Single-arm double-fork wafer transfer robot

Abstract

The application provides a single-arm double-fork wafer transmission manipulator, and belongs to the technical field of semiconductor handling. In view of the poor flexibility and low efficiency of a wafer transmission manipulator, the application provides a single-arm double-fork wafer transmission manipulator, which comprises a manipulator body and a manipulator arm, and the manipulator body is provided with a first driving mechanism, a second driving mechanism and a third driving mechanism; the manipulator arm comprises a large arm connected with the third driving mechanism; the large arm is provided at the tail end with a first transmission group and a second transmission group; the first transmission group comprises a first small arm and a first finger part connected in linkage, and the first small arm is connected with the first driving mechanism; the second transmission group comprises a second small arm and a second finger part connected in linkage, and the second small arm is connected with the second driving mechanism. The application improves the flexibility and transmission efficiency of the wafer transmission manipulator by the large arm, the first transmission group and the second transmission group at the tail end of the large arm, and independent driving of the three.

Description

Technical Field

[0001] This application relates to the field of semiconductor handling technology, and in particular to a single-arm, double-fork wafer transfer robot. Background Technology

[0002] The schematic diagram of the existing wafer transfer robot is as follows: Figure 1 and Figure 2 As shown: Figure 1 It is a dual-arm, dual-fork robotic hand, with the arm part consisting of two upper arms and two forearms. Figure 2 It is a single-arm, single-fork robotic hand, with the arm consisting of one upper arm and one forearm.

[0003] The aforementioned robotic arm has the following drawbacks:

[0004] (1) Figure 1 The dual-arm, dual-fork robotic arm shown requires a larger turning space during wafer handling to avoid interference between the cavity and the robotic arm. In some semiconductor processes, there are specific requirements for the size of the transition cavity where the robotic arm is located; the smaller the better, especially for vacuum chambers, which have smaller thickness and diameter.

[0005] (2) Figure 2 The single-arm, single-fork robot shown can only pick up and place one piece at a time, resulting in low efficiency. This can affect the output of machines with short processing times. Utility Model Content

[0006] The purpose of this application is to address the problems of poor flexibility and low efficiency in existing wafer transfer robots. Therefore, this application provides a single-arm, dual-fork wafer transfer robot, which improves the flexibility and transfer efficiency of the wafer transfer robot by using the main arm, the first and second transfer groups at the end of the main arm, and the independent driving of the three.

[0007] This application provides a single-arm, dual-fork wafer transfer robot, including a robot body and a robot arm. The robot body is provided with a first drive mechanism, a second drive mechanism, and a third drive mechanism. The robot arm includes a large arm connected to the third drive mechanism. A first transfer group and a second transfer group are stacked at the end of the large arm. The first transfer group includes a linked first forearm and a first finger, and the first forearm is connected to the first drive mechanism. The second transfer group includes a linked second forearm and a second finger, and the second forearm is connected to the second drive mechanism.

[0008] By adopting the above technical solution, by setting a first forearm, a second forearm, and corresponding first and second finger sections at the end of the upper arm, two wafers can be transported at once, improving the transmission efficiency. Furthermore, the first, second, and third drive mechanisms enable individual control of the first forearm, the second forearm, and the upper arm. The three mechanisms can work together to achieve various postures of the robotic arm, improving transmission flexibility and posture adjustment efficiency, which can significantly reduce energy consumption and increase cycle time.

[0009] In some embodiments, a first transmission wheel, a second transmission wheel, a third transmission wheel, and a fourth transmission wheel are stacked along the axis of rotation at the rotatable connection between the upper arm, the first forearm, and the second forearm.

[0010] The first and second transmission wheels are rotatable relative to the rotation axis, while the third and fourth transmission wheels are fixed relative to the rotation axis.

