A packaging apparatus, device and wafer processing production line

Abstract

The application discloses a packaging device, equipment and wafer processing production line, the packaging device comprises a first film feeding mechanism, a second film feeding mechanism, a first sealing mechanism, a second sealing mechanism and an inflation mechanism; the first film feeding mechanism and the second film feeding mechanism respectively output packaging films, each packaging film is oppositely arranged and has a spacing space for placing materials between the packaging films; the first sealing mechanism seals multiple sides of the oppositely arranged packaging films and reserves at least one side as an opening; the inflation mechanism inflates the spacing space through the opening; and the second sealing mechanism seals the opening after inflation to complete packaging. In the application, the packaging films are output by the first film feeding mechanism and the second film feeding mechanism, the packaging films are preliminarily sealed by the first sealing mechanism to form packaging and contain materials, the packaging is inflated by the inflation mechanism, and then the second sealing mechanism is used to complete the sealing of the packaging, so that the packaging of wafers is more simple and convenient, the packaging efficiency is improved, and the product quality is ensured.

Description

Technical Field

[0001] This application relates to the field of wafer processing technology, and in particular to a packaging device, equipment and wafer processing production line. Background Technology

[0002] Wafer packaging is a crucial step in wafer processing. It occurs after cleaning away chemicals and contaminants from the wafer surface and ensuring the wafer meets specific standards and requirements. The final product is shipped after being boxed and packaged. In most wafer processing production lines, packaging is done manually, with each wafer individually wrapped in an inner bag and then an outer bag. This method is inefficient, time-consuming, and can easily compromise wafer quality during transit. Utility Model Content

[0003] This application proposes a packaging device to effectively solve the technical problems of low efficiency and easy quality problems in manual packaging in related technologies.

[0004] This application also proposes a packaging device that includes the above-described packaging apparatus.

[0005] This application also proposes a wafer processing production line that includes the aforementioned packaging equipment.

[0006] The first aspect of this application provides a packaging device, including: a first film feeding mechanism, a second film feeding mechanism, a first sealing mechanism, a second sealing mechanism, and an inflation mechanism;

[0007] The first film feeding mechanism and the second film feeding mechanism are used to output packaging film respectively, and each packaging film is arranged opposite to each other and forms a space between them for placing materials;

[0008] The first sealing mechanism is used to seal the packaging film arranged opposite to each other on multiple sides and leave at least one side as an opening;

[0009] The inflation mechanism is used to inflate the space through the opening;

[0010] The second sealing mechanism is used to seal the opening after inflation to complete the encapsulation.

[0011] Furthermore, the packaging device also includes a cutting mechanism, wherein the first film feeding mechanism and the second film feeding mechanism are used to output continuous packaging film, and the cutting mechanism is used to cut out packaging film adapted to the material.

[0012] Furthermore, the packaging device also includes a conveying mechanism for conveying the output packaging film so that the packaging film passes sequentially through the first sealing mechanism, the cutting mechanism, and the second sealing mechanism.

[0013] Furthermore, the packaging films output by the first film feeding mechanism and the second film feeding mechanism are arranged at vertical intervals, and the conveying mechanism includes a first conveying column and a second conveying column;

[0014] Multiple first conveying columns are arranged sequentially at intervals and used to convey and limit the packaging film output by the first film feeding mechanism, so that the packaging film output by the first film feeding mechanism is located above the packaging film output by the second film feeding mechanism.

[0015] Multiple second conveying columns are arranged sequentially at intervals and are used to convey and support the packaging film and materials output by the second film feeding mechanism.

[0016] Furthermore, the packaging device also includes a feeding mechanism, which is used to sequentially transfer materials to dock with the first sealing mechanism and place the materials within the interval space;

[0017] And / or the inflation mechanism includes an inflation port component, which is movably disposed at the work station of the second sealing mechanism, so that the inflation port component can extend into the opening and inflate within the interval space, or the inflation port component can exit from the opening after inflation and then be sealed by the second sealing mechanism.

