Multifunctional loading device for mask

Abstract

The utility model discloses a kind of mask plate multifunctional loading devices, it is related to mask plate transfer technology field, and it includes: mobile frame, the mobile frame top has object carrying platform;The object carrying platform includes the long clamping plate separately arranged in two sides, the opposite surface of the long clamping plate is all with convex strip, two convex strips are parallel to each other;Roller group is all with on the top surface and side surface of the convex strip, the roller group includes several several rollers that are evenly distributed in the length direction of the convex strip in turn, several rollers are all parallel to the mounting surface on the convex strip of each, and can rotate around its own axis;Two roller groups between top surface are used for clamping mask plate side wall, two roller groups top for carrying mask plate bottom surface in side surface.Using the present scheme, mask plate can be pushed out or pushed in horizontally, realize the short distance transport of mask plate, reduce time consumption, realize the promotion of production efficiency, improve capacity.

Description

Technical Field

[0001] This utility model relates to the field of mask transfer technology, specifically to a multifunctional mask loading device. Background Technology

[0002] Photomasks are products with extremely high requirements for appearance quality. They are made of glass substrates that are only one or two centimeters thick, and their outer surface is easily damaged by bumps and knocks. The production process of photomasks includes eight steps: exposure, development, etching, cleaning, precision measurement, defect detection, defect repair, and packaging. Some of these later steps may be repeated, and the process of transporting the photomasks and loading them into various devices needs to be repeated multiple times.

[0003] Generally, AGVs (Automated Guided Vehicles) are used to load photomasks into various devices in most cases. AGVs are intelligent devices that achieve unmanned transportation based on automatic navigation technology. However, the process of AGVs performing magnetic strip navigation, laser alignment, and visual calibration to complete the loading is very time-consuming. Regardless of the size of the substrate, it takes more than 40 minutes from transportation to loading completion. For larger photomask products, the loading time is acceptable, but for smaller photomask products (such as photomasks for display panels below the G6 generation line, i.e., sizes below 850*1200mm), the time cost is undoubtedly too high. The time cost spent loading between multiple devices can even exceed the processing time of some equipment sections.

[0004] Therefore, in order to improve production efficiency, it is necessary to design a material loading device that can safely load materials to each section of equipment while only incurring a small time cost. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention aims to provide a multi-functional mask loading device. This solution enables the mask to be pushed out or pushed in laterally, achieving short-distance transport of the mask, reducing time consumption, improving production efficiency, and increasing production capacity.

[0006] This utility model is achieved through the following technical solution: A multi-functional mask loading device, comprising: A mobile frame, the mobile frame having a loading platform on top; The loading platform includes long strip clamps on both sides, each strip clamp has a raised rib on its opposite surface, and the two raised ribs are parallel to each other; each raised rib has a roller assembly on its top surface and side surface, and the roller assembly includes a number of rollers evenly distributed along the length of the raised rib, each roller being parallel to its mounting surface on the raised rib and capable of rotating around its own axis. The two roller sets located on the top are used to clamp the sidewalls of the mask, while the tops of the two roller sets located on the sides are used to support the bottom surface of the mask.

[0007] Compared to existing technologies that use AGVs to load photomasks onto various devices, especially for small-sized photomasks, the time cost of loading between multiple devices can even exceed the processing time of some equipment sections. This invention provides a multi-functional photomask loading device. This solution enables the photomask to be pushed out or pushed in laterally, achieving short-distance transportation of the photomask, reducing time consumption, improving production efficiency, and increasing production capacity. The specific design includes a movable frame with two sets of casters at its bottom for easy and rapid movement of the entire device. A loading platform is located at the top of the frame, comprising a frame and two parallel, elongated clamping plates on the frame. The two clamping plates have raised ribs on their opposite surfaces, similar to a stepped structure on the sides of the clamping plates. Roller sets are located on the top and sides of the raised ribs. When a mask needs to be placed, it can enter directly from the end of the raised rib and move inward via the roller sets, transferring the mask to the loading device. Similarly, when the mask needs to be removed, it can move horizontally out from the exit at the end of the raised rib. The roller sets on the sides support the bottom of the mask, while the roller sets on the top clamp the sides of the mask, guiding it and ensuring stable movement.