[0011] The first drive mechanism drives the first forearm to rotate relative to the upper arm via the second transmission wheel, and drives the first finger portion to rotate relative to the first forearm via the third transmission wheel, so as to realize the extension and retraction of the first transmission group;

[0012] The second drive mechanism drives the second forearm to rotate relative to the upper arm via the first transmission wheel, and drives the second finger portion to rotate relative to the second forearm via the fourth transmission wheel, so as to realize the extension and retraction of the second transmission group.

[0013] By adopting the above technical solution, the first forearm rotates while the first finger rotates through the cooperation of the second and third transmission wheels. Similarly, the second forearm rotates while the second finger rotates through the cooperation of the first and fourth transmission wheels. This effectively controls the number of driving power sources and enables the forearm and finger to move in sync, simplifying the control steps and thus improving transmission reliability.

[0014] In some embodiments, a mounting base is provided at the end of the boom, a fixed shaft is fixedly connected to the mounting base, a rotating shaft is inserted through the fixed shaft, and the axes of the fixed shaft and the rotating shaft coincide with the rotating axis.

[0015] The two ends of the rotating shaft are respectively fixedly connected to the housing of the first transmission wheel and the housing of the second forearm;

[0016] The third transmission wheel and the fourth transmission wheel are fixedly connected to the fixed shaft;

[0017] The second transmission wheel is rotatably sleeved on the fixed shaft and is fixedly connected to the housing of the first forearm.

[0018] In some embodiments, the first forearm and the first finger are rotatably connected by a fifth transmission wheel, and the fifth transmission wheel and the third transmission wheel are drive-connected.

[0019] The second forearm and the second finger are rotatably connected by a sixth transmission wheel, and the sixth transmission wheel is pulsatorically connected to the fourth transmission wheel;

[0020] The first transmission wheel, the second transmission wheel, the third transmission wheel, the fourth transmission wheel, the fifth transmission wheel, and the sixth transmission wheel are all synchronous belt pulleys and are connected by synchronous belt drive.

[0021] By adopting the above technical solution, transmission is achieved through synchronous pulleys and synchronous belts, which improves transmission accuracy and thus further enhances transmission reliability.

[0022] In some embodiments, the second drive wheel is fixedly connected to the bottom of the housing of the first forearm via a first connecting cylinder, the top of the housing of the first forearm is connected to a second connecting cylinder, and the housing of the second forearm is rotatably connected to the second connecting cylinder.

[0023] In some embodiments, an angular contact ball bearing is provided between the first transmission wheel and the fixed shaft, and between the second connecting cylinder and the fixed shaft;

[0024] Multiple deep groove ball bearings are provided between the first connecting cylinder and the fixed shaft;

[0025] Crossed roller bearings are provided between the first connecting cylinder and the housing of the upper arm, and between the second connecting cylinder and the housing of the second lower arm.

[0026] In some embodiments, the diameter ratio of the third transmission wheel and the fifth transmission wheel, and the fourth transmission wheel and the sixth transmission wheel, is 1:n, where n>1.

[0027] By adopting the above technical solution, the fingers rotate at a slower speed relative to the forearm, that is, the speed of the fingertips is reduced, thereby improving the transmission stability.

[0028] In some embodiments, the first drive mechanism, the second drive mechanism, and the third drive mechanism each include a servo motor, a reducer, and a transmission wheel connected in sequence;

[0029] The robotic arm body is provided with an inner shaft, a middle shaft and an outer shaft that are sequentially sleeved and sealed by a magnetohydrodynamic seal, and are respectively connected to the transmission wheels of the first drive mechanism, the second drive mechanism and the third drive mechanism;

[0030] The inner shaft is driven to the first forearm, the middle shaft is driven to the second forearm, and the outer shaft is driven to the upper arm.

[0031] The above technical solution uses a servo motor and a reducer to provide driving power, resulting in a smaller size and higher precision. This allows for control of the robot's body size and improves transmission reliability.

