Photoresist wrench

Abstract

The utility model relates to a photoresist wrench relates to the technical field of semiconductor preparation, this photoresist wrench includes handle stem and wrench head, the first opening of wrench head includes first clamping groove and second clamping groove, wherein, first clamping groove is used for clamping photoresist bottle cap, and second clamping groove is used for clamping photoresist lock head, because photoresist bottle cap is less than photoresist lock head, so the maximum opening width of first clamping groove is designed less than the minimum opening width of second clamping groove, like this can make the clamping of first clamping groove and second clamping groove more closely, increase the use convenient degree of photoresist wrench. Design first clamping groove and second clamping groove can more easily clamping photoresist lock head, increase the speed of operation.

Description

Technical Field

[0001] This application relates to the field of semiconductor fabrication technology, and in particular to a photoresist wrench. Background Technology

[0002] In the field of semiconductor fabrication technology, the photoresist coating and development stage involves photoresist coating, and the photoresist is stored in a photoresist bottle.

[0003] The photoresist bottle cap is a crucial component of the photoresist bottle, and its design must ensure excellent sealing to prevent oxidation and deterioration of the photoresist upon contact with air. A photoresist locking mechanism on the cap effectively ensures a tight seal between the cap and the bottle. However, when adding photoresist to the bottle, the connection between the locking mechanism and the cap requires technicians to manually tighten the cap, which is time-consuming and laborious. Furthermore, manually tightening the cap necessitates leaving the photoresist replacement area, posing a safety hazard such as the cap falling off.

[0004] Therefore, how to more quickly and conveniently unscrew the photoresist bottle cap with the photoresist lock has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] Therefore, it is necessary to provide a solution to the above problems.

[0006] To achieve the above objectives, this utility model provides a light-blocking wrench, comprising:

[0007] Handle lever and wrench head;

[0008] The wrench head has a first opening, and the first opening includes a first slot and a second slot, with the first slot located between the handle and the second slot.

[0009] The maximum opening width of the first card slot is less than the minimum opening width of the second card slot.

[0010] In one embodiment, the second slot includes a first plane, a second plane, a third plane, and a fourth plane. The first plane is parallel to the second plane and parallel to the extension direction of the handle rod. The first plane is perpendicularly connected to the third plane on the side facing the second plane, and the second plane is perpendicularly connected to the fourth plane on the side facing the first plane.

[0011] In one embodiment, the first card slot has a first angle with the third plane and a second angle with the fourth plane, the first angle being in the range of 90 degrees to 120 degrees and the second angle being in the range of 90 degrees to 120 degrees.

[0012] In one embodiment, the first included angle is the same as the second included angle.

[0013] In one embodiment, the first slot is shaped like a trumpet or an arc.

[0014] In one embodiment, the first slot includes a first sub-plane, a second sub-plane, and a third sub-plane, wherein the first sub-plane and the second sub-plane are located on both sides of the third sub-plane in a direction perpendicular to the extension direction of the handle rod;

[0015] The first subplane is connected to the third plane, and the included angle between the first subplane and the third plane is the first included angle.

[0016] The second subplane is connected to the fourth plane, and the included angle between the second subplane and the fourth plane is the second included angle;

[0017] The third sub-plane is parallel to the third plane, and in the extension direction of the handle rod, the third sub-plane is located between the third plane and the handle rod.

[0018] In one embodiment, the handle and the wrench head are an integral structure.

[0019] In one embodiment, the height of the first slot is less than the height of the second slot in the extension direction of the handle rod.

[0020] In one embodiment, the maximum opening width of the first slot ranges from 70mm to 80mm.

[0021] In one embodiment, the opening width of the second slot is 110mm-120mm.

[0022] Compared with existing technologies, the above technical solution has the following advantages:

[0023] This photoresist wrench includes a handle and a wrench head. The wrench head has a first opening containing a first slot and a second slot. The first slot engages the photoresist bottle cap, and the second slot engages the photoresist locking head. Because the photoresist bottle cap is smaller than the photoresist locking head, the maximum opening width of the first slot is designed to be smaller than the minimum opening width of the second slot. This allows for a tighter engagement between the first and second slots, increasing the ease of use of the photoresist wrench. The design of the first and second slots also makes it easier to engage the photoresist locking head, increasing the speed of operation. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This application provides a schematic diagram of the structure of a photoresist wrench according to an embodiment of the present application;

[0026] Figure 2 This application provides a three-dimensional structural schematic diagram of a photoresist wrench according to an embodiment of the present application;

[0027] Figure 3 This application provides a schematic diagram of the structure of the wrench head of a photoresist wrench according to an embodiment of the present application;

[0028] Figures 4-6 This is a schematic diagram showing the dimensions of a photoresist wrench provided in an embodiment of this application.

