A box helium cleaning device for vacuum box helium detection

Abstract

The utility model discloses a kind of box helium cleaning devices for vacuum box helium detection, it is related to helium cleaning device technical field;And the utility model includes filter box, the inside fixedly connected with baffle of filter box, the inside of filter box and below baffle is provided with filter cartridge, filter cartridge is connected with baffle by clamping component between, the bottom end fixedly connected with connecting pipe of baffle, filter cartridge and baffle are connected by connecting pipe between the top, the cooperation between the cooperation between limiting block, mounting plate, limit slot, L type board, guide rod, fixed block, limit plate and spring, utilize limiting block and limit slot, the rotation of filter cartridge is positioned, simultaneously make L type board and mounting plate mutually clamped, to limit the vertical movement of filter cartridge, the installation of filter cartridge is facilitated, when disassembling, only need to pull guide rod to two sides simultaneously, make L type board and mounting plate separate, to remove the restriction to the vertical movement of filter cartridge, the filter cartridge is disassembled conveniently.

Description

Technical Field

[0001] This utility model relates to the technical field of helium removal devices, specifically a helium removal device for a vacuum chamber helium detection chamber. Background Technology

[0002] In high-tech fields such as precision manufacturing, aerospace, and semiconductor production, vacuum chamber helium testing technology plays a crucial role in accurately detecting minute leaks in various equipment, components, and piping systems. This technology assesses sealing performance by filling the test piece with helium gas and using a highly sensitive helium detector on the outside to detect potential leaks. To ensure the accuracy and efficiency of the testing process, vacuum chamber helium testing systems are typically equipped with a helium purging device to remove helium from the chamber before and after testing, preventing interference with subsequent testing or the working environment.

[0003] However, the filter installation method of existing vacuum chamber helium cleaning devices is often complicated, requiring professional tools or complex procedures to complete the disassembly and replacement. This not only increases the difficulty of operation but may also lead to misoperation during the operation. In order to solve the above problems, the inventors have proposed a vacuum chamber helium detection chamber cleaning device. Utility Model Content

[0004] To address the issue of easily replacing the helium cleaning filter screen in a vacuum chamber for helium detection, the purpose of this invention is to provide a helium cleaning device for a vacuum chamber for helium detection.

[0005] To solve the above technical problems, the present invention adopts the following technical solution: a helium cleaning device for a vacuum chamber helium detection chamber, comprising a filter chamber, a partition fixedly connected inside the filter chamber, a filter cylinder disposed inside the filter chamber and below the partition, the filter cylinder being connected to the partition via a snap-fit ​​assembly, a connecting pipe fixedly connected to the bottom end of the partition, the filter cylinder being connected to the top of the partition via a connecting pipe, a fixing frame fixedly connected inside the filter chamber and at the top of the partition, exhaust ports being provided on both sides of the fixing frame, two side plates fixedly connected to the sides of the fixing frame near the exhaust ports, an oil-removing filter plate being slidably snapped between the two side plates, an installation assembly disposed on one side of the filter chamber for fixing the oil-removing filter plate, an air inlet pipe communicating with the interior of the filter chamber being fixedly connected to one side of the bottom of the filter chamber, an exhaust pipe communicating with the interior of the filter chamber being fixedly connected to the middle of the top of the filter chamber, and a door hinged to one side of the bottom of the filter chamber, on which a filter cylinder is mounted.

[0006] Preferably, the snap-fit ​​assembly includes a limiting block, which is fixedly connected to the side of the connecting pipe. A mounting plate is fixedly connected to the top of the filter cylinder. A limiting groove is formed on the inner side of the mounting plate. The limiting block is slidably snapped into the limiting groove. The bottom end of the connecting pipe is movably inserted into the mounting plate. Fixing blocks are fixedly connected to the bottom end of the partition plate on both sides of the filter cylinder. Guide rods are movably passed through the fixing blocks. L-shaped plates are fixedly connected to the ends of the guide rods that are close to each other. The L-shaped plates are snapped into the mounting plate. Limiting plates are fixedly connected to the ends of the guide rods that are far apart from each other. Springs are provided between the L-shaped plates and the fixing blocks on the side close to the fixing blocks. The springs are movably sleeved on the outside of the guide rods.