[0032] In some embodiments, the inner shaft, the middle shaft, and the outer shaft are coaxially connected in sequence with an inner shaft drive wheel, a middle shaft drive wheel, and an outer shaft drive wheel. The first drive mechanism, the second drive mechanism, and the third drive mechanism are distributed circumferentially around the outer shaft, and the three have a height difference to be respectively connected to the inner shaft drive wheel, the middle shaft drive wheel, and the outer shaft drive wheel for transmission.

[0033] In some embodiments, a lifting drive mechanism is provided inside the robotic arm body, the lifting drive mechanism is connected to a mounting platform, the first drive mechanism, the second drive mechanism and the third drive mechanism are disposed on the mounting platform, and a corrugated pipe is provided between the mounting platform and the top opening of the robotic arm body.

[0034] Other features and corresponding beneficial effects of this application will be described in the latter part of the specification, and it should be understood that at least some of the beneficial effects will become obvious from the description in this application. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the structure of a dual-arm, dual-fork robotic arm in the prior art;

[0036] Figure 2 This is a schematic diagram of the structure of a single-arm, single-fork robotic arm in the prior art;

[0037] Figure 3 This is a schematic diagram of the structure of this application;

[0038] Figure 4 This is a top view of the robotic arm in this application;

[0039] Figure 5 for Figure 4 Schematic diagram of section AA;

[0040] Figure 6 for Figure 5 A partially enlarged structural diagram;

[0041] Figure 7 This is a schematic diagram of the structure of the robotic arm body in this application.

[0042] Explanation of reference numerals in the attached figures:

[0043] 100. Robotic arm; 110. Upper arm; 120. First forearm; 121. First finger joint; 130. Second forearm; 131. Second finger joint;

[0044] 200. Robotic arm body; 210. First drive mechanism; 211. Servo motor; 212. Reducer; 213. Transmission wheel; 220. Second drive mechanism; 230. Third drive mechanism; 240. Lifting drive mechanism; 250. Mounting platform; 260. Corrugated pipe;

[0045] 11. First transmission wheel; 12. Second transmission wheel; 13. Third transmission wheel; 14. Fourth transmission wheel; 15. Fifth transmission wheel; 16. Sixth transmission wheel;

[0046] 20. Mounting base; 21. Fixed shaft; 22. Rotating shaft;

[0047] 31. First connecting cylinder; 32. Second connecting cylinder;

[0048] 41. Angular contact ball bearing; 42. Deep groove ball bearing; 43. Crossed roller bearing;

[0049] 51. Inner shaft; 52. Central shaft; 53. Outer shaft; 54. Inner shaft drive wheel; 55. Central shaft drive wheel; 56. Outer shaft drive wheel. Detailed Implementation

[0050] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Although the description of this application will be presented in conjunction with preferred embodiments, this does not mean that the features of this application are limited to this embodiment. On the contrary, the purpose of describing the application in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of this application. To provide a thorough understanding of this application, many specific details will be included in the following description. This application may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this application, some specific details will be omitted in the description. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other.

[0051] It should be noted that in this specification, similar reference numerals and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0052] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used solely for the convenience of describing this application and for simplification, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more. Unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or a connection within two elements. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0053] In current semiconductor manufacturing processes, the requirements for clean environments are becoming increasingly stringent, leading to the development of vacuum chambers. Vacuum chambers are constructed between the entrances of multiple process chambers in process equipment (such as lithography machines, etching machines, and thin-film deposition equipment). Wafer transfer robots are installed within the vacuum chambers to achieve safe, precise, and contamination-free transfer of wafers (silicon wafers).

[0054] Because maintaining a vacuum chamber environment is extremely costly, vacuum chambers are becoming increasingly smaller in size while still meeting wafer transfer requirements. This necessitates smaller and smaller dimensions and turning radius for wafer transfer robots, and this application is particularly suitable for transferring wafers in a vacuum chamber.

[0055] Please see Figure 3-4 and Figure 7 , Figure 3 This is a schematic diagram of the structure of this application; Figure 4 This is a top view of the robotic arm 100 in this application; Figure 7 This is a schematic diagram of the structure of the robotic arm body 200 in this application.

