Workpiece turntable and PVD coating device

Abstract

The application provides a workpiece rotating frame and a PVD coating equipment, wherein the clamping station of the PVD coating equipment comprises a rotating disc, a plurality of first reversing mechanisms arranged in a circumferential array on the rotating disc, and at least two holders rotatably arranged on the first reversing mechanisms, and each first reversing mechanism is provided with a second reversing mechanism and a driving member corresponding to the holder, the first reversing mechanism is in driving connection with the driving member at a preset position in the vacuum chamber in the self-rotation process of the rotating disc, so as to drive the at least two corresponding holders to rotate relative to the rotating disc, thereby adjusting the coating angle of the corresponding sheet workpiece; at the same time, the driving member drives each second reversing mechanism to rotate in sequence, so as to drive the corresponding holder and the sheet workpiece thereon to turn over. The sheet workpieces on each clamping station are turned over at a certain rhythm, so that the uniformity of the positive and negative coatings of the sheet workpiece, the corresponding coating deposition efficiency and the feeding and discharging efficiency are improved, and the enterprise cost is reduced and the benefit is increased.

Description

Technical Field

[0001] This application relates to the field of vacuum coating technology, and further to a workpiece turntable and PVD coating equipment. Background Technology

[0002] As a process that uses physical methods to vaporize materials in a vacuum environment and deposit them onto the surface of a substrate to form a thin film, PVD technology has become one of the key technologies in modern surface engineering due to its advantages of low-temperature processing, excellent film performance, and environmental friendliness.

[0003] In related industries, commonly used single-box vacuum coating equipment typically uses a planetary workpiece holder inside the vacuum chamber to clamp the workpiece, in order to meet the requirements of uniform coating processes for small, ordinary workpieces. However, for sheet workpieces that require coating on both sides, the aforementioned planetary workpiece holder cannot achieve the corresponding coating uniformity and target sputtering rate requirements. Therefore, developing a PVD coating equipment suitable for uniform coating of sheet workpieces and improving coating deposition efficiency will have a profound impact on the development of the surface treatment technology industry. Utility Model Content

[0004] The purpose of this application is to provide a workpiece turntable and PVD coating equipment, which effectively improves the uniformity of the coating on both sides of the sheet workpiece and the corresponding coating deposition efficiency by optimizing the clamping fixture and related structure of the workpiece to be coated.

[0005] The technical solution provided in this application is as follows: On one hand, this application provides a workpiece turntable for a PVD coating equipment, comprising: The turntable has multiple clamping stations arranged in a circular array around its own axis. A support is used to support sheet workpieces; each of the clamping stations includes at least two supports, and the two supports are arranged side by side with a gap between them; A primary reversing mechanism is rotatably mounted on the turntable around its own axis and is set corresponding to the clamping station; at least two of the supports are mounted on the corresponding primary reversing mechanism and rotate independently relative to the primary reversing mechanism around their own axes; the primary reversing mechanism is used to drive the drive component at a preset position in the vacuum chamber during the rotation of the turntable, so as to drive the corresponding at least two supports to rotate relative to the turntable, thereby adjusting the coating angle of the corresponding sheet workpiece; The secondary reversing mechanism is rotatably mounted on the primary reversing mechanism around its own axis, corresponding one-to-one with the support, and coaxially connected for transmission. A reversing component is fixed on the turntable and set in relation to the clamping station. It is sequentially connected to at least two secondary reversing mechanisms at a preset angle. It is used to drive at least two secondary reversing mechanisms to rotate relative to the primary reversing mechanism during the rotation of the primary reversing mechanism relative to the turntable, so as to drive the corresponding support and the sheet workpiece on it to flip over.

[0006] This application provides a workpiece turntable for a PVD coating equipment. In practical applications, the turntable rotates while simultaneously driving the primary reversing mechanism and its mounting brackets and sheet workpieces to rotate synchronously. At this time, multiple primary reversing mechanisms are sequentially connected to the drive unit installed in the vacuum chamber, rotating relative to the turntable by a preset angle. Simultaneously, the corresponding primary reversing mechanism drives its mounting brackets and sheet workpieces to rotate synchronously, adjusting the coating angle of the corresponding sheet workpiece. Simultaneously, one of the corresponding secondary reversing mechanisms rotates to connect with the drive unit, driving the corresponding mounting bracket and its sheet workpiece to rotate relative to the primary reversing mechanism by a preset angle, thereby flipping the corresponding sheet workpiece. As the turntable rotates cyclically, the coating angle at each clamping station is adjusted one by one, and each sheet workpiece is flipped one by one… This cycle continues until all the mounting brackets at each clamping station return to their initial state, completing one cycle of flipping all sheet workpieces on the corresponding workpiece turntable. Then, the sheet workpiece to be coated is replaced, and the next round of coating operation can begin.

