Turnover jig cart for PECVD plate equipment cavity cover assembly

Abstract

The application relates to a turnover jig trolley for assembling a PECVD plate type equipment cavity cover, and belongs to the technical field of semiconductor equipment manufacturing. The turnover jig trolley comprises a frame mechanism, at least two supporting frames connected with the base and oppositely arranged, the at least two supporting frames having a spacing for placing the PECVD plate type equipment cavity cover; a driving mechanism arranged on the at least two supporting frames and connected with a rotating shaft of the PECVD plate type equipment cavity cover, so as to drive the rotating shaft to rotate and further drive the PECVD plate type equipment cavity cover to rotate; and a limiting mechanism arranged on the at least two supporting frames and configured to be capable of abutting against the PECVD plate type equipment cavity cover rotated to a set angle, so as to fix the PECVD plate type equipment cavity cover at the set angle. In the above manner, the assembling and turnover risks can be reduced, the assembling and turnover precision can be improved, and the standardized production line can be adapted to improve the production efficiency.

Description

Technical Field

[0001] This application relates to a flipping fixture trolley for assembling cavity covers of PECVD plate equipment, belonging to the field of semiconductor equipment manufacturing technology. Background Technology

[0002] During the assembly process of PECVD plate equipment, operators typically need to install parts on both sides of the cavity covers, such as the process chamber and heating chamber. After the parts on the front side of the cavity cover are installed, the cavity cover needs to be manually flipped to the back before installing the parts.

[0003] However, due to the large size and heavy weight (typically exceeding several hundred kilograms) of the chamber covers for process chambers and heating chambers in PECVD plate equipment, manual flipping during the process requires multiple people, which is inefficient and poses safety risks. Alternatively, lifting equipment can be used for manual flipping, but the covers are prone to shifting and wobbling during flipping, leading to assembly misalignment and affecting the equipment's sealing and performance. Furthermore, since the assembly process relies entirely on manual labor, the level of automation is low, making it difficult to adapt to standardized production lines and limiting mass production efficiency.

[0004] Therefore, it is necessary to improve the existing technology to overcome the aforementioned defects. Utility Model Content

[0005] The purpose of this application is to provide a flipping fixture trolley for assembling cavity covers of PECVD plate equipment that can reduce assembly and flipping risks, improve assembly and flipping accuracy, and adapt to standardized production lines to improve production efficiency.

[0006] The purpose of this application is to achieve the following technical solution: a flip-over fixture trolley for assembling the cavity cover of PECVD plate equipment, comprising: The frame mechanism includes a base and at least two support frames connected to and opposite to the base, the at least two support frames having a spacing for placing the cavity cover of the PECVD plate equipment; A drive mechanism, mounted on at least two of the support frames and connected to the rotation shaft of the PECVD plate-type equipment cavity cover, drives the rotation shaft to rotate, thereby driving the PECVD plate-type equipment cavity cover to rotate; and A limiting mechanism, disposed on at least two of the support frames, is configured to abut against the PECVD plate-type equipment cavity cover rotated to a set angle, thereby fixing the PECVD plate-type equipment cavity cover at the set angle.

[0007] In one embodiment, the drive mechanism includes a drive component and a fixed component connected to the drive component, wherein the rotating shaft is connected to the fixed component.

[0008] In one embodiment, the fixing component includes at least two oppositely disposed fixing members, one of which is connected to the drive component; Each of the fasteners has a slot and a bearing seat disposed in the slot, and the rotating shaft is inserted into the slot to connect with the bearing seat.

[0009] In one embodiment, each of the fasteners includes a fixed body fixedly connected to the support frame and a flipping body connected to the fixed body via a rotating member and capable of flipping relative to the fixed body, the slot being formed on the fixed body and / or the flipping body.

[0010] In one embodiment, the bearing housing includes a housing body and a bearing disposed within the housing body.

[0011] In one embodiment, the drive assembly includes a drive member and a speed reducer connected to the drive member, wherein the output shaft of the speed reducer is connected to the rotating shaft.

[0012] In one embodiment, the drive mechanism further includes a connecting component that connects the drive component and the fixed component, the connecting component including a coupling.

