Boron expanded tail gas treatment system

Abstract

The application relates to a boron diffusion tail gas treatment system, which comprises a boron diffusion device, a tail gas treatment device and at least two exhaust pipes, wherein the at least two exhaust pipes are arranged between the boron diffusion device and the tail gas treatment device, so that the boron diffusion device is communicated with the tail gas treatment device through the exhaust pipes. The boron diffusion tail gas treatment system comprises the at least two exhaust pipes, and in use, one exhaust pipe is selected to communicate the boron diffusion device with the tail gas treatment device. In this way, when one or more exhaust pipes are blocked, the unblocked exhaust pipe can be selected in time to replace the blocked exhaust pipe, and the system can be operated in time without waiting for the blocked exhaust pipe to be cleaned, that is, the exhaust pipe cleaning and the system operation can be simultaneously performed, the exhaust pipe cleaning no longer delays the normal operation of the system, the boron diffusion efficiency is ensured, and the system capacity is improved.

Description

Technical Field

[0001] This application relates to the field of exhaust gas treatment technology, specifically a boron diffuser exhaust gas treatment system. Background Technology

[0002] In the production of photovoltaic cells, a boron diffusion process is involved, which produces exhaust gas (containing boron). This exhaust gas usually needs to be discharged through an exhaust pipe.

[0003] In traditional technology, an exhaust pipe is connected between the boron diffusion furnace and the tail gas collection device. Since the tail gas from the boron diffusion furnace contains not only gaseous components but also solid components (such as boron oxide and borosilicate glass, which are white powders), as the diffusion process proceeds, a large amount of white powder will accumulate on the inner wall of the exhaust pipe, thus causing blockage of the exhaust pipe.

[0004] When the exhaust pipe becomes blocked, the equipment needs to be shut down and restarted only after the inner wall of the exhaust pipe has been cleaned. This will affect the boron expansion efficiency and production capacity. Utility Model Content

[0005] Therefore, it is necessary to provide a boron diffuser tail gas treatment system that can reduce the probability of equipment downtime and increase equipment capacity to address the above problems.

[0006] A boron diffuser tail gas treatment system, comprising:

[0007] Boron expansion equipment;

[0008] Exhaust gas treatment device;

[0009] At least two exhaust pipes are provided, one of which is located between the boron expansion equipment and the exhaust gas treatment device, such that the boron expansion equipment is connected to the exhaust gas treatment device through the exhaust pipes.

[0010] The aforementioned boron diffusion exhaust gas treatment system includes at least two exhaust pipes. During operation, one exhaust pipe is selected to connect the boron diffusion equipment and the exhaust gas treatment device. This allows for timely replacement of the blocked exhaust pipe with an unblocked one, eliminating the need for the blocked pipe to be cleaned before system operation. Exhaust pipe cleaning and system operation can be performed simultaneously, ensuring that exhaust pipe cleaning does not disrupt normal system operation, guaranteeing boron diffusion efficiency, and improving system productivity.

[0011] In one embodiment, the boron expansion exhaust gas treatment system includes two exhaust pipes, one of which is selectively located between the boron expansion equipment and the exhaust gas treatment device.

[0012] In one embodiment, each of the exhaust pipes is provided with a first connector, and the boron expansion device is provided with a second connector, the first connector and the second connector being screwed together.

[0013] In one embodiment, each exhaust pipe is provided with a plurality of first connectors, and a second connector is selectively connected to one of the first connectors of the exhaust pipe, and the other first connectors on the exhaust pipe are sealed by a first sealing member.

[0014] In one embodiment, one axial end of the exhaust pipe is connected to the exhaust gas treatment device, and the other axial end is sealed by a second sealing member.

[0015] The first connector is located on the outer circumferential surface of the exhaust pipe.

[0016] In one embodiment, the boron-expanded exhaust gas treatment system further includes a connector sleeved around the exhaust pipe and the exhaust gas treatment device, wherein the exhaust pipe is detachably connected to the exhaust gas treatment device via the connector.

[0017] In one embodiment, the connector includes a third connector and a fourth connector connected to each other, the third connector being screwed to the exhaust gas treatment device and the fourth connector being screwed to the exhaust pipe.

