A tool for deposition of a CVD coating on the surface of a cylindrical product

Abstract

The application provides a device for depositing CVD coating on the surface of a cylindrical product, and relates to the technical field of coating preparation.The device comprises a plurality of support components.The support components comprise two support rod groups, and a plurality of support rod groups are arranged between the two support rod groups for supporting workpieces.The support rod groups comprise a plurality of support rods, the support rod groups comprise at least two support rods, and the two ends of the support rods are connected with the support rods respectively.The lower end of the support rod is connected with a gas distribution plate in a detachable manner.The device for depositing CVD coating on the surface of a cylindrical product can lift the workpiece, thereby improving the uniformity of the distribution of the gas around the workpiece, making the coating thickness uniform, and improving the product quality.

Description

Technical Field

[0001] This utility model relates to the field of coating preparation technology, specifically a tooling for CVD coating deposition on the surface of cylindrical products. Background Technology

[0002] In related industrial production, porous graphite cartridges are widely used in various fields due to their unique porous structure and excellent physicochemical properties. To further improve their performance, it is often necessary to deposit specific coatings on their surface.

[0003] Currently, when using a CVD furnace to deposit surface coatings on porous graphite cylinders, the porous graphite cylinders are usually placed directly at the bottom of the CVD furnace chamber. This results in uneven gas distribution around the graphite cylinder, leading to inconsistent coating thickness and affecting product quality. Utility Model Content

[0004] To address the aforementioned issues, this application provides a tooling for CVD coating deposition on the surface of cylindrical products that can elevate the workpiece, thereby improving the uniformity of gas distribution around the workpiece, resulting in a uniform coating thickness and improved product quality.

[0005] The technical solution adopted by this utility model to solve its technical problem is: A tooling for CVD coating deposition on the surface of cylindrical products includes several support components; The support component includes two support rod groups, and several layers of support rod groups for supporting the workpiece are arranged between the two support rod groups; The support rod assembly includes several support rods, and the supporting rod assembly includes at least two supporting rods, with both ends of the supporting rods connected to the support rods respectively. The lower end of the support rod is detachably connected to the air diffuser plate.

[0006] Furthermore, the number of support rods in the support rod group is the same as the number of support rods in the support rod group, and they correspond one-to-one. The two ends of the support rod are respectively connected to the corresponding support rod.

[0007] Furthermore, the support rod is provided with several sets of insertion holes, each set including several insertion holes arranged vertically, and the diameters of the insertion holes in different sets of insertion holes are not equal.

[0008] Furthermore, the support rod includes a support part and a plug-in part from bottom to top. The support part has a cylindrical structure, and the plug-in part has a regular polygonal cross-section. The number of variables in the regular polygonal structure is twice the number of the plug-in hole group.

[0009] Furthermore, a stud is provided at the lower end of the support rod, the stud extends through the air diffuser plate to the bottom of the air diffuser plate, and a locking nut is provided on the stud located on the lower side of the air diffuser plate.

[0010] Furthermore, the diameter of the stud is less than or equal to the diameter of the air vent on the air vent plate.

[0011] Furthermore, the supporting rod adopts a split structure and is connected into a whole by splicing.

[0012] Furthermore, each row of support rods is provided with several reinforcing support rods, and the reinforcing support rods are provided with support holes for accommodating the support rods.

[0013] Furthermore, the reinforcing support rod is composed of several reinforcing columns spliced ​​together, and each of the reinforcing columns is provided with a support hole for accommodating the supporting rod.

[0014] Furthermore, the lower end of the reinforcing column is provided with a second splicing insertion hole, and the upper end of the reinforcing column is provided with an insertion boss.