[0018] Furthermore, the packaging device also includes a pushing mechanism for shaping the material, and the first sealing mechanism seals the packaging film on multiple sides after the pushing mechanism adjusts the material's shape.

[0019] Furthermore, the pushing mechanism includes a driving component and a pusher plate component;

[0020] The driving component is used to drive the pusher component so that the pusher component can extend into the opening and shape the material in the interval space, or the pusher component can exit from the opening after the first sealing mechanism performs multi-sided sealing;

[0021] The pusher assembly includes pusher plates that can be brought closer or further away from each other, the pusher plates being used to squeeze material together by bringing them closer together.

[0022] As can be seen from the above technical solutions, the embodiments of this application have at least the following beneficial effects: the packaging film is output through the first film feeding mechanism and the second film feeding mechanism, the packaging film is initially sealed by the first sealing mechanism to form a package and contain the material, the packaging is inflated by the inflation mechanism and then the second sealing mechanism is used to complete the sealing of the package. Through mechanical automation, the packaging of the wafers is made simpler and more convenient, packaging efficiency is improved, and product quality is guaranteed.

[0023] A second aspect of this application provides a packaging apparatus, including a packaging device as described in the first aspect of this application.

[0024] Furthermore, at least two packaging devices are provided, each of which is used to package the material layer by layer.

[0025] A third aspect of this application provides a wafer processing production line, including: a packaging apparatus as described in the first aspect of this application; or a packaging device as described in the second aspect of this application.

[0026] It is easy to understand that the packaging equipment in the second aspect embodiment of this application and the wafer processing production line in the third aspect embodiment of this application both have the same technical effects as the packaging device in the first aspect embodiment, and therefore will not be described again.

[0027] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of a packaging device provided in one embodiment of the present application, in which a pushing mechanism is not provided;

[0030] Figure 2 A schematic diagram of a packaging device provided in another embodiment of this application, wherein a pushing mechanism is provided;

[0031] Figure 3 This is a schematic diagram of a packaging device provided in one embodiment of the present application, wherein one packaging device is provided with a pushing mechanism and the other packaging device is not provided with a pushing mechanism;

[0032] Figure 4 This is a schematic diagram of the structure of a propulsion mechanism provided in one embodiment of this application.

[0033] Figure label:

[0034] 100. First film feeding mechanism;

[0035] 200. Second film feeding mechanism;

[0036] 300. First sealing mechanism;

[0037] 400. Second sealing mechanism;

[0038] 500. Inflatable mechanism;

[0039] 600. Pushing mechanism; 610. Driving component; 620. Push plate component; 621. Push plate;

[0040] 700. Conveying mechanism; 710. First conveying column; 720. Second conveying column;

[0041] 800. Cutting mechanism;

[0042] 900, Interval space;

[0043] 1000. Feeding mechanism. Detailed Implementation

[0044] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0045] It is understood that indium phosphide (InP) is a compound semiconductor material with advantages such as high electron mobility, high optical transmittance, low noise, and high stability, and is widely used in the manufacture of high-speed communication devices, optical devices, sensors, and lasers. Given the increasingly demanding requirements for indium phosphide wafer processing production lines, this application proposes a packaging device that automates wafer packaging to make it simpler, more convenient, and more efficient. However, it should be understood that any simple, adaptive modifications made by those skilled in the art based on the disclosure of the embodiments of this application, without inventive effort, to enable the packaging device to be used for packaging other types of materials, should also be considered within the scope of protection of this application.

[0046] See Figures 1 to 4 As shown, an embodiment of the first aspect of this application discloses a packaging device, including a first film feeding mechanism 100, a second film feeding mechanism 200, a first sealing mechanism 300, a second sealing mechanism 400, and an inflation mechanism 500.

