Baffled rotating reactor atomic layer deposition apparatus
By designing a baffled rotary reactor, the combination of inner cylinder rotation and baffles solves the problems of uneven deposition and low efficiency in mass production of atomic layer deposition equipment, achieving efficient and stable catalyst deposition and mass production.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- INST OF COAL CHEM CHINESE ACAD OF SCI
- Filing Date
- 2025-08-13
- Publication Date
- 2026-07-21
AI Technical Summary
Existing atomic layer deposition equipment suffers from poor deposition uniformity and low efficiency in mass production. Traditional equipment is prone to uneven catalyst particle size distribution and uncontrollable morphology, and has high equipment costs and a heavy environmental burden.
A baffled rotary reactor is adopted, in which the inner cylinder rotates and the baffles are arranged radially in a staggered manner to form a turbulent effect, ensuring uniform distribution of raw material gas. Combined with the heat-insulating outer shell, the reaction temperature is kept stable. Microporous gas outlets and a total gas outlet are designed to discharge waste gas, so as to achieve uniform tumbling and efficient deposition of catalyst particles.
It improves the uniformity and reaction efficiency of atomic layer deposition, shortens the production cycle, enhances the efficiency and feasibility of mass production, ensures stable product quality, and reduces equipment maintenance costs.
Smart Images
Figure CN224531024U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of atomic layer deposition technology, and in particular to an atomic layer deposition device using a baffled rotary reactor. Background Technology
[0002] Nanocatalysts, due to their unique surface effects, size effects, and high specific surface area, have demonstrated significant application value in petrochemicals, environmental protection, energy conversion, pharmaceuticals, and fine chemicals. Traditional catalyst synthesis methods (such as precipitation, impregnation, and sol-gel methods) have limitations in precisely controlling the size and morphology of nanoparticles during nanocatalyst construction. These methods typically result in uneven particle size distribution and poor morphology controllability, leading to significant fluctuations in catalyst performance. Since the activity of nanocatalysts essentially depends on particle dispersion, the microstructure of active sites, and their spatial distribution characteristics, traditional synthesis routes face challenges such as random spatial arrangement of active sites, poor ability to directionally control electronic structure, and uncontrollable interactions with metal supports. These limitations result in insufficient precision in nanocatalyst structural control, poor stability, high cost, and heavy environmental burden. These systemic limitations highlight the urgent need to develop novel, precisely synthesized catalysts to achieve controllable construction and enhanced stability of atomically active centers.
[0003] Atomic layer deposition (ALD) technology achieves species deposition through continuous, self-limited surface chemical reactions of metal precursors and oxidants (or reductants) on a substrate surface, offering advantages such as atomic-level control precision, excellent conformability, uniformity, and repeatability. Despite ALD's significant advantages in the precise synthesis of nanocatalysts, its industrial application still faces serious challenges. Currently, the single-batch capacity of ALD equipment is generally limited to the milligram level in the laboratory. Although large-scale deposition has been achieved in recent years through the development of novel equipment such as rotary reactors and fluidized bed reactors, these devices suffer from a series of process problems, including easy aggregation of the deposition carrier into particles and poor deposition uniformity. Therefore, a baffled rotary reactor ALD device is urgently needed to address these technical issues. Utility Model Content
[0004] The purpose of this invention is to provide a baffled rotary reactor atomic layer deposition device to solve the problems existing in the prior art, so as to achieve better uniformity of atomic layer deposition and enable mass production.
[0005] To achieve the above objectives, this utility model provides the following solution: This utility model provides an atomic layer deposition device for a baffled rotary reactor, including an installation platform, an insulated outer shell, an inner cylinder, baffles, and a rotary drive mechanism. The axes of the insulated outer shell and the inner cylinder are parallel to the top surface of the installation platform. The inner cylinder is disposed within the insulated outer shell and is detachably connected to the output end of the rotary drive mechanism. The inner cylinder is capable of rotating around its own axis. The baffles are arranged radially and alternately along the inner cylinder, and multiple baffles are arranged along the axial direction of the inner cylinder. The first end of the inner cylinder is connected to a raw material gas chamber, and the inner cylinder is used to hold a catalyst. The second end of the inner cylinder is provided with a microporous gas outlet, which communicates with the insulated outer shell. A main gas outlet is provided on the insulated outer shell.