[0015] The beneficial effects of this utility model are: This application provides a fixture for CVD coating deposition on the surface of cylindrical products. By installing support rods on a gas diffuser plate and at least two crossbars between the support rods on both sides to support the workpiece, the workpiece is raised, causing its lower surface to detach from the gas diffuser plate at the bottom of the furnace chamber. This improves the uniformity of gas distribution around the workpiece during deposition, resulting in a more uniform coating thickness on the workpiece surface and improved product quality. Attached Figure Description

[0016] Figure 1 A three-dimensional structural schematic diagram of a tooling for CVD coating deposition on the surface of a cylindrical product provided in Embodiment 1 of this application during vapor deposition; Figure 2 A front view of a tooling for CVD coating deposition on the surface of a cylindrical product, provided in Embodiment 1 of this application, during vapor deposition; Figure 3 A top view of a tooling for CVD coating deposition on the surface of a cylindrical product, provided in Embodiment 1 of this application, during vapor deposition; Figure 4 A schematic diagram of the installation structure for the supporting components; Figure 5 for Figure 4 A magnified structural diagram of part A in the middle; Figure 6 A cross-sectional view of the installation structure for the supporting components; Figure 7for Figure 6 A magnified structural diagram of part B in the middle section; Figure 8 for Figure 6 A magnified structural diagram of section C; Figure 9 This is a schematic diagram showing the positional relationship between the supporting component and the workpiece; Figure 10 A three-dimensional structural schematic diagram of a support rod in a tooling for CVD coating deposition on the surface of a cylindrical product, provided in Embodiment 4 of this application; Figure 11 A three-dimensional structural schematic diagram of a support rod in a tooling for CVD coating deposition on the surface of a cylindrical product, provided in Embodiment 5 of this application; Figure 12 This is a three-dimensional structural diagram of a support rod in a tooling for CVD coating deposition on the surface of a cylindrical product, as provided in Embodiment Six of this application.

[0017] In the diagram: 1. Support component; 11. Support rod; 111. Support part; 112. Plug-in part; 1121. First plug-in hole; 1122. Second plug-in hole; 1123. Third plug-in hole; 113. Stud; 12. Support rod; 121. Support sub-rod; 1211. First splicing plug-in hole; 122. Connecting post; 13. Locking nut; 14. Reinforcing support rod; 141. Reinforcing post; 1411. Second splicing plug-in hole; 1412. Plug-in boss; 2. Workpiece; 3. Air diffuser plate; 31 air diffuser holes. Detailed Implementation

[0018] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be described in detail below with reference to the accompanying drawings. The described embodiments are merely a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort should fall within the protection scope of this application.

[0019] To facilitate understanding of the specific embodiments of this application, a coordinate system is now defined as follows: Figure 1 As shown, the left and right directions are horizontal, the front and back directions are vertical, and the up and down directions are vertical.

[0020] Example 1 like Figure 1 , Figure 2 and Figure 3 As shown, a tooling for CVD coating deposition on the surface of a cylindrical product includes several support components 1, and the several support components 1 are arranged radially along the diffuser plate 3.

[0021] As one specific implementation, this embodiment of the fixture for CVD coating deposition on the surface of a cylindrical product includes four support components 1, and is arranged according to... Figure 1 In the coordinate system shown, the four support components 1 are evenly arranged along the front-to-back direction.

[0022] The support component 1 includes two support rod groups, and several layers of supporting rod groups are arranged sequentially from bottom to top between the two support rod groups. The supporting rod groups are used to support the workpiece 2.

[0023] Each of the aforementioned support rod groups includes a plurality of support rods 11, and the number of support rods 11 in two of the aforementioned support rod groups is equal. Each of the aforementioned support rod groups includes at least two support rods 12, and both ends of each support rod 12 are respectively connected to the support rods 11. The lower end of each support rod 11 is detachably fixedly connected to the air diffuser plate 3.

[0024] During chemical vapor deposition, the cylindrical workpiece 2 to be processed is placed layer by layer on the support rod assembly. Since there is a certain distance between the bottom workpiece 2 and the gas diffuser plate 3, the gas can flow evenly over the inner and outer surfaces of the workpiece 2 when it moves upward through the gas diffuser plate 3, thereby ensuring the uniformity of the gas around the workpiece 2 and ultimately ensuring the uniformity of the coating thickness.

[0025] like Figure 6 , Figure 8 and Figure 9 As shown, the support rod assembly includes at least two support rods 11. The number of support rods 11 in the support rod assembly is the same as the number of support rods 12 in the support rod assembly, and they correspond one-to-one. The two ends of the support rod 12 are respectively connected to the corresponding support rod 11.

