Rack, loading and unloading system and vacuum plasma cleaning machine

Abstract

The utility model discloses a kind of shelves, and disclosed with the feeding and discharging system of shelf and the vacuum plasma cleaning machine with feeding and discharging system, shelf includes moving seat and multiple groups of shelf board group, two support plates of shelf board group are all equipped with long circle through-hole, the axial direction of two long circle through-holes is all along front-back direction extension and coaxial arrangement, two opposite sides of two support plates are respectively equipped with multiple first U-shaped grooves and multiple second U-shaped grooves, multiple first U-shaped grooves and multiple second U-shaped grooves are all along left-right direction extension and position one-to-one correspondence, the depth direction of all first U-shaped grooves is along front-back direction extension, the depth direction of all second U-shaped grooves is all inclined upward and with left-right direction each other vertical, the two ends of the limiting plate of shelf board group are all equipped with chuck, two chucks of limiting plate are respectively inserted into different first U-shaped groove and second U-shaped groove, the height of limiting plate can be conveniently and quickly adjusted, shelf is suitable for different size size's base plate.

Description

Technical Field

[0001] This utility model relates to the field of printed circuit board technology, and in particular to a shelf and its vacuum plasma cleaning machine. Background Technology

[0002] In the production process of printed circuit boards, vacuum plasma cleaners are used to remove contaminants from the surface of substrates and other materials, while activating surface properties to provide a high-quality substrate for subsequent processes. Shelves serve as carriers for temporarily storing and placing substrates, distributing multiple substrates between two sets of adjacent electrode plate assemblies. Currently, shelves are usually custom-made with a fixed number of support units. These support units are suitable for substrates of a certain size, resulting in poor versatility. Oversized substrates cannot fit into the support units. The number of support units and the number of substrates that can be placed on the shelf are fixed. Placing oversized substrates on the support units poses a risk of board falling and fails to effectively utilize the space of the shelf and vacuum plasma cleaner, resulting in resource waste and hindering production efficiency. There are also universal shelves, but their structure is usually relatively simple. Fasteners need to be tightened to disassemble and reposition the limiting plates so that the support units formed by two adjacent vertically distributed limiting plates can be used for substrates of different sizes (the height of the substrate when it is upright). This involves many steps, is time-consuming, and the positioning accuracy of the limiting plates is poor. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a shelf with a limiting plate that can be easily and quickly adjusted in position, so as to be suitable for supporting and limiting substrates of different sizes.

[0004] This utility model also proposes a loading and unloading system having the above-mentioned shelf.

[0005] This utility model also proposes a vacuum plasma cleaner having the above-mentioned loading and unloading system.

[0006] According to a first aspect embodiment of the present invention, a shelf includes a movable base and multiple sets of shelf assemblies. The bottom of the movable base is provided with multiple guide wheels. The multiple sets of shelf assemblies are arranged in a left-right direction. Each shelf assembly includes two support plates and at least two limiting plates. The two support plates are distributed on the movable base in a front-back direction. Each support plate has an elongated through hole, the axial direction of which extends in the front-back direction. The two elongated through holes are coaxially arranged, and their length extends in the vertical direction. Multiple first U-shaped grooves and multiple second U-shaped grooves are respectively provided on two opposite sides of the two support plates. The multiple first U-shaped grooves and multiple second U-shaped grooves extend in a left-right direction and their positions correspond one-to-one. The depth direction of all the first U-shaped grooves is along the front-back direction. Extending inwards, the depth direction of all the second U-shaped grooves is inclined upwards and perpendicular to the left and right directions. The two ends of the limiting plate are respectively inserted into the two elongated through holes. Both ends of the limiting plate are provided with locking heads. Both locking heads extend in the left and right directions. The distance between the two locking heads is greater than the distance between the two opposite sides of the two supporting plates. One locking head can be inserted into one of the first U-shaped grooves, and the other locking head can be withdrawn from the second U-shaped groove opposite to one of the first U-shaped grooves. Alternatively, the two locking heads can be inserted into the opposite first U-shaped groove and the second U-shaped groove respectively. The upper end face and the lower end face of the limiting plate are respectively provided with an upper limiting groove and a lower limiting groove. Both the upper limiting groove and the lower limiting groove extend in the front and back directions.

[0007] It has at least the following beneficial effects: By inserting the two clips of the limiting plate into different first and second U-shaped grooves, the height of the limiting plate can be adjusted, thereby adjusting the distance between two adjacent limiting plates. This makes the distance between the upper and lower limiting grooves on two adjacent limiting plates adjustable, ultimately making the shelf suitable for supporting and limiting substrates of different sizes. Furthermore, the operation of disassembling and installing the limiting plates is simple, with few steps, no need to tighten fasteners, and no need to worry about the threaded structure of the fasteners failing due to long-term use. It allows for convenient and quick adjustment of the height position of the limiting plates.

