A fool-proof jig for semiconductor carrier handle mounting
By designing a foolproof fixture and utilizing a limit and foolproof stop block structure, the problem of incorrect wafer carrier handle installation was solved, enabling an efficient and accurate assembly process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHEJIANG SAIJIN SEMICON TECH CO LTD
- Filing Date
- 2025-06-18
- Publication Date
- 2026-07-21
AI Technical Summary
Existing wafer carriers are prone to incorrect installation of handles, leading to confusion in orientation during handling and loading, which affects efficiency.
Design a foolproof fixture, including a fixture base plate, a positioning component and a foolproof stop block. The limit block and the positioning block ensure the correct orientation of the carrier, and the foolproof stop block prevents incorrect installation.
It improves the assembly efficiency and accuracy of semiconductor carriers, ensuring that handles are installed quickly and in the correct orientation.
Smart Images
Figure CN224527027U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a foolproof fixture for mounting handles on semiconductor carriers. Background Technology
[0002] A wafer carrier, also known as a wafer cassette, is a type of semiconductor carrier. It is a precision-designed device specifically for holding semiconductor wafers and plays a crucial role in semiconductor production. It is primarily used to place and transport wafers, simplifying the wafer transport process, reducing the risk of wafer contamination, and ensuring the smooth flow of wafers between different production stages.
[0003] Current wafer carriers consist of an internal wafer storage box into which multiple wafers are inserted. To prevent the wafers from slipping out, a support frame is typically installed on the inner wall of the wafer carrier. The relevant structure and function are described in detail in the Chinese invention patent application CN119673833B, "Wafer Box with Protective Limiting Device". Therefore, when placing and handling wafer carriers, attention should be paid to the orientation of the carrier to avoid damaging the wafers.
[0004] In the conventional wafer carrier installation process, fasteners are used to install handles onto the carrier. If the handles on both sides are installed backwards or the two handles on the left and right are installed as the same, it will cause errors in orientation when handling and loading the carrier. Since the wafer carrier housing is made of opaque material, if the position of the support frame is checked by flipping it over every time the handle is installed, the installation efficiency of the handle will be poor. Therefore, it is necessary to design a foolproof fixture that facilitates the installation of carrier handles. Summary of the Invention
[0005] In view of this, the present invention provides a foolproof fixture for mounting handles on semiconductor carriers to solve the above-mentioned technical problems.
[0006] A foolproof fixture for mounting handles on a semiconductor carrier includes a fixture base plate, a positioning assembly disposed on the fixture base plate, and two foolproof abutment blocks disposed on the fixture base plate. The semiconductor carrier includes a carrier body, an abutment frame disposed inside the carrier body, and two handles disposed on both sides of the carrier body. The two handles are symmetrically disposed on both sides of the carrier body, exhibiting axial symmetry about the abutment frame. Each handle includes a gripping hole and an abutment plate disposed at the edge of the gripping hole. In the vertical direction of the line connecting the two handles, the gripping hole is located on the side away from the abutment frame, and the abutment plate is located on the side closer to the abutment frame, with the gripping holes and abutment plates on both sides aligned on the same straight line. The positioning assembly includes four limiting blocks disposed on the fixture base plate and a positioning block disposed between the limiting blocks. The positioning block is located between two of the limiting blocks and inside the rectangular structure formed by the positioning blocks, and the height of the positioning block is greater than the distance between the abutment frame and the fixture base plate. One end of the foolproof abutment block is vertically fixed to the fixture base plate, and the other end extends vertically upwards freely, with the length from the fixed end to the free end of the foolproof abutment block being greater than the distance from the handle to the fixture base plate. The foolproof abutment blocks are located on both sides of the positioning block and correspond to the position of the gripping hole when the semiconductor carrier is located within the limiting blocks.
[0007] Furthermore, the abutment frame is disposed inside the cavity of the vehicle body and fixed on one inner wall of the vehicle body.
