A single wafer test station with a single wafer alignment device

Abstract

A kind of single wafer test bench is used to single wafer shaping device, single wafer shaping device includes conveying table, respectively on the conveying table is equipped with conveying belt and adjusting device, the adjusting device includes U-shaped frame, U-shaped frame both ends are fixedly installed on conveying table, conveying belt is installed on the surface of conveying table and passes through U-shaped frame, U-shaped frame is fixedly installed with adjusting box, adjusting box side is equipped with sliding slot, shaping frame is slidably installed on the sliding slot, the height bar is also installed on the conveying table.The utility model is in regular by conveying table to single wafer, prevents single wafer stacking and long and short side is not placed in accordance with;By adjusting box, it can be adapted to different size single wafer to adjust shaping frame.

Description

Technical Field

[0001] This utility model relates to the field of single-chip test bench technology, specifically a single-chip straightening device for a single-chip test bench. Background Technology

[0002] Single-wafer inspection technology, as a crucial aspect of quality control in semiconductor manufacturing, directly impacts the technological advancement and product reliability of the entire industry. As semiconductor applications continue to expand, inspection will also evolve to meet the ever-increasing demands. Single-piece preparation refers to a series of processing and preparatory work carried out before the quality inspection of a single piece of material to ensure the accuracy of the inspection. This technology is mainly used in the single-piece inspection process and is a key step to ensure the reliability of subsequent inspection results.

[0003] In single-wafer testing, sorting and organizing the wafers is the first step, and this pre-testing process directly affects the accuracy and reliability of the testing equipment. The main purpose of sorting is to eliminate stacking and misalignment that may interfere with the test results; therefore, this invention proposes a single-wafer sorting device for a single-wafer testing platform. Utility Model Content

[0004] The purpose of this invention is to provide a single-wafer straightening device for a single-wafer test bench, so as to solve the problems mentioned in the background art, such as the disordered position and orientation of single-wafers before testing and the impact of single-wafer stacking on testing.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a single-piece straightening device for a single-piece test bench, the single-piece straightening device including a conveyor table, a conveyor belt and an adjustment device respectively provided on the conveyor table, the adjustment device including a U-shaped frame, the two ends of the U-shaped frame being fixedly installed on the conveyor table, the conveyor belt being installed on the upper surface of the conveyor table and passing through the U-shaped frame, an adjustment box being fixedly installed on the U-shaped frame, a sliding groove being opened on the side of the adjustment box, the straightening frame being slidably installed on the sliding groove, and a height limiting rod being installed on the conveyor table.

[0006] Furthermore, a motor is fixedly installed on the U-shaped frame, and a turbine is installed after the motor output shaft passes through the top of the adjustment box. The adjustment box is equipped with a worm gear that cooperates with the turbine. One end of the aligner extends into the slide groove and is slidably installed on the worm gear.

[0007] Furthermore, the regulating box is fixedly installed inside the U-shaped frame via a connecting rod, and the motor is fixedly installed on the top of the U-shaped frame via a motor frame, with its output shaft passing through the U-shaped frame and extending into the regulating box.

[0008] Furthermore, the sizing frame adopts a strip structure with an adjustment slide. The sizing plate is fixedly installed on the adjustment slide by bolts, and the sizing plate is slidably installed on the bolts. A spring is installed between the sizing plate and the bolts, with one end of the spring fixedly installed on the sizing plate and the other end fixedly installed on the bolts.

[0009] Furthermore, there are two grading frames, each with a grading plate mounted on it, and the two grading frames are respectively connected to worm gears for driving them.

[0010] Furthermore, a height limiting bar is also installed on the conveyor platform. The height limiting bar is equipped with a slide rail. The height limiting bar is fixedly installed on the conveyor platform by adjusting bolts. The adjusting bolts are set on the side of the conveyor belt on the conveyor platform. The height limiting bar is set perpendicular to the direction of movement of the conveyor belt and is located above the conveyor belt.

[0011] Furthermore, the adjusting bolt passes through one side of the upper slide rail of the height limit bar and is fixed to the conveyor platform, while an adjusting block is installed at the other end of the upper slide rail of the height limit bar.

[0012] Compared with the prior art, the beneficial effects of this utility model are: 1. This utility model uses a conveyor to organize individual pieces, preventing them from being stacked or having inconsistent placement of long and short sides.

[0013] 2. This utility model uses an adjustment box to adjust the straightening frame, which can accommodate single pieces of different sizes. Attached Figure Description

[0014] Figure 1 This is a structural diagram of the present utility model; Figure 2 This is a diagram showing the layout and height limit of this utility model; Figure 3 This is a transmission diagram of the present utility model.

[0015] In the diagram: 1. Conveyor platform; 2. Conveyor belt; 3. Adjustment device; 4. U-shaped frame; 5. Adjustment box; 6. Steering frame; 7. Height limit bar; 8. Turbine; 9. Worm gear; 10. Steering plate; 11. Adjustment block. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0017] Example 1 A single-piece straightening device for a single-piece testing platform includes a conveyor platform 1, a conveyor belt 2 and an adjustment device 3 respectively provided on the conveyor platform, the adjustment device 3 including a U-shaped frame 4, the two ends of the U-shaped frame 4 are fixedly installed on the conveyor platform 1, the conveyor belt 2 is installed on the upper surface of the conveyor platform 1 and passes through the U-shaped frame 4, an adjustment box 5 is fixedly installed on the U-shaped frame 4, the side of the adjustment box 5 is provided with a sliding groove, the straightening frame 6 is slidably installed on the sliding groove, and a height limiting rod 7 is also installed on the conveyor platform 1.