[0008] To further optimize the process and prevent external contact, a drive assembly is provided on the platform to actively drive the photomask's movement in and out. This drive assembly rotates at least one roller in the roller group, allowing the photomask to move in and out of the platform. The drive assembly can rotate each roller in the roller group, or it can rotate only some rollers at intervals. In this case, some rollers are active, and the rest are passive, all of which can move the photomask.

[0009] Further optimized, as a specific structure of a drive component, the drive component includes a first lead screw and a second lead screw, the first lead screw being rotatably connected between two long strip clamps; a first gear is coaxially sleeved at two protruding positions on the first lead screw; The protrusion has a cavity inside, and the second lead screw is rotatably connected to the cavity and is arranged along the length of the protrusion; a second gear is sleeved on the second lead screw; the first gear and the second gear are connected in a transmission and are used to drive the second lead screw to rotate; The second lead screw is also fitted with several third gears along its length; the roller has a connecting shaft, which passes through the convex strip and is connected to the fourth gear in the cavity. The third and fourth gears mesh with each other and are used to drive the connecting shaft to rotate. In this scheme, the first lead screw is rotatably connected to the frame of the loading platform or between two long strip clamps, so that the first lead screw can rotate around its own axis; first gears are fitted at both ends of the first lead screw; the second lead screw is located inside the long strip clamp and can also rotate around its own axis, with a second gear at its end; wherein, the first gear and the second gear can directly mesh for transmission, and both are bevel gears, such as the first gear extending into the cavity; if the distance between the first gear and the second gear is long, a lead screw can be added, the two ends of which mesh with the first gear and the second gear respectively through bevel gears, thereby facilitating the conversion of the transmission direction. When the second lead screw is driven to rotate as described above, it simultaneously drives several third gears on itself to rotate. The third gears can simultaneously drive the rollers on the top and side surfaces to rotate. If both the third and fourth gears are bevel gears, the fourth gear meshes with the top and side surfaces of the third gear. The fourth gear can drive the rollers to rotate through the connecting shaft. The rotation of the rollers can drive the mask to move. The circumferential surface of the rollers is rubber.

[0010] Further optimization involves manually driving the first lead screw to rotate, enabling the mask to move in and out. One end of the first lead screw extends out of the long clamping plate and is connected to a first rocker arm.

[0011] To further optimize the platform and adapt to the width of the mask by changing the spacing between the two long clamping plates, the platform also includes a frame, on which both long clamping plates are located. The frame is also equipped with a parallel third lead screw and a guide rod. The third lead screw is rotatably connected to the frame. One of the long strip clamps is threadedly connected to the third lead screw and slidably connected to the guide rod. The rotation of the third lead screw is used to move the long strip clamp closer to or away from the other long strip clamp. In this design, the frame has three crossbeams in the longitudinal direction. One long strip clamp is fixed to the outermost crossbeam, and another long strip clamp is located between the other two crossbeams. A third lead screw and a guide rod are arranged between the two crossbeams. A connecting block extends downward from the bottom of the other long strip clamp. This connecting block is threadedly connected to the third lead screw and slidably connected to the guide rod to achieve limiting. In this way, by rotating the third lead screw, the long strip clamp can be displaced, thereby changing the distance between the two long strip clamps.

[0012] Further optimization involves manually driving the third lead screw to rotate. The third lead screw extends out of the frame and is connected to a second rocker arm.

[0013] Further optimization involves aligning the top surface of the loading device with the platform of the external loading machine to facilitate the entry and exit of the mask. Therefore, lifting components are installed on both sides of the moving frame and between the frame to adjust the height of the top loading platform. These lifting components are used to raise and lower the frame. The lifting components can employ any existing conventional lifting structure, preferably a manual lifting structure, such as one controlled by a knob to rotate a lead screw. This is a conventional structure and will not be described further. Additionally, a leveling component can be installed on the loading device to adjust the levelness of the loading platform. This leveling component is a conventional leveling structure and will not be described further.

