to be reused repeatedly without its sealing performance easily deteriorating.

[0061] For example, the first connector 124 and the second connector 125 are connected by threads. Specifically, the outer peripheral wall of the first connector 124 is provided with external threads, and the inner peripheral wall of the second connector 125 is provided with matching internal threads. When the operator rotates the first connector 124 (or the second connector 125) in one direction, the two move towards each other along the target axis L through thread engagement; when rotated in the opposite direction, the two move away from each other, thereby achieving detachability.

[0062] In other embodiments, the first connector 124 and the second connector 125 can also be detachably connected by means of bayonet connection, spiral snap-fit, plug-in connection with locking ring, etc.

[0063] In some embodiments, continue to refer to Figure 1 and Figure 2 As shown, at least a portion of the first connector 124 passes through the second connector 125, and the sealing gasket 123 is located within the second connector 125.

[0064] In this embodiment, a portion of the first connector 124 passes through the second connector 125, and the sealing gasket 123 is located within the second connector 125, achieving circumferential wrapping and protection of the sealing gasket 123, reducing external environmental contamination and corrosion of the sealing surface. Simultaneously, the overall radial dimensions are compact, making it suitable for installing multiple parallel filter units 11 in confined spaces.

[0065] In some embodiments, continue to refer to Figure 2 As shown, the sealing gasket 123 is a metal sealing gasket.

[0066] In this embodiment, the sealing gasket 123 is a metal sealing gasket, which is suitable for the strong corrosiveness and high purity requirements of alkyl aluminum. The metal sealing gasket 123 is resistant to alkyl aluminum corrosion, does not precipitate impurities, and can be plastically deformed to form a reliable seal, and is not prone to problems such as aging, swelling, and precipitation contamination that often occur with rubber gaskets.

[0067] For example, gasket 123 is a metal gasket, specifically made of 316L stainless steel or Hastelloy C-276. 316L stainless steel contains molybdenum, possessing excellent corrosion resistance and oxidation resistance, is non-magnetic, does not precipitate impurities, and can withstand the strong reducing properties of alkyl aluminum (such as trimethylaluminum), making it suitable for semiconductor-grade TMA (trimethylaluminum) filtration. Hastelloy C-276 offers even better corrosion resistance, can withstand corrosion from trace impurities under extreme operating conditions, and is suitable for ultra-high purity (ppb level) TMA filtration and long-term continuous operation requirements.

[0068] In some embodiments, continue to refer to Figure 1As shown, the filter 112 includes multiple filter elements 1121, which are arranged sequentially along the fluid flow direction, and the mesh size of each filter element 1121 increases along the fluid flow direction.

[0069] In this embodiment, the mesh size of the multi-stage filter element 1121 increases gradually along the fluid direction (e.g., 100 mesh, 200 mesh, 500 mesh, 1000 mesh), achieving step-by-step interception of impurities (coarse filtration followed by fine filtration), improving filtration efficiency, extending the overall service life of the filter element 1121, and avoiding the problem of easy clogging of a single high-precision filter element 1121. It can effectively remove solid particles, oxides, and colloidal impurities of different sizes, enabling the alkyl aluminum purity to reach the ppb level.

[0070] For example, the mesh size of each filter element 1121 increases along the fluid flow direction, meaning the filtration accuracy increases progressively. Specific mesh size ranges and selection guidelines are as follows:

[0071] First-stage filter element 1121 (primary pre-filtration): 100 mesh (corresponding to a pore size of approximately 150 μm), used to filter out large particulate impurities in alkyl aluminum (such as metal oxides and solid mechanical impurities generated during the raw material synthesis process).

[0072] The second-stage filter element 1121 has a mesh size of 200 (corresponding to a pore size of approximately 74μm) and further intercepts medium-sized particles.

[0073] The third-stage filter element 1121 (secondary high-precision filter element): 500 mesh (corresponding to a pore size of approximately 25μm), is used to filter out tiny solid particles.