[0018] In one embodiment, a seal is provided between the connector and both the exhaust pipe and the exhaust gas treatment device.

[0019] In one embodiment, the exhaust pipe is made of a transparent material.

[0020] In one embodiment, the exhaust pipe is made of PP material. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a boron diffuser tail gas treatment system provided in an embodiment of this application.

[0022] Explanation of reference numerals in the attached figures:

[0023] 100. Boron expansion exhaust gas treatment system; 10. Boron expansion equipment; 11. Second connector; 12. Connecting pipe; 13. Equipment body; 20. Exhaust pipe; 21. First connector; 22. First sealing component; 23. Second sealing component; 30. Exhaust gas treatment device; 40. Connecting component; 41. Third connector; 42. Fourth connector. Detailed Implementation

[0024] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0025] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0026] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0027] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0028] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0029] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0030] See Figure 1 One embodiment of this application provides a boron diffusion tail gas treatment system 100 for treating tail gas generated during a boron diffusion process. The boron diffusion process involves forming a boron-doped layer on the surface of a silicon wafer to alter its electrical properties. Its core principle is to use high temperatures to diffuse boron atoms into the silicon wafer, forming a P-type semiconductor region, thereby modulating the electrical properties.

[0031] The boron diffusion exhaust gas treatment system 100 includes a boron diffusion device 10, an exhaust pipe 20, and an exhaust gas treatment device 30. The exhaust pipe 20 connects the boron diffusion device 10 and the exhaust gas treatment device 30. That is, the boron diffusion device 10 is connected to the exhaust gas treatment device 30 through the exhaust pipe 20. The boron diffusion process is completed in the boron diffusion device 10, and the exhaust gas generated by the boron diffusion process flows to the exhaust gas treatment device 30 through the exhaust pipe 20. The exhaust gas treatment device 30 can collect the exhaust gas, or it can not only collect the exhaust gas but also treat it in a timely manner (e.g., water-carrying gas can be introduced into the exhaust gas treatment device 30, the exhaust gas dissolves in water, and is discharged together with the water-carrying gas). This application does not limit the specific configuration of the boron diffusion device 10 and the exhaust gas treatment device 30; they can be selected according to needs.

[0032] Furthermore, the boron expansion exhaust gas treatment system 100 includes at least two exhaust pipes 20, with one of the exhaust pipes 20 selectively located between the boron expansion equipment 10 and the exhaust gas treatment device 30. That is, one exhaust pipe 20 can be selected from multiple exhaust pipes 20 to connect between the boron expansion equipment 10 and the exhaust gas treatment device 30, and the boron expansion equipment 10 is connected to the exhaust gas treatment device 30 through this exhaust pipe 20. Exhaust pipes 20 not connected between the boron expansion equipment 10 and the exhaust gas treatment device 30 are in a standby state.

[0033] It should be noted that, since at least two exhaust pipes 20 can be selectively located between the boron expansion equipment 10 and the exhaust gas treatment device 30, each exhaust pipe 20 is detachably connected to the boron expansion equipment 10 and the exhaust gas treatment device 30, so that one of the exhaust pipes 20 can be selected to connect the boron expansion equipment 10 and the exhaust gas treatment device 30.

[0034] The boron diffusion exhaust gas treatment system 100 provided in this application embodiment includes at least two exhaust pipes 20. In use, one exhaust pipe 20 is selected to connect the boron diffusion equipment 10 and the exhaust gas treatment device 30. Thus, when one or more exhaust pipes 20 become blocked, an unblocked exhaust pipe 20 can be selected to replace the blocked one. The system can operate immediately without waiting for the blocked exhaust pipe 20 to be cleaned, meaning that exhaust pipe 20 cleaning and system operation can be performed simultaneously. Cleaning the exhaust pipe 20 no longer delays the normal operation of the system, ensuring boron diffusion efficiency and improving system productivity.

[0035] In some embodiments, see further reference. Figure 1 The boron expansion exhaust gas treatment system 100 includes two exhaust pipes 20, one of which is selectively connected between the boron expansion equipment 10 and the exhaust gas treatment device 30. This configuration allows the two exhaust pipes 20 to be freely switched, ensuring timely system startup and operation while reducing the number of exhaust pipes 20, thus achieving cost savings.

