A novel coating carrier device and a coating apparatus
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JOLYWOOD (TAIZHOU) SOLAR TECHNOLOGY CO LTD
- Filing Date
- 2025-06-27
- Publication Date
- 2026-07-21
AI Technical Summary
Existing coating carrier devices lack effective fixing components, which makes the coated parts prone to displacement and falling off during high-temperature coating processes, affecting coating uniformity and equipment utilization. Furthermore, the increased width of the support components leads to a reduction in the coating area.
The design employs a coordinated approach between the clamping components and the support frame. The clamping unit deflects and extends into the support frame to fix the part to be coated. This, combined with the support frame's supporting surface, ensures stable fixation of the part to be coated. The clamping force can be precisely controlled, preventing the part from moving or circumventing the coating process. The support frame's supporting surface width is reduced to an ultra-narrow design.
It improves coating uniformity and coating quality, increases the effective coating area, and enhances the utilization rate of coating equipment and the performance of battery cells.
Smart Images
Figure CN224531002U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of photovoltaic equipment technology, specifically to a novel coating carrier device and coating equipment. Background Technology
[0002] Photovoltaic coating technologies, such as PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), and ALD (Atomic Layer Deposition), play a crucial role in the manufacturing of high-efficiency solar cells, and their related coating equipment is one of the core pieces of equipment in high-efficiency solar cell manufacturing. With the development of large-size, thin-film, and flexible photovoltaic products, high-precision, intelligent coating equipment will become one of the important supports for reducing costs and increasing efficiency in the photovoltaic industry. Depositing functional thin films such as anti-reflection films and passivation films on the surface of silicon wafers through processes such as PVD and CVD directly affects the light absorption, carrier transport, and photoelectric conversion efficiency of solar cells. The coating carrier system of the coating equipment is a key component that determines the coating uniformity, yield, and production cost, and it is applicable to mainstream solar cell technologies such as PERC (Emitter and Back Passivation Cells), TOPCon (Tunneling Oxide Passivated Contact Cells), HJT (Heterojunction Cells), and perovskite cells.
[0003] As shown in CN215163114U, existing coating carrier devices typically only have a support frame for supporting the workpiece to be coated (such as a silicon wafer or a solar cell). However, the support components of the support frame only provide unidirectional support for the coating surface (lower surface) of the workpiece. This type of coating carrier device lacks an effective fixing component for the workpiece. Therefore, in high-temperature coating processes, when the coating equipment operates at high speed, mechanical vibration or thermal stress can cause the workpiece to be coated to easily shift or even fall off, seriously affecting the stability of the coating process and resulting in uneven coating thickness on the lower surface of the workpiece. Moreover, during the coating process, the coating reaction gas generates turbulence at the edge of the support component, causing the plasma to bombard the edge of the workpiece non-directionally, forming a swirling coating. In addition, to improve the reliability of the support and prevent the part to be coated from falling due to displacement, the width of the support members of the support frame will be increased. However, a wider support member will increase the shading area of the edge of the part to be coated, which will significantly reduce the effective coating area of the coating area on the lower surface of the part to be coated. Therefore, it will reduce the utilization rate of the coating equipment and reduce the passivation effect of the cell, which is not conducive to the improvement of cell performance. Utility Model Content
[0004] The purpose of this utility model is to overcome the shortcomings of the prior art and provide a new type of coating carrier plate device and coating equipment.
[0005] Based on this, the present invention discloses a novel coating carrier plate device, including a carrier plate body, wherein the carrier plate body has a plurality of material loading frames arranged in sequence.
[0006] The material carrier frame includes a hollow area and a support frame for supporting the part to be coated. The support frame surrounds the side of the hollow area, and the bottom of the support frame is connected to the carrier plate body.
[0007] A clamping component is installed outside the material carrier frame. The clamping component includes a drive component and a clamping unit. The drive component is connected to a control component. The fixed end of the clamping unit is rotatably connected to the drive component. The drive component drives the clamping unit to deflect outward counterclockwise or clockwise, so that the free end of the clamping unit deflects and extends into the support frame to fix the workpiece to be coated.
[0008] Preferably, the clamping components are mounted on the carrier plate body, and one clamping component is mounted on each of the four corners of each material carrying frame.