[0007] Compared to the uncontrolled continuous rotation and flipping method in related technologies, this application flips the sheet workpieces at each clamping station according to a certain rhythm, making the coating process more controllable and significantly improving the uniformity of the coating on the sheet workpieces. Furthermore, since the sheet workpieces at multiple clamping stations are arranged in a ring around the axis of the turntable, the consistency of the movement path of each sheet workpiece is ensured throughout the coating process. This reduces the impact of the sputtering target position in the vacuum chamber on the finished coating and effectively improves the target utilization rate, that is, improves the deposition efficiency.

[0008] In some embodiments, the primary reversing mechanism includes a primary gear; At least two of the aforementioned supports are rotatably positioned above the corresponding primary gear, and their rotation axes are parallel to the rotation axis of the primary gear. At least two of the aforementioned supports are arranged at uniform intervals around the axis of the corresponding first-stage gear.

[0009] This application provides a workpiece turntable for PVD coating equipment, which is equipped with a primary gear as a primary reversing mechanism. The drive component in the vacuum chamber can be configured in various forms, and the production process is simple and the layout is convenient. This effectively reduces the production cost of the corresponding workpiece turntable for PVD coating equipment and promotes cost reduction and efficiency improvement for enterprises.

[0010] In some embodiments, the rotary table, corresponding to the clamping station, includes a base and a rotating shaft, which are coaxially and fixedly connected. The rotating base is detachably and fixedly connected to the turntable; The primary gear is coaxially rotatably mounted on the rotating shaft and located above the rotating base; The first spring locking mechanism is located on the rotating shaft at a position corresponding to the first-stage gear, so as to keep the rotating shaft and the first-stage gear tightly connected and engaged with the first-stage gear at a preset angle.

[0011] This application provides a workpiece turntable for PVD coating equipment. By utilizing a detachable connection structure between the turntable and the rotating base, the primary gear can be detachably installed on the turntable, which helps to further reduce the production difficulty and cost of the corresponding workpiece turntable for PVD coating equipment.

[0012] Meanwhile, by utilizing the first spring locking mechanism, the relative static motion of the first-stage gear with the turntable is achieved, as well as the accuracy of adjusting the coating angle of the sheet workpiece on the first-stage gear. The structure is simple and ingenious, serving multiple purposes and helping to further promote cost reduction and efficiency improvement for enterprises.

[0013] In some embodiments, the mounting platform is coaxially rotatably sleeved on the rotating shaft, located above the primary gear and fixed relative to the primary gear; at least two of the supports are rotatably mounted on the mounting platform via lower rotating rods; The secondary reversing mechanism includes a secondary gear, which is rotatably positioned below the mounting platform corresponding to the bracket. The reversing component includes a sector gear, which is coaxially fixedly sleeved on the rotating shaft and meshes sequentially with at least two secondary gears at a preset angle.

[0014] This application provides a workpiece turntable for a PVD coating equipment, with an installation platform fixed above the primary gear to meet the requirements for bearing the support and installing the secondary gear on it. This enables the corresponding support to move synchronously with the primary gear and rotate relative to the primary gear. The corresponding reversing component has a simple structure and is easy to install, effectively ensuring the production convenience of the workpiece turntable for the PVD coating equipment.

[0015] In some embodiments, the partition is coaxially rotatably sleeved on the rotating shaft and located between the mounting platform and the primary gear; The two ends of the secondary gear are respectively rotatably mounted on the partition and the mounting platform; The second spring locking mechanism is located between the lower rotating rod and the mounting platform to maintain the lower rotating rod in a tight fit with the mounting platform and to engage with the mounting platform at a preset angle.

[0016] This application provides a workpiece turntable for PVD coating equipment, which has a partition plate installed below the installation platform. This improves the ease of setting up the secondary gears and increases the distance between the lower end of the support rod and the primary gear, so as to separate the first spring locking mechanism and the second spring locking mechanism, thereby promoting the miniaturization of the workpiece turntable for PVD coating equipment.

[0017] In some embodiments, the support ring is fixed above the turntable by a number of support rods and is coaxially spaced from the turntable; The support frame is set corresponding to the clamping station and is rotatably positioned below the support ring around its own axis; At least two of the corresponding supports are evenly spaced around the rotation axis of the support frame, and their upper ends are rotatably connected to the support frame.