[0029] Explanation of reference numerals in the attached drawings: 01-Handle lever; 02-Wrench head; 03-First slot; 04-Second slot; 05-Optical lock head; 05a-First lock head; 05b-Second lock head; 041-First plane; 042-Second plane; 043-Third plane; 044-Fourth plane; α1-First included angle; α2-Second included angle; 031-First sub-plane; 032-Second sub-plane; 033-Third sub-plane. Detailed Implementation

[0030] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0032] It should be understood that when a layer is referred to as "on," "adjacent to," or "connected to" other layers, it can be directly on, adjacent to, or connected to other layers, or there can be intervening layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," or "directly connected to" other layers, there are no intervening layers.

[0033] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising,” “including,” or “having,” etc., specify the presence of the stated feature, whole, step, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof.

[0034] To make the objectives, features and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0035] refer to Figure 1 , Figure 1 This application provides a schematic diagram of the structure of a photoresist wrench according to an embodiment; see reference. Figure 2 , Figure 2 This application provides a three-dimensional structural schematic diagram of a photoresist wrench according to an embodiment; the photoresist wrench includes:

[0036] Handle lever 01 and wrench head 02;

[0037] The wrench head 02 has a first opening, which includes a first slot 03 and a second slot 04. The first slot 03 is located between the handle 01 and the second slot 04.

[0038] The maximum opening width L of the first card slot 03 is less than the minimum opening width K of the second card slot 04.

[0039] Specifically, the photoresist wrench is used to open the photoresist bottle. The handle 01 provides leverage to the wrench head 02, which engages the photoresist bottle cap and the photoresist lock head 05 at the bottle opening. The photoresist lock head 05 is connected to the photoresist bottle cap by screws. The photoresist lock head 05 includes a first lock head 05a and a second lock head 05b. The first lock head 05a overlaps with the photoresist bottle cap, and the second lock head 05b is located on both sides of the photoresist bottle cap, forming a... Figure 2 The shape shown.

[0040] The photoresist wrench has a first opening, which allows for quick engagement of the photoresist bottle and facilitates operation. The first opening contains a first slot 03 and a second slot 04, with the first slot 03 located between the second slot 04 and the handle rod 01. The first slot 03 is used to engage the photoresist bottle cap, and the second slot 04 is used to engage the photoresist locking head 05.

[0041] Since the second locking head 05b of the photoresist lock head 05 is located on both sides of the photoresist bottle cap, the opening width of the second groove is designed to be larger, and the maximum opening width L of the first slot 03 is set to be smaller than the minimum opening width K of the second slot 04. This can better achieve the engagement of the photoresist bottle cap and the photoresist lock head 05.

[0042] In this embodiment, since the photoresist bottle cap is smaller than the photoresist lock head 05, the maximum opening width L of the first slot 03 is designed to be smaller than the minimum opening width K of the second slot 04. This allows the first slot 03 and the second slot 04 to engage more tightly, increasing the ease of use of the photoresist wrench. Designing the first slot 03 and the second slot 04 also makes it easier to engage the photoresist lock head 05, increasing the speed of operation.

[0043] In another embodiment of this application, such as Figure 1 As shown, the second slot 04 includes a first plane 041, a second plane 042, a third plane 043, and a fourth plane 044. The first plane 041 is parallel to the second plane 042 and parallel to the extension direction of the handle rod 01. The first plane 041 is perpendicularly connected to the third plane 043 on the side facing the second plane 042, and the second plane 042 is perpendicularly connected to the fourth plane 044 on the side facing the first plane 041.

[0044] Specifically, the second slot 04 is used to engage the second lock head 05b of the photoresist lock head 05. The first plane 041 is perpendicularly connected to the third plane 043, and the second plane 042 is perpendicularly connected to the fourth plane 044. The first plane 041 and the third plane 043 engage one side of the second lock head 05b, while the second plane 042 and the fourth plane 044 engage the other side of the second lock head 05b. Since the first plane 041 and the second plane 042 are parallel and parallel to the extension direction of the handle rod 01, a seamless engagement of the photoresist lock head 05 can be achieved. Figure 2 As shown.

[0045] In this embodiment, the second slot 04 can seamlessly engage with the photoresist lock head 05, making it easier to open the photoresist bottle. Furthermore, the first plane 041 and the second plane 042 are parallel to each other and parallel to the extension direction of the handle rod 01, making the photoresist wrench easier to use.