[0047] The first film feeding mechanism 100 and the second film feeding mechanism 200 are used to output packaging films respectively, and the packaging films are arranged opposite each other and form a space 900 between them for placing materials; the first sealing mechanism 300 is used to seal the packaging films arranged opposite each other on multiple sides and leave at least one side as an opening; the inflation mechanism 500 is used to inflate the space 900 through the opening; the second sealing mechanism 400 is used to seal the opening after inflation to complete the sealing.

[0048] In the embodiments of this application, packaging film is output through the first film feeding mechanism 100 and the second film feeding mechanism 200, and the packaging film is initially sealed by the first sealing mechanism 300 to form packaging and contain materials. The packaging is then inflated by the inflation mechanism 500 and sealed by the second sealing mechanism 400. Through mechanical automation, the packaging of wafers is made simpler and more convenient, packaging efficiency is improved, and product quality is guaranteed.

[0049] It is understood that the first film feeding mechanism 100 and the second film feeding mechanism 200 respectively output packaging films, which are spaced apart and face each other. This creates a space 900 for placing materials. By placing the materials into the space 900 and then sealing the sides of the packaging films to form a packaging bag, the packaging process is complete. Furthermore, the packaging bag needs to be inflated to protect the product. Therefore, the sealing action is divided into two steps. First, the packaging film is sealed to form a packaging bag. At this point, the packaging bag has an opening for inflation or subsequent material shaping. The inflation mechanism 500 inflates the packaging bag through this opening, and then the second step seals the opening of the packaging bag. This achieves automated packaging, making packaging simpler, more convenient, and improving efficiency. It should be understood that because the packaging device of this application improves packaging efficiency, it reduces secondary contamination of materials caused by excessive packaging time or waiting time, thereby ensuring product quality.

[0050] In some embodiments, the packaging device of this application is used for packaging after wafer washing, inspection, and boxing. In this case, the first sealing mechanism seals three sides of the packaging film arranged opposite each other, leaving one side open. After the inflation mechanism 500 inflates, the second sealing mechanism seals the remaining side to complete the encapsulation. Specifically, if the first and second sealing mechanisms are arranged close to the inner side of the packaging film, the first sealing mechanism seals the outer side of the packaging film and the upper and lower sides of the packaging film along the conveying direction, and the second sealing mechanism seals the inner side of the packaging film to complete the encapsulation.

[0051] In other embodiments, the number of sealing edges of the packaging film by the first sealing mechanism can be adjusted according to the actual situation, thereby reserving an opening of a suitable position or size for use in subsequent work stations. The second sealing mechanism is used to cooperate with the first sealing mechanism to seal the film and complete the packaging.

[0052] In some embodiments, the sealing methods of the first sealing mechanism 300 and the second sealing mechanism 400 for sealing the packaging film include, but are not limited to, heat sealing, cold sealing, and pressure sealing, thereby first sealing the packaging films arranged opposite each other to form a packaging bag, and then sealing the opening to form a complete package.

[0053] In some embodiments, the first film feeding mechanism 100 and the second film feeding mechanism 200 may employ mechanisms including, but not limited to, film winding mechanisms and sheet film mechanisms, thereby outputting packaging films of corresponding forms and packaging materials.

[0054] It should be understood that the packaging device of this application can improve packaging efficiency. In specific use, it can be combined with the direct operation of technicians or with other mechanical mechanisms to perform corresponding actions, so that when the material passes through the various stations of the packaging device in the embodiment of this application during the entire packaging process, the connection can be smoother, further improving packaging efficiency.

[0055] The following will combine Figures 1 to 4 The packaging apparatus disclosed in the embodiments of this application will be explained and described in detail.

[0056] In some embodiments of this application, such as Figures 1 to 3 The packaging device also includes a cutting mechanism 800. A first film feeding mechanism 100 and a second film feeding mechanism 200 are used to output continuous packaging film, while the cutting mechanism 800 is used to cut packaging film to fit the material. It is understood that the first film feeding mechanism 100 and the second film feeding mechanism 200 employ a film winding mechanism, outputting continuous packaging film through unwinding to achieve continuous production and improve efficiency. To meet packaging requirements, the cutting mechanism 800 cuts the continuously output packaging film, cutting it into pre-defined sizes. This allows a set of relatively positioned packaging films to package one material and flow to the next station for sealing. Thus, mechanical automation simplifies and simplifies packaging, improving packaging efficiency.

