Chemical vapor deposition furnace with support tooling

Abstract

The utility model provides a chemical vapor deposition furnace with support frock belongs to chemical vapor deposition furnace technical field, including support, right angle motor, screw rod and bolster, be provided with furnace body on the bolster, the plate mouth is set up in the center of bolster, the bottom cover that is cooperated with the plate mouth and furnace body is provided in the lower part of furnace body, and the one side bottom of support is fixedly connected with side frame, is provided with the jacking assembly that is cooperated with the bottom cover on the side frame. The utility model discloses through setting right angle motor drive screw rod rotation, adjusts the bolster to the suitable height, makes the furnace body wear the hole on the panel, and is fixedly connected with the panel through fixed bolt, and the hoisting process is simple and safe, does not need manual hoisting, through setting horizontal hydraulic propelling member, pushes the plate together with vertical hydraulic propelling member and jacking plate and pushes to the furnace body below suitable position, makes jacking plate rise through setting vertical hydraulic propelling member, makes the bottom cover seal to the furnace body bottom.

Description

Technical Field

[0001] This utility model belongs to the technical field of chemical vapor deposition furnaces, specifically relating to a chemical vapor deposition furnace with supporting fixtures. Background Technology

[0002] A chemical vapor deposition furnace is a specialized device for preparing solid thin films or coatings on a substrate surface using chemical vapor deposition technology. Its core principle is: gaseous reactants containing thin film / coating elements are introduced into a reaction chamber; under high temperature, plasma, or other energy excitation conditions, the gaseous substances undergo a chemical reaction on the substrate surface, generating solid deposits that gradually accumulate to form a film.

[0003] Chemical vapor deposition (CVD) furnaces typically need to be raised (a certain height off the ground) during installation. This elevation allows for the installation of gas pipelines, cooling water pipelines, or vacuum pipelines at the bottom of the furnace, reducing pipe bending or compression and ensuring stable gas flow and pressure. Currently, installing and dismantling CVD furnaces requires raising the furnace, usually through hoisting. Hoisting is prone to swaying, posing significant safety risks and potentially leading to accidents and equipment damage.

[0004] Therefore, a chemical vapor deposition furnace with supporting fixtures is needed. Utility Model Content

[0005] The technical problem this invention aims to solve is to address the shortcomings of the prior art by providing a chemical vapor deposition furnace with supporting fixtures. This furnace utilizes a right-angle motor to drive a screw, adjusting the support plate to a suitable height so that the furnace body passes through holes in the panel. Fixing bolts are used to secure the outer ring to the panel. The installation process is simple and safe, requiring no manual hoisting. The furnace body can be stably positioned. Precise height adjustment and flexible lifting support methods allow the equipment to adapt to different process requirements and operating scenarios, demonstrating strong versatility and practicality.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a chemical vapor deposition furnace with supporting fixtures, the chemical vapor deposition furnace including a support frame, right-angle motors fixedly connected to both sides of the bottom of the support frame, vertically arranged screws fixedly connected to the output shafts of the right-angle motors, support plates threadedly connected to the screws of the two right-angle motors, a furnace body provided on the upper surface of the support plate, a plate opening through the center of the upper surface of the support plate, a bottom cover provided at the lower part of the furnace body that cooperates with the plate opening and the furnace body, a side frame fixedly connected to one side bottom of the support frame, and a lifting assembly that cooperates with the bottom cover provided on the side frame.

[0007] The aforementioned chemical vapor deposition furnace with supporting fixtures includes a lifting assembly comprising a transverse hydraulic pusher fixed to the side frame, a pusher plate fixedly connected to the output shaft of the transverse hydraulic pusher, and a vertical hydraulic pusher fixed to the upper surface of the pusher plate.

[0008] In the aforementioned chemical vapor deposition furnace with supporting fixtures, a lifting plate is fixedly connected to the output shaft of the vertical hydraulic pusher, and the upper surface of the lifting plate is provided with an upwardly protruding bottom cover.