[0008] Furthermore, the gripping hole is an opening formed between the handle and the vehicle body, and the direction of the opening is consistent with the opening direction of the receiving cavity of the vehicle body.
[0009] Furthermore, the abutment plate is disposed at the edge of the gripping hole and located on the edge near the receiving cavity opening of the vehicle body.
[0010] Furthermore, the base plate of the fixture is a rectangular plate structure, made of one or more materials selected from plastic, metal or alloy.
[0011] Furthermore, the four limiting blocks are all L-shaped protrusions fixed on the base plate of the fixture, and they surround each other to form a rectangular structure, and the rectangular part formed is consistent with the shape and size of the opening of the main body of the carrier.
[0012] Furthermore, the top of the limiting block, away from the base plate of the fixture, is also provided with an arc-shaped guide portion.
[0013] Furthermore, the anti-fooling block is located at the edge of the rectangular structure enclosed by the limiting blocks.
[0014] Compared with existing technologies, the foolproof fixture for installing semiconductor carrier handles provided by this utility model, by setting the positioning component, ensures that the position of the semiconductor carrier is limited by the limiting block when placed on the fixture. Simultaneously, by setting the positioning block, it abuts against the abutment frame when the semiconductor carrier is placed in the wrong direction, thus preventing foolproof installation and facilitating confirmation of the semiconductor carrier's orientation. By setting the foolproof abutment block, the handle must be installed in the correct position for the abutment block to pass through the gripping hole, thereby achieving rapid handle installation and effectively improving the assembly efficiency and accuracy of the semiconductor carrier. Attached Figure Description
[0015] Figure 1 This is a front view of a storage machine for a foolproof fixture for mounting a handle on a semiconductor carrier, which is provided by this utility model.
[0016] Figure 2 for Figure 1 A schematic diagram of the foolproof fixture used for mounting the handle of a semiconductor carrier during the loading of the semiconductor carrier.
[0017] Figure 3 for Figure 1 A schematic diagram of the structure of the semiconductor carrier mounted on the foolproof fixture used for mounting the handle of the semiconductor carrier.
[0018] Figure 4 for Figure 1 A front view of the foolproof fixture used for mounting the handle of a semiconductor carrier during the loading of the semiconductor carrier.
[0019] Figure 5 for Figure 4 A cross-sectional schematic diagram of a foolproof fixture for mounting handles on semiconductor carriers, shown in section AA. Detailed Implementation
[0020] The specific embodiments of this utility model are described in further detail below. It should be understood that the description of the embodiments of this utility model herein is not intended to limit the scope of protection of this utility model.
[0021] like Figures 1 to 5The diagram shows a schematic representation of the foolproof fixture for mounting a semiconductor carrier handle provided by this invention. The foolproof fixture includes a fixture base plate 10, a positioning component 20 disposed on the fixture base plate 10, and two foolproof abutment blocks 30 disposed on the fixture base plate 10. It is conceivable that the foolproof fixture for mounting a semiconductor carrier handle may also include other functional modules such as fasteners, lifting handles, etc., which are technologies known to those skilled in the art and will not be described in detail here.
[0022] It should be noted that, as Figure 3 The diagram shows a schematic of a semiconductor carrier 40 placed on the foolproof fixture for mounting the semiconductor carrier handles. The semiconductor carrier 40 includes a carrier body 41, a support frame 42 disposed inside the carrier body 41, and two handles 43 disposed on both sides of the carrier body 41.
[0023] The carrier body 41 is a rectangular box-shaped structure with an opening on one side to house a wafer storage box inside.
[0024] The abutment frame 42 is disposed inside the cavity of the carrier body 41 and fixed on one inner wall of the carrier body 41 to abut against the wafer storage cassette placed inside the carrier body 41.