[0056] This application provides a single-arm, double-fork wafer transfer robot, including a robot body 200 and a robot arm 100.

[0057] Preferably, a flange is provided between the robotic arm body 200 and the robotic arm 100, so that the robotic arm 100 is installed in the vacuum chamber through the flange, and the robotic arm body 200 is installed outside the vacuum chamber through the flange.

[0058] The robotic arm 100 of this wafer transfer robot includes a large arm 110, and a first transfer group and a second transfer group stacked at the end of the large arm 110. The first transfer group includes a linked first forearm 120 and a first finger 121, and the second transfer group includes a linked second forearm 130 and a second finger 131. This allows for the simultaneous handling of two wafers via the first finger 121 and the second finger 131, improving transfer efficiency. Furthermore, a single large arm 110 can drive the movement of the first forearm 120 and the second forearm 130, reducing interference and providing greater flexibility while requiring less operating space.

[0059] The robotic arm body 200 is equipped with a first drive mechanism 210, a second drive mechanism 220, and a third drive mechanism 230. The first drive mechanism 210 is connected to the first forearm 120, the second drive mechanism 220 is connected to the second forearm 130, and the upper arm 110 is connected to the third drive mechanism 230. Individual control of the first forearm 120, the second forearm 130, and the upper arm 110 can be achieved through the first drive mechanism 210, the second drive mechanism 220, and the third drive mechanism 230. Furthermore, the three mechanisms can work together to achieve various postures of the robotic arm 100, such as controlling the extension and synchronous rotation of the first and second transmission groups, enabling single-arm stationary or simultaneous double-arm movement, improving transmission flexibility, and increasing posture adjustment efficiency. For example, it can simultaneously pick up or place two wafers at the same location, and the two forearms can rotate independently, reducing rotation time in the process, significantly reducing energy consumption, and improving cycle time. Meanwhile, the first drive mechanism 210, the second drive mechanism 220 and the third drive mechanism 230 are all located inside the robot body 200, that is, no drive power source is set inside the robot arm 100, so the volume of the robot arm 100 can be controlled, making it more suitable for use in vacuum chambers.

[0060] Please see Figure 5-6 , Figure 5 for Figure 4 Schematic diagram of section AA; Figure 6 for Figure 5 A partially enlarged structural diagram.

[0061] In one embodiment, a first transmission wheel 11, a second transmission wheel 12, a third transmission wheel 13, and a fourth transmission wheel 14 are stacked along the rotation axis 22 at the rotatable connection between the upper arm 110, the first forearm 120, and the second forearm 130.

[0062] The first transmission wheel 11 and the second transmission wheel 12 are rotatable relative to the axis of rotation 22, while the third transmission wheel 13 and the fourth transmission wheel 14 are fixed relative to the axis of rotation 22.

[0063] The first drive mechanism 210 drives the first forearm 120 to rotate relative to the upper arm 110 via the second drive wheel 12, and drives the first finger part 121 to rotate relative to the first forearm 120 via the third drive wheel 13, thereby realizing the extension and retraction of the first transmission group. That is, through the cooperation of the second drive wheel 12 and the third drive wheel 13, the rotation of the first forearm 120 is simultaneously driven by the rotation of the first finger part 121.

[0064] The second drive mechanism 220 drives the second forearm 130 to rotate relative to the upper arm 110 via the first drive wheel 11, and drives the second finger part 131 to rotate relative to the second forearm 130 via the fourth drive wheel 14, thereby realizing the extension and retraction of the second transmission group. That is, through the cooperation of the first drive wheel 11 and the fourth drive wheel 14, the second forearm 130 rotates while simultaneously driving the second finger part 131 to rotate.

[0065] The above method effectively controls the number of driving power sources, and the forearm and fingers work in sync, simplifying the control steps and thus improving transmission reliability.