[0057] In some embodiments, the packaging film is output via the first film feeding mechanism 100 and the second film feeding mechanism 200 and sequentially passes through the stations of the first sealing mechanism 300 and the second sealing mechanism 400. To this end, a cutting mechanism 800 is positioned between the first sealing mechanism 300 and the second sealing mechanism 400 along the conveying direction of the packaging film. After the packaging film is sealed into a bag at the first sealing mechanism 300, the continuous packaging film is cut, preventing the packaging film from deviating. In some embodiments, after the packaging film is sealed into a bag, the cutting mechanism 800 cuts along the conveying direction of the packaging film upstream and downstream of the bag, thereby cutting a bag of the appropriate size without damaging the product.

[0058] In some embodiments, the cutting mechanism 800 includes, but is not limited to, a blade-type cutting mechanism 800, a hot-cutting blade cutting mechanism 800, etc.

[0059] It is understandable that in some embodiments, when the production line operates in an intermittent manner, the positions of the first film feeding mechanism 100, the second film feeding mechanism 200, the first sealing mechanism 300, the second sealing mechanism 400, and the inflation mechanism 500 can be integrated to complete production in conjunction with the on-site operation of technicians. In this case, there is no need to configure the conveying mechanism 700 to allow the packaging film to pass through each station, but there is still room for optimization in terms of packaging efficiency and production capacity.

[0060] To ensure the continuously output packaging film can pass through each workstation smoothly and achieve continuous production, thereby improving packaging efficiency, some embodiments of this application include, for example... Figures 1 to 3 The packaging device also includes a conveying mechanism 700, which is used to convey the output packaging film so that the packaging film passes sequentially through the first sealing mechanism 300, the cutting mechanism 800, and the second sealing mechanism 400.

[0061] It is understandable that by conveying the packaging film through the conveying mechanism 700, and setting the first sealing mechanism 300, the cutting mechanism 800 and the second sealing mechanism 400 along the conveying path of the conveying mechanism 700, the packaging film can reach each workstation in sequence and perform the corresponding process, and finally achieve sealing. This not only further improves the convenience and efficiency of packaging through mechanical automation, but also enables continuous production and increases production capacity.

[0062] It should be understood that, depending on the different arrangement of the packaging films output by the first film feeding mechanism 100 and the second film feeding mechanism 200, the structure and conveying method of the conveying mechanism 700 also need to be adjusted accordingly.

[0063] In some embodiments, when the packaging films output by the first film feeding mechanism 100 and the second film feeding mechanism 200 are spaced along the left and right or along the front and back, the conveying mechanism 700 can be a commonly used conveying mechanism such as a roller conveyor, a belt conveyor, or a chain conveyor. The type of conveying mechanism can be determined according to the specific type of packaging film being conveyed. For example, when conveying sheet-shaped packaging film, a belt conveyor can be used, and when conveying continuous packaging film, a roller conveyor can be used.

[0064] When the packaging films output by the first film feeding mechanism 100 and the second film feeding mechanism 200 are spaced vertically, the conveying mechanism 700 can be a suction conveying mechanism, a roller conveying mechanism, or other conveying mechanisms. In addition to conveying, this type of conveying mechanism can also support the packaging film located below and limit the packaging film located above, so that the packaging films spaced vertically are not easily deviated during conveying.

[0065] In some embodiments of this application, such as Figures 1 to 3 The packaging films output by the first film feeding mechanism 100 and the second film feeding mechanism 200 are arranged vertically at intervals. The conveying mechanism 700 includes a first conveying column 710 and a second conveying column 720. A plurality of first conveying columns 710 are arranged at intervals in sequence and are used to convey and limit the packaging film output by the first film feeding mechanism 100 so that the packaging film output by the first film feeding mechanism 100 is located above the packaging film output by the second film feeding mechanism 200. A plurality of second conveying columns 720 are arranged at intervals in sequence and are used to convey and support the packaging film and materials output by the second film feeding mechanism 200.