[0025] Two handles 43 are symmetrically arranged on both sides of the carrier body 41 and fixed to the outer side wall of the carrier body 41 by fasteners, and are axially symmetrical about the abutment frame 42. Each handle 43 includes a gripping hole 431 and an abutment plate 432 disposed at the edge of the gripping hole 431. The gripping hole 431 is an opening formed between the handle 43 and the carrier body 41, and its opening direction is consistent with the opening direction of the receiving cavity of the carrier body 41, which facilitates the operator's gripping. The abutment plate 432 is disposed at the edge of the gripping hole 431, specifically, on the edge near the opening of the receiving cavity of the carrier body 41, so that the overhead crane or robotic arm can clamp the semiconductor carrier 40 from both sides. In the vertical direction of the line connecting the two handles 43, the gripping hole 431 is located on the side away from the top support 42, while the top support plate 432 is located on the other side closer to the top support 42. The gripping holes 431 and the top support plate 432 on both sides are on the same straight line. This makes it easy to identify the orientation of the semiconductor carrier 40 by gripping the handle 43, such as aligning the top support 42 with the opening of the wafer storage cassette placed in the cavity of the semiconductor carrier 40 during use.
[0026] The fixture base plate 10 can be a rectangular plate structure to serve as a carrier for the fixture, supporting the positioning component 20 and the anti-foolproof stop block 30. The fixture base plate 10 can be made of stable materials such as plastic, metal, or alloy, depending on the actual needs of the product, and no specific restrictions are imposed here.
[0027] The positioning component 20 includes four limiting blocks 21 disposed on the fixture base plate 10, and a positioning block 22 disposed between the limiting blocks 21.
[0028] The four limiting blocks 21 are all L-shaped protrusions fixed to the fixture base plate 10, and they surround each other to form a rectangular structure. The rectangular portion formed is consistent with the shape and size of the opening of the carrier body 41, so that when the carrier body 41 is upside down on the fixture base plate 10, it is limited by the limiting blocks 21 and will not move horizontally along the surface of the fixture base plate 10. The top of the limiting block 21 away from the fixture base plate 10 is also provided with an arc-shaped guide, which facilitates the insertion of the semiconductor carrier 40 into the four limiting blocks 21.
[0029] The positioning block 22 is located between two of the limiting blocks 21 and inside the rectangular structure enclosed by the positioning blocks 22. The height of the positioning block 22 is greater than the distance between the abutment frame 42 and the fixture base plate 10. This ensures that when the semiconductor carrier 40 is placed on the fixture base plate 10, the abutment frame 42 and the positioning block 22 must not be on the same side to be placed between the four limiting blocks 21. If the abutment frame 42 and the positioning block 22 are on the same side, they will abut and cannot be placed. This ensures that the orientation of the semiconductor carrier 40 placed on the fixture base plate 10 is determined.
[0030] The anti-misalignment blocks 30 are two abutment structures disposed on the fixture base plate 10. They can be rod-shaped or plate-shaped, with one end vertically fixed to the fixture base plate 10 and the other end extending vertically upwards freely. The length from the fixed end to the free end of the anti-misalignment block 30 is greater than the distance from the handle 43 to the fixture base plate 10. The anti-misalignment blocks 30 are located at the edge of the rectangular structure enclosed by the limiting blocks 21, so that when the semiconductor carrier 40 is located within the limiting blocks 21, the anti-misalignment blocks 30 are against the outer wall of the carrier body 41. The foolproof abutment block 30 is located on both sides of the positioning block 22, and corresponds to the position of the gripping hole 431 when the semiconductor carrier 40 is located inside the limiting block 21. This allows the foolproof abutment block 30 to pass through the gripping hole 431 when the handle 43 is installed correctly. If the installation is incorrect, the foolproof abutment block 30 will abut against the abutment plate 432, thereby achieving foolproof and quick handle installation.