[0018] In some embodiments, mounting positions are provided on the support ring and are evenly spaced around the axis of the support ring, for detachably connecting the support frame.

[0019] This application provides a workpiece turntable for PVD coating equipment. In practical applications, the number of support frames is set according to the size and shape of the sheet workpiece to be coated. The support frames are installed in appropriate mounting positions to meet the coating requirements of different sheet workpieces. Therefore, the workpiece turntable for PVD coating equipment has a wide range of applications and strong practicality.

[0020] In some embodiments, a gear ring is coaxially fixed to the outer peripheral surface of the support ring for meshing with an internal gear at the top of the vacuum chamber.

[0021] This application provides a workpiece turntable for a PVD coating equipment. The turntable achieves a rotational connection between the support ring and the inner wall of the vacuum chamber through a gear transmission structure. While stably supporting the upper end of the corresponding workpiece turntable, it improves the reliability of the rotation of the corresponding workpiece turntable in the vacuum chamber, which helps to ensure the normal and stable operation of the corresponding vacuum coating process.

[0022] On the other hand, this application also provides a PVD coating apparatus, including a workpiece turntable for PVD coating apparatus as described above, and further comprising: A vacuum chamber is formed inside the vacuum box, and the workpiece rotating frame of the PVD coating equipment is rotatably disposed in the vacuum chamber around its own axis. A driving component is disposed on the inner wall of the vacuum chamber and is sequentially connected to each of the first-stage reversing mechanisms to drive the brackets on each of the first-stage reversing mechanisms to rotate relative to the turntable by a preset angle, so as to adjust the coating angle of the corresponding sheet workpiece. An internal gear is coaxially fixed to the top of the vacuum chamber and is used to mesh with a gear ring on the workpiece rotating frame of the PVD coating equipment.

[0023] In some embodiments, the drive element is detachably provided on the inner wall of the vacuum chamber; Alternatively, at least two drive components may be detachably provided on the inner wall of the vacuum chamber, and the at least two drive components may be arranged at uniform intervals around the axis of the turntable.

[0024] This application provides a PVD coating equipment in which multiple drive components are installed on the inner wall of the vacuum chamber. When the turntable rotates once, the primary reversing mechanism of each clamping station rotates multiple times relative to the turntable. That is, the coating angle of the corresponding sheet workpiece is adjusted multiple times, which helps to improve the efficiency of the corresponding coating operation.

[0025] Compared with the prior art, the workpiece turntable and PVD coating equipment provided in this application have at least one of the following advantages: 1. This application employs multiple gear structures to achieve the rotation of sheet workpieces at each clamping station according to a specific rhythm, meeting the coating requirements of both sides of the sheet workpieces. The coating process is controllable, and each sheet workpiece travels the same distance during the process, reducing the impact of the sputtering target position in the vacuum chamber on the finished coating and effectively ensuring the coating uniformity of the sheet workpieces. At the same time, since the support is set in accordance with the clamping station, the sheet workpieces to be coated in the vacuum chamber are arranged in a ring around the axis of the turntable, which helps to improve the target utilization rate and deposition efficiency. Furthermore, the large sheet mounting method also significantly improves the workpiece loading and unloading efficiency and coating efficiency. In addition, the workpiece turntable of the PVD coating equipment of this application can also be applied to the coating scenarios of alternating multilayer film materials, effectively expanding its application scope and enhancing its practicality.

[0026] 2. In addition, the workpiece turntable of the corresponding PVD coating equipment has a simple and ingenious overall structure, achieving multiple benefits. It is convenient to produce and stable and reliable in use, effectively reducing the production and usage costs of enterprises in the corresponding PVD coating. Moreover, since no additional power source is required, the workpiece clamping fixture of the original single-box vacuum coating equipment can be obtained by simple modification, which effectively promotes cost reduction and efficiency improvement for enterprises.

[0027] 3. In this application, due to the improved sputtering efficiency of the target material, the coating cost of a single sheet workpiece to be coated is reduced, which is conducive to further energy saving and cost reduction for enterprises. Attached Figure Description

[0028] The preferred embodiments will now be described in a clear and easy-to-understand manner, with reference to the accompanying drawings, to further explain the above-mentioned characteristics, technical features, advantages, and implementation methods of this solution.

[0029] Figure 1This is an isometric schematic diagram of the overall structure of the workpiece turntable for the PVD coating equipment, which is the main embodiment of this application. Figure 2 yes Figure 1 The enlarged view in section A is mainly used to show the relative positions of the first-stage reversing mechanism and the second-stage reversing mechanism; Figure 3 This is an exploded view of the main cooperative relationship between the first-level reversing mechanism and the second-level reversing mechanism in the embodiments of this application.

