Anti-static wafer transfer box
By setting an antistatic coating and adjusting the structure on the wafer turnover box, the adaptability problem of non-standard size wafers is solved, the cleaning function is enhanced, and the diverse production needs are met.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SEMIGLORY SEMICON MATERIAL (JIASHAN) CO LTD
- Filing Date
- 2025-07-31
- Publication Date
- 2026-07-21
AI Technical Summary
Existing wafer turnover boxes cannot accommodate non-standard sized wafers and have limited functionality, failing to meet diverse production needs.
An antistatic wafer turnover box was designed with an antistatic coating on the surface and a telescopic connection to an adjustment structure via slots. The slots are equipped with water-permeable holes for easy cleaning and can accommodate wafers of different sizes.
It enables adaptive placement of non-standard sized wafers and adds cleaning functionality, improving production flexibility and efficiency.
Smart Images
Figure CN224529388U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wafer box technology, specifically to an antistatic wafer turnover box. Background Technology
[0002] In the wafer manufacturing process, wafers need to be placed in process turnover boxes and moved between various processes. The size of the process turnover box corresponds to the size of the wafer, and the mainstream sizes are currently fixed sizes such as 4-inch, 6-inch, 8-inch, and 12-inch. However, with the horizontal development of the industry, many companies have introduced non-standard wafer sizes, such as 4.3-inch, 5.2-inch, and 6.125-inch, in order to provide a more comprehensive product range and have stronger production compatibility. These non-standard sizes can vary arbitrarily, which has brought great trouble to existing silicon wafer manufacturers when selecting process turnover boxes; moreover, process turnover boxes often only serve a turnover function and do not have other functions. Summary of the Invention
[0003] To address the shortcomings of the existing technology, this invention proposes an antistatic wafer turnover box.
[0004] To achieve the above-mentioned technical effects, the present invention adopts the following solution:
[0005] An antistatic wafer turnover box is provided, the surface of which is coated with an antistatic coating. The turnover box includes a slot 1 and a slot 2, which are arranged opposite to each other. A plurality of slot 1 grooves are provided on the side of slot 1 opposite to slot 2, the length of which extends from top to bottom. A plurality of slot 2 grooves are provided on the side of slot 2 opposite to slot 1, the length of which extends from top to bottom. The slot 2 grooves correspond one-to-one with the slot 1 grooves for placing wafers. The outer wall of slot 1 has a plurality of first water-permeable holes communicating with the slot 1 grooves, and the outer wall of slot 2 has a plurality of holes communicating with the slot 2 grooves. The second water-permeable hole is provided. The front and rear sides of the first slot and the second slot are connected by an adjustment structure. The adjustment structure includes a guide sleeve set on one side wall of the slot. The guide sleeve has a guide hole that penetrates the guide sleeve in the horizontal direction. The cross-sectional shape of the guide hole is rectangular. A guide plate is slidably provided in the guide hole. One end of the guide plate is fixed to the side wall of the second slot. The upper surface of the guide sleeve has a first strip hole along its length direction. The first strip hole communicates with the guide hole. The lower surface of the guide sleeve has a second strip hole along its length direction. The second strip hole communicates with the guide hole.
[0006] In a preferred embodiment, the guide plate includes a first assembly plate and a second assembly plate symmetrically arranged. The first assembly plate and the second assembly plate are attached to each other to form a guide plate. The first assembly plate and the second assembly plate are detachably connected. A first arc groove is provided on the side of the first assembly plate connected to the second assembly plate. A second arc groove is provided on the inner wall of the first arc groove. A first polygonal groove is provided at the upper end of the first arc groove. A second polygonal groove is provided at the lower end of the arc groove. Two first arc grooves on the first assembly plate and the second assembly plate cooperate to form a central shaft hole. Two second arc grooves cooperate to form a limiting rotation groove. Two first polygonal grooves cooperate to form a first nut hole. Two second polygonal grooves cooperate to form a second nut hole.
[0007] In a preferred embodiment, the first assembly plate and the second assembly plate are detachably connected by screws.
[0008] In a preferred embodiment, the upper edges of both slot one and slot two extend outward to form a support edge.
[0009] In a preferred embodiment, a first rubber washer is fitted onto the first threaded portion, with the first rubber washer positioned above the first nut; a second rubber washer is fitted onto the second threaded portion, with the second rubber washer positioned below the second nut.
[0010] Compared with existing technologies, the beneficial effects are:
[0011] This utility model has a simple structure and is easy to use. Slot 1 and Slot 2 are provided with several first water-permeable holes and second water-permeable holes, so the turnover box can be placed directly in the cleaning tank to clean the wafers, which increases the function of the turnover box. In addition, Slot 1 and Slot 2 are connected by an adjustable structure, which can arbitrarily change the distance between Slot 1 and Slot 2 to meet the needs of wafers of any size, bringing convenience to manufacturers that produce non-standard sized wafers. Attached Figure Description
[0012] Figure 1 This is a schematic diagram of the structure of this utility model.
[0013] Reference numerals in the attached drawings: 1. Slot 1; 2. Slot 2; 3. Card slot 1; 4. Card slot 2; 5. Second water-permeable hole; 6. Guide sleeve; 7. Guide plate; 8. First strip hole; 9. First adjusting component; 10. Second adjusting component. Detailed Implementation
[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.