[0074] The fourth-stage filter element 1121 has a mesh size of 1000 (corresponding to a pore size of approximately 13μm) and is used to filter out colloidal impurities and trace metal impurities, ensuring that the purity of the alkyl aluminum at the outlet reaches the ppb level.

[0075] For example, each filter element 1121 is a metal mesh. The filter layer can be made of 316L stainless steel mesh or Hastelloy C-276 mesh; the support layer can be made of 304 stainless steel to improve the overall rigidity of the filter element 1121 and prevent deformation of the filter element 1121 due to pressure changes. An appropriate gap (approximately 2mm-5mm) is maintained between each filter element 1121 to avoid mutual compression.

[0076] For example, the welding process of filter element 1121 adopts precision welding without welding slag or leakage. For example, laser welding: power 80-150W, welding speed 10-20mm / s, spot diameter 0.2-0.5mm, inert gas (argon) protection, flow rate 5-10L / min.

[0077] For example, the welding process of filter element 1121 can also be argon arc welding (TIG welding): welding current 15-30A, welding voltage 8-12V, argon gas protection flow rate 8-12L / min, and welding wire (such as stainless steel or Hastelloy) matching the material of filter element 1121.

[0078] In some embodiments, continue to refer to Figure 1 As shown, the filter 112 includes a housing 1122, which has an inlet end 1123, an outlet end 1124, and a filter chamber 1125. The filter element 1121 is located inside the filter chamber 1125 and connects the inlet end 1123 and the outlet end 1124. The filter device 1 includes a first docking assembly 14 and a second docking assembly 15. The first docking assembly 14 connects the inlet end 1123 to the first branch pipe 111, and the second docking assembly 15 connects the outlet end 1124 to the first branch pipe 111.

[0079] In this embodiment, both the feed end 1123 and the discharge end 1124 of the filter 112 adopt the same docking assembly (i.e., the first docking assembly 14 and the second docking assembly 15), which achieves a complete seal of the entire filtration path and reduces leakage points. Moreover, both the feed end 1123 and the discharge end 1124 can be equipped with filter elements 13 to pre-filter the incoming raw materials and finely filter the outgoing products, achieving dual protection.

[0080] For example, the first docking assembly 14 connects the feed end 1123 to the inflow section 1111 of the first branch pipe 111 (i.e., the part of the first branch pipe 111 where the material to be filtered is introduced). The second docking assembly 15 connects the discharge end 1124 to the outflow section 1112 of the first branch pipe 111 (i.e., the part of the first branch pipe 111 where the filtered material is drawn out). The first docking assembly 14 and the second docking assembly 15 have the same structure and both adopt the aforementioned metal gasket surface sealing structure.

[0081] For example, both the first docking assembly 14 and the second docking assembly 15 are provided with filter elements 13. In this way, the alkyl aluminum to be filtered is pre-filtered by the filter element 13 at the feed end 1123 before entering the filter 112 to remove larger particles. After being finely filtered by the multi-stage filter element 1121 inside the filter 112, it is finally filtered by the filter element 13 at the discharge end 1124 when flowing out, achieving triple filtration protection.

[0082] In some embodiments, continue to refer to Figure 1As shown, the filtration device 1 includes a first main pipe 16, a second main pipe 17, and a plurality of filtration units 11. Each filtration unit 11 includes a first valve 113, which is disposed on a first branch pipe 111 so that each filtration unit 11 can selectively connect the first main pipe 16 to the second main pipe 17.

[0083] In this embodiment, multiple filter units 11 are connected in parallel, and each filter unit 11 is equipped with a first valve 113. By opening different numbers of first valves 113, the flow rate can be adjusted in stages. For example, opening 1, 2, 3, and 4 filters 112 can obtain flow rates of approximately 60 kg / h, 100 kg / h, 130 kg / h, and 150 kg / h, respectively. It also has fault tolerance; for example, if one filter unit 11 fails, it can be isolated while the other filter units 11 continue to operate, achieving continuous production.