[0013] In one embodiment, the limiting mechanism includes at least two sets of limiting components arranged opposite to each other and connected to the support frame. Each set of limiting components includes a limiting member and a retaining member disposed on one side of the limiting member. The limiting member is configured such that the PECVD plate equipment cavity cover is located within the spacing. The retaining member is movable relative to the PECVD plate equipment cavity cover to abut or separate from the PECVD plate equipment cavity cover.

[0014] In one embodiment, the abutment includes a connecting seat and an abutment body threadedly connected to the connecting seat.

[0015] In one embodiment, the frame mechanism further includes rollers connected to the base and locking elements for locking the rollers.

[0016] Compared with the prior art, this application has the following beneficial effects: The tilting jig trolley for assembling the cavity cover of a PECVD plate-type equipment includes a frame mechanism, a drive mechanism, and a limiting mechanism. The frame mechanism has a spacing for placing the PECVD plate-type equipment cavity cover, enabling the lifting equipment to lift the PECVD plate-type equipment cavity cover into the spacing. Then, the drive mechanism is connected to the rotation shaft of the PECVD plate-type equipment cavity cover to drive the rotation shaft to rotate, thereby driving the PECVD plate-type equipment cavity cover to rotate. After the drive mechanism drives the PECVD plate-type equipment cavity cover to rotate to a set angle, parts need to be installed on it. At the same time, the limiting mechanism abuts against the PECVD plate equipment cavity cover to fix the PECVD plate equipment cavity cover at a set angle, so that the PECVD plate equipment cavity cover can be fully automated in the entire assembly process and reduce operational risks. At the same time, after the PECVD plate equipment cavity cover is hoisted into the spacing and connected to the drive mechanism through the rotating shaft, the drive mechanism drives the PECVD plate equipment cavity cover to rotate according to the set angle, so that the PECVD plate equipment cavity cover rotates to the target angle and is limited and fixed by the limiting mechanism. The rotation angle is more accurate and will not flip after reaching the target angle, thereby improving the assembly accuracy. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the cavity cover of the PECVD plate-type equipment of this application.

[0018] Figure 2 This is a structural schematic diagram of the flipping fixture trolley of this application.

[0019] Figure 3 yes Figure 2 A partial structural diagram.

[0020] Figure 4 This is a schematic diagram of the PECVD plate-type equipment cavity cover assembled on a tilting fixture trolley.

[0021] Figure 5 This is another structural diagram of the PECVD plate-type equipment cavity cover being assembled on a tilting fixture trolley.

[0022] Icon labels: 100 - Cavity cover body; 200 - Rotating shaft; 300 - Tilting jig trolley; 1-Frame mechanism; 11-Base; 12-Support frame; 13-Roller; 2-Fixed components; 3-Limiting mechanism; 31-Holding component; 32-Limiting component; 4-Drive mechanism; 41-Drive assembly; 411-Drive component; 412-Reducer; 42-Connecting assembly. Detailed Implementation

[0023] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0024] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0025] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0026] Please see Figures 1 to 5 As shown, a preferred embodiment of this application provides a flipping jig trolley 300 for assembling the cavity cover of a PECVD plate-type equipment. This trolley is suitable for assembling with the cavity cover of a PECVD plate-type equipment and for flipping the cavity cover at an angle. In this embodiment, the flipping angle of the PECVD plate-type equipment cavity cover is not specifically limited; the flipping angle can be 0°, 90°, 180°, etc.

[0027] The PECVD plate-type equipment cavity cover includes a cavity cover body 100 and rotating shafts 200 disposed on both sides of the cavity cover body 100. The PECVD plate-type equipment cavity cover is assembled and connected to a tilting fixture trolley 300 via the rotating shafts 200, and then the cavity cover body 100 is driven to rotate by driving the rotating shafts 200 to rotate. In this embodiment, the cavity cover body 100 has a conventional structure and will not be described in detail here.

[0028] In existing technologies, operators typically need to install parts on both sides of the cavity covers, such as the process chamber and heating chamber, of a PECVD plate-type equipment. After the parts on the front side of the cavity cover are installed, the cavity cover needs to be manually flipped to the back before the parts can be installed.