[0006] In some embodiments, the baffle is inclinedly disposed within the inner cylinder and extends gradually from the edge toward the center toward the microporous air outlet.
[0007] In some embodiments, the inner cylinder includes a first half-cylinder and a second half-cylinder in the axial direction, and the first half-cylinder and the second half-cylinder are detachably connected.
[0008] In some embodiments, a sliding plate is also included, the rotary drive mechanism is fixedly mounted on the sliding plate, the sliding plate is slidably mounted on the mounting platform, and is capable of sliding along a direction parallel to the axis of the inner cylinder.
[0009] In some embodiments, the rotary drive mechanism includes a motor, which is fixedly mounted on the slide plate, and the inner cylinder, the heat-insulating outer shell, and the output shaft of the motor are coaxially arranged.
[0010] In some embodiments, the system further includes two support frames fixedly mounted on the slide plate, and the rotary drive mechanism further includes a rotary guide rod rotatably connected to the two support frames.
[0011] In some embodiments, a rotary seal is also included, which is rotatably connected to the output end of the drive mechanism and is used to seal the thermal insulation outer shell.
[0012] In some embodiments, a porous sintered plate is also included, which is used to fix the inner cylinder to both ends.
[0013] In some embodiments, a differential pressure valve is also included, which is embedded in one end of the microporous outlet near the rotary drive mechanism.
[0014] In some embodiments, an air intake pipe is also included, which includes a connecting section and a diffuser section. The connecting section is cylindrical and connected to the raw material gas chamber. The diffuser section is trumpet-shaped, with its small end connected to the connecting section and its large end connected to and communicating with the inner cylinder.
[0015] The present invention achieves the following technical advantages over the prior art: The rotating inner cylinder of the atomic layer deposition (ALD) apparatus provided by this invention, combined with baffles, improves the uniformity of ALD deposition. Furthermore, the rotation enhances reaction efficiency, significantly improving batch production. The rotation of the inner cylinder continuously agitates the catalyst, ensuring more even contact between catalyst particles and the feed gas, preventing uneven deposition caused by large localized differences in feed gas concentration due to static placement. The radially staggered baffles create turbulence between the feed gas and catalyst, further breaking the inertial flow of the gas and resulting in a more dispersed and uniform distribution of the feed gas within the reactor. This ensures consistent ALD deposition thickness and quality across the catalyst surface. Higher deposition uniformity and reaction efficiency mean stable batch quality and shorter production cycles, allowing for the production of more qualified products within the same timeframe, significantly improving the efficiency and feasibility of batch production. The insulated outer shell maintains stable internal reactor temperature, reducing external environmental interference and providing constant thermodynamic conditions for the ALD reaction, thus improving reaction repeatability and stability. The microporous vent at the second end of the inner cylinder is connected to the heat-insulating outer shell, and the exhaust is then vented through the main vent. This design ensures that the waste gas generated by the reaction and the unreacted raw material gas are discharged in an orderly manner, while also preventing the exhaust process from causing severe disturbance to the internal reaction airflow, thus maintaining the stability of the reaction system. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the structure of the baffled rotary reactor atomic layer deposition equipment in some embodiments of this utility model; Figure 2 This is a front view of the baffled rotary reactor atomic layer deposition apparatus in some embodiments of this utility model; Figure 3 This is a top view of the baffled rotary reactor atomic layer deposition apparatus in some embodiments of the present invention; Figure 4 This is a side view of a baffled rotary reactor atomic layer deposition apparatus in some embodiments of the present invention.