[0014] To further optimize the process and facilitate the inspection of the mask's appearance, the lifting assembly is fixed to the movable frame, and its output end is equipped with a lifting platform that abuts against the lower side of the frame. Hydraulic rods are hinged to both sides of the front end of the frame. The two ends of each hydraulic rod are hinged to the frame and the movable frame, respectively, and are used to drive the frame to rotate. In this design, the output end of the lifting assembly has a lifting platform. The middle part of the frame can be placed directly on the lifting platform or hinged to it. A hydraulic rod is located at the front end of the frame, with its lower end hinged to the front end of the movable frame. A ramp is also present on the front side of the movable frame to avoid obstructing the rotating frame. Therefore, by retracting the hydraulic rod, the upper frame can be rotated to change its tilt state. At this time, the appearance of the photomask can be inspected, and the tilted state also facilitates temporary storage of the photomask. In addition, a counterweight is added to the movable frame to increase the weight of the device, ensuring a low center of gravity, enhancing the stability of the device in practical use, and preventing the device from tipping over.

[0015] To further optimize the design and prevent the mask from slipping out when tilted, a baffle is fixed to the middle of the front end of the frame.

[0016] To further optimize the process and facilitate personnel to control the direction of the vehicle during transport, handles are provided on both sides of the frame.

[0017] Compared with the prior art, this utility model has the following advantages and beneficial effects: 1. This utility model provides a multi-functional mask loading device. By adopting this solution, the mask can be pushed out or pushed in laterally, realizing short-distance transportation of the mask, reducing time consumption, improving production efficiency, and increasing production capacity.

[0018] 2. This utility model provides a multi-functional mask loading device. Using this solution, the mask can be actively moved by the drive component, which facilitates the quick entry and exit of the mask; the lifting component can drive the loading platform to rise and fall, so as to be flush with the platform of the external loading machine; the hydraulic rod can drive the loading platform to rotate and tilt, which facilitates the inspection of the appearance of the mask; the above functions realize the multi-functional operation of the loading device. Attached Figure Description

[0019] The accompanying drawings, which are included to provide a further understanding of the embodiments of the present invention and form part of this application, do not constitute a limitation thereof. In the drawings: Figure 1 A perspective view of the multifunctional loading device for the mask plate provided by this utility model; Figure 2 Top view of the mask plate multifunctional loading device provided by this utility model; Figure 3 Rear view of the mask plate multifunctional loading device provided by this utility model; Figure 4 A side view of the mask plate multifunctional loading device provided by this utility model; Figure 5 A schematic diagram of the tilted state of the loading platform provided by this utility model; Figure 6 The transmission principle diagram of the drive component provided by this utility model; Figure 7 Schematic diagram of the leveling component provided by this utility model; Figure 8 A schematic diagram of the lifting component provided by this utility model; Figure 9 A schematic diagram of the hydraulic rod drive tilting state provided by this utility model.

[0020] The attached diagram shows the markings and corresponding component names: 1-Mobile frame, 2-Loading platform, 201-Long strip clamp, 202-Roller assembly, 203-First lead screw, 204-Second lead screw, 205-First rocker arm, 206-Third lead screw, 207-Guide rod, 208-Second rocker arm, 209-Frame, 210-Hydraulic rod, 211-Baffle, 212-Handle, 213-Lifting assembly. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.

[0022] Example 1: This Example 1 provides a multi-functional mask loading device, such as... Figures 1-5 As shown, it includes: A mobile frame 1, with a loading platform 2 on its top; The loading platform 2 includes long strip clamps 201 disposed on both sides, each strip clamp 201 having a protrusion on its opposite surface, the two protrusions being parallel to each other; roller sets 202 are provided on the top and side surfaces of the protrusions, each roller set 202 including a plurality of rollers evenly distributed along the length of the protrusion, each roller being parallel to its mounting surface on the protrusion and capable of rotating around its own axis; The two roller groups 202 located on the top are used to clamp the sidewall of the mask, and the top of the two roller groups 202 located on the side are used to support the bottom surface of the mask.