[0030] Explanation of reference numerals in the attached figures: 1. Turntable; 2. First-stage reversing mechanism; 21. First-stage gear; 22. Mounting platform; 23. Partition; 3. Support; 31. Lower rotating rod; 311. Second spring locking mechanism; 32. Upper rotating rod; 4. Second-stage reversing mechanism; 41. Second-stage gear; 42. Reversing component; 5. Rotary seat; 51. Base; 511. Mounting hole; 52. Rotating shaft; 521. First spring locking mechanism; 6. Support ring; 61. Mounting position; 7. Support rod; 8. Carrier rod; 9. Drive component. Detailed Implementation

[0031] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the specific implementation methods of this application will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without creative effort.

[0032] To keep the drawings concise, each drawing only schematically shows the parts relevant to this application, and they do not represent the actual structure of the product. Furthermore, for ease of understanding, in some drawings, only one of the components with the same structure or function is schematically shown, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one."

[0033] In the surface treatment technology industry, PVD coating technology, through precise process control, improves product performance while meeting environmental protection requirements, and has become one of the key technologies in modern surface engineering. Currently, most common single-chamber vacuum coating equipment uses planetary rotating frames within the vacuum chamber. During operation, the large turntable rotates, driving the planetary disks to rotate simultaneously. The workpiece, inserted into the planetary disks, rotates along with the planetary disks; thus, the workpiece continuously rotates within the vacuum chamber, achieving uniform surface coating. This method is widely applicable to the full-enclosed uniform coating process requirements of various common small workpieces. However, for sheet workpieces requiring coating on both sides, the aforementioned rotating frames cannot achieve the required coating uniformity and target sputtering rate.

[0034] In one embodiment, reference is made to the accompanying drawings. Figures 1 to 3 This invention provides a workpiece turntable for a PVD coating equipment. By optimizing the workpiece clamping fixture and related structures, it significantly improves the coating uniformity of high-quality sheet workpieces and the corresponding target sputtering efficiency. The turntable includes a turntable 1 rotatably mounted within the vacuum chamber of the coating equipment, with multiple clamping stations arranged in a circular array around its axis. Each clamping station is equipped with a primary reversing mechanism 2, a support 3, and a secondary reversing mechanism 4. Specifically, the primary reversing mechanism 2 is rotatably mounted above the turntable 1, and the support 3 for holding the sheet workpiece is mounted on the primary reversing mechanism 2. Each primary reversing mechanism 2 includes at least two supports 3, arranged side-by-side with intervals, and each supports 3 rotate independently relative to the primary reversing mechanism 2 around its own axis. The secondary reversing mechanism 4 is rotatably mounted on the primary reversing mechanism 2, and it is connected to the support 3... Each component is connected in a one-to-one correspondence and coaxial transmission. Multiple primary reversing mechanisms 2 are sequentially connected to drive components 9 at preset positions within the vacuum chamber during the rotation of the turntable 1, thereby sequentially driving at least two corresponding supports 3 to rotate relative to the turntable 1. Secondary reversing mechanisms 4 are used to sequentially drive at least two corresponding secondary reversing mechanisms 4 to rotate relative to the primary reversing mechanism 2 during the rotation of the primary reversing mechanism 2 relative to the turntable 1. A reversing component 42 is fixedly provided at each clamping station corresponding to the primary reversing mechanism 2. The reversing component 42 is sequentially connected to the corresponding secondary reversing mechanism 4 at a preset angle, thereby driving the corresponding secondary reversing mechanism 4 to rotate relative to the primary reversing mechanism 2.

[0035] During the rotation of turntable 1, the primary reversing mechanisms 2 at each clamping station, along with their supports 3 and sheet workpieces, move synchronously. As multiple primary reversing mechanisms 2 move, they sequentially connect with drive components 9 installed at preset positions within the vacuum chamber, causing the supports 3 on them to rotate relative to turntable 1 by a preset angle, thereby adjusting the coating angle of the corresponding sheet workpiece. Simultaneously, one of the secondary reversing mechanisms 4 on the corresponding primary reversing mechanism 2 rotates to connect with a reversing component 42, which in turn drives the corresponding support 3 relative to the primary reversing mechanism 1. Rotate the mechanism 2 by a preset angle to flip the corresponding sheet workpiece; as the turntable 1 rotates cyclically, adjust the coating angle at each clamping station one by one, and flip each sheet workpiece on the corresponding first-level reversing mechanism 2 one by one... This cycle continues until each support 3 at each clamping station returns to its initial state, thus completing one cycle of flipping all sheet workpieces on the corresponding workpiece turntable; then, replace the sheet workpiece to be coated on the corresponding workpiece turntable and perform the next round of coating operation until the coating process of all sheet workpieces is completed.