[0008] According to some embodiments of the present invention, the shelf assembly further includes a connecting plate, the two ends of which are respectively connected to the upper ends of the two support plates. The lower end surface of the connecting plate is provided with a top limiting groove extending in the front-back direction, and the two ends of the top limiting groove are respectively connected to the two elongated through holes on the two support plates.

[0009] According to some embodiments of the present invention, a plurality of first U-shaped grooves are provided on the left side wall of one of the elongated through holes, a plurality of second U-shaped grooves are provided on the right side wall of the other elongated through hole, and two clamping heads are respectively provided on the left and right sides of the two ends of the limiting plate.

[0010] According to some embodiments of this utility model, the left and right sides of both ends of the limiting plate are provided with insertion holes, and the two card heads are respectively inserted into the two insertion holes.

[0011] According to some embodiments of the present invention, a plurality of first U-shaped grooves and a plurality of second U-shaped grooves are respectively disposed on the left side wall of the two elongated through holes, or a plurality of first U-shaped grooves and a plurality of second U-shaped grooves are respectively disposed on the right side wall of the two elongated through holes.

[0012] According to some embodiments of the present invention, the movable seat is provided with a plurality of positioning seats distributed in the left-right direction, and the positioning seats are provided with positioning grooves. The lower end of one of the support plates of the shelf assembly is inserted into one of the positioning grooves.

[0013] The loading and unloading system according to a second aspect of the present invention includes a shelf according to the first aspect of the present invention, and a trolley. The bottom of the trolley is provided with a plurality of wheels, and the top of the trolley is provided with a first guide rail. The guide wheels are rotatably disposed on the first guide rail.

[0014] It has at least the following beneficial effects: the loading and unloading system can easily carry the shelves to move so as to push the shelves into the vacuum chamber of the vacuum plasma cleaner or remove the shelves from the vacuum chamber of the vacuum plasma cleaner, so as to conveniently and quickly complete the loading and unloading of the vacuum plasma cleaner.

[0015] According to some embodiments of the present invention, the front end of the first guide rail extends to the front of the trolley, and the front end of the first guide rail is disposed at the first guide docking structure. The first guide docking structure is used to cooperate with the second guide docking structure of the second guide rail disposed at the bottom of the vacuum chamber so that the first guide rail docks with the second guide rail.

[0016] According to some embodiments of the present invention, one of the first guide docking structure and the second guide docking structure is a conical hole and the other is a conical head, wherein the conical head can be inserted into the conical hole.

[0017] The vacuum plasma cleaner according to a third aspect of the present invention includes a loading and unloading system according to the second aspect of the present invention, and a machine body. The machine body is provided with a vacuum chamber. The vacuum chamber is provided with a second guide rail. The guide wheel can roll onto the second guide rail to transfer the shelf and the substrate on the shelf between the trolley and the vacuum chamber.

[0018] It has at least the following beneficial effects: the shelf is suitable for substrates of different sizes, has strong versatility, and the shelf is easy to transfer between the trolley and the vacuum chamber, improving the convenience and efficiency of loading and unloading substrates, increasing the utilization rate of the vacuum plasma cleaner, and improving the cleaning efficiency of the vacuum plasma cleaner.

[0019] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0021] Figure 1 This is a partial structural schematic diagram of the vacuum plasma cleaner according to an embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram of the loading and unloading system according to an embodiment of the present invention;

[0023] Figure 3 This is one of the structural schematic diagrams of the shelf assembly of the shelf according to an embodiment of the present utility model;

[0024] Figure 4 This is the second schematic diagram of the shelf assembly of the shelf in this embodiment of the present utility model;

[0025] Figure 5 This is a schematic diagram of the limiting plate of the shelf in an embodiment of the present utility model;

[0026] Icon labels:

[0027] Movable seat 1, positioning seat 11;

[0028] Shelf assembly 2, support plate 21, elongated through hole 211, first U-shaped groove 212, second U-shaped groove 213, limiting plate 22, clamp head 221, upper limit groove 222, lower limit groove 223, connecting plate 23, top limit groove 231;

[0029] 3. Trolley 3, wheel 31, first guide rail 32, first guide docking structure 321;

[0030] Body 4;

[0031] Substrate 5. Detailed Implementation

[0032] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0033] In the description of this utility model, the use of "first" and "second" is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features or the order of the technical features.