[0007] Preferably, the mounting assembly includes two square plates, which are fixedly connected to one side of the filter box. A threaded rod is rotatably connected between the two square plates. A movable block is threadedly connected to the outer side of the threaded rod. Connecting rods are rotatably connected to both sides of the movable block. A fixing plate is fixedly connected to one side of the filter box and to both sides of the threaded rod. An insert plate is movably inserted through the interior of the fixing plate. The end of the connecting rod away from the movable block is rotatably connected to the insert plate. One end of the oil-removing filter plate extends movably to the outside of the filter box and is fixedly connected to an insert block. The side of the insert plate away from the connecting rod is movably inserted into the insert block. The top end of the threaded rod extends to the top end of the square plate and is fixedly connected to a handle.

[0008] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. Through the cooperation of the limiting block, mounting plate, limiting groove, L-shaped plate, guide rod, fixing block, limiting plate and spring, the rotation of the filter cylinder is limited by the cooperation between the limiting block and the limiting groove. At the same time, the L-shaped plate and the mounting plate are interlocked to limit the vertical movement of the filter cylinder, which facilitates the installation of the filter cylinder. When disassembling, simply pull the guide rods to both sides at the same time to separate the L-shaped plate from the mounting plate, thereby releasing the restriction on the vertical movement of the filter cylinder and facilitating the disassembly of the filter cylinder. 2. By rotating the throttle, the threaded rod is rotated, which in turn causes the moving block to move vertically along the outside of the threaded rod. Utilizing the connecting rod, the two insert plates are moved along the inside of the fixed plate to either move away from or towards each other, allowing the insert plates to be inserted into or removed from the insert blocks, thus facilitating the installation and removal of the oil-removing filter plate. Attached Figure Description

[0009] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0010] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0011] Figure 2 This utility model Figure 1 Enlarged view of point A in the middle.

[0012] Figure 3 This is a cross-sectional structural diagram of the present invention.

[0013] Figure 4 This utility model Figure 3 Enlarged view of point B in the middle.

[0014] Figure 5 This is a schematic diagram of the partially disassembled structure of this utility model.

[0015] In the diagram: 1. Filter box; 2. Partition plate; 3. Filter cylinder; 4. Connecting pipe; 5. Snap-fit ​​assembly; 51. Limiting block; 52. Mounting plate; 53. Limiting groove; 54. L-shaped plate; 55. Guide rod; 56. Fixing block; 57. Limiting plate; 58. Spring; 6. Fixing frame; 7. Exhaust port; 8. Side plate; 9. Mounting assembly; 91. Square plate; 92. Threaded rod; 93. Moving block; 94. Connecting rod; 95. Fixing plate; 96. Insert plate; 97. Insert block; 98. Thruster; 10. Oil-removing filter plate; 11. Air inlet pipe; 12. Exhaust pipe; 13. Box door. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Example: Figure 1-4As shown, this utility model provides a helium cleaning device for a vacuum chamber helium detection chamber, including a filter box 1. A partition 2 is fixedly connected inside the filter box 1. A filter cylinder 3 is arranged inside the filter box 1 and below the partition 2. The filter cylinder 3 is connected to the partition 2 by a snap-fit ​​assembly 5. A connecting pipe 4 is fixedly connected to the bottom end of the partition 2. The filter cylinder 3 is connected to the top of the partition 2 by the connecting pipe 4. A fixing frame 6 is fixedly connected inside the filter box 1 and at the top end of the partition 2. Exhaust ports 7 are opened on both sides of the fixing frame 6. Two side plates 8 are fixedly connected to the sides of the fixing frame 6 near the exhaust ports 7. An oil-removing filter plate 10 is slidably snapped between the two side plates 8. An installation assembly 9 is arranged on one side of the filter box 1 to fix the oil-removing filter plate 10.

[0018] The snap-fit ​​assembly 5 includes a limiting block 51, which is fixedly connected to the side of the connecting pipe 4. The top of the filter cylinder 3 is fixedly connected to an installation plate 52. A limiting groove 53 is opened on the inner side of the installation plate 52. The limiting block 51 is slidably snapped into the limiting groove 53. The bottom end of the connecting pipe 4 is movably inserted into the installation plate 52. The bottom end of the partition plate 2 and both sides of the filter cylinder 3 are fixedly connected to fixing blocks 56. A guide rod 55 is movably passed through the fixing block 56. An L-shaped plate 54 is fixedly connected to the end of the guide rod 55 that is close to each other. The L-shaped plate 54 is snapped into the installation plate 52.