[0023] Compared to existing technologies that use AGVs to load photomasks onto various devices, especially for small-sized photomasks, the time cost of loading between multiple devices can even exceed the processing time of some equipment sections. This invention provides a multi-functional photomask loading device. This solution enables the photomask to be pushed out or pushed in laterally, achieving short-distance transportation of the photomask, reducing time consumption, improving production efficiency, and increasing production capacity. The specific design includes a movable frame 1 with two sets of casters at its bottom for easy movement of the entire device. A loading platform 2 is mounted on top of the movable frame 1. The loading platform 2 includes a frame 209 and two long clamping plates 201 on the frame 209. The two long clamping plates 201 are parallel to each other, and protrusions are provided on their opposite surfaces, similar to a stepped structure on the side of the long clamping plates 201. Pulleys are provided on the top and side surfaces of the protrusions. When a mask needs to be placed, the mask can enter directly from the end of the protrusion and move inward via the roller assembly 202, thereby transferring the mask to the loading device. Similarly, when the mask needs to be removed, it can move horizontally and exit from the outlet at the end of the protrusion. The roller assembly 202 located on the side is used to support the bottom surface of the mask, while the roller assembly 202 located on the top surface is clamped on both sides of the mask to guide it and enable it to move stably.

[0024] Example 2: This Example 2 is a further optimization based on Example 1, providing a driving component, such as... Figure 6 As shown.

[0025] In this embodiment, to actively drive the photomask in and out and avoid contact with external conditions, the platform 2 is also equipped with a driving component. The driving component is used to drive at least one roller in the roller group 202 to rotate. The rotating roller can drive the photomask in and out of the platform 2. The driving component can drive each roller in the roller group 202 to rotate, or it can drive some rollers to rotate at intervals. In this case, some are active rollers and the rest are passive rollers, all of which can drive the photomask to move.

[0026] In this embodiment, as Figure 6 As shown, as a specific structure of a drive assembly, the drive assembly includes a first lead screw 203 and a second lead screw 204. The first lead screw 203 is rotatably connected between two long strip clamps 201. At two protruding positions on the first lead screw 203, a first gear is coaxially sleeved. The protrusion has a cavity inside, and the second lead screw 204 is rotatably connected to the cavity and is arranged along the length of the protrusion; a second gear is sleeved on the second lead screw 204; the first gear and the second gear are connected in a transmission and are used to drive the second lead screw 204 to rotate; The second lead screw 204 is also fitted with several third gears along its length; the roller has a connecting shaft, which passes through the convex strip and is connected to the fourth gear in the cavity for transmission. The third gear and the fourth gear mesh with each other and are used to drive the connecting shaft to rotate. In this scheme, the first lead screw 203 is rotatably connected to the frame 209 of the loading platform 2 or between the two long strip clamps 201, so that the first lead screw 203 can rotate around its own axis; the first gear is fitted at both ends of the first lead screw 203; the second lead screw 204 is located inside the long strip clamp 201 and can also rotate around its own axis. The second lead screw 204 has a second gear at its end; wherein, the first gear and the second gear can directly mesh for transmission, and both are bevel gears, such as the first gear extending into the cavity; if the distance between the first gear and the second gear is long, a lead screw can be added, the two ends of which mesh with the first gear and the second gear respectively through bevel gears, thereby facilitating the conversion of the transmission direction. When the second lead screw 204 is driven to rotate as described above, it will simultaneously drive several third gears on itself to rotate. The third gears can simultaneously drive the rollers on the top and side surfaces to rotate. If both the third and fourth gears are bevel gears, the fourth gear meshes with the top and side surfaces of the third gear. The fourth gear can drive the rollers to rotate through the connecting shaft. The rotation of the rollers can drive the mask to move. The circumferential surface of the rollers is rubber.