[0034] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0035] Reference Figure 1 and Figure 2 This utility model discloses a shelf, including a movable base 1 and multiple sets of shelf groups 2 all disposed on the movable base 1. The shelf groups 2 are used to place or support multiple substrates 5. The bottom of the movable base 1 is provided with multiple guide wheels. The movable base 1 can move on the table or ground of other support devices through the guide wheels, thereby realizing easy movement of the shelf and the substrates 5 on the shelf.

[0036] Reference Figure 3 and Figure 4 The multiple shelf groups 2 have the same structure and are arranged on the movable base 1 in the left-right direction. Taking one shelf group 2 as an example, the shelf group 2 includes two support plates 21 and at least two limiting plates 22. The two support plates 21 are distributed on the movable base 1 in the front-back direction. Both support plates 21 are provided with elongated through holes 211. The axial direction of the two elongated through holes 211 is extended in the front-back direction. The two elongated through holes 211 are coaxially arranged. The length of the elongated through holes 211 is extended in the vertical direction. The two ends of the limiting plates 22 are respectively inserted through the two elongated through holes 211. The elongated through holes 211 have a left side wall and a right side wall. The left side wall and the right side wall limit the left and right movement of the limiting plates 22 in the left-right direction.

[0037] It should be noted that the width of the elongated through hole 211 in the left-right direction is greater than the thickness of the two ends of the limiting plate 22 in the left-right direction, so that both ends of the limiting plate 22 can move in the front-back direction and the up-down direction within the elongated through hole 211, and the two ends of the limiting plate 22 cannot move in the left-right direction within the elongated through hole 211 or can move a very small distance in the left-right direction within the elongated through hole 211.

[0038] On the two opposite sides of the two support plates 21, there are a plurality of first U-shaped grooves 212 and a plurality of second U-shaped grooves 213 respectively. The plurality of first U-shaped grooves 212 and the plurality of second U-shaped grooves 213 extend in the left and right direction and are positioned one by one. The depth direction of all first U-shaped grooves 212 extends in the front and back direction. The depth direction of all second U-shaped grooves 213 is inclined upward and perpendicular to the left and right direction. The first U-shaped grooves 212 and the second U-shaped grooves 213 have an upper inner wall and a lower inner wall. The lower inner wall of the second U-shaped groove 213 gradually decreases from the groove opening to the bottom of the groove.

[0039] Reference Figure 5 Both ends of the limiting plate 22 are provided with locking heads 221, and both locking heads 221 extend in the left and right direction. The distance between the two locking heads 221 is greater than the distance between the two opposite sides of the two support plates 21. One locking head 221 can be inserted into a first U-shaped groove 212, and the other locking head 221 can be withdrawn from a second U-shaped groove 213 opposite to the first U-shaped groove 212. Alternatively, both locking heads 221 can be inserted into the opposite first U-shaped groove 212 and second U-shaped groove 213 respectively. The upper end face and lower end face of the limiting plate 22 are respectively provided with an upper limit groove 222 and a lower limit groove 223. Both the upper limit groove 222 and the lower limit groove 223 extend in the front-back direction. The inner wall of the upper limit groove 222 is used to support and limit the lower end of the substrate 5 in the left-right direction. The inner wall of the lower limit groove 223 is used to limit the upper end of the substrate 5 in the left-right direction. The lower limit groove 223 can also prevent the substrate 5 from moving upward and prevent the lower end of the substrate 5 from detaching from the upper limit groove 222 of the lower limiting plate 22.

[0040] Two support plates 21 are fixedly connected or detachably connected to the movable base 1. When it is necessary to install the limiting plate 22 on the two support plates 21, the limiting plate 22 is placed between the two support plates 21, with the limiting plate 22 in a state of front higher than back or back lower than front higher. Then, one of the locking heads 221 of the limiting plate 22 is inserted into the first U-shaped groove 212 from the opening of the first U-shaped groove 212. Then, the limiting plate 22 is driven to rotate around the left-right direction as the rotation axis, so that the other locking head 221 of the limiting plate 22 swings downward and inserts into the opening of the second U-shaped groove 213. Under the force and the action of the lower inner wall of the second U-shaped groove 213, the other locking head 221 of the limiting plate 22 will slide into the bottom of the second U-shaped groove 213, and one locking head 221 of the limiting plate 22 will slide to the middle of the first U-shaped groove 212. One locking head 221 of the limiting plate 22 will not completely exit the first U-shaped groove 212. At this time, the inner walls of the first U-shaped groove 212 and the second U-shaped groove 213 support the two locking heads 221, thereby enabling the two supporting plates 21 to support the limiting plate 22.

