A feeding device and a polysilicon heating equipment
By designing the transfer and feeding components, a highly efficient silicon pillar supply for the polycrystalline silicon heating equipment was achieved, solving the problem of low feeding efficiency in existing technologies and ensuring a stable supply for the polycrystalline silicon heating equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DONGGUAN CSG INTELLIGENT EQUIP MFG CO LTD
- Filing Date
- 2025-06-12
- Publication Date
- 2026-07-21
AI Technical Summary
The existing feeding device has low feeding efficiency and cannot efficiently supply silicon pillars to polysilicon heating equipment.
The design employs a transfer component and a feeding component. Through the coordinated movement of the first carrier and the second carrier, continuous supply of silicon pillars is achieved. This includes the up-and-down movement of the first carrier and the sliding of the second carrier along the length direction. The alternating use of the feeding section and the discharging section ensures stable delivery of the silicon pillars.
This improved the feeding efficiency of the feeding device, ensured a stable supply to the polysilicon heating equipment, and enhanced the working efficiency of the silicon pillar.
Smart Images
Figure CN224529741U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of automation equipment technology, and in particular to a feeding device and a polycrystalline silicon heating device. Background Technology
[0002] In related technologies, polycrystalline silicon needs to be pulverized before use. This requires high-temperature and cooling treatment of the polycrystalline silicon to facilitate subsequent pulverization operations.
[0003] In the process of heating polycrystalline silicon, the feeding device usually uses a motor and lead screw structure to drive the carrier to move to the heating area. The polycrystalline silicon heating equipment performs high-temperature treatment on the polycrystalline silicon on the carrier. Typically, the polycrystalline silicon is heated to 450℃-500℃ and then instantly placed into high-purity water at room temperature for rapid cooling. Due to the physical property of thermal expansion and contraction, the polycrystalline silicon produces many cracks due to the drastic change in internal stress. As a result, the silicon pillar can be better crushed in the subsequent process.
[0004] However, the feeding device uses a motor and lead screw structure to drive the carrier, which needs to travel a long distance to supply the silicon pillars to be heated to the polysilicon heating equipment. With this setup, the feeding device has a low supply efficiency. Utility Model Content
[0005] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a feeding device and a polycrystalline silicon heating equipment to improve the feeding efficiency of the feeding device.
[0006] In a first aspect, embodiments of this application provide a feeding device, including:
[0007] Machine tool;
[0008] The transfer component includes a first vehicle and a first drive module. The first drive module is disposed on the machine base and is used to drive the first vehicle to move up and down. The first vehicle is provided with a plurality of first placement slots in sequence.
[0009] The feeding assembly includes a second carrier and a second drive module. The second drive module is disposed on the machine base and is used to drive the second carrier to slide along its length direction. The second carrier is provided with a plurality of second placement slots in sequence and is arranged side by side with the second carrier.
[0010] The second carrier includes a feeding section and a discharging section, which are equidistant from each other. When the feeding section extends relative to the first carrier, it receives the incoming silicon pillars. The discharging section is aligned with the first carrier to support the silicon pillars on the first carrier. When the discharging section extends relative to the first carrier, it discharges the silicon pillars, and the feeding section is aligned with the first carrier to place the silicon pillars on the first carrier.
[0011] According to some embodiments of the present invention, the second carrier further includes an intermediate section, which is connected between the feeding section and the discharging section;
[0012] Wherein, the length of the intermediate section is set to X1, and the lengths of the feeding section and the discharging section are set to X2, X1 = nX2, where n is greater than or equal to 1.
[0013] According to some embodiments of this utility model, the feeding section, the intermediate section, and the discharging section are all of the same length and are half the length of the first carrier.
[0014] According to some embodiments of the present invention, the first placement groove is provided with relatively unfolded first guide slopes on both sides; the second placement groove is provided with relatively unfolded second guide slopes on both sides.
[0015] According to some embodiments of the present invention, the bottom of the first placement slot is provided with a first supporting plane, and the bottom of the second placement slot is provided with a second supporting plane.
