A heating disc for a coating device

Abstract

The utility model belongs to semiconductor coating equipment technical field, specifically speak to a kind of heating disc for coating device, including heating disc body, the heating disc body top is provided with cover plate;The cover plate inside is equipped with round hole;The screw rod is arranged in the round hole;The screw rod is screw connection in the round hole;The heating disc body bottom is fixedly connected with multiple microstep motor;The microstep motor output is fixedly connected with stirring rod;The heating disc body inside is fixedly connected with multiple heating device;By increasing stirring rod can make the hot oil in the heating disc body inside be heated sufficiently evenly, reduce the hot oil in the heating disc body inside local overheating situation, can increase the flow rate of hot oil in the heating disc body inside simultaneously, make coating device be heated evenly by heating disc body.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor coating equipment technology, specifically a heating plate for a coating device. Background Technology

[0002] The coating apparatus is a specialized piece of equipment for realizing the coating process. By integrating core components such as a vacuum system, target evaporation source, and substrate holder, it provides a controllable environment for film preparation. Its functions include vacuum pumping, material evaporation and sputtering, substrate heating and rotation, etc., and parameters such as temperature, gas pressure, and deposition rate can be adjusted according to process requirements.

[0003] The coating apparatus first pre-treats and fixes the substrate, then evacuates it to the required vacuum level, and then deposits according to the principle: vacuum evaporation uses heating to vaporize and condense the material, magnetron sputtering uses plasma to bombard the target material to deposit atoms, and CVD forms a film through gas reaction. The process monitors parameters such as vacuum level and temperature. After completion, the substrate is returned to the gas and taken out, and post-processing is performed if necessary.

[0004] In actual use, existing heating plates are prone to local temperature differences inside the hot oil chamber. Especially in heating plates with large planar structures, the flow of heat transfer oil is slow or restricted, which can lead to local overheating or insufficient temperature, affecting the overall heating effect of the coating device.

[0005] Therefore, a heating plate for a coating apparatus is proposed to address the above problems. Utility Model Content

[0006] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0007] The technical solution adopted by this utility model to solve its technical problem is as follows: A heating plate for a coating device, comprising a heating plate body, a cover plate on the top of the heating plate body; a circular hole inside the cover plate; a screw rod inside the circular hole; the screw rod being threaded into the circular hole; multiple micro stepper motors fixedly connected to the bottom of the heating plate body; a stirring rod fixedly connected to the output end of each micro stepper motor; and multiple heating devices fixedly connected inside the heating plate body. By adding the stirring rod, the hot oil inside the heating plate body can be heated sufficiently and evenly, reducing localized overheating of the hot oil inside the heating plate body. Simultaneously, it can increase the flow rate of the hot oil inside the heating plate body, ensuring that the coating device is uniformly heated by the heating plate body.

[0008] Preferably, the heating plate body has multiple square grooves inside; a pull-out plate is provided inside the square groove; thermally conductive silicone is fixed to the end of the pull-out plate; a scraper is fixed to the bottom inner side of the heating plate body; by adding thermally conductive silicone, the coating device can be heated by the heating plate body even if the size is small, reducing the possibility of insufficient heating due to the small size of the coating device and the large inner diameter of the heating plate body.

[0009] Preferably, an electric push rod is fixedly connected to the bottom of the heating plate body; a base plate is fixedly connected to the end of the electric push rod; by adding the electric push rod, the coating device can be heated regardless of its height, which improves the practicality of the coating device. At the same time, adding the base plate can fix the heating plate body, eliminating the need for frequent adjustments to the position of the heating plate body.

[0010] Preferably, a magnet block is provided inside the heating plate body; a magnet cover is provided outside the magnet block; the magnet cover and the magnet block are correspondingly arranged; by adding the magnet cover, the hot oil inside the heating plate body can be discharged, reducing the number of times the hot oil is used and the subsequent heating effect is poor. At the same time, the addition of the magnet block and the magnet cover can make the hot oil discharged quickly.

