A laser processing apparatus

Abstract

The utility model belongs to the field of laser processing technology, concretely relates to a kind of laser processing equipment, including laser, beam shaping device, facula detection device, horizontal moving device, work panel and be used to drive work panel and move lifting device along vertical direction, work panel is set in the below of beam shaping device, and processing area and non-processing area are provided on work panel, horizontal moving device is set in non-processing area, for driving facula detection device moves between processing area and non-processing area.This utility model moves facula detection device to the above of processing area before laser processing, adjusts the position of work panel to make the material to be processed to be in proper processing height after laser processing by lifting device, can greatly improve the efficiency and quality of laser processing.

Description

Technical Field

[0001] This utility model belongs to the field of laser processing technology, and specifically relates to a laser processing device. Background Technology

[0002] Before laser processing, the spot size is usually calibrated by manually adjusting the position of the CCD camera. This process is not only prone to introducing errors, but also time-consuming and inefficient. During laser processing, traditional Gaussian beams have the problem of excessively high energy at the center and insufficient energy at the edges, which can easily lead to defects such as uneven processing areas and material damage. Utility Model Content

[0003] In order to overcome the shortcomings of the existing technology, the purpose of this utility model is to provide a laser processing equipment that can at least solve some of the problems of the existing technology.

[0004] To achieve the above objectives, the technical solution of this utility model is a laser processing equipment, including a laser, a beam shaping device, a spot detection device, a horizontal moving device, a work panel, and a lifting device for driving the work panel to move vertically. The work panel is located below the beam shaping device, and the work panel is provided with a processing area and a non-processing area. The horizontal moving device is located in the non-processing area and is used to drive the spot detection device to move between the processing area and the non-processing area.

[0005] As one embodiment, the spot detection device includes a fixed plate and a CCD camera, the CCD camera being mounted on the fixed plate and the fixed plate being connected to the horizontal moving device.

[0006] As one embodiment, the fixed plate is also provided with a reflector mount, and the reflector mount is provided with a reflector for reflecting the beam shaped by the beam shaping device into the CCD camera.

[0007] As one embodiment, the horizontal moving device includes a horizontal track arranged in the horizontal direction, a horizontal slider slidably mounted on the horizontal track, and a horizontal driving member for driving the fixed plate to move in the horizontal direction. The horizontal slider and the horizontal driving member are both connected to the fixed plate.

[0008] As one embodiment, the beam shaping device includes a diffractive optical element and a galvanometer. Both the diffractive optical element and the galvanometer are disposed in the laser beam path of the laser, and the diffractive optical element is located between the laser and the galvanometer.

[0009] As one embodiment, the beam shaping device further includes a beam expander, which is disposed in the laser optical path between the laser and the diffractive optical device.

[0010] As one embodiment, the beam expander is an electrically operated variable magnification beam expander, including a housing, a first lens, a second lens, and a variable magnification drive for driving the second lens to move linearly along the laser beam path. The first lens and the variable magnification drive are both fixed on the housing, the second lens is connected to the variable magnification drive, and both the first lens and the second lens are disposed on the laser beam path of the laser.

[0011] As one embodiment, the first lens is arranged close to the laser, and the second lens is arranged close to the diffractive optical device, wherein the first lens is a concave lens and the second lens is a convex lens.

[0012] As one embodiment, the zoom drive component includes a zoom drive motor, a zoom lead screw, and a zoom lead screw nut mounted on the zoom lead screw. The output shaft of the zoom drive motor is connected to the zoom lead screw, and the zoom lead screw nut is connected to the second lens through an adapter plate.

[0013] As one embodiment, the beam shaping device further includes a field mirror, which is disposed in the laser exit of the galvanometer.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0015] (1) Before laser processing, the present invention moves the spot detection device to the top of the processing area by a horizontal moving device. The spot detection device is used to detect the laser spot after the beam shaping device is shaped. The beam shaping device can be adjusted according to the detection results to obtain a laser spot that meets the preset requirements, thus ensuring the quality of the laser processing spot. Then, the spot detection device is moved to the non-processing area by a horizontal moving device to avoid interference with the subsequent laser processing. The material to be processed is then placed in the processing area. The position of the working panel is adjusted by a lifting device to make the material to be processed at a suitable processing height before laser processing. This can greatly improve the efficiency and quality of laser processing.