[0018] In the diagram: 101-Insulation platform; 1-Insulated outer shell; 2-Inner cylinder; 3-Raw material gas chamber; 4-Inlet pipe; 5-Sealing gasket; 6-Connecting joint; 7-Rotary seal; 8-Rotary guide rod; 9-Micro-hole outlet; 10-Baffle; 11-Main outlet; 12-Rotary drive mechanism; 13-Guide rail; 14-Slide plate. Detailed Implementation
[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0020] The purpose of this invention is to provide a baffled rotary reactor atomic layer deposition device to solve the problems existing in the prior art, so as to achieve better uniformity of atomic layer deposition and enable mass production.
[0021] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0022] like Figures 1-4As shown, this utility model provides an atomic layer deposition device for a baffled rotary reactor, including an installation platform 101, an insulated outer shell 1, an inner cylinder 2, baffles 10, and a rotary drive mechanism 12. The axes of the insulated outer shell 1 and the inner cylinder 2 are parallel to the top surface of the installation platform 101. The inner cylinder 2 is disposed inside the insulated outer shell 1. The inner cylinder 2 is detachably connected to the output end of the rotary drive mechanism 12. The inner cylinder 2 can rotate around its own axis. The baffles 10 are arranged alternately along the radial direction of the inner cylinder 2, and multiple baffles 10 are arranged in the axial direction of the inner cylinder 2. Preferably, the baffles 10 are welded to the inner wall of the inner cylinder 2. The first end of the inner cylinder 2 is connected to the raw material gas chamber 3. The inner cylinder 2 is used to hold the catalyst. The second end of the inner cylinder is provided with a microporous gas outlet 9, which is connected to the insulated outer shell 1. The insulated outer shell 1 is provided with a main gas outlet 11. The rotation of the inner cylinder 2, combined with the baffle 10, improves the uniformity of atomic layer deposition. Furthermore, the rotation enhances reaction efficiency, which is beneficial for mass production. The rotation of the inner cylinder 2 continuously agitates the internal catalyst, ensuring more even contact between the catalyst particles and the feed gas, thus preventing uneven deposition caused by excessively high feed gas concentrations in localized areas due to static placement.
[0023] The radially staggered baffles 10 create turbulence on the feed gas and catalyst, further breaking the inertial flow of the gas and making the distribution of the feed gas in the reactor more diffuse and uniform. This ensures that the atomic layer deposition thickness and quality are consistent across all regions of the catalyst surface. Higher deposition uniformity and reaction efficiency mean stable quality for each batch of products and a shorter production cycle, enabling the production of more qualified products in the same amount of time, significantly improving the efficiency and feasibility of mass production. The heat-insulating outer shell 1 maintains a stable internal temperature in the reactor, reducing interference from the external environment on the reaction temperature and providing constant thermodynamic conditions for the atomic layer deposition reaction, which is beneficial for improving the repeatability and stability of the reaction. The microporous vent 9 at the second end of the inner cylinder 2 is connected to the heat-insulating outer shell 1, and the exhaust is then conducted through the main vent 11. This design ensures that the waste gas and unreacted feed gas generated during the reaction are discharged in an orderly manner, while avoiding severe disturbance to the internal reaction gas flow during the exhaust process, thus maintaining the stability of the reaction system.
[0024] It should be noted that the thermal insulation outer shell 1 is also connected to a vacuum pump, which keeps the interior of the thermal insulation outer shell 1 under a constant vacuum. In a vacuum environment, the free path of gas molecules increases, and the diffusion rate of the raw material gas in the reactor is faster, allowing it to quickly fill the space of the inner cylinder 2 and come into contact with the catalyst. At the same time, the by-product gases produced by the reaction can also be quickly discharged through the microporous outlet 9 and the thermal insulation outer shell 1 under the vacuum suction, reducing the residence time in the reaction zone.