[0084] For example, the first main pipe 16 is used to distribute the alkyl aluminum to be filtered to each filter unit 11, and the second main pipe 17 is used to collect the filtered alkyl aluminum discharged from each filter unit 11, thereby realizing the parallel connection between multiple filter units 11.

[0085] For example, the filter device 1 includes four filter units 11 connected in parallel. When a small flow rate is required, only the first valve 113 of one filter unit 11 is opened, and the alkyl aluminum flows only through that filter unit 11, while the other filter units 11 are closed. When a larger flow rate is required, two, three, or four filter units 11 are opened simultaneously, and the total flow rate is the sum of the flow rates of each unit.

[0086] For example, the first valve 113 may be a diaphragm valve. The first valve 113 may be located upstream or downstream of the filter 112.

[0087] In some embodiments, continue to refer to Figure 1 As shown, the filter device 1 includes a second valve 18 and a second branch pipe 19. The second valve 18 is disposed on the second branch pipe 19 so that the second branch pipe 19 can selectively connect the first main pipe 16 and the second main pipe 17.

[0088] In this embodiment, a second branch pipe 19 (e.g., a bypass pipe) and a second valve 18 are provided in parallel with the filter unit 11. Before maintenance, the filter device 1 opens the second valve 18, allowing a vacuum source to be simultaneously connected upstream and downstream of the filter 112 to displace residual alkyl aluminum and prevent leakage during disassembly. During normal filtration, the filter device 1 closes the second valve 18, which does not affect the filtration effect.

[0089] For example, even if the filter element 1121 is completely blocked, the vacuum can reach the feed end 1123 of the filter 112 through the second branch pipe 19 and remove the residual alkyl aluminum on the feed end 1123 side.

[0090] According to a second aspect of this disclosure, a filtration system is provided, which includes the aforementioned filtration device 1. This filtration system possesses all the beneficial effects of the aforementioned filtration device 1, which will not be elaborated further herein.

[0091] refer to Figure 3 As shown, a filtration system includes a filtration device 1, a feeding device 2, and a discharging device 3.

[0092] In some embodiments, the feeding device 2 includes a feeding pipe 21, which is connected to the first main pipe 16.

[0093] For example, the upstream of the feed pipe 21 is connected to an alkyl aluminum storage tank (not shown in the figure), powered by the tank's own pressure or a delivery pump. A ninth valve 22 is provided on the feed pipe 21 to control the on / off state of the feed.

[0094] In some embodiments, the discharge device 3 includes a discharge pipe 31, which is connected to the second main pipe 17.

[0095] For example, the downstream of the discharge pipe 31 is connected to a finished product tank or downstream process equipment. The discharge pipe 31 is equipped with an eighth valve 312 for controlling the on / off of the discharge.

[0096] In some embodiments, the discharge device 3 includes a third branch pipe 32, a fourth branch pipe 33, a third valve 34, and a fourth valve 35.

[0097] In some embodiments, a third valve 34 is disposed on a third branch pipe 32 so that the third branch pipe 32 can selectively connect a vacuum source to a discharge pipe 31.

[0098] In this embodiment, one end of the third branch pipe 32 is connected to the discharge pipe 31, and the other end is used to connect to the vacuum pump (vacuum source). The third valve 34 controls the on / off state of the vacuum source.

[0099] In some embodiments, a fourth valve 35 is disposed on a fourth branch pipe 33 so that the fourth branch pipe 33 can selectively connect an inert gas source to a discharge pipe 31.

[0100] In this embodiment, one end of the fourth branch pipe 33 is connected to the discharge pipe 31, and the other end is used to connect to an inert gas source (e.g., nitrogen with a purity ≥ 99.99%). The fourth valve 35 controls the on / off state of the inert gas source.