[0066] Understandably, the first conveyor column 710 is used to convey the packaging film located above, and simultaneously limits the packaging film to maintain the gap between the upper and lower packaging films at an appropriate size so that materials can be placed inside. Furthermore, the second conveyor column 720 is used to convey and support the packaging film located below. After the material is placed within the gap and sealed by the first sealing mechanism 300, the second conveyor column 720 also conveys and supports the material to ensure that both the packaging film and the material can be transported.

[0067] In some embodiments, a portion of the first conveying column 710 may be configured as a conveying column with a tensioning function, thereby achieving the effect of conveying and limiting the packaging film output by the first film feeding mechanism 100. In other embodiments, a component with an adsorption function may also be provided on the first conveying column 710 to achieve a limiting effect.

[0068] Considering that the second transmission column 720, compared with the first transmission column 710, not only has the function of transmission, it also has the function of support.

[0069] In some embodiments, the number of second transmission columns 720 is greater than the number of first transmission columns 710. By setting an appropriate number of second transmission columns 720 at intervals, the transmission and support effect is improved.

[0070] In other embodiments, a third conveying column or support structure may be provided in the queue formed by the second conveying columns 720, and at least one third conveying column or at least one support structure may be inserted between at least partially adjacent second conveying columns 720, thereby improving the support effect.

[0071] To further improve automation, mechanical feeding is used instead of manual feeding, thereby enhancing packaging convenience and efficiency. In some embodiments of this application, such as... Figures 2 to 3 The packaging device also includes a feeding mechanism 1000, which is used to sequentially transfer materials to dock with the first sealing mechanism 300 and place the materials within the interval space 900.

[0072] It is understandable that the feeding mechanism 1000 can sequentially place materials into the interval space 900 and enable the first sealing mechanism 300 to continuously produce in accordance with the production rhythm, thereby further improving the convenience and efficiency of packaging through mechanical automation and increasing production efficiency.

[0073] In some embodiments, the feeding mechanism 1000 is a robotic arm. By setting feeding points for gripping materials and unloading points for releasing materials, it can sequentially transfer materials to dock with the first sealing mechanism 300 and place the materials within the interval space 900. Specifically, the feeding and unloading points can be adaptively adjusted according to actual conditions or the layout of the production line to meet production needs.

[0074] In some embodiments, when inner and outer packaging of wafers is required, two packaging devices are used for inner and outer packaging respectively. The robotic arm of the inner packaging device has its loading point at the location where the wafer or wafer box can be obtained, and its unloading point is the station of its first sealing mechanism 300, where the material is placed in the interval space 900. The robotic arm of the outer packaging device has its loading point at the station of the second sealing mechanism 400 of the inner packaging device, and its unloading point is the station of its first sealing mechanism 300, where the material is placed in the interval space 900.

[0075] In other embodiments, the feeding mechanism 1000 may be a belt feeding mechanism 1000, a chain feeding mechanism 1000, or a suction cup feeding mechanism 1000, etc.

[0076] In some embodiments of this application, the inflation mechanism 500 includes an inflation port component, which is movably disposed at the workstation of the second sealing mechanism 400. This allows the inflation port component to extend into the opening and inflate within the space 900, or for the inflation port component to retract from the opening after inflation, and then be sealed by the second sealing mechanism 400. It is understood that by integrating the positions of the inflation mechanism 500 and the second sealing mechanism 400, the inflation port component is positioned at the workstation of the second sealing mechanism 400 and can move in and out of the space 900 between the packaging films when in the workstation of the second sealing mechanism 400. This allows for convenient inflation via extension and timely retraction without affecting the sealing of the second sealing mechanism 400, reducing the area occupied by the equipment and making it simpler and more convenient to use.