[0009] In the aforementioned chemical vapor deposition furnace with supporting fixtures, the horizontal hydraulic pusher is horizontally arranged, and the vertical hydraulic pusher is vertically arranged.

[0010] The aforementioned chemical vapor deposition furnace with supporting fixtures has a panel fixedly connected to the upper end of the support, and a hole is formed through the center of the upper surface of the panel, through which the furnace body passes.

[0011] The aforementioned chemical vapor deposition furnace with supporting fixtures has an outer ring fixedly connected to the outer periphery of the furnace body. The outer ring is located below the panel, and the outer ring and the panel are fixedly connected by fixing bolts.

[0012] In the aforementioned chemical vapor deposition furnace with supporting fixtures, two sliding columns are fixedly connected to the lower surface of the panel. The sliding columns are vertically arranged, and the support plate is slidably connected to the sliding columns.

[0013] In the aforementioned chemical vapor deposition furnace with supporting fixtures, the lower end of the sliding column is fixedly connected to a base, the base is fixed to the bracket, the free end of the base is fixedly connected to a clamping plate, the clamping plates on the two sliding columns are symmetrically arranged, and the push plate is slidably connected between the two clamping plates.

[0014] This utility model has the following advantages compared with the prior art: 1. This utility model uses a right-angle motor to drive the screw to rotate, adjusting the support plate to a suitable height so that the furnace body passes through the hole on the panel. The outer ring is fixedly connected to the panel using fixing bolts. The installation process is simple and safe, requiring no manual hoisting, and the furnace body can be stably placed.

[0015] 2. This utility model uses a horizontal hydraulic pusher to push the pusher plate, along with the vertical hydraulic pusher and the lifting plate, to a suitable position below the furnace body. The vertical hydraulic pusher causes the lifting plate to rise, and the bottom cover on the lifting plate seals the bottom of the furnace body while providing support for the furnace body, ensuring that the furnace body remains stable during the deposition process.

[0016] 3. This utility model uses a vertical hydraulic pusher to lower the lifting plate, causing the bottom cover to detach from the furnace body. Then, a horizontal hydraulic pusher is used to retract the pusher plate and other components to their original positions, allowing for cleaning, maintenance, or sampling operations inside the furnace body.

[0017] 4. Through the ingenious design and coordinated operation of each component, this utility model effectively solves the problem of prominent safety risks during the installation and disassembly of chemical vapor deposition furnaces, and improves the stability of the furnace body during the deposition process, thereby improving product quality and production efficiency. At the same time, the precise height adjustment function and flexible lifting support method enable the equipment to adapt to different process requirements and operating scenarios, and it has strong versatility and practicality.

[0018] 5. This utility model solves the problem that manual hoisting during installation and disassembly poses significant safety risks and is prone to causing accidents and equipment damage.

[0019] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of the chemical vapor deposition furnace with supporting fixtures according to this utility model.

[0021] Figure 2 This is a structural diagram showing the installation position of the base support of this utility model.

[0022] Figure 3 This is a schematic diagram showing the positional relationship between the lifting component and the support plate of this utility model.

[0023] Figure 4 This is a schematic diagram showing the positional relationship between the sliding column and the support plate of this utility model.

[0024] Figure 5 This is a schematic diagram of the structure of the tray of this utility model.

[0025] Explanation of reference numerals in the attached figures: Detailed Implementation

[0026] like Figures 1-4As shown, a chemical vapor deposition furnace with supporting fixtures according to this utility model includes a support 1. Right-angle motors 2 are fixedly connected to both sides of the bottom of the support 1. Vertically arranged screws 21 are fixedly connected to the output shafts of the right-angle motors 2. Support plates 3 are threadedly connected to the screws 21 of the two right-angle motors 2. A furnace body 4 is provided on the upper surface of the support plate 3. A plate opening 31 is provided through the center of the upper surface of the support plate 3. A bottom cover 41 that cooperates with the plate opening 31 and the furnace body 4 is provided at the lower part of the furnace body 4. A side frame 13 is fixedly connected to the bottom of one side of the support 1. A lifting assembly that cooperates with the bottom cover 41 is provided on the side frame 13.