[0009] More preferably, each clamping component located at the edge of the carrier plate body has two clamping units; while each clamping component located in the middle of the carrier plate body has four clamping units, and each clamping unit of the same clamping component deflects and extends into different support frames to contact the upper surface of the workpiece to be coated.
[0010] Preferably, each of the clamping units includes a connecting rod, a telescopic joint, and an elastic clamping arm; the fixed end of the connecting rod is rotatably connected to the driving member, the upper end of the elastic clamping arm is connected to the free end of the connecting rod through the telescopic joint, and the lower end of the elastic clamping arm is used to contact the upper surface of the part to be coated within the support frame.
[0011] Preferably, the support frame has a support surface for supporting the lower surface of the part to be coated; the support surface of the support frame is a stepped platform.
[0012] More preferably, the width of the support frame extending horizontally within the hollowed-out area is less than or equal to 2 mm.
[0013] More preferably, the clamp components are connected via connecting pipes, which are connected to a control component, which is a solenoid valve. A control switch is connected between the connecting pipes and the drive component to control the start or stop of the drive component, and the solenoid valve controls the control switch.
[0014] More preferably, the control components and connecting pipes are both mounted on the carrier plate body, and both the control components and connecting pipes are located on the outside of the material carrying frame.
[0015] Preferably, the part to be coated is a battery cell or a silicon wafer; the carrier plate body is made of aluminum alloy, stainless steel or carbon fiber.
[0016] This utility model also discloses a coating device suitable for solar cells, which includes the novel coating carrier device described above.
[0017] Compared with the prior art, the present invention has at least the following beneficial effects:
[0018] When this novel coating carrier plate device is in operation, the control unit activates the drive unit, causing it to rotate the clamping unit counterclockwise or clockwise outwards. This allows the free end of the clamping unit to extend into the support frame, contacting the upper surface of the workpiece to be coated. Combined with the support frame's load-bearing function on the lower surface of the workpiece, the clamping components and support frame work together to effectively fix the workpiece. This better secures the workpiece, significantly reducing the degradation of coating quality caused by movement, falling, or deformation of the workpiece due to mechanical vibration or thermal stress. It also effectively avoids coating problems caused by gaps between the workpiece and the bottom of the support frame, and significantly improves coating uniformity, resulting in a substantial improvement in coating effect and quality.
[0019] Furthermore, since the synergistic action of the clamping components and the support frame enables effective fixation of the workpiece to be coated, improving the reliability and stability of the fixation, the width of the support frame extending horizontally within the hollowed-out area can be reduced (e.g., reduced to less than 2mm), achieving an ultra-narrow design for the support frame's support surface. This increases the effective coating area, helps improve the utilization rate of the coating equipment, optimizes the passivation effect, and enhances the performance of the solar cells. Attached Figure Description
[0020] Figure 1 This is a top view of a novel coating carrier device according to this embodiment.
[0021] Figure 2 This is a top view of the four material-carrying frames and a fixture component in an inactive state of the carrier plate body.
[0022] Figure 3 This is a top view of the four material-carrying frames and a fixture component in working condition of the carrier plate body.
[0023] Figure 4 This is a schematic diagram of the installation structure of a material-carrying frame and clamping components.
[0024] Reference numerals: 1. Carrier plate body; 2. Material carrier frame; 21. Hollow area; 22. Support frame; 221. Support surface; 3. Fixture component; 31. Drive component; 32. First fixture unit; 33. Second fixture unit; 34. Third fixture unit; 35. Fourth fixture unit; 36. Connecting rod; 37. Elastic clamping arm; 38. Telescopic joint; 4. Control component; 41. Control switch; 5. Connecting pipe; 6. Part to be coated. Detailed Implementation
[0025] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0026] Example
[0027] This embodiment presents a novel coating carrier device; see [link to relevant documentation]. Figure 1 The system includes a carrier plate body 1, which has several sequentially arranged material carrier frames 2. Each material carrier frame 2 holds a workpiece 6 to be coated (e.g., ...). Figure 4 (As shown).
[0028] In practice, the part to be coated 6 is a solar cell or a silicon wafer. The carrier body 1 may include different numbers of material carrier frames 2, specifically determined by the size of the carrier body 1 required by the coating equipment. The material of the carrier body 1 includes, but is not limited to, aluminum alloy, stainless steel, or carbon fiber.