[0077] In some embodiments, the inflation port component protects the material by introducing a protective gas such as nitrogen. In some embodiments, the movement of the inflation port component includes, but is not limited to, extension and retraction, linear movement, etc.

[0078] In some other embodiments, the first sealing mechanism 300, the inflation mechanism 500, and the second sealing mechanism 400 are arranged sequentially along the conveying direction. That is, the position of the inflation mechanism 500 is not integrated with the position of the second sealing mechanism 400. In this case, it is not necessary to set the inflation port component as a movable structure. However, in this case, the problem caused by air leakage needs to be considered and further targeted adjustments need to be made. This will not be described in detail here.

[0079] It should be understood that when materials require only one layer of packaging, packaging quality can be ensured by controlling the feeding point of the feeding mechanism 1000, or by having technicians reliably place the materials onto the first sealing mechanism 300. However, when materials require at least two layers of packaging, errors in the placement or orientation of the materials can easily occur when the inner and outer packaging are joined.

[0080] Therefore, in order to make the connection between inner and outer packaging more scientific, and to further improve the degree of automation and the quality of packaging, in some embodiments of this application, such as Figure 3 The packaging device also includes a pushing mechanism 600, which is used to shape the material. The first sealing mechanism 300 seals the packaging film on multiple sides after the pushing mechanism 600 adjusts the shape of the material.

[0081] It is understood that the pushing mechanism 600 is used to shape materials, which refers to adjusting the material's shape, such as orientation, looseness, or position. Specific actuators can be designed according to the specific type of material being adjusted to achieve the corresponding effect. It should be understood that in the packaging device of this application embodiment, after the inner packaging of the material is completed and before the outer packaging, the pushing mechanism 600 adjusts the material's shape, making the outer packaging less prone to errors and ensuring the quality of the packaging.

[0082] In some embodiments, the packaging apparatus of this application, whether used for inner packaging or outer packaging, may include this pushing mechanism 600 to ensure that the packaged product is in a suitable position and to ensure packaging quality. Specifically, in some embodiments, when wafers need to be packaged both innerly and outerly, the packaging apparatus for inner packaging does not include the pushing mechanism 600, while the packaging apparatus for outer packaging includes the pushing mechanism 600, thereby improving both automation and packaging quality.

[0083] In some embodiments of this application, such as Figure 4 The pushing mechanism 600 includes a driving component 610 and a pusher plate component 620; the driving component 610 is used to drive the pusher plate component 620 so that the pusher plate component 620 can extend into the opening and shape the material within the interval space 900, or the pusher plate component 620 can exit from the opening after the first sealing mechanism 300 performs multi-sided sealing; the pusher plate component 620 includes a pusher plate 621 that can be relatively close to or far away from each other, the pusher plate 621 being used to squeeze the material by being relatively close to each other.

[0084] It is understandable that by integrating the position of the pushing mechanism 600 with that of the first sealing mechanism 300, the pusher component 620 is positioned at the workstation of the first sealing mechanism 300 and can extend and retract into the space 900 between the packaging films when in the workstation of the first sealing mechanism 300. This allows for convenient shaping by extending in and timely withdrawal by retraction without affecting the subsequent conveying and circulation of the packaging film, reducing the area occupied by the equipment and making it simpler and more convenient to use. In this embodiment, when the packaging device is used for outer packaging, the material being shaped is the inner packaging film. Excess packaging film is squeezed up by compression, thereby improving outer packaging and ensuring packaging quality.

[0085] In some embodiments, the driving component 610 is a telescopic rod that drives the push plate component 620 to move by telescoping. In other embodiments, the driving component 610 may be a slider guide drive component 610, a lead screw and nut drive component 610, a gear and rack linear drive component 610, etc., which drives the push plate component 620 to move linearly to achieve extension or retraction.