[0011] Preferably, the cover plate has an insertion hole inside; a temperature monitoring meter is installed inside the insertion hole; by adding a temperature monitoring meter, the temperature inside the heating plate body can be viewed, reducing the possibility of the heating plate body becoming too hot and improving the overall safety when using the heating plate body.

[0012] Preferably, a cleaning sponge is provided on the outside of the electric actuator; a cleaning sponge is provided on the outside of the output end of the electric actuator; by adding a cleaning sponge, the electric actuator can be cleaned, and frequent cleaning of the electric actuator can ensure better performance when it extends or retracts.

[0013] The advantages of this utility model are:

[0014] 1. The heating plate for a coating device described in this utility model can be heated evenly and fully by adding a stirring rod, reducing local overheating of the hot oil inside the heating plate and increasing the flow rate of the hot oil inside the heating plate, so that the coating device is heated evenly by the heating plate.

[0015] 2. The heating plate for a coating device described in this utility model can be heated by the heating plate body even if the coating device is small in size by adding thermally conductive silicone, thus reducing the possibility of insufficient heating due to the small size of the coating device and the large inner diameter of the heating plate body. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the main body of this utility model;

[0018] Figure 2 This is a schematic diagram of the thermally conductive silicone in this utility model;

[0019] Figure 3 This is a schematic diagram of the electric actuator in this utility model;

[0020] Figure 4 This is a schematic diagram of the oil drain port in this utility model;

[0021] Figure 5 This is a schematic diagram of the structure of the cleaning sponge in this utility model.

[0022] In the diagram: 1. Heating plate body; 11. Cover plate; 12. Screw; 13. Heating device; 14. Miniature stepper motor; 15. Stirring rod; 16. Round hole; 2. Thermally conductive silicone; 21. Square groove; 22. Pull-out plate; 23. Scraper; 3. Electric push rod; 31. Base plate; 4. Magnetic cover; 41. Magnetic block; 5. Temperature monitoring meter; 51. Socket; 6. Cleaning sponge. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0024] Specific implementation examples are given below.

[0025] like Figures 1 to 5As shown in the embodiment of this utility model, a heating plate for a coating device includes a heating plate body 1. A cover plate 11 is provided on the top of the heating plate body 1. A circular hole 16 is formed inside the cover plate 11. A screw 12 is disposed inside the circular hole 16. The screw 12 is threaded into the circular hole 16. Multiple micro stepper motors 14 are fixedly connected to the bottom of the heating plate body 1. A stirring rod 15 is fixedly connected to the output end of each micro stepper motor 14. Multiple heating devices 13 are fixedly connected inside the heating plate body 1. When the heating plate body 1 is needed to heat the coating device, hot oil can be injected into the heating plate body 1. Then, the heating devices 13 can be activated. The heating devices 13 will heat the hot oil inside the heating plate body 1. After the hot oil is heated, the hot oil... The temperature of the oil is transferred to the outer wall of the heating plate body 1, which then heats the coating device. At this time, the micro stepper motor 14 can be started, which drives the stirring rod 15 to rotate. When the stirring rod 15 rotates, the hot oil inside the heating plate body 1 is disturbed by the stirring rod 15, and the flow rate of the hot oil inside the heating plate body 1 will increase. At this time, the hot oil can be rapidly heated and diffused inside the heating plate body 1, so that the heating plate body 1 is fully heated. By adding the stirring rod 15, the hot oil inside the heating plate body 1 can be heated fully and evenly, reducing the occurrence of local overheating of the hot oil inside the heating plate body 1. At the same time, it can increase the flow rate of the hot oil inside the heating plate body 1, so that the coating device is heated evenly by the heating plate body 1.