[0029] However, due to the large size and heavy weight (usually exceeding several hundred kilograms) of the chamber covers for process chambers and heating chambers in PECVD plate equipment, manual flipping of the chamber covers requires the cooperation of multiple people, which is inefficient and poses safety risks. Alternatively, hoisting equipment can be used to manually flip the chamber covers, but the covers are prone to shifting and shaking during flipping, leading to assembly misalignment and affecting the equipment's sealing and performance.

[0030] To address the aforementioned technical issues, the tilting fixture trolley 300 specifically includes a frame mechanism 1 and a drive mechanism 4. The frame mechanism 1 is configured for assembling the PECVD plate-type equipment cavity cover, while the drive mechanism 4 is connected to the rotation shaft 200 of the PECVD plate-type equipment cavity cover to drive the entire PECVD plate-type equipment cavity cover to rotate.

[0031] The frame mechanism 1 includes a base 11 and at least two support frames 12 connected to and opposite to the base 11. The at least two support frames have a spacing for placing the PECVD plate-type equipment cavity cover. In this embodiment, two support frames 12 are provided, respectively located on both sides of the base 11. The spacing between the two support frames 12 is not specifically limited, but is determined according to the specific model of the PECVD plate-type equipment cavity cover. In other embodiments, the number of support frames 12 can also be other, such as three, four, or five, etc., and is not specifically limited here, depending on the actual situation.

[0032] Of course, in other embodiments, the distance between the two support frames 12 is adjustable to accommodate different models of PECVD plate-type equipment cavity covers. In this case, a slide rail is provided on the base 11, a slider is provided on the support frame 12 that is slidably connected to the slide rail, and the frame mechanism 1 is also provided with bolts for locking the support frame 12 to the slide rail, thereby realizing the adjustment of the position of the support frame 12 and the adjustment of the distance between the two support frames 12.

[0033] The frame mechanism also includes rollers 13 connected to the base 11 and locking components for locking the rollers 13. The rollers 13 allow the tilting jig trolley 300 to move freely to the assembly station, adapting to different installation scenarios and thus not limiting the overall assembly options for the tilting jig trolley 300, improving assembly flexibility. The locking components prevent the tilting jig trolley 300 from sliding when moving to the assembly station, which could cause discrepancies in its installation position with the lifting equipment. In this embodiment, the locking component is a brake.

[0034] The drive mechanism 4 is mounted on at least two support frames 12 and is connected to the rotation shaft 200 of the PECVD plate-type equipment cavity cover to drive the rotation shaft 200 to rotate, thereby driving the PECVD plate-type equipment cavity cover to rotate. The drive mechanism 4 includes a drive assembly 41 and a fixing assembly 2 connected to the drive assembly 41, and the rotation shaft 200 is connected to the fixing assembly 2.

[0035] The drive assembly 41 includes a drive element 411 and a reducer 412 connected to the drive element 411. The output shaft of the reducer 412 is connected to the rotating shaft 200. In this embodiment, the drive element 411 can be a hand crank or a motor, depending on the actual situation, and no specific limitation is made here.

[0036] Taking the drive component 411 as a hand crank as an example, one rotation of the hand crank can be set to a rotation of 90°, thereby determining the flipping angle of the cavity cover of the PECVD plate equipment.

[0037] Taking a motor as an example, the motor is connected to the controller via a signal connection, and the rotation angle of the motor can be set within the controller. This allows the determination of the flip angle of the PECVD plate-type equipment cavity cover. It is worth noting that even though the motor and controller are connected via a signal connection in this embodiment, no corresponding modifications have been made to the software control program in the controller; a conventional control program can achieve the same result.

[0038] The drive mechanism 4 also includes a connecting component 42 that connects the drive assembly 41 and the fixed assembly 2. The connecting component 42 includes a coupling for connecting the output shaft of the drive assembly 41 and the rotating shaft 200 installed in the fixed assembly 2.