[0027] It should be noted that bracket 1 is made of high-strength metal material, which has good stability and load-bearing capacity, providing a reliable support foundation for the entire equipment.

[0028] It should be noted that the synchronous rotation of the two right-angle motors 2 in the same direction can stably transmit power to the screw 21, thereby achieving precise adjustment of the height of the pallet 3. The pallet 3 is threadedly connected to the screw 21 of the two right-angle motors 2 through its internal thread structure. This connection method allows the pallet 3 to rise or fall smoothly in the vertical direction under the drive of the screw 21, thereby achieving the control of the height of the furnace body 4.

[0029] It should be noted that the bottom cover 41 is provided with multiple ports for connecting gas pipes, cooling water pipes and vacuum pipes, and the ports are connected to the inside of the furnace body 4.

[0030] like Figure 1 As shown, in this embodiment, a lifting plate 8 is fixedly connected to the output shaft of the vertical hydraulic pusher 7, and the upper surface of the lifting plate 8 is provided with an upwardly protruding bottom cover 41.

[0031] like Figure 4 As shown, in this embodiment, the horizontal hydraulic pusher 5 is horizontally arranged, and the vertical hydraulic pusher 7 is vertically arranged.

[0032] It should be noted that the transverse hydraulic pusher 5 adopts a high-performance hydraulic drive system to provide stable and controllable transverse thrust. Its output shaft is fixedly connected to the push plate 6. Under the action of the transverse hydraulic pusher 5, the push plate 6 can move linearly in the horizontal direction, thereby moving out and leaving working space for material feeding, maintenance and furnace body 4 installation. The upper surface of the push plate 6 is fixed with a vertical hydraulic pusher 7. The vertical hydraulic pusher 7 also adopts a high-precision hydraulic drive system. Its output shaft is fixedly connected to the lifting plate 8. Under the drive of the vertical hydraulic pusher 7, the lifting plate 8 can realize vertical lifting and lowering movement.

[0033] like Figure 1 and Figure 2As shown, in this embodiment, a panel 11 is fixedly connected to the upper end of the bracket 1, and a hole is opened through the center of the upper surface of the panel 11, through which the furnace body 4 passes.

[0034] like Figure 3 As shown, in this embodiment, an outer ring 42 is fixedly connected to the outer periphery of the furnace body 4. The outer ring 42 is located below the panel 11, and the outer ring 42 and the panel 11 are fixedly connected by fixing bolts 43.

[0035] It should be noted that the panel 11 provides an upper fixed support point for the furnace body 4, and the connection between the outer ring 42 and the fixing bolt 43 further stabilizes and fixes the furnace body 4.

[0036] like Figure 2 and Figure 3 As shown, in this embodiment, the lower end of the sliding column 12 is fixedly connected to the base 14, the base 14 is fixed on the bracket 1, and the free end of the base 14 is fixedly connected to the clamping plate 141. The clamping plates 141 on the two sliding columns 12 are symmetrically arranged, and the push plate 6 is slidably connected between the two clamping plates 141.

[0037] It should be noted that the sliding column 12 provides guidance for the lifting and lowering movement of the pallet 3, ensuring that the pallet 3 will not deviate during the rising or falling process, thereby improving the stability and reliability of the equipment operation. The bottom support 14 at the lower end of the sliding column 12 provides support for the sliding column 12, and the clamping plate 141 plays a guiding and limiting role in the movement of the push plate 6, ensuring the linear motion accuracy of the push plate 6 in the horizontal direction.

