Single atom high temperature stirred deposition apparatus

Abstract

The utility model discloses a kind of single-atom high-temperature stirring deposition devices.The single-atom high-temperature stirring deposition device includes deposition chamber, it has deposition cavity, the deposition chamber is provided with the air inlet for the protective gas to enter the deposition cavity and the air outlet for the protective gas to be discharged;Stirring cup, it is set in deposition chamber and is used to hold powder;Stirring device, it has the stirring unit set in stirring cup, for stirring the powder;Heater, set on the stirring cup and used to heat cup temperature;And pipeline, the input end of the pipeline is worn in the lateral wall of the deposition chamber, output end communicates the stirring cup.The single-atom high-temperature stirring deposition device of the utility model can uniformly heat powder, and not easy to be agglomerated under the stirring of stirring device.

Description

Technical Field

[0001] This utility model relates to the field of powder heat treatment technology, and in particular to a single-atom high-temperature stirring deposition device. Background Technology

[0002] Powder atomic layer deposition (PALD) is an important means of improving the physicochemical properties of powders. Powders coated using PALD exhibit good resistance to erosion, moisture resistance, and flowability. However, in existing technologies, the heating device is usually located at the bottom, which can easily lead to uneven heating of the powder in vertical containers, causing powder agglomeration and resulting in poor deposition effects. Utility Model Content

[0003] The technical problem to be solved by this invention is to provide a single-atom high-temperature stirring deposition device with uniform heating.

[0004] To address the above problems, this utility model provides a single-atom high-temperature stirred deposition apparatus, which includes:

[0005] A deposition chamber having a deposition cavity, wherein the deposition chamber is provided with an inlet for protective gas to enter the deposition cavity and an outlet for protective gas to exit;

[0006] A stirring cup, which is located in the deposition chamber and is used to hold powder;

[0007] A stirring device having a stirring unit disposed within a stirring cup for stirring the powder;

[0008] A heater, disposed on the stirring cup and used to heat the temperature inside the cup; and

[0009] The pipeline has its input end inserted through the side wall of the sedimentation chamber and its output end connected to the stirring cup.

[0010] Furthermore, the heater includes an electromagnetic coil, which is arranged around the outer periphery of the stirring cup to electromagnetically heat the stirring cup when energized.

[0011] Furthermore, it also includes a cooling device, which includes a cooling channel arranged around the stirring cup and a water inlet and a water outlet communicating with both ends of the cooling channel.

[0012] Furthermore, the cooling channel is disposed in the electromagnetic coil along the length direction of the electromagnetic coil.

[0013] Furthermore, the stirring device includes a stirring motor for providing power, a drive shaft for transmitting power, and a stirring unit for stirring powder. The drive shaft is connected to the stirring motor, and the stirring unit is mounted on the drive shaft.

[0014] Furthermore, the drive shaft is rotatably connected to the connecting plate, which is detachably connected to the deposition chamber.

[0015] Furthermore, the deposition chamber includes a box body with a deposition cavity, a box cover for sealing the deposition cavity, and height-adjustable support feet. The box cover is detachably fixed to the box body, a sealing ring is provided between the box cover and the box body, and the support feet are provided on the box body.

[0016] Furthermore, the box body has a fixed platform, the box cover is detachably mounted on the fixed platform, the fixed platform is provided with a sealing groove, and the sealing ring is located in the sealing groove.

[0017] Furthermore, the box cover is provided with a perforation, the stirring device has a drive shaft and a connecting plate, the drive shaft is inserted into the perforation, and an installation step is provided around the perforation. A sealing ring for sealing the gap between the drive shaft and the box cover is provided on the installation step.

[0018] Furthermore, the support platform is provided with a positioning groove for positioning the stirring cup.