[0039] The fixing component 2 includes at least two oppositely arranged fixing members, one of which is connected to the drive component 41. In this embodiment, there are two fixing members, which are respectively mounted on two support frames 12, and their mounting positions correspond to the mounting positions of the rotation shaft 200 of the PECVD plate-type equipment cavity cover.

[0040] Each fastener has a slot and a bearing seat disposed within the slot. The rotating shaft 200 is inserted into the slot to connect with the bearing seat. Each fastener includes a fixed body fixedly connected to the support frame 12 and a rotating body connected to the fixed body via a rotating component and capable of rotating relative to the fixed body. The slot is formed on the fixed body and / or the rotating body. That is, the fastener is an openable fastener. The purpose of this arrangement is that, when the rotating shaft 200 is installed on the flipping jig trolley 300, in order to improve assembly efficiency, the rotating body can be flipped to offset from the fixed body, thereby exposing the slot for the rotating shaft 200 to be installed in the slot. Then, the rotating body is flipped again to cover the fixed body, thereby fixing the rotating shaft 200. In this embodiment, the rotating component is a hinge, which is a conventional structure and will not be described in detail here.

[0041] As mentioned above, a bearing seat is provided in the slot. The bearing seat rotates in conjunction with the rotating shaft 200. Therefore, in order to facilitate the assembly of the cavity cover of the PECVD plate equipment, the bearing seat includes a seat body, which is also a split type. Half of the bearing seat is assembled on the fixed body, and half of the bearing seat is assembled on the flipping body. When the flipping body and the fixed body are closed, the bearing seat is a complete bearing seat.

[0042] Furthermore, to further facilitate the rotation of the rotating shaft 200, the bearing housing also includes a bearing housed within the housing. In this embodiment, the bearing is a needle roller bearing. This needle roller bearing can also consist of two semi-circular needle roller bearings, installed in the same manner as the bearing housing, thus achieving the aforementioned purpose of facilitating the assembly of the rotating shaft 200.

[0043] The fixing component 2 also includes a locking member that locks the fixing body and the flipping body together. The fixing body and the flipping body are provided with threaded holes, and the locking member is threadedly connected to the threaded holes.

[0044] To further secure the PECVD plate-type equipment cavity cover rotated to a set angle and prevent it from wobbling and affecting assembly accuracy, the tilting fixture trolley 300 also includes a limiting mechanism 3. The limiting mechanism 3 is mounted on at least two support frames 12 and is configured to abut against the PECVD plate-type equipment cavity cover rotated to the set angle, thereby fixing the PECVD plate-type equipment cavity cover at the set angle. The set angle can be the same as the aforementioned tilting angle, such as 0°, 90°, 180°, etc., and is not specifically limited here, depending on the actual situation.

[0045] The limiting mechanism 3 includes at least two sets of limiting components that are arranged opposite to each other and connected to the support frame 12. Each set of limiting components includes a limiting member 32 and a holding member 31 disposed on one side of the limiting member 32. The limiting member 32 is configured such that the PECVD plate equipment cavity cover is located within the gap. The holding member 31 can move relative to the PECVD plate equipment cavity cover to hold or separate from the PECVD plate equipment cavity cover.

[0046] The abutment 31 includes a connecting seat and an abutment body threadedly connected to the connecting seat. Rotating the abutment body can move the abutment body away from or close to the PECVD plate equipment cavity cover, thereby abutting or separating it from the cover.

[0047] In summary: The tilting jig trolley 300 for assembling the cavity cover of a PECVD plate-type equipment according to this application includes a frame mechanism 1, a drive mechanism 4, and a limiting mechanism 3. The frame mechanism 1 has a spacing for placing the PECVD plate-type equipment cavity cover, allowing the lifting equipment to lift the PECVD plate-type equipment cavity cover into the spacing. Then, the drive mechanism 4 is connected to the rotation shaft 200 of the PECVD plate-type equipment cavity cover to drive the rotation shaft 200 to rotate, thereby driving the PECVD plate-type equipment cavity cover to rotate. When the drive mechanism 4 drives the PECVD plate-type equipment cavity cover to rotate to a set angle, and parts need to be installed, the limiting mechanism 3... The positioning mechanism 3 abuts against the PECVD plate equipment cavity cover to fix the PECVD plate equipment cavity cover at a set angle, so that the PECVD plate equipment cavity cover can be fully automated in the entire assembly process and reduce operational risks. At the same time, after the PECVD plate equipment cavity cover is hoisted into the spacing and connected to the drive mechanism 4 through the rotating shaft 200, the drive mechanism 4 drives the PECVD plate equipment cavity cover to rotate according to the set angle, so that the PECVD plate equipment cavity cover rotates to the target angle and is fixed by the limiting mechanism 3. The rotation angle is more accurate and will not flip after reaching the target angle, thereby improving the assembly accuracy.