[0027] In this embodiment, to manually drive the first lead screw 203 to rotate and realize the entry and exit of the mask, one end of the first lead screw 203 extends out of the long strip clamp 201 and is connected to the first rocker arm 205.

[0028] Example 3: This Example 3 further optimizes any of the above examples, providing an implementation method for changing the spacing between the two long strip clamps 201, such as... Figure 2 As shown.

[0029] In this embodiment, to accommodate the width of the mask, the loading platform 2 also includes a frame 209, and the two long strip clamps 201 are located on the frame 209. The frame 209 is also provided with a parallel third lead screw 206 and a guide rod 207. The third lead screw 206 is rotatably connected to the frame 209. One of the long strip clamps 201 is threadedly connected to the third lead screw 206 and slidably connected to the guide rod 207. The rotation of the third lead screw 206 is used to drive the long strip clamp 201 to move closer to or away from the other long strip clamp 201. In this design, the frame 209 has three crossbeams in the longitudinal direction. One long strip clamp 201 is fixed to the outermost crossbeam, and another long strip clamp 201 is located between the other two crossbeams. A third lead screw 206 and a guide rod 207 are provided between the two crossbeams. A connecting block extends downward from the bottom of the other long strip clamp 201. The connecting block is threadedly connected to the third lead screw 206 and slidably connected to the guide rod 207 to achieve limiting. In this way, by rotating the third lead screw 206, the long strip clamp 201 can be moved, thereby changing the distance between the two long strip clamps 201.

[0030] In this embodiment, the third lead screw 206 is manually driven to rotate. The third lead screw 206 extends out of the frame 209 and is connected to the second rocker arm 208.

[0031] Example 4: This example 4 further optimizes the previous example 3 by providing a lifting component 213, such as... Figure 3 and Figure 8 As shown.

[0032] In this embodiment, since the top surface of the loading device needs to be flush with the platform of the external loading machine to facilitate the entry and exit of the mask, lifting components 213 are provided on both sides of the movable frame 1 and between the frame 209 to adjust the height of the top loading platform 2. The lifting components 213 are used to drive the frame 209 to rise and fall. The lifting components 213 can adopt any existing conventional lifting structure, preferably a manual lifting structure, such as lifting and lowering by controlling the rotation of a lead screw with a knob, etc., which are existing conventional structures and will not be described further here. In addition, a leveling component can also be provided on the loading device to adjust the levelness of the loading platform 2, such as... Figure 7 As shown, the leveling component is a conventional leveling structure, which will not be described in detail here.

[0033] Example 5: This example 5 is a further optimization based on example 4, providing a tilted placement method, such as... Figure 5 and Figure 9 As shown (where Figure 5 The middle part of the inner frame 209 is always located at the top of the lifting assembly 213, which is a display error. Figure 9 (Subject to)

[0034] In this embodiment, in order to facilitate the inspection of the appearance of the mask, the lifting component 213 is fixed on the movable frame 1, and its output end is equipped with a lifting platform, which abuts against the lower side of the frame 209. Hydraulic rods 210 are hinged to both sides of the front end of the frame 209. The two ends of each hydraulic rod 210 are hinged to the frame 209 and the movable frame 1, respectively, and are used to drive the frame 209 to rotate. In this design, the output end of the lifting assembly 213 has a lifting platform. The middle part of the frame 209 can be placed directly on the lifting platform or hinged to it. The front end of the frame 209 has hydraulic rods 210, the lower end of which is hinged to the front end of the movable frame 1. The movable frame 1 also has a ramp on its front side to avoid obstructing the rotation of the frame 209. Therefore, by retracting the hydraulic rods 210, the upper frame 209 can be rotated to change its tilt state. At this time, the appearance of the photomask can be inspected, and the tilted state also facilitates temporary storage of the photomask. In addition, a counterweight is added to the movable frame 1 to increase the weight of the device, ensuring a low center of gravity, enhancing the stability of the device in practical use, and preventing the device from tipping over.