[0036] In this way, the sheet workpieces at each clamping station are flipped at a certain rhythm. By controlling and adjusting their coating angle and flipping angle, the coating requirements of the front and back sides of different sheet workpieces can be met. The coating process is controllable. During the operation, each sheet workpiece travels the same distance, which effectively reduces the probability that the sputtering target in the vacuum chamber will affect the finished coating and improves the coating uniformity of the sheet workpieces. Furthermore, since the sheet workpieces to be coated in the vacuum chamber are arranged in a ring around the axis of turntable 1, the utilization rate of the target material and the deposition efficiency are effectively improved.

[0037] Of course, since the workpiece flipping process is controllable, the workpiece turntable for the PVD coating equipment of this application is not only suitable for single-layer coating scenarios, but also for multi-layer coating scenarios with alternating changes in film materials. It has strong applicability and good overall performance.

[0038] In one embodiment, based on the above embodiments, specifically referring to... Figures 1 to 3 In this embodiment, a rotating base 5 is provided on the turntable 1 for each clamping station to improve the overall assembly convenience. Specifically, the rotating base 5 includes a base 51 and a rotating shaft 52, which are coaxially arranged, and the rotating shaft 52 is detachably fixed to one side of the base 51. During assembly, the base 51 is close to the upper surface of the turntable 1 and is detachably fixed to the turntable 1 by fasteners. In the embodiments of this application, the fasteners can be set as various forms such as threaded connection structures such as fastening bolts, snap-locking structures, and magnetic structures. This application does not impose specific limitations on them. At this time, the rotating shaft 52 is located on the upper side of the base 51.

[0039] Reference Figure 3 The base 51 has multiple mounting holes 511 evenly spaced around its own axis. Each fastening bolt corresponds to one of the mounting holes 511, and it passes through the corresponding mounting hole 511 from top to bottom before being screwed into the turntable 1; that is, Figure 3 The illustration shows an implementation where the fastener is set as a fastening bolt.

[0040] In this embodiment, the preferred primary reversing mechanism 2 includes a primary gear 21, which is coaxially rotatably mounted on the rotating shaft 52. (Refer to...) Figure 2 and Figure 3An installation platform 22 is coaxially mounted on the rotating shaft 52 above the primary gear 21. At least two supports 3 are evenly spaced around the axis of the rotating shaft 52 on the upper side of the installation platform 22, and each is rotatably mounted on the installation platform 22 via a lower rotating rod 31 at its lower end corresponding to the axis of the rotating shaft 52. The rotation axis 52 direction of any lower rotating rod 31 is parallel to the rotation axis 52 direction of the primary gear 21. In this embodiment, a first spring locking mechanism 521 is provided on the rotating shaft 52 corresponding to the installation platform 22. The first spring locking mechanism 521 is used to keep the supports 3 stable and stationary relative to the turntable 1 when the primary gear 21 is not in contact with the driving member 9, so as to realize the synchronous operation of the supports 3 with the primary gear 21.

[0041] The secondary reversing mechanism 4 includes a secondary gear 41, which is rotatably positioned below the mounting platform 22 and coaxially connected to the corresponding support 3. Specifically, the shaft of the secondary gear 41 is connected to the corresponding lower rotating rod 31. Correspondingly, the reversing component 42 includes a sector gear, which is coaxially fixed on the rotating shaft 52 and located on the same horizontal plane as the secondary gear 41. When the secondary gear 41 rotates relative to the turntable 1 to a preset angle, it meshes with the corresponding sector gear, thereby achieving relative rotation of the corresponding support 3 relative to the primary gear 21. In this embodiment, it is preferable that the sector gear and the rotating base 5 are integrally formed to ensure the stability and reliability of the flipping structure and function of the support 3.

[0042] Furthermore, to improve the ease of installation of the secondary gear 41, refer to Figure 2 and Figure 3 In this embodiment, preferably, a partition 23 is also coaxially rotatably mounted on the rotating shaft 52. The partition 23 is located between the mounting platform 22 and the first-stage gear 21, and the two ends of the second-stage gear 41 are respectively rotatably mounted on the partition 23 and the mounting platform 22.