[0026] In one specific embodiment, the support rod group in this embodiment includes two support rods 11, and the supporting rod group includes two supporting rods 12. The supporting rods 12 are located between the corresponding two support rods 11, and the two ends of the supporting rods 12 are respectively connected to the corresponding support rods 11.

[0027] The support rod 11 is provided with a plurality of insertion hole groups, each of which includes a plurality of insertion holes arranged in a vertical direction. The two ends of the support rod 12 are respectively inserted into the insertion holes of the corresponding support rod 11.

[0028] The number of sets of connector holes can be one, two, or more. When there are two or more sets of connector holes, the axes of the connector holes in different sets can be parallel or non-parallel. When the axes of the connector holes in different sets are parallel, the connector holes in different sets are staggered; when the axes of the connector holes in different sets are not parallel, the connector holes in different sets can be staggered or not staggered. The diameters of the connector holes in different sets are not equal.

[0029] In one specific embodiment, the support rod 11 in this embodiment is provided with two sets of insertion holes. For ease of understanding, the two sets of insertion holes are defined as the first insertion hole group 1121 and the second insertion hole group 1122, respectively. The first insertion hole group 1121 includes seven first insertion holes 1121 arranged vertically, and the seven first insertion holes 1121 are evenly arranged vertically. The second insertion hole group 1122 includes seven second insertion holes 1122 arranged vertically, and the seven second insertion holes 1122 are evenly arranged vertically. The axis of the first insertion hole 1121 is not parallel to the axis of the second insertion hole 1122, and the first insertion hole 1121 and the second insertion hole 1122 are staggered. The diameter of the second insertion hole 1122 is larger than the diameter of the first insertion hole 1121.

[0030] The advantages of this design are as follows: First, the distance between two adjacent support rod groups can be adjusted according to the height of the workpiece 2 to accommodate different heights of the workpiece 2. This allows for flexible adjustment of the number of layers and the height between adjacent layers based on the product quantity, effectively improving the space utilization of the CVD furnace cavity, increasing production efficiency, and reducing production costs. Second, the diameter of the support rod 12 can be adjusted according to the weight of the workpiece 2, and the support rod 11 can be rotated so that the insertion hole matching the diameter of the support rod 12 faces the support rod 12, improving the versatility of the tooling.

[0031] Furthermore, the axis of the first insertion hole 1121 is perpendicular to the axis of the second insertion hole 1122.

[0032] Furthermore, the support rod 11 includes a support portion 111 and a connector portion 112 from bottom to top. The support portion 111 has a cylindrical structure, and the connector portion 112 has a square cross-section. The first connector hole 1121 and the second connector hole 1122 are respectively disposed on two adjacent sides of the connector portion 112. Preferably, the connector portion 112 has a square cross-section.

[0033] like Figure 6 and Figure 8As shown, a stud 113 is provided at the lower end of the support rod 11. The stud 113 extends through the air diffuser plate 3 to the lower part of the air diffuser plate 3. A locking nut 13 is provided on the stud 113 on the lower side of the air diffuser plate 3.

[0034] Furthermore, the diameter of the stud 113 is less than or equal to the diameter of the vent hole 31 on the vent plate 3. When the diameter of the stud 113 is less than the diameter of the vent hole 31 on the vent plate 3, the support rod 11 can still be fixed to the vent plate 3 by tightening the locking nut 13. That is, the diameter of the stud 113 should preferably be slightly smaller than the diameter of the vent hole 31 on the vent plate 3.

[0035] The advantages of this design are that, on the one hand, no processing of the air diffuser plate 3 is required; on the other hand, since the air diffuser plate 3 is evenly covered with air diffuser holes 31, the installation position of the support rod 11 can be adjusted as needed, increasing the flexibility of tooling use.

[0036] Furthermore, such as Figure 7 and Figure 8 As shown, the support rod 12 adopts a split structure and is connected into a whole by splicing.

[0037] In one specific implementation, the support rod 12 in this embodiment includes a plurality of support sub-rods 121. Each end of the support sub-rod 121 is provided with a first splicing insertion hole 1211. A connecting post 122 is provided between two adjacent support sub-rods 121. The two ends of the connecting post 122 are respectively inserted into the first splicing insertion hole 1211 of the support sub-rod 121, and the two adjacent support sub-rods 121 are connected into a whole.