[0016] According to some embodiments of the present invention, the first guide slope is provided with a first support pad, and the second guide slope is provided with a second support pad.
[0017] According to some embodiments of the present invention, multiple second vehicles and multiple first vehicles are provided, and the multiple second vehicles and the multiple first vehicles are arranged alternately.
[0018] According to some embodiments of the present invention, two first connectors are fixedly provided between the bottoms of a plurality of first carriers, and two second connectors are fixedly provided between the bottoms of a plurality of second carriers; wherein, one first connector is located between two second connectors, and the second drive module is connected to the second connector.
[0019] According to some embodiments of the present invention, the feeding assembly further includes a sliding seat, the sliding seat and the second carrier are both slidably disposed on the machine base and connected to each other, and the second drive module is used to drive the sliding seat to slide.
[0020] Secondly, embodiments of this application provide a polycrystalline silicon heating device, including the aforementioned feeding device.
[0021] As can be seen from the above technical solutions, the embodiments of this application have the following advantages: In the first stage, the first driving module drives the first carrier to move upward, and the first carrier lifts the silicon pillar on the second placement slot of the second carrier upward through the first placement slot. In the second stage, the second driving module is used to drive the second carrier to move the feeding section to the left by a distance. At this time, the feeding section is in an extended state to the left relative to the first carrier, and the external device can add the silicon pillar to the feeding section. In the third stage, the first driving module drives the first carrier to move downward, and the first carrier places the silicon pillar in the second placement slot of the second carrier through the first placement slot. In the fourth stage, the second driving module is used to drive the second carrier to move the discharging section to the right by a distance. At this time, the discharging section is in an extended state to the right relative to the first carrier, so that the external device can easily grab the silicon pillar from the discharging section; at the same time, the feeding section is aligned with the first carrier, and the first driving module drives the first carrier to move upward, thereby lifting the silicon pillar in the feeding section and the silicon pillars at other positions on the second carrier. This cycle continues, and the feeding component, through the transfer component, can continuously supply silicon pillars to be heated to the polycrystalline silicon heating equipment. Attached Figure Description
[0022] Figure 1 This is a schematic diagram of the feeding device according to an embodiment of the present utility model;
[0023] Figure 2 This is an exploded structural diagram of the feeding device according to an embodiment of the present utility model;
[0024] Figure 3 This is another exploded structural diagram of the feeding device according to an embodiment of the present utility model;
[0025] Figure 4 This is a schematic diagram of the assembly structure of the first and second carriers according to an embodiment of the present utility model.
[0026] The meanings of the reference numerals in the attached figures are as follows:
[0027] 100. Machine base; 200. Transfer assembly; 210. First carrier; 211. First placement slot; 212. First guide ramp; 213. First support plane; 220. First drive module; 230. First connector; 300. Feeding assembly; 310. Second drive module; 320. Second carrier; 321. Second placement slot; 322. Second guide ramp; 323. Second support plane; 324. Feeding section; 325. Discharge section; 326. Intermediate section; 330. Second connector; 340. Sliding seat; 400. First slide rail assembly; 500. Second slide rail assembly; 600. Silicon pillar. Detailed Implementation
[0028] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.
[0029] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, up, down, etc., indicating the directional or positional relationship, are based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0030] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.
[0031] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.
[0032] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0033] The present invention will now be described in further detail with reference to the accompanying drawings.
[0034] Please see Figures 1 to 2A feeding device provided in this embodiment of the present invention includes a machine base 100, a feeding component 300, and a transfer component 200. The transfer component 200 includes a first carrier 210 and a first drive module 220. The first drive module 220 is disposed on the machine base 100 and is used to drive the first carrier 210 to move up and down. The first carrier 210 is sequentially provided with a plurality of first placement slots 211. The feeding component 300 includes a second carrier 320 and a second drive module 310. The second drive module 310 is disposed on the machine base 100 and is used to drive the second carrier 320 to slide along its length. The second carrier 320 is sequentially provided with a plurality of second placement slots 321. The first carrier 210 is arranged in parallel with the second carrier 320. The second carrier 320 includes a feeding section 324 and a discharging section 325. The feeding section 324 and the discharging section 325 are arranged at equal distances. When the feeding section 324 extends relative to the first carrier 210, it receives the incoming silicon pillar 600. The discharging section 325 is aligned with the first carrier 210 to support the silicon pillar 600 on the first carrier 210. When the discharging section 325 extends relative to the first carrier 210, it discharges the silicon pillar 600, and the feeding section 324 is aligned with the first carrier 210 to place the silicon pillar 600 on the first carrier 210.