[0026] like Figures 1 to 4 As shown, the heating plate body 1 has multiple square grooves 21 inside; a pull-out plate 22 is provided inside the square groove 21; thermally conductive silicone 2 is fixed to the end of the pull-out plate 22; a scraper 23 is fixed to the bottom inner side of the heating plate body 1; when encountering a small-sized coating device, the pull-out plate 22 can be slid, and then the pull-out plate 22 will slide inside the square groove 21, sliding the pull-out plate 22 towards the middle of the heating plate body 1. The hot oil inside the heating plate body 1 will transfer the temperature to the thermally conductive silicone 2 through the pull-out plate 22, and then the thermally conductive silicone 2 will be heated. At this time, the position of the pull-out plate 22 can be slid to bring the thermally conductive silicone 2 as close as possible to the coating device, so as to accurately heat the coating device; by adding thermally conductive silicone 2, even if the coating device is small in size, it can be heated by the heating plate body 1, reducing the situation where the coating device is small and the inner diameter of the heating plate body 1 is large, resulting in insufficient heating.

[0027] like Figures 1 to 5As shown, an electric push rod 3 is fixedly connected to the bottom of the heating plate body 1; a base plate 31 is fixedly connected to the end of the electric push rod 3; when it is necessary to heat different positions of the coating device, the electric push rod 3 can be started, and then the electric push rod 3 will drive the heating plate body 1 to move up and down. After the heating plate body 1 is raised to a sufficient height, the electric push rod 3 can be stopped, and the heating plate body 1 will stay at the required height; by adding the electric push rod 3, the coating device can be heated regardless of the height of the device, which improves the practicality of the coating device. At the same time, adding the base plate 31 can fix the heating plate body 1, eliminating the need to frequently adjust the position of the heating plate body 1.

[0028] like Figures 1 to 5 As shown, a magnet block 41 is provided inside the heating plate body 1; a magnet cover 4 is provided outside the magnet block 41; the magnet cover 4 and the magnet block 41 are correspondingly arranged; when the hot oil inside the heating plate body 1 is used up, the magnet cover 4 can be removed from the outside of the magnet block 41, and the hot oil inside the heating plate body 1 will flow out from the bottom of the heating plate body 1. After all the hot oil inside the heating plate body 1 has flowed out, the magnet cover 4 can be inserted into the outside of the magnet block 41, and then the magnet block 41 will magnetically attract the magnet cover 4, while sealing the bottom of the heating plate body 1; by adding the magnet cover 4, the hot oil inside the heating plate body 1 can be discharged, reducing the situation of excessive use of hot oil and poor subsequent heating effect. At the same time, the cooperation of the magnet block 41 and the magnet cover 4 can make the hot oil discharged quickly.

[0029] like Figure 1 As shown, the cover plate 11 has an insertion hole 51 inside; a temperature monitoring meter 5 is installed inside the insertion hole 51; when the heating device 13 heats the hot oil inside the heating plate body 1, the temperature monitoring meter 5 can be inserted into the insertion hole 51, and then the temperature monitoring meter 5 will detect the temperature inside the heating plate body 1 and display the temperature inside the heating plate body 1; by adding the temperature monitoring meter 5, the temperature inside the heating plate body 1 can be viewed, reducing the possibility of the heating plate body 1 overheating and improving the overall safety when using the heating plate body 1.

[0030] like Figure 5 As shown, a cleaning sponge 6 is provided on the outside of the electric actuator 3; a cleaning sponge 6 is provided on the outside of the output end of the electric actuator 3; when the electric actuator 3 extends or retracts, the cleaning sponge 6 will contact the output end of the electric actuator 3, and then the cleaning sponge 6 will clean the extension and retraction part of the electric actuator 3; by adding the cleaning sponge 6, the electric actuator 3 can be cleaned, and frequent cleaning of the electric actuator 3 can make the electric actuator 3 have a better condition when extending or retracting.