[0066] In one embodiment, a mounting base 20 is provided at the end of the boom 110. A fixed shaft 21 is fixedly connected to the mounting base 20. A rotating shaft 22 is inserted through the fixed shaft 21, and the axes of the fixed shaft 21 and the rotating shaft 22 are both aligned with the axis of the rotating shaft 22.

[0067] The two ends of the rotating shaft 22 are fixedly connected to the housing of the first transmission wheel 11 and the second forearm 130, respectively, so that the first transmission wheel 11 drives the second forearm 130 to rotate.

[0068] The second drive wheel 12 is rotatably mounted on the fixed shaft 21 and is fixedly connected to the housing of the first forearm 120, thereby enabling the second drive wheel 12 to drive the first forearm 120 to rotate.

[0069] A third transmission wheel 13 and a fourth transmission wheel 14 are fixedly connected to the fixed shaft 21, so that the third transmission wheel 13 and the fourth transmission wheel 14 are fixed and do not rotate.

[0070] In one embodiment, the first forearm 120 and the first finger portion 121 are rotatably connected by a fifth transmission wheel 15, and the fifth transmission wheel 15 is drive-connected to the third transmission wheel 13.

[0071] The second forearm 130 and the second finger 131 are rotatably connected by the sixth transmission wheel 16, and the sixth transmission wheel 16 and the fourth transmission wheel 14 are connected in a transmission manner.

[0072] The above method enables the forearm to rotate, which in turn drives the fingers to rotate, and the structure is simple.

[0073] Preferably, the first transmission wheel 11, the second transmission wheel 12, the third transmission wheel 13, the fourth transmission wheel 14, the fifth transmission wheel 15, and the sixth transmission wheel 16 are all synchronous belt pulleys and are connected by synchronous belt drive, which can improve the transmission accuracy and thus further improve the transmission reliability.

[0074] In one embodiment, the second drive wheel 12 is fixedly connected to the bottom of the housing of the first forearm 120 via the first connecting cylinder 31, the top of the housing of the first forearm 120 is connected to the second connecting cylinder 32, and the housing of the second forearm 130 is rotatably connected to the second connecting cylinder 32.

[0075] In one embodiment, an angular contact ball bearing 41 is provided between the first drive wheel 11 and the fixed shaft 21, and between the second connecting cylinder 32 and the fixed shaft 21. A plurality of deep groove ball bearings 42 are provided between the first connecting cylinder 31 and the fixed shaft 21. Crossed roller bearings 43 are provided between the first connecting cylinder 31 and the housing of the upper arm 110, and between the second connecting cylinder 32 and the housing of the second lower arm 130.

[0076] This method typically uses different types of bearings for different rotational positions, which improves the rotational stability and reliability of the first arm 120 and the second arm 130, thereby improving the transmission stability and reliability.

[0077] In one embodiment, the diameter ratio of the third drive wheel 13 and the fifth drive wheel 15, and the fourth drive wheel 14 and the sixth drive wheel 16 are all 1:n, where n>1. Thus, during operation, the ratio of the rotation speed of the fingers to the rotation speed of the forearm is 1:n, which causes the fingers to rotate at a slower speed relative to the forearm, i.e., the speed of the fingertips is reduced, thus avoiding finger tremors during the picking and placing of sheets and improving transmission stability.

[0078] Preferably, n is 2. Taking the third transmission wheel 13 and the fifth transmission wheel 15 as an example, the first finger part 121 rotates at a reduced speed relative to the first forearm 120, and when the first forearm 120 rotates 90°, the first finger part 121 rotates 45°.

[0079] More preferably, the initial posture of this wafer transfer robot is L-shaped. Taking the first transfer group as an example (the posture of the second transfer group is the same as that of the first transfer group), the upper arm 110 and the first forearm 120 are on the same straight line, and the first finger 121 is perpendicular to the first forearm 120. This initial posture allows the wafer transfer robot to meet the functional requirements while also requiring less rotation space.