[0025] In some embodiments, the baffle 10 is inclinedly disposed within the inner cylinder 2, and gradually extends from the edge to the center towards the microporous outlet 9. The inclined baffle 10 extending towards the outlet can directionally guide the feed gas, causing the airflow to gradually converge towards the center along the baffle's inclination direction and flow towards the microporous outlet 9, reducing the stagnation or ineffective circulation of the feed gas in the edge region, and allowing the airflow to pass through the catalyst bed more efficiently. Combined with the rotational motion of the inner cylinder 2, the inclined baffle exerts a combined pushing and tumbling effect on the catalyst particles. During rotation, the catalyst at the edge of the baffle is pushed towards the center, while the inclination angle causes the catalyst to move slowly towards the outlet, forming a circulating flow of the catalyst within the cylinder. This prevents particles from remaining in the same area for extended periods. The catalyst particles can not only tumble up and down but also undergo orderly displacement along the axial direction, resulting in more comprehensive contact with the feed gas. In particular, it reduces the shielding effect between particles (i.e., some particles are blocked by other particles and have difficulty contacting the airflow), further improving deposition uniformity.
[0026] In some embodiments, the inner cylinder 2 includes a first half-cylinder and a second half-cylinder in the axial direction. The first half-cylinder and the second half-cylinder are detachably connected and can be fixed by a rotational coupling mechanism. For catalysts processed in batches (especially granular, powdery, or lumpy materials), the traditional one-piece inner cylinder 2 requires insertion or removal from the port during loading and unloading, which can easily lead to local accumulation and residue, and is inconvenient to operate. The detachable two-half-cylinder design allows the inner cylinder 2 to be opened directly, allowing the catalyst to be quickly and evenly spread inside, or the reacted material to be poured out in one go, greatly simplifying the loading and unloading process, reducing the amount of catalyst residue in the cylinder, and improving operating efficiency. After the two half-cylinders are detachable, the inner wall of the inner cylinder 2 and the front and back of the baffle 10 can be directly exposed, making it easy for operators to thoroughly clean (such as wiping, blowing, solvent cleaning, etc.), avoiding the presence of contaminants in hard-to-reach corners in the one-piece structure. If the baffle 10 or the inner cylinder 2 is partially damaged, the detachable design also makes it easy to replace the damaged parts individually without replacing the entire inner cylinder 2, reducing maintenance costs.
[0027] In some embodiments, the rotary reactor atomic layer deposition apparatus further includes a slide plate 14, on which a rotary drive mechanism 12 is fixedly mounted. The slide plate 14 is slidably mounted on the mounting platform 101 and can slide along a direction parallel to the axis of the inner cylinder 2. When it is necessary to install or remove the inner cylinder 2 (such as when replacing the catalyst, cleaning the inner cylinder, or repairing components), the rotary drive mechanism 12 can be driven away from the insulation outer shell 1 along the axial direction by sliding the slide plate 14, so that the inner cylinder 2 is separated from the insulation outer shell 1, forming sufficient operating space. This avoids the insertion and removal of the inner cylinder 2 in a confined space, reduces the risk of bumping or knocking the inner cylinder 2, the baffle 10, or the interface of the insulation outer shell 1 during loading and unloading, and allows operators to more easily connect or separate the inner cylinder 2 from the rotary drive mechanism 12, improving maintenance efficiency.
[0028] More specifically, the plane on which the installation platform 101 is located is provided with a guide rail 13, and the bottom of the slide plate 14 is provided with a sliding groove, which is slidably connected to the guide rail 13.