[0038] The advantage of this design is that it can not only adapt to workpieces of different specifications, but also facilitate disassembly and replacement, reduce maintenance costs, and enhance the practicality of the tooling.

[0039] Furthermore, the number of support rods 12 in different support rod groups is equal and corresponds one-to-one. The support rods 12 in the support component 1 are arranged in a matrix, and each column of support rods 12 is provided with several reinforcing support rods 14. The reinforcing support rods 14 are provided with support holes for accommodating the support rods 12.

[0040] The reinforcing rod 14 provides auxiliary support and disperses the load-bearing pressure. Furthermore, due to its small diameter, the reinforcing rod 14 reduces its impact on the flow of process gas, ensuring both structural reliability and uniform airflow.

[0041] As one specific implementation method, such as Figure 1 , Figure 2 and Figure 3 As shown, in this embodiment, the support rods 12 between the two support rod groups are arranged in a matrix of five rows and two columns. Each column of support rods 12 on the two sides is provided with a reinforcing support rod 14, and each column of support rods 12 on the two support components 1 in the middle is provided with two reinforcing support rods 14.

[0042] During installation, it can be done along the axis of the support rod 12 (according to...). Figure 1 (The coordinate system shown is in the left-right direction) Adjust the position of the reinforcing rod 14 so that the lower end of the reinforcing rod 14 abuts against the air diffuser plate 3, so as to avoid the lower end of the reinforcing rod 14 being located in the area of ​​the air diffuser hole 31 and thus unable to obtain reliable support. At the same time, it should also avoid the workpiece 2 to avoid interference with the workpiece 2 or being too close to the side wall of the workpiece 2.

[0043] Furthermore, such as Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, the reinforcing support rod 14 is composed of several reinforcing columns 141 spliced ​​together, and each reinforcing column 141 is provided with a support hole for accommodating the supporting rod 12. The lower end of each reinforcing column 141 is provided with a second splicing insertion hole 1411, and the upper end of each reinforcing column 141 is provided with an insertion boss 1412. The insertion boss 1412 of the lower reinforcing column 141 is inserted into the second splicing insertion hole 1411 of the upper reinforcing column 141.

[0044] Here, when the support rod 11 is provided with multiple sets of insertion holes, the reinforcing rod 14 includes several sets to match different sets of insertion holes. That is, when the reinforcing columns 141 are connected end to end to form the reinforcing rod 14, the support holes on the formed reinforcing rod 14 are aligned one by one with the insertion holes in the matching insertion hole sets, and the diameter of the support holes on the reinforcing columns 141 is equal to the diameter of the insertion holes in the matching insertion hole sets.

[0045] Example 2 The support rod assembly consists of only one support rod 11, and the insertion hole assembly on the support rod 11 is removed.

[0046] The inner side of the support rod 11 (with the side opposite to the two support rod groups as the inner side) is provided with mounting holes corresponding to the support rod 12. One end of each support rod 12 is inserted into the corresponding mounting hole on one side of the support rod 11, and the other end of each support rod 12 is inserted into the corresponding mounting hole on the other side of the support rod 11.

[0047] The rest of the structure is the same as in Example 1.

[0048] Example 3 Remove the insertion hole group on the support rod 11.

[0049] The number of support rods 11 in the support rod group is less than the number of support rods 12 in the support rod group. The inner side of the support rod 11 (with the side opposite to the two support rod groups as the inner side) is provided with mounting holes, and the number of mounting holes on the support rod group is the same as the number of support rods 12, and they correspond one-to-one.

[0050] In one specific implementation, the support rod assembly in this embodiment includes two support rods 11, and the bearing rod assembly includes three bearing rods 12. According to... Figure 1 In the coordinate system shown, the inner side of the support rod 11 on the front side (with the side opposite to the two support rod groups as the inner side) is provided with mounting holes corresponding to the previous row of support rods 12, and the inner side of the support rod 11 on the rear side is provided with mounting holes corresponding to the next two rows of support rods 12.