[0019] This invention relates to a single-atom high-temperature stirring deposition device. The heater is arranged around the outer periphery of the stirring cup, allowing the heater to uniformly heat the powder in the stirring cup, effectively preventing powder agglomeration due to uneven heating. At the same time, a stirring device is provided to stir the powder in the stirring cup, further preventing the possibility of powder agglomeration. This allows single-atom or cluster particles to better adhere to the powder, that is, to ensure that the powder is uniformly coated. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a preferred embodiment of the single-atom high-temperature stirring deposition apparatus of this utility model.

[0021] Figure 2 This is an exploded view of the single-atom high-temperature stirring deposition device of this utility model.

[0022] Figure 3 This is a structural diagram showing the piping installed on the enclosure.

[0023] Figure 4 This is a cross-sectional view of the single-atom high-temperature stirring deposition apparatus of this utility model.

[0024] Figure 5 This is a structural diagram of the mounting slot.

[0025] Figure 6 yes Figure 2 A magnified view of part A in the image.

[0026] Figure 7 This is a schematic diagram of the sealing ring installed between the drive shaft and the housing cover.

[0027] Figure 8 This is a structural diagram of the support platform.

[0028] The meanings of the labels in the attached diagram are as follows:

[0029] Sedimentation chamber 1, sedimentation cavity 101, air inlet 102, air outlet 103, box body 11, mounting groove 111, fixing platform 112, sealing groove 113, box cover 12, support foot 13, stirring device 2, stirring motor 21, drive shaft 22, stirring unit 23, coupling 24, support platform 3, positioning groove 31, stirring cup 4, heater 5, cooling device 6, cooling channel 60, water inlet 61, water outlet 62, pipeline 7, connecting plate 8, sealing ring 9. Detailed Implementation

[0030] The present invention will be further described below with reference to the accompanying drawings.

[0031] like Figures 1 to 4As shown, a preferred embodiment of the single-atom high-temperature stirred deposition apparatus of this utility model includes a deposition chamber 1, a stirring device 2, a support platform 3, a stirring cup 4, a heater 5, a cooling device 6, and pipelines 7. The deposition chamber 1 has an environmentally controlled deposition cavity 101. The deposition chamber 1 is provided with an air inlet 102 and an air outlet 103. The air inlet 102 is used to introduce non-reactive gas, and the air outlet 103 is used to discharge non-reactive gas. The non-reactive gas is usually an inert gas, which can prevent the powder from oxidizing and deteriorating when in contact with air at high temperatures. The air inlet 102 is located higher than the air outlet 103, which ensures that the non-reactive gas is completely filled in the deposition cavity 101 before being discharged from the air outlet 103. When the non-reactive gas fills the entire deposition cavity 101, it is discharged from the air outlet 103, forming a continuous protective gas atmosphere. This design helps to replace the air in the deposition cavity 101 as much as possible, improving the protective effect. The support platform 3 is installed inside the deposition chamber 101 of the deposition chamber 1. The stirring cup 4 is mounted on the support platform 3 and is used to hold powder. The heater 5 is arranged around the outer periphery of the stirring cup 4 and is used to heat the powder inside the stirring cup 4. The height of the heater 5 is basically the same as that of the stirring cup 4, so that the heater 5 can uniformly heat the powder in the stirring cup 4 and effectively avoid agglomeration due to uneven heating. Of course, it can also exceed the height of the stirring cup 4. The stirring cup 4 is mounted on the support platform 3 to prevent the heater 5 from being connected to the deposition chamber 1. The cooling device 6 is arranged around the outer periphery of the stirring cup 4 and is used to cool the stirring cup 4 so that it can be quickly removed after coating. The stirring device 2 is installed on the deposition chamber 1 and is used to stir the powder in the stirring cup 4 to prevent powder agglomeration. The pipe 7 is installed on the deposition chamber 1 and is used to spray single-atom or cluster particles so that the powder in the stirring cup 4 forms a coating. The end of the pipe 7 faces the stirring cup 4 to ensure that the reactive gas can be sprayed onto the powder in the stirring cup 4.