[0041] When it is necessary to remove the limiting plate 22 from the two support plates 21, drive the limiting plate 22 to move towards the first U-shaped groove 212. One of the locking heads 221 of the limiting plate 22 slides to the bottom of the first U-shaped groove 212. Under the guidance of the lower inner wall of the second U-shaped groove 213, the other locking head 221 of the limiting plate 22 slides to the opening of the second U-shaped groove 213. Then drive the limiting plate 22 to rotate around the left and right direction as the rotation axis, so that the other locking head 221 of the limiting plate 22 swings upward and completely disengages from the second U-shaped groove 213. Finally, drive the limiting plate 22 away from the first U-shaped groove 212, and one of the locking heads 221 of the limiting plate 22 completely exits the first U-shaped groove 212, thus completing the removal of the limiting plate 22 from the two support plates 21.

[0042] When two adjacent limiting plates 22 are installed on two support plates 21, the substrate 5 can be inserted into the upper limiting groove 222 and lower limiting groove 223 on the two adjacent limiting plates 22 through either of the two elongated through holes 211. The lower limiting plate 22 supports the substrate 5, and the inner walls of the upper limiting groove 222 and lower limiting groove 223 limit the substrate 5 in the left and right directions.

[0043] According to the actual situation, the two clips 221 of the limiting plate 22 are respectively inserted into different first U-shaped grooves 212 and second U-shaped grooves 213 to adjust the height of the limiting plate 22, which in turn adjusts the distance between two adjacent limiting plates 22. This makes the distance between the upper limiting groove 222 and the lower limiting groove 223 on the two adjacent limiting plates 22 adjustable, and finally makes the shelf suitable for supporting and limiting substrates 5 of different sizes.

[0044] The operation of disassembling and installing the limiting plate 22 is simple and involves few steps. There is no need to tighten fasteners, and there is no need to worry about the threaded structure of the fasteners failing due to prolonged use. The height of the limiting plate 22 can be adjusted conveniently and quickly. Since the depth direction of the second U-shaped groove 213 is inclined upwards and perpendicular to the left and right directions, without significant external force, the other locking head 221 of the limiting plate 22 will not move towards the opening of the second U-shaped groove 213. This prevents the other locking head 221, located at the bottom of the second U-shaped groove 213, from accidentally dislodging from it, thus preventing the limiting plate 22 from accidentally detaching from the two support plates 21 and consequently preventing the base plate 5 from falling off the shelf.

[0045] Reference Figure 3 and Figure 4It can be assumed that the distance between the bottom of the first U-shaped groove 212 and the bottom of the second U-shaped groove 213 at the same height is greater than the distance between the two locking heads 221 on the same limiting plate 22. This ensures that after one locking head 221 on the limiting plate 22 extends into the bottom of the first U-shaped groove 212, the other locking head 221 can swing downwards and enter the opening of the second U-shaped groove 213. When the other locking head 221 slides to the bottom of the second U-shaped groove 213, one locking head 221 is still within the first U-shaped groove 212. The specific spacing between the two locking heads 221 on the same limiting plate 22 is not specified here.

[0046] It should be noted that multiple first U-shaped grooves 212 are distributed along the vertical direction, and the spacing between any two adjacent first U-shaped grooves 212 is equal. The first U-shaped grooves 212 are connected to the elongated through holes 211 on the corresponding support plate 21. The number of second U-shaped grooves 213 is equal to the number of first U-shaped grooves 212. Multiple second U-shaped grooves 213 are distributed along the vertical direction, and the spacing between any two adjacent second U-shaped grooves 213 is equal. The second U-shaped grooves 213 are connected to the elongated through holes 211 on the corresponding support plate 21. The positions of multiple first U-shaped grooves 212 and multiple second U-shaped grooves 213 correspond one-to-one, which means that at the same height, there is a groove bottom with one first U-shaped groove 212 and one second U-shaped groove 213.

[0047] Reference Figure 3 and Figure 4 Both support plates 21 can be made from a single cuboid plate, with an elongated through hole 211 and multiple first U-shaped grooves 212 formed on one plate, and another elongated through hole 211 and multiple second U-shaped grooves 213 formed on the other plate. Alternatively, one support plate 21 can be made by splicing two cuboid plates, with half of the elongated through hole 211 formed on two opposite sides of the two plates, forming a complete elongated through hole 211 when the two plates are spliced. Multiple first U-shaped grooves 212 can be formed on one of the two plates, or multiple first U-shaped grooves 212 can be formed on both plates, and the clamp 221 can simultaneously extend into two first U-shaped grooves 212 distributed on the left and right. Similarly, the other support plate 21 is made of two other cuboid plates spliced ​​together. Multiple second U-shaped grooves 213 are opened on one of the other two plates, or multiple second U-shaped grooves 213 are opened on both of the other two plates. The clamp 221 can simultaneously extend into two second U-shaped grooves 213 distributed on the left and right.