[0035] Specifically, in the first stage, the first drive module 220 drives the first carrier 210 to move upward, and the first carrier 210 lifts the silicon pillar 600 on the second placement slot 321 of the second carrier 320 upward through the first placement slot 211. In the second stage, the second drive module 310 drives the second carrier 320 to move the feed section 324 to the left by a distance. At this time, the feed section 324 is extended to the left relative to the first carrier 210, and an external device can add the silicon pillar 600 onto the feed section 324. In the third stage, the first drive module 220 drives the first carrier 210 to move downward, and the first carrier 210 places the silicon pillar 600 into the second placement slot 321 of the second carrier 320 through the first placement slot 211. In the fourth stage, the second drive module 310 drives the second carrier 320 to move the discharge section 325 to the right by a distance. At this time, the discharge section 325 is extended to the right relative to the first carrier 210, making it convenient for external equipment to grab the silicon pillar 600 from the discharge section 325. At the same time, the feeding section 324 is aligned with the first carrier 210, and the first drive module 220 drives the first carrier 210 to move upward, thereby lifting the silicon pillar 600 in the feeding section 324 and the silicon pillars 600 in other positions on the second carrier 320. This cycle continues, and the feeding assembly 300 can continuously supply the silicon pillars 600 to be heated to the polysilicon heating equipment through the transfer assembly 200.
[0036] With this configuration, when the second carrier 320 transports the silicon pillar 600 to the required position, it transfers the silicon pillar 600 to the first carrier 210, and then supports the silicon pillar 600 from the first carrier 210 to transport it to the required position. With the assistance of the first carrier 210, the second carrier 320 can supply silicon pillars 600 over long distances without requiring a large travel distance, thus ensuring the working efficiency of the silicon pillar 600 and guaranteeing a stable supply of silicon pillars 600 to the polycrystalline silicon heating equipment.
[0037] In some embodiments, please refer to Figures 2 to 3 The second carrier 320 also includes an intermediate section 326, which connects the feed section 324 and the discharge section 325. The length of the intermediate section 326 is set to X, and the lengths of the feed section 324 and the discharge section 325 are also set to X, where X = nX, and n is greater than or equal to n. For example, n = 1, X = X. The feed section 324, the discharge section 325, and the intermediate section 326 are used to store the same number of silicon pillars 600. Figure 3 As shown, the second carrier 320 is divided into three sections along its length: a feeding section 324, a middle section 326, and a discharging section 325. Each of the feeding section 324, the middle section 326, and the discharging section 325 is provided with three second placement slots 321 for placing silicon pillars 600. Of course, in other possible embodiments, the second carrier 320 may not need a middle section 326; only the feeding section 324 and the discharging section 325 are required.
[0038] For example, the feed section 324, intermediate section 326, and discharge section 325 are of the same length and are half the length of the first carrier 210. It can be understood that the length of the first carrier 210 is twice the length of the feed section 324, intermediate section 326, and discharge section 325, and the first carrier 210 and the second carrier 320 can cooperate to transport the silicon pillar 600 away from the ground.
[0039] Understandably, through the configuration of the intermediate section 326, during its reciprocating motion in the left-right direction, the intermediate section 326 supports the silicon pillars 600 on the first carrier 210 and transports the silicon pillars 600 to the right along the length of the first carrier 210. For example, the silicon pillars 600 at the first three positions on the first carrier 210 are transported to the silicon pillars 600 at the last three positions on the first carrier 210 under the action of the intermediate section 326. Thus, through the configuration of the intermediate section 326, the feeding device can further transport the silicon pillars 600 over a longer distance.