[0101] In this embodiment, the filtration system integrates vacuum replacement and inert gas protection functions. The vacuum source is controlled by the third valve 34 to evacuate the filtration system (e.g., pressure ≤ -98 kPa, maintained for 30 minutes), and inert gas (e.g., high-purity nitrogen) is introduced through the fourth valve 35. This process is repeated 2-3 times to ensure complete replacement of the alkyl aluminum. Therefore, the filtration system can operate safely in a closed, inert atmosphere.

[0102] For example, the discharge device 3 also includes a fifth branch pipe 36 and a fifth valve 38 disposed on the fifth branch pipe 36. One end of the fifth branch pipe 36 is connected to the discharge pipe 31, and the other end is connected to a material pipeline (e.g., to a finished product tank). The fifth valve 38 controls the material output.

[0103] For example, the discharge device 3 also includes a sixth branch pipe 37 and a sixth valve 39 disposed on the sixth branch pipe 37. One end of the sixth branch pipe 37 is connected to the discharge pipe 31, and the other end is connected to a pressure gauge (not shown in the figure). The sixth valve 39 is used to isolate the pressure gauge, facilitating the replacement or calibration of the pressure gauge.

[0104] For example, the discharge device 3 also includes a seventh branch pipe 310 and a seventh valve 311 disposed on the seventh branch pipe 310. One end of the seventh branch pipe 310 is connected to the discharge pipe 31, and the other end is connected to the leak detection port of the helium mass spectrometer leak detector. During the system airtightness test, the seventh valve 311 is opened, the leak detector evacuates the system, and then sprays helium gas at each joint. The leak point is determined by detecting whether helium gas is drawn in.

[0105] For example, the filtration system includes the following steps when performing vacuum replacement:

[0106] S1. Perform system leak detection. Close valves 34, 35, 38, 39, and 22. Open valves 311, 312, 113, and 18. Connect a helium mass spectrometer leak detector through the seventh branch pipe 310. The helium mass spectrometer leak detector evacuates the filtration system, and then helium gas is injected at the joints of all mating components. After the leak detector shows that the leakage rate meets the requirements, close valve 311.

[0107] S2. Perform the first vacuuming. Open the third valve 34 and start the vacuum pump to evacuate the filtration system (including the discharge pipe 31, the second main pipe 17, the second branch pipe 19, the first main pipe 16, and each filter unit 11). Observe the pressure gauge (if the sixth valve 39 is open). Start timing when the gauge pressure reaches below -98 kPa (i.e., the absolute pressure is about 3 kPa) and maintain the vacuuming for 30 minutes.

[0108] S3. Fill the filter system with inert gas. Close the third valve 34 and open the fourth valve 35 to fill the filter system with inert gas (e.g., nitrogen with a purity ≥ 99.99%). Once the pressure gauge shows a pressure higher than 0 kPa (i.e., slightly positive pressure), close the fourth valve 35.

[0109] S4. Perform repeated replacement. Repeat steps S2 and S3 twice in total. That is, perform a total of three vacuum-inert gas cycles (for example, perform the first vacuum-nitrogen cycle, the second vacuum-nitrogen cycle, and the third vacuum-nitrogen cycle sequentially). Finally, maintain a positive pressure (approximately 10-20 kPa) in the system.

[0110] In some embodiments, continue to refer to Figure 3 As shown, the filter device 1 includes a third docking component 110 and a fourth docking component 120. The third docking component 110 connects the feed pipe 21 to the first main flow pipe 16, and the fourth docking component 120 connects the discharge pipe 31 to the second main flow pipe 17.

[0111] In this embodiment, the same metal gasket sealing structure is used in the docking components (i.e., the third docking component 110 and the fourth docking component 120) between the feed pipe 21 and the first main pipe 16, and between the discharge pipe 31 and the second main pipe 17. This ensures that the sealing level of all interfaces in the entire filtration system is consistent, eliminates weak links, and is suitable for alkyl aluminum conveying pipelines with high sealing requirements.

[0112] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0113] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0114] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.

