A sulfuric acid deashing process equipment system
By designing a sulfuric acid descaling process equipment system, the problem of oxide film accumulation on the surface of sulfide was solved, achieving efficient and environmentally friendly descaling, improving production efficiency and product quality, and reducing costs and environmental risks.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU EPITAXY ELECTRONIC MATERIALS CO LTD
- Filing Date
- 2025-07-25
- Publication Date
- 2026-07-21
AI Technical Summary
In existing technologies, the accumulation of surface oxide film in the high-temperature chemical vapor deposition process of Susceptor leads to uneven heating, increased energy consumption and reduced product yield. Meanwhile, the traditional nitric acid descaling process has the risks of residual ash, equipment corrosion and environmental pollution.
A sulfuric acid ash removal process equipment system was designed, including hoisting, cleaning and drying systems. It utilizes the synergistic effect of strong acid dissolution and high-temperature oxidation of sulfuric acid, combined with angle titanium hangers and titanium alloy electrode screws, to achieve automated ash removal. It uses 316L stainless steel and titanium-lined tanks for corrosion resistance, and is equipped with high-pressure water guns and a 6-in-1 air hose.
It achieves efficient and environmentally friendly removal of oxide films and pollutants, improves production efficiency and product quality, reduces production costs and environmental pressure, and ensures equipment lifespan and product consistency.
Smart Images
Figure CN224525450U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of ash removal equipment technology, specifically to a sulfuric acid ash removal process equipment system. Background Technology
[0002] In high-temperature chemical vapor deposition (CVD) or epitaxial growth processes for semiconductors, the susceptor plays a crucial role. It is constantly exposed to a high-temperature reactive gas environment, and its surface oxide film gradually accumulates reaction byproducts. The presence of these byproducts leads to a series of serious problems: 1. Impact on film uniformity: Due to the accumulation of reaction byproducts, the glass becomes unevenly heated. Taking semiconductor chip manufacturing as an example, if the glass is heated unevenly during the chip thin film growth process, it will lead to differences in the growth rate and quality of the thin film in different regions, thereby affecting the chip's performance and stability.
[0003] 2. Increased energy consumption: The accumulation of reaction byproducts reduces the thermal conductivity of the substrate. It's like wrapping the substrate in an insulating layer, making heat transfer difficult. To achieve the required process temperatures, more energy is needed to maintain the high-temperature environment, which undoubtedly increases production costs.
[0004] 3. Reduced product yield: As the amount of reaction byproducts increases, the risk of particulate contamination rises significantly. In processes like semiconductor manufacturing, which have extremely high environmental requirements, even tiny particulate contamination can lead to chip short circuits, open circuits, and other malfunctions, thereby reducing product yield.
[0005] To ensure the normal operation of semiconductor processes and product quality, Susceptors need to be taken offline periodically for maintenance, which involves peeling off the oxide film on the surface and recoating it.
[0006] In traditional stripping processes, nitric acid (HNO3) is widely used to remove oxide films and residual pollutants due to its strong oxidizing properties. However, this method has problems such as ash residue, equipment corrosion, and environmental risks.
[0007] In conclusion, developing a more efficient, environmentally friendly, and low-residue sulfuric acid descaling process system has significant practical implications and market demand. It can solve problems existing in current technologies, improve the quality and efficiency of semiconductor processes, and reduce production costs and environmental pressures. Utility Model Content
[0008] Purpose of the utility model: In order to overcome the above shortcomings, the purpose of this utility model is to provide a sulfuric acid ash removal process equipment system, which has significant beneficial effects in improving ash removal efficiency, reducing residue, extending equipment life and optimizing the process. It can improve the quality and efficiency of semiconductor processes, reduce production costs and environmental pressure, and has broad application prospects.
[0009] Technical solution: A sulfuric acid deashing process equipment system, comprising: A hoisting system; the hoisting system includes a hanger and a crane, the hanger being used to suspend the workpiece, and the crane being used to lift the hanger and transfer the workpiece on the hanger between different processes; Cleaning system; The cleaning system is located below the hoisting system. The cleaning system includes a water washing tank, a sodium hydroxide tank, and a sulfuric acid tank. The water washing tank is used to wash the workpiece with water, the sodium hydroxide tank is used to perform alkaline washing on the workpiece, and the sulfuric acid tank is used to perform acid washing on the workpiece. Drying system; the drying system is located below the hoisting system and behind the cleaning system, and is used to dry the cleaned workpiece.