[0080] In one embodiment, the first drive mechanism 210, the second drive mechanism, and the third drive mechanism 230 each include a servo motor 211, a reducer 212, and a transmission wheel 213 connected in sequence. The servo motor 211 and the reducer 212 provide driving power. Compared with the conventional use of DD motors, this method has a smaller size, lower cost, lower noise, higher torque, and higher precision, thereby controlling the size of the robot body 200 and improving transmission reliability.

[0081] In one embodiment, the robot body 200 is provided with an inner shaft 51, a middle shaft 52 and an outer shaft 53 that are sequentially sleeved and sealed by a magnetohydrodynamic seal, and are respectively connected to the transmission wheels of the first drive mechanism 210, the second drive mechanism 220 and the third drive mechanism 230.

[0082] The inner shaft 51 is connected to the first forearm 120, the middle shaft 52 is connected to the second forearm 130, and the outer shaft 53 is connected to the upper arm 110, thereby enabling the first drive mechanism 210, the second drive mechanism 220, and the third drive mechanism 230 to independently control the first forearm 120, the second forearm 130, and the upper arm 110, respectively.

[0083] In one embodiment, the inner shaft 51, the middle shaft 52, and the outer shaft 53 are coaxially connected with the inner shaft drive wheel 54, the middle shaft drive wheel 55, and the outer shaft drive wheel 56 in sequence. The first drive mechanism 210, the second drive mechanism 220, and the third drive mechanism 230 are distributed circumferentially around the outer shaft 53, and the three have a height difference to be connected to the inner shaft drive wheel 54, the middle shaft drive wheel 55, and the outer shaft drive wheel 56 respectively. This allows control over the installation space required for the first drive mechanism 210, the second drive mechanism 220, and the third drive mechanism 230, thereby controlling the volume of the robot body 200.

[0084] In one embodiment, the inner shaft 51 and the middle shaft 52 are also provided with an inner shaft drive wheel 54 and a middle shaft drive wheel 55 at the ends opposite to the first drive mechanism 210 and the second drive mechanism 220, so as to facilitate the transmission connection with the first drive wheel 11 and the second drive wheel 12.

[0085] In one embodiment, a lifting drive mechanism 240 is provided inside the robot body 200. The lifting drive mechanism 240 is connected to a mounting platform 250. A first drive mechanism 210, a second drive mechanism 220, and a third drive mechanism 230 are disposed on the mounting platform 250, thereby realizing the lifting of the robot arm 100 and improving the flexibility of the wafer transfer robot.

[0086] Preferably, a bellows 260 is provided between the top opening of the mounting platform 250 and the robot body 200 to improve sealing and make it suitable for use in vacuum chambers.

[0087] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A single-arm, double-fork wafer transfer robot, characterized in that, The device includes a robotic hand body and a robotic arm. The robotic hand body is provided with a first drive mechanism, a second drive mechanism, and a third drive mechanism. The robotic arm includes a large arm connected to the third drive mechanism. A first transmission group and a second transmission group are stacked at the end of the large arm. The first transmission group includes a linked first forearm and a first finger, and the first forearm is connected to the first drive mechanism. The second transmission group includes a linked second forearm and a second finger, and the second forearm is connected to the second drive mechanism.

2. The single-arm, double-fork wafer transfer robot according to claim 1, characterized in that, The first transmission wheel, the second transmission wheel, the third transmission wheel, and the fourth transmission wheel are stacked along the axis of rotation at the rotatable connection between the upper arm, the first forearm, and the second forearm. The first and second transmission wheels are rotatable relative to the rotation axis, while the third and fourth transmission wheels are fixed relative to the rotation axis. The first drive mechanism drives the first forearm to rotate relative to the upper arm via the second transmission wheel, and drives the first finger portion to rotate relative to the first forearm via the third transmission wheel, so as to realize the extension and retraction of the first transmission group; The second drive mechanism drives the second forearm to rotate relative to the upper arm via the first transmission wheel, and drives the second finger portion to rotate relative to the second forearm via the fourth transmission wheel, so as to realize the extension and retraction of the second transmission group.