[0029] Among them, see Figure 1-3 The material carrier frame 2 includes a hollow area 21 and a support frame 22 for supporting the part 6 to be coated. The support frame 22 surrounds the side of the hollow area 21, and the bottom of the support frame 22 is connected to the carrier plate body 1.
[0030] Moreover, see Figure 1-3 A clamping component 3 is mounted outside the material-carrying frame 2. The clamping component 3 includes a driving component 31 and clamping units (such as a first clamping unit 32, a second clamping unit 33, a third clamping unit 34, and a fourth clamping unit 35). The driving component 31 is connected to a control component 4, which controls the opening and closing of the driving component 31. The fixed end of the clamping unit is rotatably connected to the driving component 31. During operation, the control component 4 controls the driving component 31 to open, causing the driving component 31 to drive the clamping unit to deflect outward counterclockwise or clockwise, so that the free end of the clamping unit extends into the support frame 22 after deflection, thereby contacting the upper surface of the workpiece 6 to be coated. Furthermore, the support frame 22 supports the lower surface of the part to be coated 6. Thus, the clamping component 3 and the support frame 22 work together to effectively fix the part to be coated 6. This can better fix the part to be coated 6, greatly reduce the decline in coating quality caused by the movement, falling or deformation of the part to be coated 6 due to mechanical vibration or thermal stress, effectively avoid the problem of coating around the coating caused by the gap between the part to be coated 6 and the bottom of the support frame 22, and effectively improve the coating uniformity, which can greatly improve the coating effect.
[0031] Specifically, the clamping component 3 is connected via a connecting pipe 5, which in turn connects to a control component 4. Both the control component 4 and the connecting pipe 5 are mounted on the carrier plate body 1, and both are located outside the material-carrying frame 2. The control component 4 is preferably an electromagnetic control component (such as a solenoid valve), and a control switch 41 is connected between the connecting pipe 5 and the drive component 31 to control the start or stop of the drive component 31. The solenoid valve controls the operation of the control switch 41. The solenoid valve includes, but is not limited to, a miniature solenoid valve of model FestoMHE2. The solenoid valve controls the clamping component 3 via the control switch 41. Through the cooperation of the solenoid valve and the clamping component 3, the accuracy of the clamping force control can be improved, allowing the clamping force of the clamping unit to be precisely controlled within the range of 0.5-2N. Combined with the support frame 22, it enables non-destructive clamping of the workpiece 6 to be coated, solving the problem of microcracks in the workpiece 6 caused by traditional mechanical clamps. Furthermore, the rapid response characteristics of solenoid valves enable fully automated processes such as coating, thus helping to improve coating efficiency.
[0032] In one example of this embodiment, the clamping component 3 is mounted on the carrier plate body 1, and one clamping component 3 is mounted on each of the four sides of each material carrying frame 2.
[0033] Alternatively, see another example of this embodiment, see Figure 1-3 The clamping component 3 is mounted on the carrier plate body 1, and one clamping component 3 is mounted on each of the four corners of each material carrying frame 2. Taking this example, the number of clamping units is explained in detail below:
[0034] Each clamping component 3 located in the middle of the carrier plate body 1 has four clamping units: a first clamping unit 32, a second clamping unit 33, a third clamping unit 34, and a fourth clamping unit 35. Each clamping component 3 located at the edge of the carrier plate body 1 has two clamping units. Each clamping unit of the same clamping component 3 deflects and extends into different support frames 22 to contact and fix different parts 6 to be coated.
[0035] See Figure 4Each clamping unit includes a connecting rod 36, a telescopic joint 38, and an elastic clamping arm 37. The fixed end of the connecting rod 36 is rotatably connected to the driving member 31. The upper end of the elastic clamping arm 37 is connected to the free end of the connecting rod 36 via the telescopic joint 38 (that is, the upper end of the telescopic joint 38 is connected to the free end of the connecting rod 36, while the lower end of the telescopic joint 38 is telescopically connected to the upper end of the elastic clamping arm 37). During operation, the solenoid valve controls the control switch 41 to open, causing the control switch 41 to activate the driving member 31. The driving member 31 drives the free end of the connecting rod 36 to deflect outward and causes the telescopic joint 38 to extend and retract (e.g., using an existing built-in spring telescopic structure), thereby causing the lower end of the elastic clamping arm 37 to contact the upper surface of the workpiece 6 to be coated within the support frame 22.