[0010] The sulfuric acid descaling process equipment system described in this utility model includes a hoisting system, a cleaning system, and a drying system. The hoisting system uses hangers to suspend workpieces, and a crane is used to lift the hangers and transfer the workpieces between different processes. This allows the entire descaling process to proceed in an orderly manner, achieving automated operation and improving production efficiency. The cleaning system includes a water washing tank, a sodium hydroxide tank, and a sulfuric acid tank, used for water washing, alkaline washing, and acid washing, respectively. This multi-step cleaning method can more comprehensively and thoroughly clean the workpieces, improving the descaling effect. The drying system removes moisture from the surface of the workpieces, preventing moisture residue. Simultaneously, dried workpieces are easier to process and use in subsequent steps.
[0011] Furthermore, in the aforementioned sulfuric acid descaling process equipment system, the hanging fixture includes an angle titanium fixture and a titanium alloy electrode screw. The angle titanium fixture is used to suspend the workpiece, and the titanium alloy electrode screw is set on the mounting hole of the workpiece and used in conjunction with the angle titanium fixture to conduct electricity and fix it.
[0012] Titanium angle brackets possess excellent corrosion resistance, enabling them to be used for extended periods in acidic and alkaline environments without damage, thus ensuring their lifespan. Titanium alloy electrode screws not only secure the workpiece but also provide electrical conductivity, which is crucial in some dust removal processes requiring electricity.
[0013] Furthermore, in the aforementioned sulfuric acid descaling process equipment system, the washing tank includes a pre-washing tank, an alkaline washing tank, an acidic washing tank, and a post-washing tank.
[0014] The subdivided water washing tank design can provide more precise cleaning results according to different cleaning stages and needs.
[0015] Furthermore, in the aforementioned sulfuric acid descaling process equipment system, the pre-washing tank, sodium hydroxide tank, alkaline water washing tank, sulfuric acid tank, acidic water washing tank, post-washing tank, and drying system are arranged sequentially from front to back.
[0016] Furthermore, in the aforementioned sulfuric acid descaling process equipment system, both the pre-washing tank and the post-washing tank are equipped with high-pressure water guns.
[0017] High-pressure water guns provide powerful water jets, effectively removing stubborn impurities and dirt from workpiece surfaces. In the pre-rinse tank, the high-pressure water gun washes away some difficult-to-remove particulate impurities during the initial cleaning; in the post-rinse tank, it provides a final, powerful rinse, ensuring no residual contaminants remain on the workpiece surface. This significantly improves the washing effect and quality, guaranteeing the cleanliness of the workpiece.
[0018] Furthermore, in the aforementioned sulfuric acid descaling process equipment system, the washing tank contains deionized water, the sodium hydroxide tank contains sodium hydroxide solution, and the sulfuric acid tank contains sulfuric acid solution.
[0019] Furthermore, in the aforementioned sulfuric acid descaling process equipment system, the sodium hydroxide tank is made of 316L stainless steel, and the sulfuric acid tank is made of titanium-lined tank and equipped with quartz heating tubes.
[0020] 316L stainless steel possesses excellent corrosion resistance, capable of withstanding the corrosion of sodium hydroxide solution and ensuring the service life of the sodium hydroxide tank. The titanium-lined tank body exhibits superior corrosion resistance, resisting sulfuric acid corrosion. Simultaneously, the quartz heating tube can heat the sulfuric acid solution, enhancing its reactivity. Under high-temperature conditions, the synergistic effect of the strong acid dissolution and high-temperature oxidation of sulfuric acid is more pronounced, enabling more effective removal of oxide films and decomposition of organic pollutants, thus improving ash removal efficiency.
[0021] Furthermore, in the aforementioned sulfuric acid descaling process equipment system, the drying system includes a high-pressure drying tank and a 6-in-1 air pipe. The high-pressure drying tank is equipped with a 6-in-1 air pipe for drying the workpiece.
[0022] The high-pressure drying tank is equipped with a 6-in-1 air pipe, which can provide powerful airflow to quickly dry the moisture on the surface of the workpiece.