[0019] By adopting the above technical solution, when installing the filter cylinder 3, the position of the limiting block 51 corresponds to that of the limiting groove 53, and the connecting pipe 4 is movably inserted into the top of the filter cylinder 3. The rotation of the filter cylinder 3 is limited by the cooperation between the limiting block 51 and the limiting groove 53. At the same time, the L-shaped plate 54 and the mounting plate 52 are interlocked, thereby limiting the vertical movement of the filter cylinder 3. The installation of the filter cylinder 3 is completed. When disassembling, simply pull the guide rods 55 to both sides at the same time to separate the L-shaped plate 54 from the mounting plate 52, thereby releasing the restriction on the vertical movement of the filter cylinder 3 and facilitating the disassembly of the filter cylinder 3.

[0020] Limiting plates 57 are fixedly connected to the ends of the guide rods 55 that are far apart from each other. Springs 58 are provided between the side of the L-shaped plate 54 that is close to the fixing block 56 and the fixing block 56. The springs 58 are movably sleeved on the outside of the guide rods 55.

[0021] By adopting the above technical solution and setting the spring 58, it is easy to reset the L-shaped plate 54. At the same time, the elastic force of the spring 58 makes the L-shaped plate 54 and the mounting plate 52 more securely engaged.

[0022] The mounting assembly 9 includes two square plates 91, which are fixedly connected to one side of the filter box 1. A threaded rod 92 is rotatably connected between the two square plates 91. A movable block 93 is threadedly connected to the outer side of the threaded rod 92. A connecting rod 94 is rotatably connected to both sides of the movable block 93. A fixing plate 95 is fixedly connected to one side of the filter box 1 and to both sides of the threaded rod 92. An insert plate 96 is movably inserted through the interior of the fixing plate 95. The end of the connecting rod 94 away from the movable block 93 is rotatably connected to the insert plate 96. One end of the oil-removing filter plate 10 extends movably to the outside of the filter box 1 and is fixedly connected to an insert block 97. The side of the insert plate 96 away from the connecting rod 94 is movably inserted into the insert block 97.

[0023] By adopting the above technical solution, by rotating the threaded rod 92, the moving block 93 is driven to move vertically along the outside of the threaded rod 92. Utilizing the connecting action of the connecting rod 94, the two insert plates 96 are simultaneously driven to move along the inside of the fixed plate 95 to the side that is further away from or closer to each other, so that the insert plates 96 can be inserted into or pulled out of the insert block 97, thereby facilitating the installation and disassembly of the oil-removing filter plate 10.

[0024] The top end of the threaded rod 92 extends to the top end of the square plate 91 and is fixedly connected to a throttle 98.

[0025] By adopting the above technical solution and setting the throttle 98, it is easier to rotate the adjusting threaded rod 92, thereby facilitating the simultaneous installation and disassembly of the two oil-removing filter plates 10.

[0026] An air inlet pipe 11 communicating with the inside of the filter box 1 is fixedly connected to one side of the bottom of the filter box 1, and an exhaust pipe 12 communicating with the inside of the filter box 1 is fixedly connected to the middle of the top of the filter box 1.

[0027] By adopting the above technical solution, the recovered helium gas is introduced into the interior of the filter box 1 from one end of the inlet pipe 11, and the filtered helium gas is discharged through the exhaust pipe 12.

[0028] A door 13 is hinged to one side of the bottom of the filter box 1, and a filter cylinder 3 is installed on the door 13.

[0029] By adopting the above technical solution and setting the box door 13, it is easier to open and close the installation space of the filter cartridge 3, thereby facilitating the replacement of the filter cartridge 3.

[0030] Working principle: When recovering helium used for vacuum chamber helium detection, helium is introduced into the filter box 1 through one end of the inlet pipe 11. After entering the filter box 1, the helium moves upward along the flow channel. When passing through the filter cylinder 3, the filter cylinder 3 filters out particulate impurities in the helium, thus performing preliminary treatment of the helium. When the helium enters above the partition 2, it passes through the oil removal filter plates 10 on both sides and enters the top of the filter box 1. When passing through the oil removal filter plates 10, the oil mist in the helium is adsorbed to prevent the oil mist from damaging the helium leak detection equipment. Meanwhile, when installing the filter cartridge 3, by aligning the position of the limiting block 51 with the limiting groove 53 and inserting the connecting pipe 4 into the top of the filter cartridge 3, the rotation of the filter cartridge 3 is limited by the cooperation between the limiting block 51 and the limiting groove 53. At the same time, the L-shaped plate 54 and the mounting plate 52 are interlocked, and the elastic force of the spring 58 makes the L-shaped plate 54 and the mounting plate 52 more securely interlocked, thereby limiting the vertical movement of the filter cartridge 3 and completing the installation of the filter cartridge 3. When disassembling, simply pull the guide rod 55 to both sides at the same time to separate the L-shaped plate 54 from the mounting plate 52, thereby releasing the restriction on the vertical movement of the filter cartridge 3 and facilitating the disassembly of the filter cartridge 3. Furthermore, by rotating the handle 98, the threaded rod 92 is rotated, which in turn causes the moving block 93 to move vertically along the outside of the threaded rod 92. Utilizing the connecting rod 94, the two insert plates 96 are simultaneously moved along the inside of the fixed plate 95 to the side that is further away from or closer to each other, so that the insert plates 96 can be inserted into or pulled out of the insert block 97, thereby facilitating the installation and removal of the oil-removing filter plate 10.