[0018] A motor is fixedly installed on the U-shaped frame 4. The motor output shaft passes through the top of the regulating box 5 and is then installed with a turbine 8. The regulating box 5 is equipped with a worm gear 9 that cooperates with the turbine 8. One end of the regulating frame 6 extends into the slide groove and is slidably installed on the worm gear 9.

[0019] The regulating box 5 is fixedly installed inside the U-shaped frame 4 via a connecting rod, and the motor is fixedly installed on the top of the U-shaped frame 4 via a motor frame, with its output shaft passing through the U-shaped frame 4 and extending into the regulating box 5.

[0020] The aligning frame 6 adopts a strip structure with an adjustment slide. The aligning plate 10 is fixedly installed on the adjustment slide by bolts and is slidably installed on the bolts. A spring is installed between the aligning plate 10 and the bolts. One end of the spring is fixedly installed on the aligning plate 10 and the other end is fixedly installed on the bolts, so that the aligning plate 10 can return to its original position after rotation.

[0021] The straightening frame 6 has two members, on which straightening plates 10 are respectively installed, and the two straightening frames 6 are respectively connected to the worm gear 8 and the worm 9 for driving them.

[0022] Because the worm gear 8 and worm 9 transmission can achieve self-locking, it can effectively prevent the aligner from pushing the worm gear to rotate in the opposite direction during operation, thus preventing the gap from increasing.

[0023] The distance between the two regular frames 6 is slightly greater than the length of the short side of a single piece, but less than the length of the long side of a single piece. The conveyor platform 1 is also equipped with a height limiting rod 7. The height limiting rod 7 is provided with a slide rail. The height limiting rod 7 is fixedly installed on the conveyor platform by adjusting bolts. The adjusting bolts can adjust the height of the height limiting rod 7. The adjusting bolts are set on the side of the conveyor platform 1 of the conveyor belt 2. The height limiting rod 7 is set perpendicular to the movement direction of the conveyor belt 2 and is located above the conveyor belt 2.

[0024] The adjusting bolt passes through one side of the upper slide of the height limit bar 7 and is fixed on the conveyor table 1. An adjusting block 11 is installed at the other end of the upper slide of the height limit bar 7.

[0025] To prevent jamming caused by a single long side parallel to the straightening plate 10, an adjustment block 11 is provided. The position of the adjustment block 11 is slightly larger than the vertical distance between the straightening frame 6 and the adjustment bolt, and smaller than half the length of the single long side exceeding the distance between the two straightening frames.

[0026] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A single-wafer straightening device for a single-wafer testing platform, the single-wafer straightening device comprising a conveyor table, characterized in that: The conveyor platform is equipped with a conveyor belt and an adjustment device. The adjustment device includes a U-shaped frame, with both ends of the U-shaped frame fixedly installed on the conveyor platform. The conveyor belt is installed on the upper surface of the conveyor platform and passes through the U-shaped frame. An adjustment box is fixedly installed on the U-shaped frame. A sliding groove is opened on the side of the adjustment box. The adjustment frame is slidably installed on the sliding groove. A height limiting bar is also installed on the conveyor platform.

2. The single-wafer straightening device for a single-wafer test bench according to claim 1, characterized in that: A motor is fixedly installed on the U-shaped frame. The motor output shaft passes through the top of the adjustment box and is then installed with a turbine. The adjustment box is equipped with a worm gear that cooperates with the turbine. One end of the aligner extends into the slide groove and is slidably installed on the worm gear.

3. The single-wafer straightening device for a single-wafer test bench according to claim 2, characterized in that: The regulating box is fixedly installed inside the U-shaped frame by a connecting rod, and the motor is fixedly installed on the top of the U-shaped frame by a motor frame, with its output shaft passing through the U-shaped frame and extending into the regulating box.

4. The single-wafer straightening device for a single-wafer test bench according to claim 1, characterized in that: The sizing frame adopts a strip structure with an adjustment slide. The sizing plate is fixedly installed on the adjustment slide by bolts and is slidably installed on the bolts. A spring is installed between the sizing plate and the bolts, with one end of the spring fixedly installed on the sizing plate and the other end fixedly installed on the bolts.

5. The single-wafer straightening device for a single-wafer test bench according to claim 4, characterized in that: There are two grading frames, each with a grading plate mounted on it, and the two grading frames are respectively connected to worm gears for driving them.

6. The single-wafer straightening device for a single-wafer test bench according to claim 1, characterized in that: The conveyor platform is also equipped with a height limit bar, which has a slide rail. The height limit bar is fixedly installed on the conveyor platform by adjusting bolts. The adjusting bolts are set on the side of the conveyor belt on the conveyor platform. The height limit bar is set perpendicular to the direction of movement of the conveyor belt and is located above the conveyor belt.

7. A single-wafer straightening device for a single-wafer test bench according to claim 6, characterized in that: The adjusting bolt passes through one side of the upper slide of the height limit bar and is fixed to the conveyor platform. An adjusting block is installed at the other end of the upper slide of the height limit bar.

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