[0040] In some embodiments, please refer to Figures 2 to 3The first placement groove 211 has relatively unfolded first guide slopes 212 on both sides, and a first support plane 213 at the bottom; the second placement groove 321 has relatively unfolded second guide slopes 322 on both sides, and a second support plane 323 at the bottom. It can be understood that the first placement groove 211 has relatively unfolded first guide slopes 212 on both sides, or in other words, the first placement groove 211 is approximately V-shaped; similarly, the first placement groove 211 has relatively unfolded first guide slopes 212 on both sides, or in other words, the first placement groove 211 is approximately V-shaped.
[0041] It is understandable that the first placement slot 211 and the second placement slot 321 adopt the above-described structural form. The first placement slot 211 and the second placement slot 321 can flexibly accommodate silicon pillars 600 of various diameters. Thus, the polycrystalline silicon heating equipment can conveniently heat silicon pillars 600 of various diameters. Moreover, the placement openings of the first placement slot 211 and the second placement slot 321 are relatively large, so that the silicon pillars 600 can be conveniently placed in the first placement slot 211 and the second placement slot 321, or conveniently removed from the first placement slot 211 and the second placement slot 321.
[0042] Furthermore, the side wall of the first placement groove 211 is provided with a first support pad (not shown in the figure), and the side wall of the second placement groove 321 is provided with a second support pad (not shown in the figure). With the setting of the first support pad and the second support pad, the silicon pillar 600 can be stably placed in the first placement groove 211 and the second placement groove 321, thereby ensuring that the silicon pillar 600 can be stably transported to the right.
[0043] In some embodiments, please refer to Figures 2 to 4 Multiple second carriers 320 and multiple first carriers 210 are provided, and the multiple second carriers 320 and multiple first carriers 210 are arranged alternately. For example, there are seven first carriers 210 and eight second carriers 320. The first carriers 210 and the second carriers 320 are arranged side by side and alternately. In this way, each silicon pillar 600 is supported by multiple first carriers 210 and / or multiple second carriers 320, thereby ensuring the stability of the silicon pillar 600 placement.
[0044] In some embodiments, please refer to Figures 2 to 4Two first connecting members 230 are fixedly disposed between the bottoms of multiple first carriers 210, and two second connecting members 330 are fixedly disposed between the bottoms of multiple second carriers 320; wherein, one first connecting member 230 is located between two second connecting members 330, and the second drive module 310 is connected to the second connecting member 330. It can be understood that by adopting the above-described arrangement of the first connecting members 230 and the second connecting members 330, the first carriers 210 and the second carriers 320 will not interfere with each other when sliding relative to each other, and the restriction of the second connecting members 330 by the two first connecting members 230 allows the second carriers 320 to slide left and right within a set range to switch between the loading state and the unloading state.
[0045] In some embodiments, please refer to Figures 2 to 4 The feeding assembly 300 further includes a sliding seat 340, which is slidably mounted on and connected to the second carrier 320 on the machine base 100. The second drive module 310 is used to drive the sliding seat 340 to slide. Specifically, the two sides of the bottom of the sliding seat 340 are slidably mounted on the machine base 100 via first slide rail assemblies 400. The second drive module 310 is located between the two first slide rail assemblies 400 and is connected to the sliding seat 340. The sliding seat 340 is connected to the left end of the second carrier 320. Thus, the second drive module 310 is used to drive the sliding seat 340 to slide left and right, thereby driving the second carrier 320 to slide left and right. At the same time, the two sides of the second carrier 320 are slidably mounted on the machine base 100 via second slide rail assemblies 500, thereby ensuring that the second drive module 310 stably drives the second carrier 320 to move left and right, and thus drives the silicon pillar 600 to move to the right.
[0046] This application discloses a polycrystalline silicon heating device, including the above-mentioned feeding device.