[0032] The heater 5 employs an electromagnetic coil, which is spirally wound around the outer circumference of the stirring cup 4. When the battery coil is energized, it heats up to heat the stirring cup 4. In this way, a single electromagnetic coil can achieve uniform heating along the entire height of the stirring cup 4. Simultaneously, electromagnetic coil heating allows for rapid temperature rise, avoiding the temperature lag inherent in traditional heating methods. Furthermore, the electromagnetic coil provides precise temperature control, further enhancing thermal stability. In another embodiment, the heater 5 can also employ multiple electromagnetic coils overlapping along the height direction.

[0033] The cooling device 6 includes a cooling channel 60, a water inlet 61, and a water outlet 62. The cooling channel 60 is arranged around the stirring cup 4, and its two ends are connected to the water inlet 61 and the water outlet 62. Cooling water enters from the water inlet 61, flows within the cooling channel 60, absorbs heat from the stirring cup 4, carries away the heat, and then exits from the water outlet 62. The cooling channel 60 is arranged along the length of the electromagnetic coil within the electromagnetic coil, meaning the inner cavity of the electromagnetic coil serves as the cooling channel 60. This reduces the number of components, saves space, and allows the electromagnetic coil to be wound more tightly around the stirring cup 4, resulting in a smaller coil pitch and more uniform heating. Of course, in other embodiments, the cooling channel 60 can also be provided separately.

[0034] The stirring device 2 includes a stirring motor 21, a drive shaft 22, and a stirring unit 23. The upper end of the drive shaft 22 is connected to the output shaft of the stirring motor 21 via a coupling. The stirring unit 23 is installed at the lower end of the drive shaft 22 and is located inside the stirring cup 4. The stirring unit 23 is a stirring paddle. The stirring motor 21 drives the drive shaft 22 to rotate, and the rotation of the drive shaft 22 drives the stirring unit 23 to rotate, thereby stirring the powder in the stirring cup 4. The drive shaft 22 is rotatably mounted on the connecting plate 8, and the connecting plate 8 is fixed to the sedimentation chamber 1. Typically, the connecting plate 8 is fixed to the sedimentation chamber 1 in a detachable manner, such as by using screws or other fasteners.

[0035] The deposition chamber 1 includes a housing 11, a cover 12, and support feet 13. The cover 12 is detachably fixed to the housing 11, facilitating the removal of deposited samples and cleaning or maintenance of the deposition chamber 101. The housing 11 has the deposition chamber 101. A sealing ring 9 is provided between the cover 12 and the housing 11 to increase the sealing between the end cap and the assembly ring, thereby ensuring the sealing of the deposition chamber 101. The pipeline 7, air inlet 102, and air outlet 103 are all located on the housing 11. Of course, in other embodiments, the pipeline 7 and air inlet 102 can also be located on the cover 12. The drive shaft 22 is rotatably fixed to the cover 12. The support feet 13 are installed at the bottom of the housing 11 and are height-adjustable so that the housing 11 can be kept level even on uneven ground.

[0036] like Figure 5 As shown, the housing 11 has a mounting groove 111, and the support platform 3 is installed in the mounting groove 111 to ensure accurate installation of the support platform 3. Figure 6As shown, the box body 11 has a fixed platform 112, the box cover 12 is fixed on the fixed platform 112, the fixed platform 112 is provided with a sealing groove 113, the sealing ring 9 is provided in the sealing groove 113, and the box cover 12 is pressed on the sealing ring 9 to achieve a seal between the box cover 12 and the box body 11.

[0037] like Figure 7 As shown, the cover 12 has a through hole, and the drive shaft 22 is inserted into the through hole. An installation step is provided around the through hole, and a sealing ring 9 is provided on the installation step to seal the gap between the drive shaft 22 and the cover 12, ensuring that the deposition chamber 101 can be sealed, thus preventing the leakage of non-reactive gases and preventing air from entering the deposition chamber 101. The connecting plate 8 covers the sealing ring 9 on the installation step to ensure that the sealing ring 9 will not fall off.