[0086] In some other embodiments, the pushing mechanism 600, the first sealing mechanism 300, the inflation mechanism 500, and the second sealing mechanism 400 are arranged sequentially along the conveying direction. That is, the pushing mechanism 600 is not integrated into the position of the first sealing mechanism 300. In this case, it is not necessary to set the pushing mechanism 600 as a telescopic structure. However, further adjustments to the production line layout are required, which will not be described in detail here.

[0087] In one specific embodiment, the robotic arm transports the wafer from the protective compartment conveyor belt to the round box on the boxing compartment conveyor belt, tightens the round box, and then affixes a label. The wafer and round box are then conveyed together to the inner packaging area for packaging. The wafer and round box inside the packaging are then conveyed together to the outer packaging area for packaging, and the packaging process is complete.

[0088] The second aspect of this application discloses a packaging device, including: the packaging apparatus of the first aspect of this application.

[0089] It is understood that, when the packaging equipment of the present application embodiment is used for packaging, whether it is single-layer packaging or multi-layer packaging with inner, middle or outer layers, it can achieve the effect of improving packaging efficiency under the premise of having the packaging device of the first aspect embodiment of the present application.

[0090] In some embodiments of this application, at least two packaging devices are provided, each used to package materials layer by layer. It is understood that, given that the packaging equipment of this application has multiple packaging devices according to the first aspect of this application, each packaging device operates independently and is used to package materials layer by layer, thereby significantly improving packaging efficiency.

[0091] The packaging equipment of this application embodiment is described in detail below with reference to a specific example. It should be noted that the following embodiment is merely an exemplary description and should not be construed as limiting the embodiments of this application.

[0092] See Figure 3 As shown, the packaging equipment in this embodiment is divided into two parts, including an inner packaging part and an outer packaging part.

[0093] Reference Figure 1 ,for Figure 3The inner packaging unit includes a one-side sealing machine, a cutting machine, a three-side sealing machine, two-side pocket film output machines, and multiple conveyor columns. The conveyor columns are arranged in two rows to convey the two-side pocket films and also provide support. Two output machines output the two-side pocket films, which are then conveyed by the conveyor columns and sequentially pass through the three-side sealing machine, the cutting machine, and the one-side sealing machine. When the robotic arm places the round box between the two layers of film, it first passes through the three-side sealing machine to seal the three pockets, then is cut by the cutting machine to form packaging bags, which are then fed into the one-side sealing machine. After nitrogen is injected through the nitrogen filling port, the one-side sealing machine descends to seal, completing the inner packaging.

[0094] Reference Figure 2 ,for Figure 3 The packaging device for the outer packaging section is basically similar to that for the inner packaging section, with only one difference: a pushing mechanism 600 is added to the outer packaging section. The pushing mechanism 600 is referenced from... Figure 4 It includes a push plate 621 and a telescopic column. When the push plate 621 is pushed, the push plates 621 on both sides move in the same direction to squeeze up the excess part of the packaging bag. The telescopic column is used for the entry and exit of the push equipment on both sides. By combining the operation and working logic of the inner packaging part, the outer packaging can be completed.

[0095] Understandably, in the packaging process of related technologies, employees can only wrap the wafers one by one into inner and outer bags, resulting in low packaging efficiency and long time consumption. Compared with the prior art, the packaging device provided in this application uses a robotic arm to place the wafers, allowing the robotic arm to perform wafer placement and packaging operations in multiple round boxes by only passing through a few points. At the same time, it reduces the area occupied by the equipment, and the automation of the machinery improves efficiency and makes it simpler and more convenient to use. In particular, the packaging device of the embodiments of this application adopts a multi-blade design that can cut packaging materials and seal, as well as a heat-sealing design, thereby packaging wafers efficiently and conveniently, improving packaging efficiency.

[0096] The third aspect of this application discloses a wafer processing production line, including: a packaging apparatus according to the first aspect of this application, or a packaging device according to the second aspect of this application.