[0023] The beneficial effects of this utility model are as follows: The sulfuric acid descaling equipment system described in this invention, in conjunction with the sulfuric acid descaling process, effectively removes oxide films and decomposes organic pollutants through the synergistic effect of the strong acid dissolution and high-temperature oxidation of sulfuric acid, reducing ash formation. Compared with the traditional nitric acid method, sulfuric acid descaling is more efficient, removing oxide films and pollutants from the workpiece surface more quickly and thoroughly, thus improving production efficiency and product quality. The rational design and orderly arrangement of each system and component in the sulfuric acid descaling equipment system make the entire descaling process more complete and coherent. From workpiece hoisting and cleaning to drying, each step works closely together, enabling an automated and standardized production process, improving production consistency and stability. This helps improve product quality stability and reduces product quality problems caused by human factors or non-standard processes. Attached Figure Description
[0024] Figure 1 This is an overall layout diagram of the sulfuric acid deashing process equipment system described in this utility model; Figure 2 This is a schematic diagram of the layout of the sulfuric acid deashing process equipment system described in this utility model; In the picture: Lifting system 1, scaffolding 11, overhead crane 12; Cleaning system 2, sodium hydroxide tank 21, sulfuric acid tank 22, pre-rinse tank 23, alkaline water rinse tank 24, acidic water rinse tank 25, post-rinse tank 26; Drying system 3, high-pressure drying tank 31. Detailed Implementation
[0025] The following is in conjunction with the appendix Figure 1 The present invention will be further illustrated by Examples 1 and 2.
[0026] Example 1 like Figure 1 As shown, the sulfuric acid deashing process equipment system of this utility model comprises the following components: Lifting system 1, including: Hanger 11: Includes angle titanium hangers and titanium alloy electrode screws. The angle titanium hangers are used to suspend workpieces, while the titanium alloy electrode screws are installed in the workpiece's mounting holes and work in conjunction with the angle titanium hangers to provide conductivity and fixation. For example, when suspending a Susceptor, the titanium alloy electrode screws are installed in its mounting holes, and then the angle titanium hangers are used for suspension, ensuring the stability of the workpiece during lifting and handling.
[0027] Overhead crane 12: Used to lift the hanger 11 and transfer the workpieces on the hanger 11 between different processes. Through the operation of the overhead crane 12, workpieces can be accurately transferred from one processing tank to another.
[0028] Cleaning system 2: Located below hoisting system 1, including: The washing tanks contain deionized water and include a pre-wash tank 23, an alkaline wash tank 24, an acidic wash tank 25, and a post-wash tank 26. Both the pre-wash tank 23 and the post-wash tank 26 are equipped with high-pressure water guns 6. The pre-wash tank 23 is used to rinse the product surface with high-pressure water at a pressure ≥20MPa to ensure surface wetting; the alkaline wash tank 25 is used to remove alkaline residue from the product surface; the acidic wash tank 25 is used to remove ash that is insoluble in alkaline solutions during alkaline corrosion, preventing contamination of the subsequent oxidation tank; the post-wash tank 26 is used to rinse the product surface with high-pressure water at a pressure ≥20MPa to ensure no sulfuric acid residue remains on the surface.
[0029] Sodium hydroxide tank 21: Made of 316L stainless steel, it contains sodium hydroxide solution and is used for alkaline washing of workpieces. Alkaline corrosion is carried out in sodium hydroxide solution at a temperature of 20-35℃.
[0030] Sulfuric acid tank 22: It adopts a titanium-lined tank and is equipped with a quartz heating tube. It is filled with sulfuric acid solution for pickling workpieces and neutralization is performed using sulfuric acid solution at a temperature of 30-45℃.
[0031] Drying system 3: Located below the hoisting system 1 and behind the cleaning system 2, including: High-pressure drying tank 31: Equipped with a 6-in-1 air pipe 32, used to dry the cleaned workpiece.
[0032] 6-in-1 air hose: Installed on the high-pressure drying tank 31, the air blown out by it dries the moisture on the surface of the product.
[0033] Example 2 Based on the structural foundation of Embodiment 1, the working process of the sulfuric acid deashing process equipment system of this utility model is as follows: 1. Mounting the workpiece: Install titanium alloy electrode screws into the mounting holes of the Susceptor, and then start mounting using the angle titanium hanger. After mounting, use the overhead crane 11 to lift the Susceptor.
[0034] 2. Pre-wash: Hoist the Susceptor into the pre-wash tank 23 and rinse the product surface with high-pressure water at a pressure ≥20MPa to ensure the surface is wetted. This step can remove some loose impurities from the workpiece surface and fully wet the surface, which is beneficial for the subsequent alkaline washing and acid washing processes.