[0048] In some embodiments, the shelf assembly 2 further includes a connecting plate 23, with the two ends of the connecting plate 23 connected to the upper ends of two support plates 21 respectively. The lower ends of the two support plates 21 are both located on the movable seat 1. The connecting plate 23 and the two support plates 21 are in an inverted U-shape or a gantry shape, which has good stability.

[0049] The lower end face of the connecting plate 23 is provided with a top limiting groove 231 extending in the front-back direction. The two ends of the top limiting groove 231 are respectively connected to two elongated through holes 211 on the two support plates 21, so that the substrate 5 can be inserted into the upper limiting groove 222 and the top limiting groove 231 of the uppermost limiting plate 22. The connecting plate 23 can also play the role of limiting the substrate 5 in the left and right directions.

[0050] It is understood that the connecting plate 23 and the two support plates 21 can be integrally formed. In another embodiment, the connecting plate 23 and the two support plates 21 are separate structures, connected by fasteners, welding, or bonding.

[0051] In some embodiments, multiple first U-shaped grooves 212 are provided on the left side wall of one of the elongated through holes 211, and multiple second U-shaped grooves 213 are provided on the right side wall of another elongated through hole 211. Two locking heads 221 are respectively provided on the left and right sides of the two ends of the limiting plate 22. The first U-shaped grooves 212 and the second U-shaped grooves 213 are set in a staggered manner, and the two locking heads 221 are also set in a staggered manner. When the two locking heads 221 are respectively inserted into the first U-shaped grooves 212 and the second U-shaped grooves 213, the two support plates 21 support the limiting plate 22. The support points of the two support plates 21 on the limiting plate 22 are distributed on the left and right sides respectively. Compared with the scheme where the support points of the two support plates 21 on the limiting plate 22 are respectively distributed on the left or right side, the risk of the shelf assembly 2 tipping to the left or right side can be reduced.

[0052] Reference Figure 3 and Figure 4 In some embodiments, multiple first U-shaped grooves 212 are provided on the left side wall of one of the elongated through holes 211, and multiple second U-shaped grooves 213 are provided on the left side wall of another elongated through hole 211, or multiple first U-shaped grooves 212 are provided on the right side wall of one of the elongated through holes 211, and multiple second U-shaped grooves 213 are provided on the right side wall of another elongated through hole 211. This allows the operator to directly observe the first U-shaped groove 212, the second U-shaped groove 213, and the two locking heads 221 in the area corresponding to one side of the first U-shaped groove 212 and the second U-shaped groove 213, and facilitates the operation of inserting the two locking heads 221 into the first U-shaped groove 212 and the second U-shaped groove 213 respectively.

[0053] In another embodiment, a plurality of first U-shaped grooves 212 penetrate the left and right sides of one of the elongated through holes 211, a plurality of second U-shaped grooves 213 penetrate the left and right sides of another elongated through hole 211, and two clamping heads 221 penetrate the two ends of the limiting plate 22 respectively, and the two ends of the clamping heads 221 extend to the left and right sides of the limiting plate 22 respectively.

[0054] Reference Figure 5In some embodiments, the left and right sides of both ends of the limiting plate 22 are provided with insertion holes, and two clips 221 are respectively inserted into the two insertion holes, so that the two clips 221 are connected to both ends of the limiting plate 22. One end of the clip 221 is connected to the insertion hole by an interference fit, and the other end of the clip 221 extends outside the limiting plate 22 to extend into the first U-shaped groove 212 or the second U-shaped groove 213.

[0055] Of course, the clamp 221 can also be connected to both ends of the limiting plate 22 by means of threaded connection, welding, or bonding. The cross-section of the clamp 221 can be circular or square.

[0056] Reference Figure 3 and Figure 4 In this embodiment, on the same shelf group 2, multiple first U-shaped grooves 212 are provided on the right side wall of the front elongated through hole 211. The two ends of the first U-shaped grooves 212 are respectively connected to the front elongated through hole 211 and the area to the right of the front support plate 21. Multiple second U-shaped grooves 213 are provided on the left side wall of the rear elongated through hole 211. The two ends of the second U-shaped grooves 213 are respectively connected to the rear elongated through hole 211 and the area to the left of the rear support plate 21. On the same limiting plate 22, two locking heads 221 are respectively provided on the left and right sides of the limiting plate 22. The upper limiting groove 222 and the lower limiting groove 223 are symmetrically arranged vertically, so that the limiting plate 22 can be used upside down and forward and backward. In actual use, the limiting plate 22 can be rotated 180° around the left and right direction as the rotation axis to realize the upside down and forward and backward inversion of the limiting plate 22.