[0029] In some embodiments, the rotary drive mechanism 12 includes a motor, which is fixedly mounted on the slide plate 14. The inner cylinder 2, the insulation outer shell 1, and the output shaft of the motor are coaxially arranged. Coaxial arrangement means that the rotation centers or axis lines of each core component (motor output shaft, inner cylinder 2, insulation outer shell 1) are completely coincident, avoiding centrifugal force caused by eccentricity. When the inner cylinder 2 rotates, it will not wobble or vibrate due to the shift of the center of gravity, reducing mechanical noise and component wear (such as wear on bearings and connecting structures) during equipment operation, and extending the service life of the equipment. Stable rotation ensures that the relative movement between the baffle 10 and the inner cylinder 2 is always uniform, avoiding uneven catalyst agitation or abnormal airflow disturbance caused by vibration, and providing a stable mechanical environment for the deposition reaction. The coaxial design ensures that the relative position of the inner cylinder 2's axis to the insulating outer shell 1 remains fixed during rotation. The distance from all points within the inner cylinder 2 to the insulating outer shell 1 is consistent. Combined with the insulation function of the outer shell 1, this results in a more symmetrical distribution of the temperature and airflow fields around the inner cylinder 2, avoiding localized environmental differences caused by positional shifts. Simultaneously, the coaxiality of the inner cylinder 2's rotation allows for a more uniform distribution of catalyst particles under centrifugal force. Combined with the turbulence effect of the baffle 10, this further ensures consistent contact between the catalyst and the feed gas at all points, improving the uniformity and thickness accuracy of atomic layer deposition.
[0030] In some embodiments, the baffled rotary reactor atomic layer deposition apparatus further includes two support frames fixedly mounted on the slide plate 14. The rotary drive mechanism 12 also includes a rotary guide rod 8 rotatably connected to the two support frames. The two support frames provide two-point support for the rotary guide rod 8, effectively distributing the weight of the rotary guide rod 8 and the connected inner cylinder 2, preventing bending or offset of the guide rod due to single-point force, and ensuring that the rotary guide rod 8 always rotates stably along the axis. As an intermediate transmission component connecting the motor and the inner cylinder 2, the rotary guide rod 8, through the rotatable connection of the support frames (such as with bearings), can reduce the coefficient of rotational friction, allowing the motor's power to be transmitted to the inner cylinder 2 more smoothly and efficiently, reducing power loss.
[0031] In some embodiments, the rotary reactor atomic layer deposition apparatus further includes a rotary seal 7, which is rotatably connected to the output end of the drive mechanism and is used for a sealing connection with the insulation outer shell 1. The rotary seal 7 can be designed to snap onto or thread onto the insulation outer shell 1, blocking gas leakage at the gaps without hindering the rotation of the inner cylinder 2, preventing outside air from seeping into the insulation outer shell 1 and disrupting the vacuum environment, while also preventing the leakage of internal reactant gases or unreacted raw material gases, thus avoiding waste or pollution. Furthermore, a sealing ring is also present between the rotary seal 7 and the insulation outer shell 1 and the inner cylinder 2 for further sealing.
[0032] In some embodiments, the rotary reactor atomic layer deposition apparatus further includes a porous sintered plate, which is fixed to both ends of the inner cylinder 2. This creates a barrier to prevent the fluidization and escape of catalyst particles. The rotation of the inner cylinder 2 and the turbulence of the baffles 10 cause the catalyst particles to be in a dynamic fluidized state. Especially during the introduction and exhaust of feed gas, particles easily move with the airflow towards the microporous outlet 9 or the feed gas inlet. Direct escape can lead to catalyst loss and may also clog the outlet and contaminate the pipeline. The porous sintered plate has a uniform microporous structure (pore size smaller than the catalyst particle size), which allows gas to pass freely while forming a physical barrier to trap catalyst particles, ensuring a stable total catalyst volume throughout the reaction process and avoiding a decrease in deposition efficiency or fluctuations in product quality due to particle loss. The uniform micropore distribution and good permeability of the porous sintered plate do not significantly hinder the flow of feed gas or reaction waste gas, ensuring uniform airflow along the axial direction of the inner cylinder 2. Combined with the turbulence effect of the baffles 10, this maintains a uniform distribution of feed gas in the catalyst bed. Compared to traditional filters, the rigid structure of porous sintered plates is more stable. They are not easily deformed or damaged under airflow impact and rotational vibration of the inner cylinder 2. They can maintain the consistency of airflow channels for a long time, avoid local airflow turbulence caused by barrier structure failure, and ensure stable reaction mass transfer efficiency.