[0035] 3. Alkaline etching and alkaline water rinsing: The Susceptor is suspended in sodium hydroxide bath 21 and subjected to alkaline etching in a sodium hydroxide solution at 20-35℃ for 5-10 minutes. Alkaline etching removes some of the oxide film and contaminants from the workpiece surface. Then, it is suspended in alkaline water rinsing bath 24 for 1-2 minutes to remove alkaline residue from the product surface and prevent residual alkaline solution from affecting subsequent pickling processes.
[0036] 4. Pickling and Acidic Washing: The Susceptor is hoisted into sulfuric acid tank 22 and neutralized with a sulfuric acid solution at 30-45℃ for 10-15 minutes. The strong acid dissolution and high-temperature oxidation of sulfuric acid work synergistically to effectively peel off the oxide film and decompose organic pollutants. After neutralization, it is hoisted into acidic washing tank 25 and washed with acidic water for 1-2 minutes. This step aims to remove the ash that is insoluble in alkali solution during alkaline corrosion, preventing contamination of subsequent oxidation tanks.
[0037] 5. Post-washing: Hoist the Susceptor into the post-washing tank 26 and use high-pressure water with a pressure of ≥20MPa to rinse the product surface to ensure that there is no sulfuric acid residue on the surface, so as to avoid the adverse effects of sulfuric acid residue on the workpiece and subsequent processes.
[0038] 6. Drying and Unloading: The Susceptor is hoisted into the high-pressure drying tank 31. After drying the surface moisture of the product using a 6-in-1 air hose, it is hoisted and placed flat on the product trolley, and the titanium hangers are removed. At this point, the entire sulfuric acid descaling process is completed.
[0039] As can be seen from the above embodiments, the sulfuric acid deashing process equipment system of this utility model, through reasonable structural design and process, can effectively solve the problems existing in the traditional nitric acid deashing process and achieve a high-efficiency, environmentally friendly and low-residue deashing effect.
[0040] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements can be made without departing from the principle of the present utility model, and these improvements should also be considered within the protection scope of the present utility model.
Claims
1. A sulfuric acid deashing process equipment system, characterized in that, include: Lifting system (1); The lifting system (1) includes a hanger (11) and a crane (12). The hanger (11) is used to suspend the workpiece, and the crane (12) is used to lift the hanger (11) and transfer the workpiece on the hanger (11) between different processes. Cleaning system (2); The cleaning system (2) is located below the hoisting system (1). The cleaning system (2) includes a water washing tank, a sodium hydroxide tank (21), and a sulfuric acid tank (22). The water washing tank is used to wash the workpiece with water, the sodium hydroxide tank (21) is used to wash the workpiece with alkali, and the sulfuric acid tank (22) is used to wash the workpiece with acid. Drying system (3); The drying system (3) is located below the hoisting system (1) and behind the cleaning system (2). The drying system (3) is used to dry the cleaned workpiece.
2. The sulfuric acid deashing process equipment system according to claim 1, characterized in that, The hanger (11) includes an angle titanium hanger and a titanium alloy electrode screw. The angle titanium hanger is used to suspend the workpiece, and the titanium alloy electrode screw is set on the mounting hole of the workpiece and is used in conjunction with the angle titanium hanger to conduct electricity and fix it.
3. The sulfuric acid deashing process equipment system according to claim 1, characterized in that, The washing tank includes a pre-washing tank (23), an alkaline washing tank (24), an acidic washing tank (25), and a post-washing tank (26).
4. The sulfuric acid deashing process equipment system according to claim 3, characterized in that, The pre-washing tank (23), sodium hydroxide tank (21), alkaline water washing tank (24), sulfuric acid tank (22), acidic water washing tank (25), post-washing tank (26), and drying system (3) are arranged sequentially from front to back.
5. The sulfuric acid deashing process equipment system according to claim 3, characterized in that, Both the pre-wash tank (23) and the post-wash tank (26) are equipped with high-pressure water guns.
6. The sulfuric acid deashing process equipment system according to claim 1, characterized in that, The washing tank contains deionized water, the sodium hydroxide tank (21) contains sodium hydroxide solution, and the sulfuric acid tank (22) contains sulfuric acid solution.
7. The sulfuric acid deashing process equipment system according to claim 1, characterized in that, The sodium hydroxide tank (21) is made of 316L stainless steel, and the sulfuric acid tank (22) is made of titanium-lined tank and equipped with quartz heating tubes.
8. The sulfuric acid deashing process equipment system according to claim 1, characterized in that, The drying system (3) includes a high-pressure drying tank (31) and a 6-in-1 air pipe. The high-pressure drying tank (31) is equipped with a 6-in-1 air pipe for drying the workpiece.