[0057] Reference Figure 2 , Figure 3 and Figure 4 In some embodiments, the movable seat 1 is provided with a plurality of positioning seats 11 distributed in the left-right direction. The positioning seats 11 are provided with positioning grooves. The lower end of a support plate 21 of the shelf group 2 is inserted into a positioning groove, thereby realizing the positioning of the shelf group 2 so as to position and connect the shelf group 2 to the movable seat 1.

[0058] It should be noted that the inner space of the positioning groove has a square cross-section and an inner wall parallel to the front and back direction. The support plate 21 has a square cross-section and an outer side parallel to the front and back direction. The cross-section of the support plate 21 is adapted to the cross-section of the positioning groove. When the support plate 21 is inserted into the positioning groove, the support plate 21 cooperates with the positioning groove to limit the support plate 21 in the front and back and left and right directions, and can prevent the shelf group 2 from tilting to the left or right.

[0059] In another embodiment, instead of a positioning seat 11, multiple positioning slots distributed in the left-right direction are directly provided on the movable seat 1. The positioning slots can also be used to insert the lower end of the support plate 21 to limit the position of the support plate 21.

[0060] The lower end of the other support plate 21 on the shelf assembly 2 can be connected to the movable seat 1 by means of fasteners. Of course, the lower end of the other support plate 21 on the shelf assembly 2 can also be set on the movable seat 1 in an open manner, that is, the lower end surface of the other support plate 21 on the shelf assembly 2 directly abuts against the upper surface of the movable seat 1.

[0061] It is understandable that the shelf assembly 2 can rotate around the vertical axis of rotation, so that the two support plates 21 can be swapped front and back. The shelf assembly 2 can still be positioned on the moving seat 1 by inserting one of the support plates 21 into the positioning slot, and the shelf assembly 2 still has the original function of supporting and limiting the base plate 5.

[0062] The positioning seat 11 is detachably connected to the movable seat 1, such as by fastener connection, snap-fit ​​connection or sleeve connection, so that the position of the positioning seat 11 on the movable seat 1 is adjustable, thereby adjusting the position of the shelf group 2 on the movable seat 1, and further adjusting the spacing between two adjacent shelf groups 2, so that all shelf groups 2 can be inserted into the vacuum chamber of the vacuum plasma cleaner. There are multiple gaps formed between two adjacent electrode plate assemblies on the vacuum plasma cleaner, and all shelf groups 2 are located in multiple gaps, with each shelf group 2 and each gap corresponding to the other.

[0063] Reference Figure 1 and Figure 2 This utility model also discloses a loading and unloading system for loading substrates into a vacuum plasma cleaner. The loading and unloading system includes the aforementioned shelf and a trolley 3. The bottom of the trolley 3 is equipped with multiple rotating wheels 31, which allow the trolley 3 to be easily moved on the ground. The top of the trolley 3 is equipped with a first guide rail 32, and guide wheels are rolled on the first guide rail 32. The trolley 3 supports the movable seat 1 and multiple sets of shelf groups 2 on the movable seat 1 through the first guide rail 32 and the guide wheels, thereby easily transferring the substrates 5 carried on the shelf groups 2 without manual handling of the shelf. The guide wheels rotate on the first guide rail 32, which guides the movement of the guide wheels, thereby enabling the drive shelf to move directionally on the movable seat 1.

[0064] It is understandable that the first guide rail 32 is a straight plate, and the wheel surface of the guide wheel has an annular groove. The straight plate is inserted into the annular groove to achieve the function of guiding the guide wheel. Alternatively, the first guide rail 32 is a straight plate, and a strip groove is provided on the straight plate. The wheel surface of the guide wheel extends into the strip groove to achieve the function of guiding the guide wheel.

[0065] The trolley 3 is located outside the vacuum chamber of the vacuum plasma cleaner. When the shelf is on the trolley 3, the substrate 5 to be cleaned can be easily installed on the shelf assembly 2 or the cleaned substrate 5 can be removed from the shelf assembly 2. After the substrate 5 to be cleaned is placed on the shelf assembly 2, the trolley 3 can be driven to move towards the vacuum chamber, thus transporting the shelf and the substrate 5 on the shelf to the door of the vacuum chamber. When the shelf is removed from the vacuum chamber, the shelf and the substrate 5 on the shelf can be returned to the trolley 3, and the trolley 3 can then transport the shelf and the substrate 5 on the shelf out of the vacuum chamber.