[0036] See Figure 4 The support frame 22 is provided with a support surface 221 to support the lower surface of the part 6 to be coated. The support surface 221 of the support frame 22 is a stepped platform (e.g., Figure 4 (As shown). The different steps of the support surface 221 can accommodate different sizes of parts 6 to be coated, and can be compatible with and switch between multiple sizes of parts 6 to be coated. The number of steps is not limited to... Figure 4 The quantity presented in the text.
[0037] Furthermore, the width of the horizontal extension of the support surface 221 of the support frame 22 into the hollow area 21 is less than or equal to 2mm. Since the novel coating carrier device of this embodiment can effectively fix the workpiece 6 to be coated through the synergistic effect of the clamping component 3 and the support frame 22, improving the reliability and stability of fixing the workpiece 6, the width of the horizontal extension of the support surface 221 of the support frame 22 into the hollow area 21 can be reduced to less than 2mm (achieving an ultra-narrow design of the support surface 221 of the support frame 22). This increases the effective coating area, helps improve the utilization rate of the coating equipment, optimizes the passivation effect, and improves the performance of the battery cells.
[0038] This embodiment provides a coating device suitable for solar cells, which includes the novel coating carrier device described above in this embodiment.
[0039] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.
[0040] The technical solution provided by this utility model has been described in detail above. Specific examples have been used to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the method and core idea of this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.
Claims
1. A novel coating carrier plate device, characterized in that, Includes a carrier plate body, wherein the carrier plate body has a plurality of material-carrying frames arranged in sequence; The material carrier frame includes a hollow area and a support frame for supporting the part to be coated. The support frame surrounds the side of the hollow area, and the bottom of the support frame is connected to the carrier plate body. A clamping component is installed outside the material carrier frame. The clamping component includes a drive component and a clamping unit. The drive component is connected to a control component. The fixed end of the clamping unit is rotatably connected to the drive component. The drive component drives the clamping unit to deflect outward counterclockwise or clockwise, so that the free end of the clamping unit deflects and extends into the support frame to fix the workpiece to be coated.
2. The novel coating carrier device according to claim 1, characterized in that, The clamping components are mounted on the carrier plate body, and one of the clamping components is mounted on the four corners of each material carrying frame.
3. The novel coating carrier device according to claim 2, characterized in that, Each clamping component located at the edge of the carrier plate body has two clamping units; while each clamping component located in the middle of the carrier plate body has four clamping units. Each clamping unit of the same clamping component deflects and extends into different support frames to contact the upper surface of the part to be coated.
4. The novel coating carrier device according to claim 1, characterized in that, Each of the clamping units includes a connecting rod, a telescopic joint, and an elastic clamping arm; the fixed end of the connecting rod is rotatably connected to the drive component, the upper end of the elastic clamping arm is connected to the free end of the connecting rod through the telescopic joint, and the lower end of the elastic clamping arm is used to contact the upper surface of the part to be coated within the support frame.
5. The novel coating carrier device according to claim 1, characterized in that, The support frame is provided with a support surface to support the lower surface of the part to be coated; the support surface of the support frame is a stepped platform.
6. The novel coating carrier device according to claim 5, characterized in that, The width of the support frame extending horizontally within the hollowed-out area is less than or equal to 2mm.
7. A novel coating carrier device according to claim 1 or 2, characterized in that, The clamp components are connected by connecting pipes, which are connected to a control component, which is a solenoid valve. A control switch that controls the start or stop of the drive component is connected between the connecting pipes and the drive component. The solenoid valve controls the control switch.
8. The novel coating carrier device according to claim 7, characterized in that, The control components and connecting pipes are all mounted on the carrier plate body, and both the control components and connecting pipes are located on the outside of the material carrying frame.
9. The novel coating carrier device according to claim 1, characterized in that, The part to be coated is a battery cell or a silicon wafer; the carrier plate body is made of aluminum alloy, stainless steel or carbon fiber.
10. A coating apparatus, characterized in that, It includes a novel coating carrier device as described in any one of claims 1-9.