[0043] In this embodiment, each of the support fixtures 3 has a rectangular frame structure, with its central space forming a clamping space for sheet workpieces. The clamping space is large, resulting in high loading and unloading efficiency. In the embodiment of this application, during assembly, the lower rotating rod 31 of any support fixture 3 passes through the mounting platform 22 and the secondary gear 41 sequentially from top to bottom and extends into the partition 23, rotating relative to the mounting platform 22 and the partition 23 around its own axis. The secondary gear 41 is coaxially fixed with the lower rotating rod 31. Of course, if a sector gear is provided corresponding to the secondary gear 41, it is also located between the mounting platform 22 and the partition 23.

[0044] Meanwhile, to ensure the accurate flipping of the corresponding support 3 and the sheet workpiece on it, in this embodiment, a second spring locking mechanism 311 is provided at the lower end of the rotating rod 31 of any support 3 corresponding to the mounting platform 22. The mounting platform 22 is located on the periphery of the lower end of the rotating rod 31 of the corresponding support 3, and the locking tongue of the second spring locking mechanism 311 is provided with a locking groove. Of course, in the embodiments of this application, other forms of angle limiting mechanisms can also be set to improve the accuracy and reliability of the sheet workpiece flipping operation, which will not be elaborated here.

[0045] Furthermore, in this embodiment, the first spring locking mechanism 521 is preferably located at the position of the rotating shaft 52 corresponding to the partition 23, and the partition 23 is located on the periphery of the rotating shaft 52 and the locking tongue of the first spring locking mechanism 521 is also provided with a corresponding locking groove, so as to ensure the production convenience of the corresponding workpiece reversing drive module and facilitate its miniaturization.

[0046] In this embodiment, preferably, each primary gear 21 is provided with two supports 3, and the mounting platform 22 and partition 23 are both configured as rhomboid plate structures, with the two supports 3 respectively located at both ends of the long shaft of the corresponding rhomboid plate structure. Since this application is mainly applicable to the coating scenario of sheet workpieces, this embodiment preferably sets that each time the sector gear completes a transmission drive with the corresponding secondary gear 41, the support 3 corresponding to the secondary gear 41 rotates 180 degrees, that is, completes one front-to-back flip.

[0047] The PVD coating fixture of this embodiment also includes support rings 6, which are coaxially spaced above the turntable 1 and fixed to the turntable 1 by a plurality of support rods 7; see reference Figure 1 A support frame is provided below the support ring 6 at each clamping position to stably support the corresponding support 3 at the corresponding clamping position. In this embodiment, specifically, the support frame includes a support rod 8, which is a rectangular strip structure and is rotatably connected to the support ring 6 around its own length axis. An upper rotating rod 32 is provided at the upper end of each support 3 corresponding to the rotation axis 52. The upper rotating rod 32 of each support 3 is rotatably mounted on the corresponding support rod 8, thereby achieving stable installation of the support 3 at the corresponding clamping position. In the embodiment of this application, when the number of supports 3 on the first-stage gear 21 is set to two, the upper rotating rods 32 of the two supports 3 are symmetrically arranged at both ends of the length direction of the support rod 8.

[0048] Preferably, the support ring 6 has a connecting hole corresponding to the carrier rod 8 to form a mounting position 61 for the carrier rod 8. The carrier rod 8 can be detachably mounted on the corresponding mounting position 61 through a connecting structure. Figure 1In this embodiment, a connecting rod is provided at the central axis of the carrier rod 8. After the connecting rod passes through the corresponding mounting hole 511 from bottom to top, the end of the connecting rod away from the bracket 3 is stably connected to the support ring 6 through a nut. Of course, the connection structure between the carrier rod 8 and the support ring 6 can also be set as bolts, rotating pins, etc. The embodiments of this application do not impose specific limitations on this.

[0049] Furthermore, to improve the applicability of the PVD coating fixture, the support ring 6 is provided with multiple connecting holes evenly spaced around its own axis to form multiple mounting positions 61 for the carrier rods 8, so as to adapt to the installation requirements of brackets 3 of different sizes.

[0050] Of course, in the embodiments of this application, in order to improve the structural stability of the corresponding PVD coating equipment, a gear ring can be coaxially sleeved on the outer circumferential surface of the support ring 6 to mesh with the corresponding internal gear in the vacuum chamber, thereby ensuring the stable installation and reliable rotation of the workpiece frame in the vacuum chamber.