[0031] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A helium purification device for a vacuum chamber helium detection chamber, comprising a filter chamber (1), characterized in that: The filter box (1) is fixedly connected to a partition (2). A filter cylinder (3) is provided inside the filter box (1) and below the partition (2). The filter cylinder (3) is connected to the partition (2) by a snap-fit ​​assembly (5). A connecting pipe (4) is fixedly connected to the bottom end of the partition (2). The filter cylinder (3) is connected to the top of the partition (2) by a connecting pipe (4). A fixing frame (6) is fixedly connected inside the filter box (1) and at the top of the partition (2). An exhaust port (7) is provided on both sides of the fixing frame (6). Two side plates (8) are fixedly connected to the sides of the fixing frame (6) near the exhaust port (7). An oil-removing filter plate (10) is slidably snapped between the two side plates (8). An installation assembly (9) is provided on one side of the filter box (1). The installation assembly (9) is used to fix the oil-removing filter plate (10).

2. The helium cleaning device for a vacuum chamber helium detection chamber as described in claim 1, characterized in that, The snap-fit ​​assembly (5) includes a limiting block (51), which is fixedly connected to the side of the connecting pipe (4). The top of the filter cylinder (3) is fixedly connected to an installation plate (52). A limiting groove (53) is opened on the inner side of the installation plate (52). The limiting block (51) is slidably snapped into the limiting groove (53). The bottom end of the connecting pipe (4) is movably inserted into the installation plate (52). The bottom end of the partition plate (2) and both sides of the filter cylinder (3) are fixedly connected to fixing blocks (56). A guide rod (55) is movably passed through the fixing block (56). An L-shaped plate (54) is fixedly connected to the end of the guide rod (55) that is close to each other. The L-shaped plate (54) is snapped into the installation plate (52).

3. The helium cleaning device for a vacuum chamber helium detection chamber as described in claim 2, characterized in that, The guide rods (55) are all fixedly connected to the ends of the guide rods (55) that are far apart from each other. The L-shaped plate (54) is provided with a spring (58) between the side of the plate (54) that is close to the fixed block (56) and the fixed block (56). The spring (58) is movably sleeved on the outside of the guide rod (55).

4. The helium cleaning device for a vacuum chamber helium detection chamber as described in claim 1, characterized in that, The mounting assembly (9) includes two square plates (91), which are fixedly connected to one side of the filter box (1). A threaded rod (92) is rotatably connected between the two square plates (91). A movable block (93) is threadedly connected to the outer side of the threaded rod (92). A connecting rod (94) is rotatably connected to both sides of the movable block (93). A fixing plate (95) is fixedly connected to one side of the filter box (1) and to both sides of the threaded rod (92). An insert plate (96) is movably inserted through the interior of the fixing plate (95). The end of the connecting rod (94) away from the movable block (93) is rotatably connected to the insert plate (96). One end of the oil-removing filter plate (10) extends movably to the outside of the filter box (1) and is fixedly connected to an insert block (97). The side of the insert plate (96) away from the connecting rod (94) is movably inserted into the insert block (97).

5. The helium cleaning device for a vacuum chamber helium detection chamber as described in claim 4, characterized in that, The top end of the threaded rod (92) extends to the top end of the square plate (91) and is fixedly connected to a throttle (98).

6. The helium cleaning device for a vacuum chamber helium detection chamber as described in claim 1, characterized in that, An air inlet pipe (11) communicating with the inside of the filter box (1) is fixedly connected to one side of the bottom of the filter box (1), and an exhaust pipe (12) communicating with the inside of the filter box (1) is fixedly connected to the middle of the top of the filter box (1).

7. The helium cleaning device for a vacuum chamber helium detection chamber as described in claim 1, characterized in that, A door (13) is hinged to one side of the bottom of the filter box (1), and a filter cylinder (3) is installed on the door (13).

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