[0115] The above are merely preferred embodiments of this application and are not intended to limit this application in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this application without departing from the scope of the technical solution of this application shall still fall within the scope of the technical solution of this application.

Claims

1. A filtration device for alkyl aluminum, characterized in that, include: At least one filter unit, the filter unit comprising a first branch pipe and a filter; At least one docking component connects the filter to the first branch pipe; The docking assembly includes a first connector, a second connector, and a sealing gasket. The first connector is connected to the filter, and the second connector is connected to the first branch pipe. The first connector and the second connector respectively abut against opposite sides of the sealing gasket. The first connector and the second connector communicate with each other so that the filter communicates with the first branch pipe. The filtration device for alkyl aluminum further includes at least one filter element, which corresponds one-to-one with the docking assembly. The filter element connects the filter to the first branch pipe, and the filter element is detachably connected to the docking assembly. The sealing gasket has a through hole, and the filter element is connected to the sealing gasket and blocks the through hole to connect the filter to the first branch pipe.

2. The filtration device for alkyl aluminum as described in claim 1, characterized in that, The docking assembly includes a first connector and a second connector. The first connector abuts against the side of the first mating head opposite to the sealing gasket along the target axis, and the second connector abuts against the side of the second mating head opposite to the sealing gasket along the target axis. The first connector and the second connector are connected so that the first mating head and the second mating head abut against the two sides of the sealing gasket along the target axis, respectively.

3. The filtration device for alkyl aluminum as described in claim 2, characterized in that, The first connector and the second connector are detachably connected along the target axis.

4. The filtration device for alkyl aluminum as described in claim 2, characterized in that, At least a portion of the first connector passes through the second connector, and the sealing gasket is located inside the second connector.

5. The filtration device for alkyl aluminum as described in claim 1, characterized in that, The sealing gasket is a metal sealing gasket.

6. The filtration device for alkyl aluminum as described in claim 1, characterized in that, The filter includes multiple filter elements arranged sequentially along the fluid flow direction, with the mesh size of each filter element increasing along the fluid flow direction.

7. The filtration device for alkyl aluminum as described in claim 6, characterized in that, The filter includes a housing with an inlet end, an outlet end, and a filter chamber. The filter element is located inside the filter chamber and connects the inlet end to the outlet end. The filtration device for alkyl aluminum includes a first docking assembly and a second docking assembly. The first docking assembly connects the inlet end to the first branch pipe, and the second docking assembly connects the outlet end to the first branch pipe.

8. The filtration device for alkyl aluminum as described in claim 1, characterized in that, The filtration device for alkyl aluminum includes a first main pipe, a second main pipe, and a plurality of the filtration units. Each filtration unit includes a first valve disposed on the first branch pipe, such that each filtration unit can selectively connect the first main pipe to the second main pipe.

9. The filtration device for alkyl aluminum as described in claim 1, characterized in that, The filtration device for alkyl aluminum includes a first main pipe, a second main pipe, a second valve, and a second branch pipe, wherein the second valve is disposed on the second branch pipe so that the second branch pipe can selectively connect the first main pipe and the second main pipe.

10. A filtration system, characterized in that, include: The filtration device for alkyl aluminum as described in any one of claims 1-9 includes a first main flow tube and a second main flow tube; A feeding device includes a feeding pipe, which is connected to the first main pipe; The discharge device includes a discharge pipe, which is connected to the second main pipe; The discharge device includes a third branch pipe, a fourth branch pipe, a third valve, and a fourth valve. The third valve is disposed on the third branch pipe so that the third branch pipe can selectively connect a vacuum source to the discharge pipe. The fourth valve is disposed on the fourth branch pipe so that the fourth branch pipe can selectively connect an inert gas source to the discharge pipe.

11. The filtration system as claimed in claim 10, characterized in that, The filtration device for alkyl aluminum includes a third docking assembly and a fourth docking assembly, wherein the third docking assembly connects the feed pipe to the first main pipe and the fourth docking assembly connects the discharge pipe to the second main pipe.

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