[0066] Reference Figure 2 In some embodiments, the front end of the first guide rail 32 extends to the front of the trolley 3, and the front end of the first guide rail 32 is disposed at the first guide docking structure 321. The first guide docking structure 321 is used to cooperate with the second guide docking structure of the second guide rail disposed at the bottom of the vacuum chamber so that the first guide rail 32 docks with the second guide rail.

[0067] When the trolley 3 moves towards the vacuum chamber, the direction of movement of the trolley 3 is controlled so that the first guide docking structure 321 faces the second guide docking structure of the second guide rail at the bottom of the vacuum chamber. With the cooperation of the first guide docking structure 321 and the second guide docking structure, the direction of movement of the trolley 3 is corrected, so that the first guide rail 32 and the second guide rail can be docked. At this time, the moving seat 1 is pushed towards the vacuum chamber, and the guide wheel can roll from the first guide rail 32 to the second guide rail, so as to transfer the shelf into the vacuum chamber. The shelf group 2 and the gap are set one by one.

[0068] In some embodiments, one of the first guide docking structure 321 and the second guide docking structure is a conical hole and the other is a conical head. The conical head can be inserted into the conical hole to correct the direction of movement of the trolley 3, so that the first guide rail 32 is just docked with the second guide rail.

[0069] In this embodiment, the first guide docking structure 321 is a conical hole and the second guide docking structure is a conical head. This avoids the conical head being placed on the first guide rail 32, thereby preventing the conical head from accidentally damaging other components or scratching workers, and improving safety.

[0070] In another embodiment, the first guide docking structure 321 and the second guide docking structure can be a V-groove and a V-block, respectively, with the tip of the V-block able to be smoothly inserted into the V-groove.

[0071] The loading and unloading system can easily move the shelves to push them into or remove them from the vacuum chamber of the vacuum plasma cleaner, making loading and unloading of the vacuum plasma cleaner convenient and quick.

[0072] Reference Figure 1 or Figure 2 In this embodiment, the bottom of the movable seat 1 is provided with four guide wheels, which are distributed at the four corners of the movable seat 1. The trolley 3 is provided with two first guide rails 32 distributed from left to right, which extend in the front-back direction. Two guide wheels on the movable seat 1 are on the left first guide rail 32, and the other two guide wheels on the movable seat 1 are on the right first guide rail 32. The bottom of the trolley 3 is provided with four rotating wheels 31, which are distributed at the four corners of the trolley 3. The rotating wheels 31 can be universal wheels with self-locking function, which facilitates driving the trolley 3 to move in various directions. When the universal wheels are self-locking, they can prevent the trolley 3 from moving accidentally, especially when the first guide rail 32 and the second guide rail are connected. This ensures that the guide wheels can smoothly roll from the first guide rail 32 to the second guide rail. The shelf group 2 has three limiting plates 22, which and the connecting plate 23 can be used to limit the three-layer substrate 5.

[0073] The movable base 1 has a square frame structure. The movable base 1 includes a front base plate, a left base plate, a rear base plate, and a right base plate connected end-to-end. Two support plates 21 are connected to the front and rear base plates respectively, and both support plates 21 are vertically arranged. The front, left, rear, and right base plates can be separate or integrally formed structures. Four guide wheels are arranged in pairs on the left and right base plates.

[0074] Reference Figure 1 This utility model also discloses a vacuum plasma cleaner, including the above-mentioned loading and unloading system, and also includes a machine body 4. The machine body 4 is provided with a vacuum chamber, and the vacuum chamber is provided with a second guide rail. The guide wheel can roll onto the second guide rail so that the shelf and the substrate 5 on the shelf can be transferred between the trolley 3 and the vacuum chamber.

[0075] When the first guide rail 32 and the second guide rail are connected, the shelf on the trolley 3 can be driven to move towards the vacuum chamber and the second guide rail. The guide wheel rolls from the first guide rail 32 to the second guide rail, so that the shelf and the substrate 5 carried on the shelf are transferred from the trolley 3 to the vacuum chamber, or the shelf in the vacuum chamber can be driven to move towards the trolley 3, and the guide wheel rolls from the second guide rail to the first guide rail 32. This has the advantage of facilitating the transfer of the shelf and the substrate 5 carried on the shelf, which is to say, it is convenient to load and unload the vacuum plasma cleaner.

[0076] The shelf is suitable for substrates 5 of different sizes, offering strong versatility. It can hold or accommodate a larger number of substrates 5, maximizing the use of space on the shelf and in the vacuum chamber. The shelf facilitates transfer between the trolley 3 and the vacuum chamber, improving the convenience and efficiency of loading and unloading substrates 5, increasing the utilization rate of the vacuum plasma cleaner, and enhancing its cleaning efficiency. Other structural features of the vacuum plasma cleaner are existing technologies and will not be described redundantly or further limited here.