[0046] In another embodiment of this application, reference is made to Figure 3 , Figure 3 This application provides a schematic diagram of the structure of the wrench head of a photoresist wrench; a first included angle α1 is formed between the first slot 03 and the third plane 043, and a second included angle α2 is formed between the first slot 03 and the fourth plane 044. The range of the first included angle α1 is 90 degrees to 120 degrees, and the range of the second included angle α2 is 90 degrees to 120 degrees.

[0047] Specifically, one side of the first slot 03 is connected to the third plane 043, and the other side of the first slot 03 is connected to the fourth plane 044. Since the first locking head 05 overlaps with the photoresist bottle cap and the second locking head 05b is located on both sides of the photoresist bottle cap when locking the photoresist bottle cap, some areas of the photoresist bottle cap also need to be engaged.

[0048] The first included angle α1 between the first slot 03 and the third plane 043 can range from 90 degrees to 120 degrees, including the endpoint values. For example, the first included angle α1 can be 90 degrees, 100 degrees, or 110 degrees, etc. The second included angle α2 between the first slot 03 and the fourth plane 044 can range from 90 degrees to 120 degrees, including the endpoint values. For example, the second included angle α2 can be 95 degrees, 100 degrees, or 120 degrees, etc.

[0049] In this embodiment, the first included angle α1 and the second included angle α2 can be set according to the shape of the photoresist bottle cap, and are not specifically limited. Setting the angle allows the first slot 03 to engage more tightly with the photoresist bottle cap, reducing the difficulty of operation.

[0050] In another embodiment of this application, the first included angle α1 is the same as the second included angle α2.

[0051] Specifically, the first included angle α1 and the second included angle α2 can be the same. For example, when the photoresist bottle cap is a regular polygon, the tilt angles of the first slot 03 and the third plane 043 and the first slot 03 and the fourth plane 044 are exactly the same.

[0052] In this embodiment, having the same first included angle α1 and the same second included angle α2 makes the fabrication of the photoresist wrench simpler.

[0053] In another embodiment of this application, the first slot 03 is shaped like a trumpet or an arc.

[0054] Specifically, when the photoresist bottle cap is polygonal, the shape of the first slot 03 can be trumpet-shaped; when the photoresist bottle cap is circular, the shape of the first slot 03 can be arc-shaped; of course, when the photoresist bottle cap is polygonal, if the first groove can accommodate the photoresist bottle cap, the shape of the first slot 03 can also be arc-shaped, without specific limitations, and can be designed according to specific needs.

[0055] In another embodiment of this application, such as Figure 3 As shown, the first slot 03 includes a first sub-plane 031, a second sub-plane 032 and a third sub-plane 033. In the direction perpendicular to the extension direction of the handle rod 01, the first sub-plane 031 and the second sub-plane 032 are located on both sides of the third sub-plane 033.

[0056] The first subplane 031 is connected to the third plane 043, and the included angle between the first subplane 031 and the third plane 043 is the first included angle α1;

[0057] The second subplane 032 is connected to the fourth plane 044, and the included angle between the second subplane 032 and the fourth plane 044 is the second included angle α2.

[0058] The third subplane 033 is parallel to the third plane 043, and in the extension direction of the handle rod 01, the third subplane 033 is located between the third plane 043 and the handle rod 01.

[0059] Specifically, the first slot 03 may include a first sub-plane 031, a second sub-plane 032, and a third sub-plane 033. The second sub-plane 032 connects the first sub-plane 031 and the third sub-plane 033, and the third sub-plane 033 is parallel to the third plane 043. At this time, the photoresist bottle cap is octagonal in shape, and the second locking head 05b of the photoresist lock head 05 is located on opposite sides of the regular octagon. The photoresist bottle cap and the first locking head 05a will have three sides that engage with the first sub-plane 031, the second sub-plane 032, and the third sub-plane 033 respectively, making operation easier.

[0060] In another embodiment of this application, the handle lever 01 and the wrench head 02 are an integral structure.

[0061] Specifically, the material of the optical resist wrench can be polyvinylidene fluoride (PVDF), and it can be manufactured using a one-piece molding method. The one-piece handle 01 and wrench head 02 have higher mechanical stability.

[0062] In another embodiment of this application, the height of the first slot 03 is less than the height of the second slot 04 in the extending direction of the handle rod 01.

[0063] Specifically, since the first slot 03 is used to place or engage the photoresist bottle cap, its engagement height is lower than that of the photoresist lock head 05 in the second slot 04. It should be noted that the height of the second slot 04 is greater than that of the first slot 03, which ensures that the photoresist wrench can fully engage the photoresist lock head 05 and avoids slippage due to insufficient slot height.

[0064] In another embodiment of this application, the maximum opening width L of the first slot 03 ranges from 70mm to 80mm.

