A hot wire apparatus shower head device

Abstract

The utility model relates to a spray head technical field especially relates to a hot wire equipment spray head device. Its technical scheme, include: spray board, the bottom surface of spray board is opened with a plurality of spray orifices, the inside middle position of spray orifice is fixed and is provided with the baffle that penetrates, the upper surface of baffle is opened with a plurality of through -holes, and the baffle is provided with trachea and penetrates, the inside of baffle is provided with the filter assembly for filtering air. The utility model has realized the step -by -step dispersion and the speed reduction of reaction gas, avoided the gas jet superposition phenomenon of single -stage multi -hole pipe type structure, improved the uniformity of deposition area reaction gas distribution, and then guaranteed the thickness consistency and performance stability of the substrate surface deposition film layer, prevented the easy plugging air hole, and convenient to the filter plate dismounts and cleans up.

Description

Technical Field

[0001] This utility model relates to the field of spray head technology, and in particular to a spray head device for hot wire equipment. Background Technology

[0002] In hot-wire chemical vapor deposition (HCVD), the deposition of diamond films on substrate surfaces via the pyrolysis of reactive gases using a high-temperature metal wire is a core application. The inlet spray device, as a crucial component for conveying the reactive gases, directly impacts the quality of the deposited film due to the uniformity of its gas distribution. Existing spray head devices employ a single-stage, multi-hole tubular structure, with reactive gases input from one or both ends and discharged through axially equidistant openings in a single straight pipe. This structure easily leads to gas jet superposition, resulting in poor uniformity of gas distribution in the deposition area. Uneven gas distribution causes inconsistent film thickness and significant performance variations on the substrate surface, severely affecting product quality stability. Impurities in the reactive gases cannot be effectively filtered, easily clogging the pores and requiring time-consuming and labor-intensive cleaning. Therefore, this invention proposes a hot-wire spray head device. Utility Model Content

[0003] The purpose of this invention is to address the problem in the prior art where the structure of a single straight tube with equidistant axial openings easily leads to gas jet superposition, resulting in poor uniformity of the distribution of reactive gas in the deposition area. Uneven gas distribution causes inconsistent film thickness and significant differences in performance on the substrate surface, seriously affecting the quality stability of the product. Impurities that may be contained in the reactive gas cannot be effectively filtered, easily clogging the pores and requiring time and effort to clean. This invention proposes a hot wire equipment spray head device.

[0004] The technical solution of this utility model is as follows: a hot wire equipment spray head device, comprising: a spray plate, the bottom surface of which is provided with a plurality of spray holes, a baffle plate is fixedly and through the middle position inside the spray holes, the upper surface of which is provided with a plurality of through holes, and an air pipe is provided through the baffle plate; a filter component for filtering air is provided inside the baffle plate.

[0005] Optionally, the filter assembly includes a sealing base plate disposed on the bottom surface of the baffle plate, a plurality of guide rods are fixedly disposed on the upper surface of the sealing base plate, the guide rods are slidably connected to the baffle plate, a guide frame is fixedly disposed between the guide rods, a filter plate for air filtration is slidably disposed between the guide frames, and a limit bolt is threaded through the sealing base plate.

[0006] Optionally, the spray holes on the spray plate are arranged in a hexagonal array, with the hole diameter increasing from the center to the edge, and the center hole diameter being 0.8 mm and the edge hole diameter being 1 mm.

[0007] Optionally, the through holes on the shield are arranged in a hexagonal array and the hole diameter is 2 mm.

[0008] Optionally, the inner wall of the shield is provided with a guide groove, and the guide groove is slidably connected to the guide rod.

[0009] Optionally, a limit block is fixedly provided at the upper end of the guide rod, and the limit block is slidably connected to the guide groove.

[0010] Optionally, the filter plate has a through hole, which is movably connected to the air tube.

[0011] Optionally, the upper edge of the spray plate is provided with mounting holes.