[0031] Working principle: When the heating plate body 1 needs to heat the coating device, hot oil can be injected into the heating plate body 1. Then, the heating device 13 can be started. The heating device 13 will heat the hot oil inside the heating plate body 1. After the hot oil is heated, the temperature of the hot oil will be transferred to the outer wall of the heating plate body 1, and then the heating plate body 1 will heat the coating device. At this time, the micro stepper motor 14 can be started, and the micro stepper motor 14 will drive the stirring rod 15 to rotate. When the stirring rod 15 rotates, the hot oil inside the heating plate body 1 will be disturbed by the stirring rod 15. The hot oil will then flow faster inside the heating plate body 1, allowing it to heat and diffuse rapidly, ensuring sufficient heating. When encountering a smaller coating device, the pull plate 22 can be slid, moving it within the square groove 21 towards the center of the heating plate body 1. The hot oil inside the heating plate body 1 will transfer its temperature to the thermally conductive silicone 2 via the pull plate 22, heating the silicone 2. The position of the pull plate 22 can be adjusted to bring the thermally conductive silicone 2 as close as possible to the surface. The coating apparatus provides precise heating. When heating different areas of the coating apparatus is required, the electric actuator 3 is activated. The actuator 3 then moves the heating plate body 1 up and down, raising it to a sufficient height. Once the actuator 3 is stopped, the heating plate body 1 will remain at the desired height. After the hot oil inside the heating plate body 1 is used up, the magnet cover 4 can be removed from the magnet block 41. The hot oil inside the heating plate body 1 will then flow out from the bottom. Once all the hot oil has drained, the coating apparatus can be... The magnet cover 4 is inserted into the outside of the magnet block 41, and then the magnet block 41 magnetically attracts the magnet cover 4, while sealing the bottom of the heating plate body 1. When the heating device 13 heats the hot oil inside the heating plate body 1, the temperature monitoring meter 5 can be inserted into the socket 51. Then the temperature monitoring meter 5 will detect the temperature inside the heating plate body 1 and display the temperature inside the heating plate body 1. When the electric push rod 3 extends and retracts, the cleaning sponge 6 will contact the output end of the electric push rod 3 and then clean the extension and retraction part of the electric push rod 3.

[0032] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A heating plate for a coating apparatus, comprising a heating plate body (1), characterized in that: The heating plate body (1) is provided with a cover plate (11) on the top; a round hole (16) is provided inside the cover plate (11); a screw (12) is provided inside the round hole (16); the screw (12) is threaded inside the round hole (16); a plurality of micro stepper motors (14) are fixedly connected to the bottom of the heating plate body (1); a stirring rod (15) is fixedly connected to the output end of the micro stepper motor (14); a plurality of heating devices (13) are fixedly connected inside the heating plate body (1).

2. A heating plate for a coating apparatus according to claim 1, characterized in that: The heating plate body (1) has multiple square grooves (21) inside; a pull plate (22) is provided inside the square groove (21); a thermally conductive silicone (2) is fixed to the end of the pull plate (22); a scraper (23) is fixed to the bottom inside the heating plate body (1).

3. A heating plate for a coating apparatus according to claim 2, characterized in that: An electric actuator (3) is fixedly connected to the bottom of the heating plate body (1); a base plate (31) is fixedly connected to the end of the electric actuator (3).

4. A heating plate for a coating apparatus according to claim 3, characterized in that: The heating plate body (1) is provided with a magnet block (41) inside; the magnet block (41) is provided with a magnet cover (4) outside; the magnet cover (4) and the magnet block (41) are provided correspondingly.

5. A heating plate for a coating apparatus according to claim 4, characterized in that: The cover plate (11) has an insertion hole (51) inside; a temperature monitoring meter (5) is installed inside the insertion hole (51).

6. A heating plate for a coating apparatus according to claim 5, characterized in that: The electric actuator (3) is provided with a cleaning sponge (6) on its exterior; the output end of the electric actuator (3) is provided with a cleaning sponge (6).

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