[0035] In this embodiment, to prevent the mask from sliding out when tilted, a baffle 211 is fixed at the middle of the front end of the frame 209.

[0036] In this embodiment, handles 212 are provided on both sides of the frame 209 to facilitate personnel to drag and control the direction during transportation.

[0037] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above description is only a specific embodiment of this utility model and is not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A multi-functional mask loading device, characterized in that, include: Mobile frame (1), the mobile frame (1) has a loading platform (2) on top; The loading platform (2) includes long strip clamps (201) on both sides, each strip clamp (201) has a protrusion on its opposite surface, and the two protrusions are parallel to each other; each protrusion has a roller assembly (202) on its top surface and side surface, the roller assembly (202) includes a number of rollers evenly distributed along the length of the protrusion, each roller is parallel to its mounting surface on the protrusion and can rotate around its own axis; The two roller sets (202) on the top are used to hold the sidewall of the mask, and the top of the two roller sets (202) on the side are used to support the bottom surface of the mask.

2. The multifunctional loading device for a mask according to claim 1, characterized in that, The loading platform (2) is also provided with a driving component, which is used to drive at least one roller in the roller group (202) to rotate. The rotating roller can drive the mask plate to enter and exit the loading platform (2).

3. The multifunctional loading device for a mask according to claim 2, characterized in that, The drive assembly includes a first lead screw (203) and a second lead screw (204). The first lead screw (203) is rotatably connected between two long strip clamps (201). At two protruding positions on the first lead screw (203), a first gear is coaxially sleeved. The protrusion has a cavity inside, and the second lead screw (204) is rotatably connected to the cavity and is arranged along the length of the protrusion; a second gear is sleeved on the second lead screw (204); the first gear and the second gear are connected in transmission and are used to drive the second lead screw (204) to rotate; The second lead screw (204) is also fitted with several third gears along its own length direction; the roller has a connecting shaft, which passes through the convex strip and is connected to the fourth gear in the cavity. The third gear and the fourth gear mesh with each other and are used to drive the connecting shaft to rotate.

4. The multifunctional loading device for a mask according to claim 3, characterized in that, One end of the first lead screw (203) extends out of the long strip clamp (201) and is connected to the first rocker arm (205).

5. The multifunctional loading device for a photomask according to claim 1, characterized in that, The cargo platform (2) also includes a frame (209), and the two long strip plates (201) are located on the frame (209); The frame (209) is also provided with a parallel third lead screw (206) and a guide rod (207), the third lead screw (206) and the frame (209) are rotatably connected; one of the long strip clamps (201) is threadedly connected to the third lead screw (206) and slidably connected to the guide rod (207); the rotation of the third lead screw (206) is used to drive the long strip clamp (201) to move closer to or away from the other long strip clamp (201).

6. The multifunctional loading device for a mask according to claim 5, characterized in that, The third lead screw (206) extends out of the frame (209) and is connected to the second rocker arm (208).

7. A multifunctional mask loading device according to claim 5, characterized in that, Lifting components (213) are provided on both sides of the mobile frame (1) and between the frame (209), and the lifting components are used to drive the frame (209) to lift.

8. A multifunctional mask loading device according to claim 7, characterized in that, The lifting assembly (213) is fixed on the mobile frame (1), and its output end has a lifting platform, which abuts against the lower side of the frame (209); Hydraulic rods (210) are hinged to both sides of the front end of the frame (209). The two ends of the hydraulic rods (210) are respectively hinged to the frame (209) and the moving frame (1), and are used to drive the frame (209) to rotate.

9. A multifunctional mask loading device according to claim 5, characterized in that, A baffle (211) is also fixed to the middle of the front end of the frame (209).

10. A multifunctional mask loading device according to claim 5, characterized in that, The frame (209) is also provided with handles (212) on both sides.

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