[0016] (2) The beam shaping device of this utility model has a simple structure and is easy to use. It can convert the Gaussian beam emitted by the laser into a square flat-top beam, thereby achieving a more uniform energy distribution and significantly improving the processing quality and efficiency. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of the laser processing equipment provided in an embodiment of the present utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the laser processing equipment provided in an embodiment of the present utility model;

[0020] Figure 3 A square flat-top light spot pattern provided for an embodiment of this utility model;

[0021] In the diagram: 1. Laser; 2. Motorized zoom beam expander; 21. Housing; 22. First lens; 23. Second lens; 24. Zoom drive motor; 25. Zoom screw; 26. Zoom screw nut; 27. Adapter plate; 3. Diffractive optical components; 4. Galvanometer; 5. Field lens; 6. CCD camera; 7. Fixing plate; 8. Reflector mount; 9. Reflector; 10. Horizontal movement device; 11. Working panel; 12. Lifting slider; 13. Lifting rail; 14. Base; 15. Control device; 16. Computer. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0023] In the description of this utility model, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; in the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0025] like Figure 1 As shown, this embodiment provides a laser processing equipment, including a laser 1, a beam shaping device, a spot detection device, a horizontal moving device 10, a working panel 11, and a lifting device for moving the working panel 11 vertically. The working panel 11 is disposed below the beam shaping device, and the working panel 11 is provided with a processing area and a non-processing area. The horizontal moving device 10 is disposed in the non-processing area and is used to move the spot detection device between the processing area and the non-processing area. In this embodiment, before laser processing, the spot detection device is moved above the processing area by the horizontal moving device 10. The spot detection device is used to detect the laser spot shaped by the beam shaping device. The beam shaping device can be adjusted according to the detection results to obtain a laser spot that meets the preset requirements, ensuring the quality of the laser processing spot. Then, the spot detection device is moved to the non-processing area by the horizontal moving device 10 to avoid interference with subsequent laser processing. The material to be processed is then placed in the processing area, and the position of the work panel 11 is adjusted by the lifting device to ensure that the material to be processed is at a suitable processing height before laser processing. This can greatly improve the efficiency and quality of laser processing.

[0026] In some embodiments, the laser spot detection device includes a fixed plate 7 and a CCD camera 6. The CCD camera 6 is mounted on the fixed plate 7, and the fixed plate 7 is connected to the horizontal moving device 10. The horizontal moving device 10 moves the fixed plate 7 and the CCD camera 6 on the fixed plate 7 to the processing area. The CCD camera 6 performs imaging detection on the laser spot to obtain parameters such as the shape and size of the laser spot. After the laser spot is detected and adjusted, the horizontal moving device 10 moves the fixed plate 7 and the CCD camera 6 on the fixed plate 7 to a non-processing area, effectively preventing the laser spot detection device from being damaged during subsequent laser processing.

[0027] Furthermore, a reflector mount 8 is also provided on the fixing plate 7, and a reflector 9 is provided on the reflector mount 8 for reflecting the beam shaped by the beam shaping device into the CCD camera 6. Figure 1As shown, the reflector mount 8 has a 45° inclined surface, and the reflector 9 is set on the inclined surface. The laser beam shaped by the beam shaping device is vertically irradiated onto the reflector 9, and the reflector 9 reflects the laser beam. The reflected laser beam is then injected into the horizontally arranged CCD camera 6 in a horizontal direction.

[0028] In some embodiments, the horizontal moving device 10 includes a horizontal track arranged in a horizontal direction, a horizontal slider slidably mounted on the horizontal track, and a horizontal driving member for driving the fixed plate 7 to move in a horizontal direction. Both the horizontal slider and the horizontal driving member are connected to the fixed plate 7. The horizontal driving member drives the fixed plate 7 to move laterally or longitudinally, thereby moving the spot detection device between the processing area and the non-processing area. The horizontal slider, in cooperation with the horizontal track, reduces the friction and resistance experienced by the fixed plate 7 during movement, improving the smoothness and efficiency of the movement.

[0029] Furthermore, the horizontal drive component includes a horizontal motor, a horizontally arranged lead screw, and a lead screw nut mounted on the lead screw. The horizontal motor and the lead screw are mounted on the working panel 11. The output shaft of the horizontal motor is connected to the lead screw, and the lead screw nut is connected to the fixed plate 7. The horizontal motor drives the lead screw to rotate, causing the lead screw nut to move linearly in the horizontal or vertical direction, thereby causing the fixed plate 7 and the CCD camera and reflector 9 on the fixed plate 7 to move linearly in the horizontal or vertical direction, realizing the switching of the position of the spot detection device between the processing area and the non-processing area on the working panel 11.