[0097] It is understandable that when the wafers to be packaged on the production line require only one layer of packaging, using the packaging apparatus of the first aspect of this application can make packaging simpler, more convenient, and improve packaging efficiency. When the wafers to be packaged on the production line require two layers of packaging, using the packaging apparatus or packaging equipment of the embodiments of this application to package at least one layer can also achieve the above-mentioned effects. Furthermore, the packaging equipment of the embodiments of this application can also be used to package the wafers layer by layer, that is, both the inner and outer packaging are performed using the packaging apparatus of the embodiments of this application. Through mechanical automation, the packaging of the wafers is made simpler, more convenient, and packaging efficiency is improved.

[0098] It is easy to understand that the packaging equipment in the second aspect embodiment of this application and the wafer processing production line in the third aspect embodiment of this application both have the same technical effects as the packaging device in the first aspect embodiment, and therefore will not be described again.

[0099] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0100] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0101] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0102] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. A packaging device, characterized in that, include: The system comprises a first film feeding mechanism, a second film feeding mechanism, a first sealing mechanism, a second sealing mechanism, and an inflation mechanism; The first film feeding mechanism and the second film feeding mechanism are used to output packaging film respectively, and each packaging film is arranged opposite to each other and forms a space between them for placing materials; The first sealing mechanism is used to seal the packaging film arranged opposite to each other on multiple sides and leave at least one side as an opening; The inflation mechanism is used to inflate the space through the opening; The second sealing mechanism is used to seal the opening after inflation to complete the encapsulation.

2. The packaging apparatus according to claim 1, characterized in that: The packaging device further includes a cutting mechanism, wherein the first film feeding mechanism and the second film feeding mechanism are used to output continuous packaging film, and the cutting mechanism is used to cut out packaging film that is compatible with the material.

3. The packaging apparatus according to claim 2, characterized in that: The packaging device further includes a conveying mechanism for conveying the output packaging film so that the packaging film passes sequentially through the first sealing mechanism, the cutting mechanism, and the second sealing mechanism.

4. The packaging apparatus according to claim 3, characterized in that: The packaging films output by the first film feeding mechanism and the second film feeding mechanism are arranged at vertical intervals, and the conveying mechanism includes a first conveying column and a second conveying column; Multiple first conveying columns are arranged sequentially at intervals and used to convey and limit the packaging film output by the first film feeding mechanism, so that the packaging film output by the first film feeding mechanism is located above the packaging film output by the second film feeding mechanism. Multiple second conveying columns are arranged sequentially at intervals and are used to convey and support the packaging film and materials output by the second film feeding mechanism.

5. The packaging apparatus according to claim 1, characterized in that: The packaging device also includes a feeding mechanism, which is used to sequentially transfer materials to dock with the first sealing mechanism and place the materials within the interval space. And / or the inflation mechanism includes an inflation port component, which is movably disposed at the work station of the second sealing mechanism, so that the inflation port component can extend into the opening and inflate within the interval space, or the inflation port component can exit from the opening after inflation and then be sealed by the second sealing mechanism.

6. The packaging apparatus according to any one of claims 1 to 5, characterized in that: The packaging device also includes a pushing mechanism for shaping the material. The first sealing mechanism seals the packaging film on multiple sides after the pushing mechanism adjusts the shape of the material.

7. The packaging apparatus according to claim 6, characterized in that: The pushing mechanism includes a driving component and a pusher plate component; The driving component is used to drive the pusher component so that the pusher component can extend into the opening and shape the material in the interval space, or the pusher component can exit from the opening after the first sealing mechanism performs multi-sided sealing; The pusher assembly includes pusher plates that can be brought closer or further away from each other, the pusher plates being used to squeeze material together by bringing them closer together.

8. A packaging equipment, characterized in that, include: The packaging apparatus as described in any one of claims 1 to 7.

9. The packaging equipment according to claim 8, characterized in that: The packaging device is provided in at least two parts, and each packaging device is used to package the material layer by layer.

10. A wafer processing production line, characterized in that, include: The packaging apparatus as described in any one of claims 1 to 7; or the packaging equipment as described in claim 8 or 9.

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