[0036] It is conceivable that in some other embodiments, the number of exhaust pipes 20 included in the boron-expanded exhaust gas treatment system 100 is not limited. For example, the boron-expanded exhaust gas treatment system 100 may also include three or more exhaust pipes 20.

[0037] In some embodiments, see further reference. Figure 1 Each exhaust pipe 20 is provided with a first connector 21, and the boron expansion device 10 is provided with a second connector 11. The first connector 21 and the second connector 11 are screwed together. The screwing of the first connector 21 and the second connector 11 facilitates the connection and disassembly of the boron expansion device 10 and the exhaust pipe 20. Furthermore, the screwing method can also ensure the sealing of the first connector 21 and the second connector 11 after connection.

[0038] Specifically, the boron expansion equipment 10 includes an equipment body 13 and a connecting pipe 12. The connecting pipe 12 is connected to the equipment body 13, and the second connector 11 is connected to the connecting pipe 12.

[0039] Of course, in some other embodiments, the connecting pipe 12 may be omitted from the boron expansion device 10, in which case the second connector 11 is directly provided on the device body 13.

[0040] It is understood that in some other embodiments, the specific connection method of the first connector 21 and the second connector 11 is not limited. For example, the first connector 21 and the second connector 11 can also be connected by a snap-fit ​​method.

[0041] Furthermore, each exhaust pipe 20 is provided with multiple first connectors 21, and a second connector 11 is selectively connected to one of the first connectors 21 of the exhaust pipe 20. The other first connectors 21 on the exhaust pipe 20 are sealed by the first sealing member 22. The exhaust pipe 20 is provided with multiple first connectors 21, and the connection to a particular first connector 21 can be selected as needed according to the location or height of the boron expansion equipment 10, which improves the convenience of connection. Moreover, when one of the first connectors 21 is connected to the boron expansion equipment 10, the other first connectors 21 are sealed by the first sealing member 22, reducing the risk of exhaust gas leakage from the other first connectors 21.

[0042] Furthermore, one axial end of the exhaust pipe 20 is connected to the exhaust gas treatment device 30, and the other axial end is sealed by the second sealing member 23. The first connector 21 is located on the outer circumferential surface of the exhaust pipe 20. This arrangement facilitates the connection of the exhaust pipe 20 to the exhaust gas treatment device 30 via its axial end, and the outer circumferential surface is more conducive to the placement of the first connector 21 than the axial end face, thus simplifying manufacturing. Additionally, the second sealing member 23 can seal the end of the exhaust pipe 20 away from the exhaust gas treatment device 30, further reducing exhaust gas leakage.

[0043] In some embodiments, see further reference. Figure 1 The boron-expanded exhaust gas treatment system 100 also includes a connector 40, which is sleeved on the exhaust pipe 20 and the exhaust gas treatment device 30. The exhaust pipe 20 is detachably connected to the exhaust gas treatment device 30 through the connector 40. The connector 40 serves as an intermediate transition piece to facilitate the connection between the exhaust pipe 20 and the exhaust gas treatment device 30.

[0044] Furthermore, sealing elements are provided between the connector 40 and the exhaust pipe 20 and the exhaust gas treatment device 30 to ensure the sealing effect between the exhaust pipe 20 and the exhaust gas treatment device 30, reduce the risk of exhaust gas leakage between the exhaust pipe 20 and the exhaust gas treatment device 30, and ensure the exhaust gas treatment effect.

[0045] Furthermore, the connector 40 includes a third connector 41 and a fourth connector 42 that are connected to each other. The third connector 41 is screwed to the exhaust gas treatment device 30, and the fourth connector 42 is screwed to the exhaust pipe 20. This screwing connection facilitates connection between the exhaust pipe 20 and the connector 40, as well as between the exhaust gas treatment device 30 and the connector 40, thereby simplifying the connection between the exhaust pipe 20 and the exhaust gas treatment device 30. Additionally, the screwing connection also facilitates the disassembly of the exhaust pipe 20 and the exhaust gas treatment device 30, allowing for the replacement of a new exhaust pipe 20.