[0030] In some embodiments, the beam shaping device includes a diffractive optical element 3 and a galvanometer 4. Both the diffractive optical element 3 and the galvanometer 4 are disposed in the laser beam path of the laser 1, with the diffractive optical element 3 located between the laser 1 and the galvanometer 4. Specifically, the diffractive optical element 3 is a component that controls the diffraction of light waves through a micro-nano structure. By utilizing the ingenious design of the microstructure, the incident light is diffracted and interfered according to predetermined rules, thereby achieving various control functions of the light field. The processing area on the working panel 11 is located within the irradiation range of the galvanometer 4. In this embodiment, the diffractive optical element 3 converts the Gaussian beam emitted by the laser 1 into a square flat-top beam, which can achieve a more uniform energy distribution and significantly improve processing quality and efficiency. The square flat-top beam irradiates the galvanometer 4, and by controlling the deflection angle of the galvanometer 4 in two axes, the square flat-top beam is controlled to process the material to be processed in the processing area according to the designed scanning path.

[0031] In some embodiments, the beam shaping device further includes a beam expander disposed in the laser optical path between the laser 1 and the diffractive optical device 3. In this embodiment, the beam expander expands the beam emitted by the laser 1, effectively reducing the beam divergence angle and improving the beam collimation, thus providing a high-quality input beam for further processing by the diffractive optical device 3.

[0032] Further, the beam expander is an electrically operated zoom beam expander 2, including a housing 21, a first lens 22, a second lens 23, and a zoom drive for driving the second lens 23 to move linearly along the laser beam path. The first lens 22 and the zoom drive are both fixed to the housing 21, the second lens 23 is connected to the zoom drive, and both the first lens 22 and the second lens 23 are disposed on the laser beam path of the laser 1. Figure 2 As shown, the first lens 22, the second lens 23 and the zoom drive are all disposed inside the housing 21, and the first lens 22 is fixed to the inner wall of the housing 21 by a bracket, and the second lens 23 is connected to the drive end of the zoom drive by a bracket.

[0033] In one embodiment, the first lens 22 is arranged close to the laser 1, and the second lens 23 is arranged close to the diffractive optical device 3. The first lens 22 is a concave lens, and the second lens 23 is a convex lens. Specifically, the first lens 22 is a plano-concave lens with its concave surface facing the laser 1; the second lens 23 is a plano-convex lens with its convex surface facing the diffractive optical device 3.

[0034] Furthermore, the zoom drive component includes a zoom drive motor 24, a zoom lead screw 25, and a zoom lead screw nut 26 mounted on the zoom lead screw 25. The output shaft of the zoom drive motor 24 is connected to the zoom lead screw 25, and the zoom lead screw nut 26 is connected to the second lens 23 via an adapter plate 27. Figure 2 As shown, the length direction of the zoom screw 25 is parallel to the laser beam path. One end of the adapter plate 27 is provided with a clearance hole. The adapter plate 27 is sleeved on the zoom screw 25 through the clearance hole and is fixedly connected to the zoom screw nut 26. There is a gap between the zoom screw 25 and the inner wall of the clearance hole. The other end of the adapter plate 27 is connected to the bracket of the second lens 23. The zoom drive motor 24 drives the zoom screw 25 to rotate, which drives the zoom screw nut 26 and the adapter plate 27 connected to the zoom screw nut 26 to move linearly along the length direction of the zoom screw 25. This causes the second lens 23 to move linearly in the laser beam path, which can adjust the distance between the second lens 23 and the first lens 22, thereby changing the beam expansion factor of the laser beam and obtaining the required expanded spot size.

[0035] In some embodiments, the beam shaping device further includes a field mirror 5 disposed in the laser exit of the galvanometer 4. For example... Figure 1 As shown, a field lens 5 is provided at the laser exit at the bottom of the galvanometer 4. The spot size is enlarged by the motorized zoom beam expander 2, converted by the diffraction optical device 3, and then focused by the field lens 5 onto the CCD camera 6 or the surface of the material to be processed.

[0036] Furthermore, a follow-up monitor is installed on the galvanometer 4. The follow-up monitor can monitor the laser processing process in real time, thereby effectively improving the accuracy and efficiency of laser processing.

[0037] In some embodiments, the lifting device includes a base 14, a lifting rail 13 arranged vertically on the base 14, a lifting slider 12 slidably mounted on the lifting rail 13, and a lifting drive component for driving the work panel 11 to move vertically. Both the lifting slider 12 and the lifting drive component are connected to the work panel 11. The lifting drive component drives the work panel 11 to move vertically, and the lifting slider 12, in cooperation with the lifting rail 13, ensures the linear movement of the work panel 11.

[0038] Furthermore, the lifting drive component includes a lifting motor, a lifting lead screw arranged vertically, and a lifting lead screw nut mounted on the lifting lead screw. The lifting motor and the lifting lead screw are mounted on the base 14. The output shaft of the lifting motor is connected to the lifting lead screw, and the lifting lead screw nut is connected to the work panel 11. The lifting motor drives the lifting lead screw to rotate, causing the lifting lead screw nut to move linearly in the vertical direction, thereby causing the work panel 11, the spot detection device on the work panel 11, and the material to be processed to move linearly in the vertical direction.