[0033] In some embodiments, the rotary reactor atomic layer deposition apparatus further includes a differential pressure valve, which is embedded in the microporous outlet 9 near the rotary drive mechanism 12. The differential pressure valve automatically adjusts its opening degree according to a preset pressure difference. When the pressure difference between the inner cylinder 2 and the insulated outer shell 1 exceeds a set value, the valve opens to release pressure; when the pressure difference is lower than the set value, the valve closes or reduces its opening degree, thereby maintaining the pressure inside the inner cylinder 2 within a range suitable for atomic layer deposition. This pressure stability avoids sudden pressure rises and falls caused by pulsed input of raw material gas, reaction gas production, or exhaust fluctuations, ensuring that the contact conditions (such as adsorption rate and reaction driving force) between the catalyst and the raw material gas remain consistent, which is beneficial for improving the uniformity and batch repeatability of the deposited layer. The throttling effect of the differential pressure valve slows down the gas discharge rate from the inner cylinder 2, prolonging the residence time of the raw material gas in the catalyst bed, allowing the raw material gas more sufficient opportunity to contact and react with the catalyst surface, thus improving the utilization rate of the raw material gas. Meanwhile, by controlling the pressure difference, the airflow can be guided to pass through the gaps between catalyst particles more evenly. Combined with the turbulence effect of the baffle 10 and the rotation of the inner cylinder 2, the problem of uneven deposition caused by local airflow being too fast or too slow can be further avoided.
[0034] In some embodiments, the baffled rotary reactor atomic layer deposition apparatus further includes an inlet pipe 4, which includes a connecting section and a diffusion section. The connecting section is cylindrical and connected to the raw material gas chamber 3. The diffusion section is trumpet-shaped, with its small end connected to the connecting section and its large end connected to and communicating with the inner cylinder 2. The raw material gas chamber 3 is connected to the main raw material supply chamber via a connecting joint 6. The main raw material supply chamber can output raw material pulse gas. The raw material gas chamber 3 is connected to the inlet pipe 4, and a sealing gasket 5 can be provided at the connection for further sealing. The other end of the inlet pipe 4 is connected to and communicating with the inner cylinder 2. The diffuser section is funnel-shaped, with its smaller end receiving the airflow from the connecting section. The gradually expanding space at the larger end reduces the airflow velocity and increases turbulence, intensifying gas molecule collisions and diffusion. This promotes a more uniform flow of the raw material pulse gas before it enters the inner cylinder 2, avoiding localized concentration differences caused by gas stratification and providing a prerequisite for the uniformity of subsequent deposition reactions. The larger end of the funnel-shaped diffuser section connects directly to the inner cylinder 2, and its enlarged cross-section allows the airflow to spread more smoothly and evenly across the inlet cross-section of the inner cylinder 2, resulting in radial dispersion of the airflow upon entering the inner cylinder 2.
[0035] Specifically, the operating process of the baffled rotary reactor atomic layer deposition equipment is as follows: In use, the inner cylinder 2 is first removed, and then opened from the middle section along the radial dividing surface using a spiral coupling mechanism. Porous sintered plates are installed at both ends of the inner cylinder 2 to create a barrier to prevent the fluidization and escape of catalyst particles. A precise amount of catalyst (accurately weighed) is placed in the accommodating space formed by the two halves of the cavity. The sliding plate 14 is brought close to the insulating outer shell 1. The inner cylinder 2, loaded with catalyst, is then installed on the axial positioning groove of the rotating guide rod 8, and the rotating seal 7 is engaged with the insulating outer shell 1. A vacuum pump is used to maintain a vacuum state inside the insulating outer shell 1. The raw material gas is input into the inner cylinder 2 through the inlet pipe 4. The catalyst carrier flows along the flow path formed by the staggered baffles 10 of the inner cylinder 2. The material concentration and temperature are uniform in all parts of the inner cylinder 2, and it is in uniform contact with the raw material gas. After deposition, the reaction gas is discharged through the microporous outlet 9 of the inner cylinder 2 to the main outlet 11. After the entire atomic layer deposition process is completed, high-purity nitrogen gas is introduced until the vacuum state is lifted. Then, the slide plate 14 slides along the guide rail 13, the rotating seal 7 separates from the heat-insulating outer shell 1, and the inner cylinder 2 is taken out to collect the synthesized catalyst particles.