[0051] The technical solution of this application will be further described in detail below, taking the workpiece turntable of the PVD coating equipment applied to a specific coating scenario as an example. In one embodiment, referring to... Figures 1 to 3 A PVD coating equipment is provided, including a workpiece turntable for PVD coating equipment as described in any of the above embodiments, and a vacuum box with a target emission source. A vacuum chamber is formed inside the vacuum box, and a power motor is provided below the vacuum chamber. The output shaft of the power motor is coaxially connected to the turntable 1 to drive the workpiece turntable for PVD coating equipment to rotate around the axis of the turntable 1 in the vacuum chamber.

[0052] Furthermore, the inner wall of the vacuum chamber is provided with a drive component 9. The drive component 9 and the first-level reversing mechanism 2 of the corresponding clamping station are located on the same horizontal plane. During the rotation of the turntable 1, it is sequentially connected to each first-level reversing mechanism 2 to drive the support 3 of the corresponding clamping station and the sheet workpiece on it to rotate relative to the turntable 1 by a preset angle to adjust the coating angle of the corresponding sheet workpiece.

[0053] In the embodiments of this application, only one drive member 9 may be provided on the rotation trajectory of the first-stage reversing mechanism 2. Of course, in order to further improve the coating efficiency and uniformity, two or more may be evenly spaced around the axis of the turntable 1 on the inner wall of the vacuum chamber.

[0054] In this application, when the first-stage reversing mechanism 2 is set as the first-stage gear 21, the driving member 9 is preferably set as a non-full-circumference internal gear so that when the first-stage gear 21 is engaged, the first-stage gear 21 is driven to rotate around its own axis relative to the turntable 1 by a preset angle.

[0055] Of course, an internal gear is also provided on the inner wall of the vacuum chamber corresponding to the gear ring. Furthermore, in the embodiments of this application, in order to improve the stability of the sheet workpiece coating angle adjustment operation, a reversing component can be additionally provided on the support ring 6 corresponding to each first-stage reversing mechanism 2. Similarly, a driving component can be additionally provided on the top of the vacuum chamber corresponding to the driving component 9, and the connection method between the reversing component and the driving component and the connection method between the same-stage reversing mechanism 2 and the driving component 9 are kept consistent, so as to ensure that each support 3 on the first-stage reversing mechanism 2 is stably reversed when passing the driving component 9.

[0056] The technical solution of this application will be further described in detail below, taking the application of the PVD coating equipment to a specific sheet workpiece coating scenario as an example. In one embodiment, based on the above embodiment, a PVD coating equipment is provided, in which two supports 3 are provided at any clamping station of the turntable 1, and only one driving component 9 is provided in the vacuum chamber. The driving component 9 drives a corresponding first-level reversing mechanism 2 to rotate 180 degrees each time, and the reversing component 42 drives a second-level reversing mechanism 4 to rotate 180 degrees each time.

[0057] Two sheets are designated A and B, with two sides of each sheet designated 1 and 2. The initial states of the two sheet workpieces at each clamping station on turntable 1 are: A1, A2, B2, B1. In practical application, when the first-stage reversing mechanism 2 passes the driving component 9 for the first time, the position states of the two sheet workpieces at the corresponding clamping station change to: B2, B1, A2, A1; when the first-stage reversing mechanism 2 passes the driving component 9 for the second time, the position states of the two sheet workpieces at the corresponding clamping station change to: A2, A1, B1, B2; when the first-stage reversing mechanism 2 passes the driving component 9 for the third time, the position states of the two sheet workpieces at the corresponding clamping station change to: B1, B2, A1, A2; when the first-stage reversing mechanism 2 passes the driving component 9 for the fourth time, the position states of the two sheet workpieces at the corresponding clamping station change to: A1, A2, B2, B1. At this point, the position states of each sheet workpiece are restored to the same initial state, that is, one cycle of flipping of each sheet workpiece is completed. Therefore, it can be seen that every 4 rotations of turntable 1, all sheet workpieces undergo one cycle of flipping. Using this type of workpiece turntable not only ensures that each sheet workpiece travels the same path and minimizes the impact of the sputtering target position in the vacuum chamber on the uniformity of the film layer, but also maximizes the utilization of the sputtering target material and improves the target material utilization rate, that is, significantly improves the sputtering efficiency.

[0058] It should be noted that the above embodiments can be freely combined as needed. The above description is only a preferred embodiment of this application. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the protection scope of this application.