[0038] like Figure 1 and Figure 2 As shown, in actual use, the bracket 1 is placed stably in the designated working area. The screw 21 is rotated by the right-angle motor 2, adjusting the support plate 3 to a suitable height so that the furnace body 4 passes through the hole in the panel 11. The outer ring 42 is fixedly connected to the panel 11 using the fixing bolts 43. Then, the horizontal hydraulic pusher 5 is activated to push the push plate 6, along with the vertical hydraulic pusher 7 and the lifting plate 8, to a suitable position below the furnace body 4. Next, the vertical hydraulic pusher 7 is activated to raise the lifting plate 8, and the bottom cover 41 on the lifting plate seals the bottom of the furnace body 4, ensuring the stability of the furnace body 4 during the deposition process. After deposition is completed, the lifting plate 8 is lowered by the vertical hydraulic pusher 7 to detach the bottom cover 41 from the furnace body 4. Then, the pusher 6 and other components are returned to their original positions by the horizontal hydraulic pusher 5. This allows for cleaning, maintenance, or sampling operations inside the furnace body 4. The operation is simple and easy to promote and apply.

[0039] The above description is merely a preferred embodiment of this utility model and does not constitute any limitation on this utility model. Any simple modifications, alterations, and equivalent changes made to the above embodiments based on the technical essence of this utility model shall still fall within the protection scope of this utility model.

Claims

1. A chemical vapor deposition furnace with supporting fixtures, characterized in that, The chemical vapor deposition furnace includes a support (1), with right-angle motors (2) fixedly connected to both sides of the bottom of the support (1). Vertically arranged screws (21) are fixedly connected to the output shafts of the right-angle motors (2). Support plates (3) are threaded onto the screws (21) of the two right-angle motors (2). A furnace body (4) is provided on the upper surface of the support plate (3). A plate opening (31) is provided through the center of the upper surface of the support plate (3). A bottom cover (41) that cooperates with the plate opening (31) and the furnace body (4) is provided at the lower part of the furnace body (4). A side frame (13) is fixedly connected to the bottom of one side of the support (1). A lifting assembly that cooperates with the bottom cover (41) is provided on the side frame (13).

2. A chemical vapor deposition furnace with supporting fixtures according to claim 1, characterized in that, The lifting assembly includes a transverse hydraulic pusher (5) fixed on the side frame (13), a push plate (6) fixedly connected to the output shaft of the transverse hydraulic pusher (5), and a vertical hydraulic pusher (7) fixed on the upper surface of the push plate (6).

3. A chemical vapor deposition furnace with supporting fixtures according to claim 2, characterized in that, A lifting plate (8) is fixedly connected to the output shaft of the vertical hydraulic pusher (7), and the upper surface of the lifting plate (8) is provided with an upwardly protruding bottom cover (41).

4. A chemical vapor deposition furnace with supporting fixtures according to claim 2, characterized in that, The horizontal hydraulic pusher (5) is set horizontally, and the vertical hydraulic pusher (7) is set vertically.

5. A chemical vapor deposition furnace with supporting fixtures according to claim 2, characterized in that, The upper end of the bracket (1) is fixedly connected to a panel (11), and a hole is opened through the center of the upper surface of the panel (11), through which the furnace body (4) passes.

6. A chemical vapor deposition furnace with supporting fixtures according to claim 5, characterized in that, An outer ring (42) is fixedly connected to the outer periphery of the furnace body (4). The outer ring (42) is located below the panel (11). The outer ring (42) and the panel (11) are fixedly connected by fixing bolts (43).

7. A chemical vapor deposition furnace with supporting fixtures according to claim 5, characterized in that, Two sliding columns (12) are fixedly connected to the lower surface of the panel (11). The sliding columns (12) are vertically arranged, and the support plate (3) is slidably connected to the sliding columns (12).

8. A chemical vapor deposition furnace with supporting fixtures according to claim 7, characterized in that, The lower end of the sliding column (12) is fixedly connected to a base (14), the base (14) is fixed on the bracket (1), and the free end of the base (14) is fixedly connected to a clamp (141). The clamps (141) on the two sliding columns (12) are symmetrically arranged, and the push plate (6) is slidably connected between the two clamps (141).

Images