[0047] Understandably, the polysilicon heating equipment employs the aforementioned feeding device. In the first stage, the first drive module 220 drives the first carrier 210 to move upward, and the first carrier 210 lifts the silicon pillar 600 on the second placement slot 321 of the second carrier 320 through the first placement slot 211. In the second stage, the second drive module 310 drives the second carrier 320 to move the feeding section 324 to the left by a distance. At this time, the feeding section 324 is extended to the left relative to the first carrier 210, and an external device can add the silicon pillar 600 onto the feeding section 324. In the third stage, the first drive module 220 drives the first carrier 210 to move downward, and the first carrier 210 places the silicon pillar 600 into the second placement slot 321 of the second carrier 320 through the first placement slot 211. In the fourth stage, the second drive module 310 drives the second carrier 320 to move the discharge section 325 to the right by a distance. At this time, the discharge section 325 is extended to the right relative to the first carrier 210, making it convenient for external equipment to grab the silicon pillar 600 from the discharge section 325. At the same time, the feeding section 324 is aligned with the first carrier 210, and the first drive module 220 drives the first carrier 210 to move upward, thereby lifting the silicon pillar 600 in the feeding section 324 and the silicon pillars 600 in other positions on the second carrier 320. This cycle continues, and the feeding assembly 300 can continuously supply the silicon pillars 600 to be heated to the polysilicon heating equipment through the transfer assembly 200.
[0048] The technical means disclosed in this utility model are not limited to those disclosed in the above embodiments, but also include technical solutions composed of any combination of the above technical features. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications are also considered within the scope of protection of this utility model.
Claims
1. A feeding device, characterized in that, include: Machine tool; The transfer component includes a first vehicle and a first drive module. The first drive module is disposed on the machine base and is used to drive the first vehicle to move up and down. The first vehicle is provided with a plurality of first placement slots in sequence. The feeding assembly includes a second carrier and a second drive module. The second drive module is disposed on the machine base and is used to drive the second carrier to slide along its length direction. The second carrier is provided with a plurality of second placement slots in sequence and is arranged side by side with the second carrier. The second carrier includes a feeding section and a discharging section, which are equidistant from each other. When the feeding section extends relative to the first carrier, it receives the incoming silicon pillars. The discharging section is aligned with the first carrier to support the silicon pillars on the first carrier. When the discharging section extends relative to the first carrier, it discharges the silicon pillars, and the feeding section is aligned with the first carrier to place the silicon pillars on the first carrier.
2. The feeding device according to claim 1, characterized in that, The second carrier further includes an intermediate section connected between the feeding section and the discharging section; wherein the length of the intermediate section is set to X1, and the lengths of the feeding section and the discharging section are set to X2, X1 = nX2, and n is greater than or equal to 1.
3. The feeding device according to claim 2, characterized in that, The feeding section, the intermediate section, and the discharge section are all of the same length and are half the length of the first carrier.
4. The feeding device according to claim 1, characterized in that, The first placement slot has a first guide slope that is relatively extended on both sides; the second placement slot has a second guide slope that is relatively extended on both sides.
5. The feeding device according to claim 4, characterized in that, The bottom of the first placement slot is provided with a first support plane, and the bottom of the second placement slot is provided with a second support plane.
6. The feeding device according to claim 4, characterized in that, The first guide slope is provided with a first support pad, and the second guide slope is provided with a second support pad.
7. The feeding device according to claim 1, characterized in that, There are multiple second vehicles and multiple first vehicles, and the multiple second vehicles are arranged alternately with the multiple first vehicles.
8. The feeding device according to claim 7, characterized in that, Two first connectors are fixedly provided between the bottoms of the plurality of first vehicles, and two second connectors are fixedly provided between the bottoms of the plurality of second vehicles; wherein, one first connector is located between two second connectors, and the second drive module is connected to the second connector.
9. The feeding device according to claim 1, characterized in that, The feeding assembly also includes a sliding seat, which is slidably disposed on the machine base and connected to the second carrier. The second drive module is used to drive the sliding seat to slide.
10. A polycrystalline silicon heating device, characterized in that, Includes the feeding device as described in any one of claims 1 to 9.