Claims

1. A workpiece turntable for a PVD coating equipment, characterized in that, include: The turntable has multiple clamping stations arranged in a circular array around its own axis. A support is used to support sheet workpieces; each of the clamping stations includes at least two supports, and the two supports are arranged side by side with a gap between them; A primary reversing mechanism is rotatably mounted on the turntable around its own axis and is set corresponding to the clamping station; at least two of the supports are mounted on the corresponding primary reversing mechanism and rotate independently relative to the primary reversing mechanism around their own axes; the primary reversing mechanism is used to drive a drive component at a preset position in the vacuum chamber during the rotation of the turntable, so as to drive the corresponding at least two supports to rotate relative to the turntable. The secondary reversing mechanism is rotatably mounted on the primary reversing mechanism around its own axis, corresponding one-to-one with the support, and coaxially connected for transmission. A reversing component is fixed on the turntable and set in relation to the clamping station. It is sequentially connected to at least two secondary reversing mechanisms at a preset angle. It is used to drive at least two secondary reversing mechanisms to rotate relative to the primary reversing mechanism during the rotation of the primary reversing mechanism relative to the turntable, so as to drive the corresponding support and the sheet workpiece on it to flip over.

2. The workpiece turntable for a PVD coating equipment according to claim 1, characterized in that, The primary reversing mechanism includes a primary gear; At least two of the aforementioned supports are rotatably positioned above the corresponding primary gear, and their rotation axes are parallel to the rotation axis of the primary gear. At least two of the aforementioned supports are arranged at uniform intervals around the axis of the corresponding first-stage gear.

3. The workpiece turntable for a PVD coating equipment according to claim 2, characterized in that, The rotary table, corresponding to the clamping station, includes a base and a rotating shaft, which are coaxially and fixedly connected. The rotating base is detachably and fixedly connected to the turntable; The primary gear is coaxially rotatably mounted on the rotating shaft and located above the rotating base; The first spring locking mechanism is located on the rotating shaft at a position corresponding to the first-stage gear, so as to keep the rotating shaft and the first-stage gear tightly connected and engaged with the first-stage gear at a preset angle.

4. The workpiece turntable for a PVD coating equipment according to claim 3, characterized in that, The mounting platform is coaxially rotatably sleeved on the rotating shaft, located above the primary gear and fixed relative to the primary gear; at least two of the brackets are rotatably mounted on the mounting platform via lower rotating rods; The secondary reversing mechanism includes a secondary gear, which is rotatably positioned below the mounting platform corresponding to the bracket. The reversing component includes a sector gear, which is coaxially fixedly sleeved on the rotating shaft and meshes sequentially with at least two secondary gears at a preset angle.

5. The workpiece turntable for a PVD coating equipment according to claim 4, characterized in that, The partition is coaxially rotatably sleeved on the rotating shaft and located between the mounting platform and the first-stage gear; The two ends of the secondary gear are respectively rotatably mounted on the partition and the mounting platform; The second spring locking mechanism is located between the lower rotating rod and the mounting platform to maintain the lower rotating rod in a tight fit with the mounting platform and to engage with the mounting platform at a preset angle.

6. A workpiece turntable for a PVD coating equipment according to any one of claims 1-5, characterized in that, A support ring is fixed above the turntable by several support rods and is coaxially spaced with the turntable. The support frame is set corresponding to the clamping station and is rotatably positioned below the support ring around its own axis; At least two of the corresponding supports are evenly spaced around the rotation axis of the support frame, and their upper ends are rotatably connected to the support frame.

7. A workpiece turntable for a PVD coating equipment according to claim 6, characterized in that, The mounting positions are located on the support ring and are evenly spaced around the axis of the support ring, for detachably connecting the bracket frame.

8. The workpiece turntable for a PVD coating equipment according to claim 7, characterized in that, A gear ring is coaxially fixed to the outer circumferential surface of the support ring and is used to mesh with the internal gear at the top of the vacuum chamber.

9. A PVD coating equipment, characterized in that, The PVD coating equipment workpiece turntable according to any one of claims 1-8 further includes: A vacuum chamber is formed inside the vacuum box, and the workpiece rotating frame of the PVD coating equipment is rotatably disposed in the vacuum chamber around its own axis. A driving component is disposed on the inner wall of the vacuum chamber and is sequentially connected to each of the first-stage reversing mechanisms to drive the brackets on each of the first-stage reversing mechanisms to rotate relative to the turntable by a preset angle, so as to adjust the coating angle of the corresponding sheet workpiece. An internal gear is coaxially fixed to the top of the vacuum chamber and is used to mesh with a gear ring on the workpiece rotating frame of the PVD coating equipment.

10. A PVD coating equipment according to claim 9, characterized in that, The driving component is detachably provided on the inner wall of the vacuum chamber; Alternatively, at least two drive components may be detachably provided on the inner wall of the vacuum chamber, and the at least two drive components may be arranged at uniform intervals around the axis of the turntable.

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