[0048] The above is only one specific implementation of this application, and any other improvements made based on the concept of this application shall be considered within the scope of protection of this application.

Claims

1. A tilting jig trolley for assembling the cavity cover of a PECVD plate-type equipment, characterized in that, include: The frame mechanism includes a base and at least two support frames connected to and opposite to the base, the at least two support frames having a spacing for placing the cavity cover of the PECVD plate equipment; A drive mechanism, mounted on at least two of the support frames and connected to the rotation shaft of the PECVD plate-type equipment cavity cover, drives the rotation shaft to rotate, thereby driving the PECVD plate-type equipment cavity cover to rotate; and A limiting mechanism, disposed on at least two of the support frames, is configured to abut against the PECVD plate-type equipment cavity cover rotated to a set angle, thereby fixing the PECVD plate-type equipment cavity cover at the set angle.

2. The tilting fixture trolley for assembling the cavity cover of a PECVD plate-type equipment as described in claim 1, characterized in that, The driving mechanism includes a driving component and a fixed component connected to the driving component, and the rotating shaft is connected to the fixed component.

3. The tilting fixture trolley for assembling the cavity cover of a PECVD plate-type equipment as described in claim 2, characterized in that, The fixing component includes at least two oppositely arranged fixing members, one of which is connected to the drive component; Each of the fasteners has a slot and a bearing seat disposed in the slot, and the rotating shaft is inserted into the slot to connect with the bearing seat.

4. The tilting fixture trolley for assembling the cavity cover of a PECVD plate-type equipment as described in claim 3, characterized in that, Each of the fasteners includes a fixed body fixedly connected to the support frame, and a flipping body connected to the fixed body via a rotating member and capable of flipping relative to the fixed body, wherein the slot is formed on the fixed body and / or the flipping body.

5. The tilting fixture trolley for assembling the cavity cover of a PECVD plate-type equipment as described in claim 3, characterized in that, The bearing housing includes a housing body and a bearing disposed within the housing body.

6. The tilting fixture trolley for assembling the cavity cover of a PECVD plate-type equipment as described in claim 2, characterized in that, The drive assembly includes a drive component and a speed reducer connected to the drive component, wherein the output shaft of the speed reducer is connected to the rotating shaft.

7. The tilting fixture trolley for assembling the cavity cover of a PECVD plate-type equipment as described in claim 2, characterized in that, The drive mechanism further includes a connecting component that connects the drive component and the fixed component, the connecting component including a coupling.

8. The tilting fixture trolley for assembling the cavity cover of a PECVD plate-type equipment as described in claim 1, characterized in that, The limiting mechanism includes at least two sets of limiting components arranged opposite to each other and connected to the support frame. Each set of limiting components includes a limiting member and a holding member disposed on one side of the limiting member. The limiting member is configured such that the PECVD plate equipment cavity cover is located within the spacing. The holding member is movable relative to the PECVD plate equipment cavity cover to abut or separate from the PECVD plate equipment cavity cover.

9. The tilting fixture trolley for assembling the cavity cover of a PECVD plate-type equipment as described in claim 8, characterized in that, The abutment includes a connecting seat and an abutment body that is threadedly connected to the connecting seat.

10. The tilting fixture trolley for assembling the cavity cover of a PECVD plate-type equipment as described in claim 1, characterized in that, The frame mechanism also includes rollers connected to the base and locking elements for locking the rollers.

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