[0039] like Figure 1 As shown, the device in this embodiment also includes a control device 15. The lifting device, the horizontal moving device 10, the spot detection device, the galvanometer 4, the laser 1, and the beam expander are all electrically connected to the control device 15. The control device 15 controls the operation of the lifting device, the horizontal moving device 10, the spot detection device, the galvanometer 4, the laser 1, and the beam expander according to the actual situation.

[0040] Furthermore, the device in this embodiment also includes a computer 16, and the control device 15 is connected to the computer 16. Before laser processing, the image from the CCD camera 6 can be displayed on the computer 16; during laser processing, the laser 1 emits a laser beam, and the control device 15 controls the deflection of the galvanometer 4 to scan according to the path edited on the computer 16.

[0041] In this embodiment, the device is first moved to the processing area on the work panel 11 by the horizontal moving device 10. The laser 1 is then activated, and the generated laser beam is expanded by the beam expander and enters the diffractive optical device 3. The diffractive optical device 3 converts the laser beam into a square flat-top beam, which then enters the galvanometer 4 and exits. The square flat-top beam is reflected by the reflector 9 back into the CCD camera 6, forming a laser spot image that is displayed on the computer 16. The lifting device is then activated to adjust the vertical position of the CCD camera 6 and the reflector 9 until a laser spot of a preset size is formed. Figure 3 As shown, the CCD camera 6 and reflector 9 are moved to the non-processing area on the working panel 11 by the horizontal moving device 10. The material to be processed is placed in the processing area of ​​the working panel 11. The lifting device is activated to adjust the position of the material to be processed in the vertical direction, so that the square flat-top beam forms a laser spot of a preset size on the material. Under the continuous action of the laser beam, the galvanometer 4 processes the material according to the preset path, producing a uniform flat-top beam processing area. The method for generating the square flat-top beam in this embodiment is simple, the generated spot size is adjustable, and the conversion efficiency is high. It is especially suitable for laser processing, laser medical fields, etc., where spot uniformity is required, and can be widely applied to ultraviolet to near-infrared, continuous or pulsed laser processing.

[0042] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A laser processing device, characterized in that: The device includes a laser, a beam shaping device, a spot detection device, a horizontal moving device, a working panel, and a lifting device for moving the working panel vertically. The working panel is located below the beam shaping device and has a processing area and a non-processing area. The horizontal moving device is located in the non-processing area and is used to move the spot detection device between the processing area and the non-processing area.

2. The laser processing equipment as described in claim 1, characterized in that: The spot detection device includes a fixed plate and a CCD camera. The CCD camera is mounted on the fixed plate, and the fixed plate is connected to the horizontal moving device.

3. The laser processing equipment as described in claim 2, characterized in that: The mounting plate is also provided with a reflector mount, which is equipped with a reflector for reflecting the beam shaped by the beam shaping device into the CCD camera.

4. The laser processing equipment as described in claim 2, characterized in that: The horizontal moving device includes a horizontal track arranged in the horizontal direction, a horizontal slider slidably mounted on the horizontal track, and a horizontal driving member for driving the fixed plate to move in the horizontal direction. The horizontal slider and the horizontal driving member are both connected to the fixed plate.

5. The laser processing equipment as described in claim 1, characterized in that: The beam shaping device includes a diffractive optical element and a galvanometer. Both the diffractive optical element and the galvanometer are disposed in the laser beam path of the laser, and the diffractive optical element is located between the laser and the galvanometer.

6. The laser processing equipment as described in claim 5, characterized in that: The beam shaping device further includes a beam expander, which is disposed in the laser optical path between the laser and the diffractive optical device.

7. The laser processing equipment as described in claim 6, characterized in that: The beam expander is an electrically operated zoom beam expander, comprising a housing, a first lens, a second lens, and a zoom drive for driving the second lens to move linearly along the laser beam path. The first lens and the zoom drive are both fixed to the housing, the second lens is connected to the zoom drive, and both the first lens and the second lens are disposed on the laser beam path of the laser.

8. The laser processing equipment as described in claim 7, characterized in that: The first lens is positioned close to the laser, and the second lens is positioned close to the diffractive optical device. The first lens is a concave lens, and the second lens is a convex lens.

9. The laser processing equipment as described in claim 7, characterized in that: The zoom drive component includes a zoom drive motor, a zoom lead screw, and a zoom lead screw nut mounted on the zoom lead screw. The output shaft of the zoom drive motor is connected to the zoom lead screw, and the zoom lead screw nut is connected to the second lens through an adapter plate.

10. The laser processing equipment as described in claim 5, characterized in that: The beam shaping device also includes a field mirror, which is disposed in the laser exit of the galvanometer.

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