[0015] An antistatic wafer turnover box is provided, the surface of which is coated with an antistatic coating. The turnover box includes a slot 1 and a slot 2, which are arranged opposite to each other. A plurality of slots 3 are provided on the side of slot 1 opposite to slot 2, the length of which extends from top to bottom. A plurality of slots 2 are provided on the side of slot 2 opposite to slot 1, the length of which extends from top to bottom. The slots 2 and slots 3 are arranged in a one-to-one correspondence for placing wafers. The outer wall of slot 1 has a plurality of first water-permeable holes communicating with the slots 3. The outer wall of the second slot 2 has several second water-permeable holes 5 that communicate with the second slot 2. The first slot 1 and the front and rear sides of the second slot 2 are connected by an adjustment structure. The adjustment structure includes a guide sleeve 6 set on the side wall of the first slot 1. The guide sleeve 6 is provided with a guide hole that passes through the guide sleeve 6 in the horizontal direction. The cross-sectional shape of the guide hole is rectangular. A guide plate 7 is slidably provided in the guide hole. One end of the guide plate 7 is fixed to the side wall of the second slot 2. The upper surface of the guide sleeve 6 is provided with a first strip hole 8 along its length direction. The first strip hole 8 communicates with the guide hole.
[0016] The wafer is placed upright in the corresponding slot 3 and slot 2. Due to the setting of the first water-permeable hole and the second water-permeable hole 5, the turnover box can be placed in the cleaning pool to clean the wafer.
[0017] In a preferred embodiment, the guide plate includes a first assembly plate and a second assembly plate symmetrically arranged. The first assembly plate and the second assembly plate are attached to each other to form a guide plate 7. The first assembly plate and the second assembly plate are detachably connected. A first arc groove is provided on the side where the first assembly plate and the second assembly plate are connected. A second arc groove is provided on the inner wall of the first arc groove. A first polygonal groove is provided at the upper end of the first arc groove. A second polygonal groove is provided at the lower end of the arc groove. Two first arc grooves on the first assembly plate and the second assembly plate cooperate to form a central shaft hole. Two second arc grooves cooperate to form a limiting rotation groove. Two first polygonal grooves cooperate to form a first nut hole. Two second polygonal grooves cooperate to form a second nut hole.
[0018] In a preferred embodiment, the first assembly plate and the second assembly plate are detachably connected by screws.
[0019] In a preferred embodiment, the upper edges of both slot one and slot two extend outward to form a support edge, which facilitates the lifting of the turnover box and allows the turnover box to be hung in the cleaning tank for cleaning wafers.
[0020] In a preferred embodiment, a first rubber washer is fitted onto the first threaded portion and is located above the first nut. A second rubber washer is fitted onto the second threaded portion and is located below the second nut. When tightening the guide and guide sleeve 6, the first rubber washer increases the friction between the first nut and the upper end of the guide hole, and the second rubber washer increases the friction between the second nut and the bottom of the guide hole, which is more conducive to locking.
[0021] In the description of this utility model, it should be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.
[0023] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
Claims
1. An antistatic wafer turnover box, characterized in that, The turnover box has an antistatic coating on its surface. The turnover box includes a slot one and a slot two, which are positioned opposite each other. Slot one has several card slots (slot 1) on its side opposite slot two, with the length of each card slot from top to bottom. Slot two has several card slots (slot 2) on its side opposite slot one, with the length of each card slot from top to bottom. The card slots (slot 2) correspond one-to-one with the card slots (slot 1) for placing wafers. The outer wall of slot one has several first water-permeable holes communicating with the card slots (slot 1), and the outer wall of slot two has several second water-permeable holes communicating with the card slots (slot 2). The front and rear sides of slot one and slot two are connected by an adjustment structure. The adjustment structure includes a guide sleeve set on one side wall of the slot. The guide sleeve has a guide hole that penetrates the guide sleeve in the horizontal direction. The cross-sectional shape of the guide hole is rectangular. A guide plate is slidably arranged in the guide hole. One end of the guide plate is fixed to the side wall of slot two. The upper surface of the guide sleeve has a first strip hole along its length direction, which communicates with the guide hole. The lower surface of the guide sleeve has a second strip hole along its length direction, which communicates with the guide hole.
2. The antistatic wafer turnover box as described in claim 1, characterized in that, The guide plate includes a first assembly plate and a second assembly plate symmetrically arranged. The first assembly plate and the second assembly plate are attached to each other to form a guide plate. The first assembly plate and the second assembly plate are detachably connected. A first arc groove is provided on the side of the first assembly plate connected to the second assembly plate. A second arc groove is provided on the inner wall of the first arc groove. A first polygonal groove is provided at the upper end of the first arc groove. A second polygonal groove is provided at the lower end of the arc groove. Two first arc grooves on the first assembly plate and the second assembly plate cooperate to form a central shaft hole. Two second arc grooves cooperate to form a limiting rotation groove. Two first polygonal grooves cooperate to form a first nut hole. Two second polygonal grooves cooperate to form a second nut hole.
3. The antistatic wafer turnover box as described in claim 2, characterized in that, The first assembly plate and the second assembly plate are detachably connected by screws.
4. The antistatic wafer turnover box as described in claim 1, characterized in that, The upper edges of both slot one and slot two extend outward to form a support edge.
5. The antistatic wafer turnover box as described in claim 1, characterized in that, A first rubber washer is fitted onto the first threaded portion, and the first rubber washer is located above the first nut. A second rubber washer is fitted onto the second threaded portion, and the second rubber washer is located below the second nut.