[0077] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0078] Of course, this utility model is not limited to the above-described embodiments. Those skilled in the art can make equivalent modifications or substitutions without departing from the spirit of this utility model. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. A shelf, characterized in that, include: The movable base (1) has multiple guide wheels at the bottom; Multiple shelf groups (2) are arranged in the left-right direction. Each shelf group (2) includes two support plates (21) and at least two limiting plates (22). The two support plates (21) are distributed on the movable seat (1) in the front-back direction. Both support plates (21) are provided with elongated through holes (211). The axial direction of the two elongated through holes (211) is extended in the front-back direction. The two elongated through holes (211) are coaxially arranged. The length of the elongated through holes (211) is extended in the up-down direction. Multiple first U-shaped grooves (212) and multiple second U-shaped grooves (213) are provided on the two opposite sides of the two support plates (21). The multiple first U-shaped grooves (212) and multiple second U-shaped grooves (213) are all extended in the left-right direction and their positions correspond one-to-one. The depth direction of all first U-shaped grooves (212) is extended in the front-back direction. The depth direction of all second U-shaped grooves (213) is inclined upward and is perpendicular to the left-right direction. The two ends of the limiting plate (22) are respectively inserted through the two elongated through holes (211). Both ends of the limiting plate (22) are provided with locking heads (221). Both locking heads (221) extend in the left-right direction. The distance between the two locking heads (221) is greater than the distance between the two opposite sides of the two supporting plates (21). One of the locking heads (221) can be inserted into a first U-shaped groove (212), and the other locking head (221) can be withdrawn from a second U-shaped groove (213) opposite to a first U-shaped groove (212). Alternatively, the two locking heads (221) can be inserted into the opposite first U-shaped groove (212) and second U-shaped groove (213) respectively. The upper end face and the lower end face of the limiting plate (22) are respectively provided with an upper limiting groove (222) and a lower limiting groove (223). Both the upper limiting groove (222) and the lower limiting groove (223) extend in the front-back direction.

2. The shelf according to claim 1, characterized in that, The shelf assembly (2) also includes a connecting plate (23), the two ends of which are respectively connected to the upper ends of the two support plates (21). The lower end face of the connecting plate (23) is provided with a top limiting groove (231) extending in the front-back direction. The two ends of the top limiting groove (231) are respectively connected to the two elongated through holes (211) on the two support plates (21).

3. The shelf according to claim 1, characterized in that, Multiple first U-shaped grooves (212) are provided on the left side wall of one of the elongated through holes (211), multiple second U-shaped grooves (213) are provided on the right side wall of the other elongated through hole (211), and two clips (221) are respectively provided on the left and right sides of the limiting plate (22).

4. The shelf according to claim 3, characterized in that, The limiting plate (22) has insertion holes on its left and right sides at both ends, and the two clips (221) are respectively inserted into the two insertion holes.

5. The shelf according to claim 1, characterized in that, Multiple first U-shaped grooves (212) and multiple second U-shaped grooves (213) are respectively provided on the left side wall of the two elongated through holes (211), or multiple first U-shaped grooves (212) and multiple second U-shaped grooves (213) are respectively provided on the right side wall of the two elongated through holes (211).

6. The shelf according to claim 1, characterized in that, The movable seat (1) is provided with a plurality of positioning seats (11) distributed in the left and right directions. The positioning seats (11) are provided with positioning grooves. The lower end of one of the support plates (21) of the shelf group (2) is inserted into one of the positioning grooves.

7. A loading and unloading system, characterized in that, The shelf as described in any one of claims 1 to 6 is further comprising a trolley (3), the bottom of which is provided with a plurality of wheels (31), and the top of which is provided with a first guide rail (32), the wheels of which are rotatably disposed on the first guide rail (32).

8. The loading and unloading system according to claim 7, characterized in that, The front end of the first guide rail (32) extends to the front of the trolley (3). The front end of the first guide rail (32) is located at the first guide docking structure (321). The first guide docking structure (321) is used to cooperate with the second guide docking structure of the second guide rail located at the bottom of the vacuum chamber so that the first guide rail (32) docks with the second guide rail.

9. The loading and unloading system according to claim 8, characterized in that, One of the first guide docking structure (321) and the second guide docking structure is a conical hole and the other is a conical head, the conical head being able to be inserted into the conical hole.

10. A vacuum plasma cleaner, characterized in that, The loading and unloading system as described in any one of claims 7 to 9 further includes a body (4) having a vacuum chamber and a second guide rail, wherein the guide wheel is capable of rolling onto the second guide rail to transfer the shelf and the substrate (5) on the shelf between the trolley (3) and the vacuum chamber.

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