[0036] This utility model uses specific examples to illustrate its principles and implementation methods. The above description of the embodiments is only for the purpose of helping to understand the method and core idea of this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the idea of this utility model. In summary, the content of this specification should not be construed as a limitation of this utility model.
Claims
1. A baffled rotary reactor atomic layer deposition apparatus, characterized in that: The device includes an installation platform, an insulated outer shell, an inner cylinder, baffles, and a rotary drive mechanism. The axes of the insulated outer shell and the inner cylinder are parallel to the top surface of the installation platform. The inner cylinder is disposed within the insulated outer shell and is detachably connected to the output end of the rotary drive mechanism. The inner cylinder is capable of rotating around its own axis. The baffles are arranged radially and alternately along the inner cylinder, and multiple baffles are arranged along the axial direction of the inner cylinder. The first end of the inner cylinder is connected to a raw material gas chamber, and the inner cylinder is used to hold a catalyst. The second end of the inner cylinder is provided with a microporous gas outlet, which communicates with the insulated outer shell. The insulated outer shell is provided with a main gas outlet.
2. The baffled rotary reactor atomic layer deposition apparatus according to claim 1, characterized in that: The baffle is inclinedly disposed inside the inner cylinder and extends gradually from the edge to the center towards the microporous air outlet.
3. The baffled rotary reactor atomic layer deposition apparatus according to claim 1, characterized in that: The inner cylinder includes a first half-cylinder and a second half-cylinder in the axial direction, and the first half-cylinder and the second half-cylinder are detachably connected.
4. The baffled rotary reactor atomic layer deposition apparatus according to claim 1, characterized in that: It also includes a slide plate, the rotary drive mechanism is fixedly mounted on the slide plate, the slide plate is slidably mounted on the mounting platform, and can slide along a direction parallel to the axis of the inner cylinder.
5. The baffled rotary reactor atomic layer deposition apparatus according to claim 4, characterized in that: The rotary drive mechanism includes a motor, which is fixedly mounted on the slide plate. The inner cylinder, the heat-insulating outer shell, and the output shaft of the motor are coaxially arranged.
6. The baffled rotary reactor atomic layer deposition apparatus according to claim 5, characterized in that: It also includes two support frames, which are fixedly mounted on the slide plate. The rotary drive mechanism also includes a rotary guide rod, which is rotatably connected to the two support frames.
7. The baffled rotary reactor atomic layer deposition apparatus according to claim 4, characterized in that: It also includes a rotary seal, which is rotatably connected to the output end of the drive mechanism and is used to seal the thermal insulation outer shell.
8. The rotary reactor atomic layer deposition apparatus according to claim 1, characterized in that: It also includes a porous sintered plate, which is used to fix the inner cylinder to both ends.
9. The baffled rotary reactor atomic layer deposition apparatus according to claim 1, characterized in that: It also includes a differential pressure valve, which is embedded in one end of the microporous outlet near the rotary drive mechanism.
10. The baffled rotary reactor atomic layer deposition apparatus according to claim 1, characterized in that: It also includes an air intake pipe, which includes a connecting section and a diffuser section. The connecting section is cylindrical and connected to the raw material gas chamber. The diffuser section is trumpet-shaped, with its small end connected to the connecting section and its large end connected to and communicating with the inner cylinder.