3. The single-arm, double-fork wafer transfer robot according to claim 2, characterized in that, The upper arm is provided with a mounting base, and a fixed shaft is fixedly connected to the mounting base. A rotating shaft is inserted through the fixed shaft, and the axes of the fixed shaft and the rotating shaft are both coincident with the rotating axis. The two ends of the rotating shaft are respectively fixedly connected to the housing of the first transmission wheel and the housing of the second forearm; The third transmission wheel and the fourth transmission wheel are fixedly connected to the fixed shaft; The second transmission wheel is rotatably sleeved on the fixed shaft and is fixedly connected to the housing of the first forearm.

4. The single-arm, double-fork wafer transfer robot according to claim 2 or 3, characterized in that, The first forearm and the first finger are rotatably connected by a fifth transmission wheel, and the fifth transmission wheel is pulsatorically connected to the third transmission wheel; The second forearm and the second finger are rotatably connected by a sixth transmission wheel, and the sixth transmission wheel is pulsatorically connected to the fourth transmission wheel; The first transmission wheel, the second transmission wheel, the third transmission wheel, the fourth transmission wheel, the fifth transmission wheel, and the sixth transmission wheel are all synchronous belt pulleys and are connected by synchronous belt drive.

5. The single-arm, double-fork wafer transfer robot according to claim 3, characterized in that, The second transmission wheel is fixedly connected to the bottom of the housing of the first forearm via the first connecting cylinder. The top of the housing of the first forearm is connected to the second connecting cylinder, and the housing of the second forearm is rotatably connected to the second connecting cylinder.

6. The single-arm, double-fork wafer transfer robot according to claim 5, characterized in that, An angular contact ball bearing is provided between the first transmission wheel and the fixed shaft, and between the second connecting cylinder and the fixed shaft; Multiple deep groove ball bearings are provided between the first connecting cylinder and the fixed shaft; Crossed roller bearings are provided between the first connecting cylinder and the housing of the upper arm, and between the second connecting cylinder and the housing of the second lower arm.

7. The single-arm, double-fork wafer transfer robot according to claim 4, characterized in that, The diameter ratio of the third and fifth transmission wheels, and the fourth and sixth transmission wheels, is 1:n, where n > 1.

8. The single-arm, double-fork wafer transfer robot according to claim 1, characterized in that, The first drive mechanism, the second drive mechanism, and the third drive mechanism each include a servo motor, a reducer, and a transmission wheel connected in sequence; The robotic arm body is provided with an inner shaft, a middle shaft and an outer shaft that are sequentially sleeved and sealed by a magnetohydrodynamic seal, and are respectively connected to the transmission wheels of the first drive mechanism, the second drive mechanism and the third drive mechanism; The inner shaft is driven to the first forearm, the middle shaft is driven to the second forearm, and the outer shaft is driven to the upper arm.

9. The single-arm, double-fork wafer transfer robot according to claim 8, characterized in that, The inner shaft, middle shaft, and outer shaft are coaxially connected in sequence with an inner shaft drive wheel, a middle shaft drive wheel, and an outer shaft drive wheel. The first drive mechanism, the second drive mechanism, and the third drive mechanism are distributed circumferentially around the outer shaft, and the three have a height difference to be connected to the inner shaft drive wheel, the middle shaft drive wheel, and the outer shaft drive wheel respectively.

10. The single-arm, double-fork wafer transfer robot according to claim 8, characterized in that, The robotic arm body is provided with a lifting drive mechanism, which is connected to a mounting platform. The first drive mechanism, the second drive mechanism, and the third drive mechanism are mounted on the mounting platform, and a corrugated pipe is provided between the mounting platform and the top opening of the robotic arm body.

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