PECVD process gas mixing structure
CN224531022UActive Publication Date: 2026-07-21ANHUI HUAYUAN EQUIP TECH CO LTD +1
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ANHUI HUAYUAN EQUIP TECH CO LTD
- Filing Date
- 2025-07-22
- Publication Date
- 2026-07-21
AI Technical Summary
Technical Problem
In the PECVD process, the connecting pipeline between the gas path cabinet and the reaction chamber leads to insufficient gas mixing, resulting in uneven film thickness and quality. Existing technologies need further optimization.
Method used
By installing a gas mixing structure one, a gas mixing structure two, or a gas mixing structure three inside the connecting pipe, including a grid plate, a baffle, or a small-diameter pipe, the gas molecules can be increased in flow distance and collision opportunities, resulting in more thorough gas mixing.
Benefits of technology
By designing a gas mixing structure, the gas mixes more evenly before reaching the reaction chamber, solving the problem of uneven film thickness and quality, and achieving a more stable PECVD process.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN224531022U_ABST
Abstract
The utility model relates to process gas mixing structure technical field, concretely relates to a PECVD process gas mixing structure, including at least one of mixing structure one, mixing structure two, mixing structure three, mixing structure one is the multiple grid plates of interval arrangement in the connecting pipeline, is provided with through -hole on the grid plate, and the through -hole position on adjacent grid plate is interlaced with each other, mixing structure two is the multiple baffle of interval arrangement in the connecting pipeline, and the gap is left between one end of baffle and connecting pipeline inner wall, and the gap position of adjacent is located in the opposite two sides in the connecting pipeline respectively, mixing structure three is located in the small diameter pipeline in the connecting pipeline, and mixed gas flows through multiple layer grid plate, or according to the wave type curve and flows through multiple layer baffle, and the more sufficient mixing, or through being provided with small diameter pipeline, make mixed gas reach turbulent flow state, can more fully mix.
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