[0012] In summary, this application includes at least one of the following beneficial technical effects: This invention utilizes a double-layer porous structure design with a shielding plate and a spray plate. The shielding plate has a hexagonal array of through holes, and the spray holes have a gradually changing diameter from the center to the edge. This design achieves the gradual dispersion and deceleration of the reactive gas, avoids the superposition of gas jets in a single-stage porous tubular structure, improves the uniformity of the reactive gas distribution in the deposition area, and thus ensures the consistency of the thickness and the stability of the performance of the deposited film on the substrate surface. Furthermore, this utility model utilizes a filter assembly installed inside the baffle plate, wherein the filter plate can slide within the guide frame and is fixed to the limiting bolt by the sealing base plate, thereby effectively filtering impurities in the reaction gas entering the spray head device, preventing easy clogging of the air holes, and facilitating the disassembly and cleaning of the filter plate. Attached Figure Description

[0013] Figure 1 This is a structural schematic diagram of a hot wire spray head device; Figure 2 Give Figure 1 Internal diagram of the disassembled central baffle; Figure 3 for Figure 2 A schematic diagram of the split structure of the filtering component.

[0014] Figure label: 1. Spray plate; 2. Spray hole; 3. Baffle plate; 4. Through hole; 5. Air pipe; 6. Filter assembly; 61. Sealing base plate; 62. Guide rod; 63. Guide frame; 64. Filter plate; 65. Limit bolt; 7. Guide groove; 8. Limiting block; 9. Through hole; 10. Mounting hole. Detailed Implementation

[0015] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this utility model, but not all embodiments.

[0016] The components of the present invention embodiments described and shown in the accompanying drawings can typically be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention.

[0017] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0018] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0019] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Example

[0020] like Figure 1 As shown, the present invention proposes a hot wire equipment spray head device, including: a spray plate 1, with a mounting hole 10 on the upper edge of the spray plate 1, which can stably and sealedly install the spray plate 1 inside the cavity by means of the mounting thread engaging the mounting hole 10; and multiple spray holes 2 on the bottom surface of the spray plate 1, which are arranged in a hexagonal array, with the diameter of the holes increasing from the center to the edge, and the diameter of the center hole being 0.8 mm and the diameter of the edge hole being 1 mm, so that the area of ​​the sprayed gas can cover the area of ​​the base, avoiding uneven gas concentration between the center and the edge of the base.

[0021] Furthermore, a baffle plate 3 is fixedly installed through the middle of the spray hole 2. A guide groove 7 is opened on the inner wall of the baffle plate 3. Multiple through holes 4 are opened on the upper surface of the baffle plate 3, which can play a preliminary role in dispersing the incoming gas. The through holes 4 are arranged in a hexagonal array and the diameter is 2 mm. An air pipe 5 is installed through the baffle plate 3 to facilitate the transmission of gas to the interior of the baffle plate 3.

[0022] like Figure 2 and Figure 3 As shown, the baffle plate 3 has a filter assembly 6 for air filtration inside. The filter assembly 6 includes a sealing base plate 61 disposed on the bottom surface of the baffle plate 3, and a sealing ring is provided at the connection between the sealing base plate 61 and the baffle plate 3 to ensure the internal sealing of the baffle plate 3. Multiple guide rods 62 are fixedly disposed on the upper surface of the sealing base plate 61, and there are three guide rods 62 located on three sides of the upper surface of the sealing base plate 61. The guide groove 7 is slidably connected to the guide rods 62, which can guide the sealing base plate 61 to move stably. A limit block 8 is fixedly disposed on the upper end of the guide rod 62, and the limit block 8 is slidably connected to the guide groove 7. The limit block 8 can limit the guide rod 62 to prevent the guide rod 62 from falling out of the guide groove 7. The guide frame 63 is fixedly installed between the guide rods 62. The guide frame 63 has a "U" shaped structure and the opening is located on the side without the guide rods 62. A filter plate 64 for air filtration is slidably installed between the guide frames 63, which makes it easy to remove the filter plate 64 from between the guide frames 63 for cleaning. The filter plate 64 has a through hole 9, which is movably connected to the air pipe 5, allowing gas to enter between the baffle plate 3 and the filter plate 64, so that the filtered gas enters the interior of the spray plate 1. A limit bolt 65 is threaded through the sealing base plate 61, and the limit bolt 65 passes through the guide frame 63 and the filter plate 64 and extends to be threadedly connected to the baffle plate 3, which makes it easy to disassemble and assemble the sealing base plate 61.