[0038] like Figure 8 As shown, the support platform 3 is provided with a positioning groove 31, which is used to position the stirring cup 4 to ensure that the stirring cup 4 can be stably placed on the support platform 3 and can be accurately positioned so that the stirring cup 4 can accurately cooperate with the pipeline 7 and the heater 5.

[0039] In use, the powder sample is placed in the stirring cup 4, and then the entire deposition chamber 101 is filled with a non-reactive gas. The electromagnetic coil is energized to heat the stirring cup 4, and the stirring motor 21 drives the stirring unit to rotate, achieving heating and mixing of the powder. Simultaneously, single-atom or cluster particles are sprayed from the pipe 7, allowing the single-atom or cluster particles to uniformly coat the powder. Using an electromagnetic coil for heating enables precise temperature control and avoids the temperature lag of traditional heating methods. Furthermore, the electromagnetic coil is evenly distributed around the outer periphery of the stirring cup 4, achieving uniform heating. The stirring of the powder by the stirring element ensures uniform heating of the powder, prevents local overheating and agglomeration, and allows single-atom or cluster particles to better adhere to the powder, thus achieving uniform coating.

[0040] The above are merely embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structure made using the contents of this utility model specification and drawings, whether directly or indirectly applied to other related technical fields, shall also be within the patent protection scope of this utility model.

Claims

1. A single-atom high-temperature stirred deposition apparatus, characterized in that, include: A deposition chamber having a deposition cavity, wherein the deposition chamber is provided with an inlet for protective gas to enter the deposition cavity and an outlet for protective gas to exit; A stirring cup, which is located in the deposition chamber and is used to hold powder; A stirring device having a stirring unit disposed within a stirring cup for stirring the powder; A heater, disposed on the stirring cup and used to heat the temperature inside the cup; and The pipeline has its input end inserted through the side wall of the sedimentation chamber and its output end connected to the stirring cup.

2. The single-atom high-temperature stirred deposition apparatus as described in claim 1, characterized in that: The heater includes an electromagnetic coil, which is arranged around the outer periphery of the stirring cup to electromagnetically heat the stirring cup when energized.

3. The single-atom high-temperature stirred deposition apparatus as described in claim 2, characterized in that: It also includes a cooling device, which includes a cooling channel arranged around the stirring cup and a water inlet and a water outlet communicating with both ends of the cooling channel.

4. The single-atom high-temperature stirred deposition apparatus as described in claim 3, characterized in that: The cooling channel is disposed in the electromagnetic coil along the length direction of the electromagnetic coil.

5. The single-atom high-temperature stirred deposition apparatus as described in claim 1, characterized in that: The stirring device includes a stirring motor for providing power, a drive shaft for transmitting power, and a stirring unit for stirring powder. The drive shaft is connected to the stirring motor, and the stirring unit is mounted on the drive shaft.

6. The single-atom high-temperature stirred deposition apparatus as described in claim 5, characterized in that: The drive shaft is rotatably connected to the connecting plate, which is detachably connected to the deposition chamber.

7. The single-atom high-temperature stirred deposition apparatus as described in claim 1, characterized in that: The deposition chamber includes a box body with a deposition cavity, a box cover for sealing the deposition cavity, and height-adjustable support feet. The box cover is detachably fixed to the box body, and a sealing ring is provided between the box cover and the box body. The support feet are provided on the box body.

8. The single-atom high-temperature stirred deposition apparatus as described in claim 7, characterized in that: The box body has a fixed platform, the box cover is detachably installed on the fixed platform, the fixed platform is provided with a sealing groove, and the sealing ring is placed in the sealing groove.

9. The single-atom high-temperature stirred deposition apparatus as described in claim 7, characterized in that: The box cover is provided with a perforation, the stirring device has a drive shaft and a connecting plate, the drive shaft is inserted into the perforation, and an installation step is provided around the perforation. A sealing ring for sealing the gap between the drive shaft and the box cover is provided on the installation step.

10. The single-atom high-temperature stirred deposition apparatus as described in claim 1, characterized in that: It also includes a support platform, which is provided with a positioning groove for positioning the stirring cup.

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