[0065] Specifically, the maximum opening width L of the first card slot 03 can range from 70mm to 80mm, including the endpoint values. For example, the maximum opening width L of the first card slot 03 can be 70mm, 73.2mm, or 79mm, etc. The design should be based on specific needs.

[0066] In another embodiment of this application, the opening width of the second slot 04 is 110mm-120mm.

[0067] Specifically, the opening width of the second card slot 04 can range from 110mm to 120mm, including the endpoint values. For example, the opening width of the second card slot 04 can be 112mm, 113.3mm, or 118mm, etc. The design is based on specific needs.

[0068] In this embodiment, the widths of the first slot 03 and the second slot 04 are designed to improve the fit and ensure that the photoresist wrench can seamlessly engage the photoresist lock head 05 and the photoresist bottle cap, making the operation more convenient.

[0069] Based on the aforementioned optical resist wrench, this application provides design data for an optical resist wrench. (Reference) Figures 4-6 , Figures 4-6 This is a schematic diagram showing the dimensions of a photoresist wrench provided in an embodiment of this application.

[0070] like Figure 4 As shown, the width of the second sub-plane 032 of the optical resist wrench can be 29.9mm, the distance between the midpoints of the first sub-plane 031 and the third sub-plane 033 is 48.3mm, the maximum opening width of the first slot 03 is 73.2mm, the opening width of the second slot 04 is 113.3mm, the height of the first slot 03 is 20.8mm, and the height of the second slot 04 is 36mm. For a more aesthetically pleasing design, the edges of the handle 01 and the wrench head 02 can be rounded. Figure 5 As shown, the maximum width of the wrench head 02 can be 146.7mm, ensuring that the wrench head 02 has a certain thickness for operation. The handle 01 can be cylindrical with a radius of up to 12.5mm. Figure 6 As shown, the length of the handle 01 can be 120mm, and the bottom height of the second slot 04 at the top of the handle 01 can be 41.1mm. It should be noted that... Figures 4-6 This is for illustrative purposes only and does not constitute a specific limitation.

[0071] This optical resist wrench design allows for a tighter engagement between the first and second locking slots, increasing the wrench's ease of use. The design of the first and second locking slots also facilitates easier engagement of the optical resist locking head, increasing operational speed.

[0072] In the description of this specification, references to terms such as "some embodiments," "another embodiment," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative descriptions of the above terms do not necessarily refer to the same embodiments or examples.

[0073] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features of the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0074] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A light-sensitive wrench, characterized in that, include: Handle lever and wrench head; The wrench head has a first opening, and the first opening includes a first slot and a second slot, with the first slot located between the handle and the second slot. The maximum opening width of the first card slot is less than the minimum opening width of the second card slot.

2. The optical resist wrench according to claim 1, characterized in that, The second slot includes a first plane, a second plane, a third plane, and a fourth plane. The first plane is parallel to the second plane and parallel to the extension direction of the handle rod. The first plane is perpendicularly connected to the third plane on the side facing the second plane, and the second plane is perpendicularly connected to the fourth plane on the side facing the first plane.

3. The optical resist wrench according to claim 2, characterized in that, The first card slot has a first included angle with the third plane, and the first card slot has a second included angle with the fourth plane. The range of the first included angle is 90 degrees to 120 degrees, and the range of the second included angle is 90 degrees to 120 degrees.

4. The optical resist wrench according to claim 3, characterized in that, The first included angle is the same as the second included angle.

5. The optical resist wrench according to claim 3, characterized in that, The first slot is shaped like a trumpet or an arc.

6. The optical resist wrench according to claim 3, characterized in that, The first slot includes a first sub-plane, a second sub-plane, and a third sub-plane. In a direction perpendicular to the extension direction of the handle rod, the first sub-plane and the second sub-plane are located on both sides of the third sub-plane. The first subplane is connected to the third plane, and the included angle between the first subplane and the third plane is the first included angle. The second subplane is connected to the fourth plane, and the included angle between the second subplane and the fourth plane is the second included angle; The third sub-plane is parallel to the third plane, and in the extension direction of the handle rod, the third sub-plane is located between the third plane and the handle rod.

7. The optical resist wrench according to claim 1, characterized in that, The handle and the wrench head are an integral structure.

8. The optical resist wrench according to claim 1, characterized in that, In the extending direction of the handle rod, the height of the first slot is less than the height of the second slot.

9. The optical resist wrench according to claim 1, characterized in that, The maximum opening width of the first card slot is 70mm-80mm.

10. The optical resist wrench according to claim 1, characterized in that, The opening width of the second slot is 110mm-120mm.

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