[0023] The working principle of this embodiment is as follows: First, the entire spraying device is sealed and installed inside the cavity through the mounting hole 10 on the upper edge of the spray plate 1, ensuring that the baffle plate 3 is directly facing the air inlet of the cavity, and the air pipe 5 is passed through the air inlet of the wall and then connected to the air pump or other air source.

[0024] When the equipment is started, the reaction gas enters the baffle plate 3 through the gas pipe 5 and is positioned between the baffle plate 3 and the filter plate 64. The baffle plate 3 has a hexagonal array with 2 mm aperture through holes 4, which can initially disperse the incoming gas. Simultaneously, after entering the baffle plate 3 through the through holes 4, the gas is filtered by the filter plate 64. The filter plate 64 effectively removes impurities from the gas, prevents easy clogging of the gas pores, and facilitates disassembly and cleaning of the filter plate.

[0025] If the filter plate 64 needs to be cleaned or replaced, the operator can use a tool to unscrew the limit bolt 65 on the sealing base plate 61, slide the sealing base plate 61 along the guide rod 62, and move the guide frame 63 and the filter plate 64 therein out of the baffle plate 3. Then the filter plate 64 can be slid out of the guide frame 63. The operation is simple and convenient.

[0026] After filtration, the gas enters the space between the spray plate 1 and the baffle plate 3 through the through hole 4 at the upper end of the baffle plate 3, where it is buffered and diffused to a certain extent. Then, the gas flows to the spray holes 2 on the spray plate 1. The diameter of the spray holes 2 gradually increases from 0.8 mm to 1 mm from the center to the edge, and like the through holes 4 of the baffle plate 3, they are all hexagonally arranged in close clusters. This allows the gas to be gradually dispersed and decelerated as it passes through the spray holes 2, avoiding the superposition phenomenon of gas jets in a single-stage porous tubular structure. Finally, the gas flowing out of the spray holes 2 evenly covers the surface of the base.

[0027] The above specific embodiments are merely optional embodiments of this utility model. Based on the technical solution of this utility model and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A spray head device for a hot wire equipment, characterized in that, include: A spray plate (1) has multiple spray holes (2) on its bottom surface. A baffle plate (3) is fixedly installed through the middle of the spray hole (2). Multiple through holes (4) are opened on the upper surface of the baffle plate (3). An air pipe (5) is installed through the baffle plate (3). A filter assembly (6) for filtering air is provided inside the baffle (3).

2. The hot wire equipment spray head device according to claim 1, characterized in that, The filter assembly (6) includes a sealing base plate (61) disposed on the bottom surface of the baffle plate (3). Multiple guide rods (62) are fixedly disposed on the upper surface of the sealing base plate (61). The guide rods (62) are slidably connected to the baffle plate (3). A guide frame (63) is fixedly disposed between the guide rods (62). A filter plate (64) for air filtration is slidably disposed between the guide frames (63). A limit bolt (65) is threaded through the sealing base plate (61).

3. The hot wire equipment spray head device according to claim 1, characterized in that, The spray holes (2) on the spray plate (1) are arranged in a hexagonal array, with the diameter of the holes increasing from the middle to the edge, and the diameter of the middle hole being 0.8 mm and the diameter of the edge hole being 1 mm.

4. The hot wire equipment spray head device according to claim 1, characterized in that, The through holes (4) on the shield (3) are arranged in a hexagonal array and the hole diameter is 2 mm.

5. A hot wire equipment spray head device according to claim 2, characterized in that, The inner wall of the shield (3) is provided with a guide groove (7), and the guide groove (7) is slidably connected to the guide rod (62).

6. A hot wire equipment spray head device according to claim 2, characterized in that, The upper end of the guide rod (62) is fixedly provided with a limiting block (8), and the limiting block (8) is slidably connected to the guide groove (7).

7. A hot wire equipment spray head device according to claim 2, characterized in that, The filter plate (64) has a through hole (9), which is movably connected to the air pipe (5).

8. A hot wire equipment spray head device according to claim 1, characterized in that, The spray plate (1) has mounting holes (10) on its upper edge.

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