[0046] When the connector 40 includes a third connector 41 and a fourth connector 42 that are interconnected, a seal is provided between the third connector 41 and the exhaust gas treatment device 30, and a seal is provided between the fourth connector 42 and the exhaust pipe 20. Specifically, the seal is a sealant or similar material provided between the connector and the responding component.

[0047] It is conceivable that in some other embodiments, the boron-expanded exhaust gas treatment system 100 may omit the connector 40, and the exhaust pipe 20 may be directly connected to the exhaust gas treatment device 30. Furthermore, when the boron-expanded exhaust gas treatment system 100 includes the connector 40, the connector 40 may also be connected to the exhaust pipe 20 and the exhaust gas treatment device 30 in other ways, such as by a snap-fit ​​connection; this is not limited here.

[0048] In some embodiments, the exhaust pipe 20 is made of a transparent material. By using a transparent material, the blockage within the exhaust pipe 20 can be easily observed from the outside, preventing complete blockage from going undetected. Furthermore, the transparent material also facilitates observation of the cleanliness level of the exhaust pipe 20, ensuring it is thoroughly cleaned.

[0049] Specifically, the exhaust pipe 20 is made of PP material. Polypropylene (PP) is a semi-crystalline thermoplastic polymer made from propylene monomers through an addition polymerization reaction. It is usually a white, waxy solid, non-toxic, odorless, transparent in appearance, and lightweight in texture.

[0050] It is conceivable that in some other embodiments, the exhaust pipe 20 may also be made of other transparent materials, which are not limited here.

[0051] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0052] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A boron diffuser tail gas treatment system, characterized in that, include: Boron expansion equipment (10); Exhaust gas treatment device (30); At least two exhaust pipes (20) are selectively located between the boron expansion device (10) and the exhaust gas treatment device (30), such that the boron expansion device (10) is connected to the exhaust gas treatment device (30) through the exhaust pipes (20).

2. The boron diffuser tail gas treatment system according to claim 1, characterized in that, The boron expansion exhaust gas treatment system includes two exhaust pipes (20), one of which is disposed between the boron expansion equipment (10) and the exhaust gas treatment device (30).

3. The boron diffuser tail gas treatment system according to claim 1, characterized in that, Each of the exhaust pipes (20) is provided with a first connector (21), and the boron expansion device (10) is provided with a second connector (11), and the first connector (21) and the second connector (11) are screwed together.

4. The boron diffuser tail gas treatment system according to claim 3, characterized in that, Each of the exhaust pipes (20) is provided with a plurality of first connectors (21), and a second connector (11) is selectively connected to one of the first connectors (21) of the exhaust pipe (20), and the other first connectors (21) on the exhaust pipe (20) are blocked by a first sealing member (22).

5. The boron diffuser tail gas treatment system according to claim 3, characterized in that, One axial end of the exhaust pipe (20) is connected to the exhaust gas treatment device (30), and the other axial end is sealed by the second sealing member (23); The first connector (21) is located on the outer peripheral surface of the exhaust pipe (20).

6. The boron diffuser tail gas treatment system according to claim 1, characterized in that, The boron-expanded exhaust gas treatment system also includes a connector (40), which is sleeved on the exhaust pipe (20) and the exhaust gas treatment device (30). The exhaust pipe (20) is detachably connected to the exhaust gas treatment device (30) through the connector (40).

7. The boron diffuser tail gas treatment system according to claim 6, characterized in that, The connector (40) includes a third connector (41) and a fourth connector (42) connected to each other. The third connector (41) is screwed to the exhaust gas treatment device (30), and the fourth connector (42) is screwed to the exhaust pipe (20).

8. The boron diffuser tail gas treatment system according to claim 6, characterized in that, The connector (40) is provided with a seal between itself and the exhaust pipe (20) and the exhaust gas treatment device (30).

9. The boron diffuser tail gas treatment system according to any one of claims 1-8, characterized in that, The exhaust pipe (20) is made of a transparent material.

10. The boron diffuser tail gas treatment system according to claim 9, characterized in that, The exhaust pipe (20) is made of PP material.

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