[0031] Compared with the prior art, the foolproof fixture for installing semiconductor carrier handles provided by this utility model, by setting the positioning component 20, ensures that the position of the semiconductor carrier 40 is limited by the limiting block 21 when placed on the fixture. Simultaneously, by setting the positioning block 22, it abuts against the abutment frame 42 when the semiconductor carrier 40 is placed in the wrong direction, thus preventing foolproof installation and facilitating confirmation of the orientation of the semiconductor carrier 40. By setting the foolproof abutment block 30, the handle 43 can only be installed in the correct position if the foolproof abutment block 30 passes through the gripping hole 431, thereby achieving rapid installation of the handle 43 and effectively improving the assembly efficiency and accuracy of the semiconductor carrier.
[0032] The above are merely preferred embodiments of the present utility model and are not intended to limit the scope of protection of the present utility model. Any modifications, equivalent substitutions or improvements within the spirit of the present utility model are covered within the scope of the claims of the present utility model.
Claims
1. A foolproof fixture for mounting handles on semiconductor carriers, characterized in that: The foolproof fixture for mounting handles on a semiconductor carrier includes a fixture base plate, a positioning component disposed on the fixture base plate, and two foolproof abutment blocks disposed on the fixture base plate. The semiconductor carrier includes a carrier body, an abutment frame disposed inside the carrier body, and two handles disposed on both sides of the carrier body. The two handles are symmetrically disposed on both sides of the carrier body, exhibiting axial symmetry about the abutment frame. Each handle includes a gripping hole and an abutment plate disposed at the edge of the gripping hole. In the vertical direction of the line connecting the two handles, the gripping hole is located on the side away from the abutment frame, and the abutment plate is located on the side closer to the abutment frame. The gripping hole and the abutment plate are both on the same straight line. The positioning component includes four limiting blocks disposed on the base plate of the fixture, and a positioning block disposed between the limiting blocks. The positioning block is located between two of the limiting blocks and inside the rectangular structure enclosed by the positioning blocks. The height of the positioning block is greater than the distance between the abutment frame and the base plate of the fixture. One end of the foolproof abutment block is vertically fixed to the base plate of the fixture, and the other end extends vertically upward freely. The length from the fixed end to the free end of the foolproof abutment block is greater than the distance from the handle to the base plate of the fixture. The foolproof abutment block is located on both sides of the positioning block and corresponds to the position of the gripping hole when the semiconductor carrier is located inside the limiting block.
2. The foolproof fixture for mounting a semiconductor carrier handle as described in claim 1, characterized in that: The abutment frame is disposed inside the cavity of the vehicle body and fixed on one inner wall of the vehicle body.
3. The foolproof fixture for mounting a semiconductor carrier handle as described in claim 1, characterized in that: The gripping hole is an opening formed between the handle and the vehicle body, and the direction of the opening is consistent with the opening direction of the receiving cavity of the vehicle body.
4. The foolproof fixture for mounting a semiconductor carrier handle as described in claim 1, characterized in that: The abutment plate is disposed at the edge of the gripping hole and located on the edge near the opening of the receiving cavity of the vehicle body.
5. The foolproof fixture for mounting a semiconductor carrier handle as described in claim 1, characterized in that: The fixture base plate is a rectangular plate structure made of one or more materials selected from plastic, metal, or alloy.
6. The foolproof fixture for mounting a semiconductor carrier handle as described in claim 1, characterized in that: The four limiting blocks are all L-shaped protrusions fixed on the base plate of the fixture, and they surround each other to form a rectangular structure, and the rectangular part formed is consistent with the shape and size of the opening of the main body of the carrier.
7. The foolproof fixture for mounting a semiconductor carrier handle as described in claim 1, characterized in that: The top of the limiting block, away from the base plate of the fixture, is also provided with an arc-shaped guide.
8. The foolproof fixture for mounting a semiconductor carrier handle as described in claim 6, characterized in that: The anti-fouling stop block is located at the edge of the rectangular structure enclosed by the limiting blocks.