[0051] The rest of the structure is the same as in Example 1.

[0052] Example 4 like Figure 10 As shown, the support rod 11 is provided with three sets of insertion holes, namely the first insertion hole 1121 set, the second insertion hole 1122 set, and the third insertion hole 1123 set.

[0053] The first set of insertion holes 1121 includes seven first insertion holes 1121 evenly arranged in the vertical direction, the second set of insertion holes 1122 includes seven second insertion holes 1122 evenly arranged in the vertical direction, and the third set of insertion holes 1123 includes seven third insertion holes 1123 evenly arranged in the vertical direction.

[0054] The angle between the axis of the first insertion hole 1121 and the axis of the second insertion hole 1122 is 60°, the angle between the axis of the second insertion hole 1122 and the axis of the third insertion hole 1123 is 60°, and the first insertion hole 1121, the second insertion hole 1122 and the third insertion hole 1123 are arranged in a staggered manner.

[0055] The diameter of the first insertion hole 1121 is smaller than the diameter of the third insertion hole 1123, and the diameter of the third insertion hole 1123 is smaller than the diameter of the second insertion hole 1122.

[0056] The cross-section of the insertion part 112 of the support rod 11 is a regular hexagonal structure. The first insertion hole group 1121, the second insertion hole group 1122 and the third insertion hole group 1123 are respectively arranged on the three planes of the insertion part 112 and penetrate the support rod 11 radially.

[0057] The rest of the structure is the same as in Example 1.

[0058] Example 5 like Figure 11 As shown, the corresponding first insertion hole 1121, second insertion hole 1122, and third insertion hole 1123 are located at the same height, meaning that the insertion holes of different insertion hole groups are not misaligned. The remaining structure is the same as in Embodiment 4.

[0059] Example 6 like Figure 12 As shown, the cross-section of the insertion portion 112 of the support rod 11 is circular, and the axes of the first insertion hole 1121, the second insertion hole 1122, and the third insertion hole 1123 are parallel. The remaining structure is the same as in Embodiment 4.

[0060] Other embodiments obtained by those skilled in the art based on the embodiments provided in this application by combining, splitting, or reorganizing the embodiments of this application do not exceed the protection scope of this application.

[0061] The above detailed embodiments have provided a detailed explanation of the purpose, technical solutions, and beneficial effects of the embodiments of this application. The above are merely specific embodiments of the embodiments of this application and are not intended to limit the protection scope of the embodiments of this application. That is, any modifications, equivalent substitutions, improvements, etc., made on the basis of the embodiments of this application should be included within the protection scope of the embodiments of this application.

Claims

1. A tooling for CVD coating deposition on the surface of cylindrical products, characterized in that: Includes several supporting components (1); The support component (1) includes two support rod groups, and several layers of support rod groups for supporting the workpiece (2) are provided between the two support rod groups; The support rod group includes several support rods (11), and the supporting rod group includes at least two supporting rods (12), and the two ends of the supporting rods (12) are respectively connected to the support rods (11). The lower end of the support rod (11) is detachably connected to the air diffuser plate (3).

2. The tooling for CVD coating deposition on the surface of cylindrical products according to claim 1, characterized in that: The number of support rods (11) in the support rod group is the same as the number of support rods (12) in the support rod group, and they correspond one-to-one. The two ends of the support rod (12) are respectively connected to the corresponding support rod (11).

3. The tooling for CVD coating deposition on the surface of cylindrical products according to claim 2, characterized in that: The support rod (11) is provided with several sets of insertion holes, each set including several insertion holes arranged in the vertical direction, and the diameters of the insertion holes in different sets of insertion holes are not equal.

4. The tooling for CVD coating deposition on the surface of cylindrical products according to claim 3, characterized in that: The support rod (11) includes a support part (111) and a plug-in part (112) from bottom to top. The support part (111) has a cylindrical structure, and the plug-in part (112) has a regular polygonal cross-section. The number of the regular polygonal structure is twice the number of the plug-in hole group.

5. The tooling for CVD coating deposition on the surface of cylindrical products according to claim 1, characterized in that: The lower end of the support rod (11) is provided with a stud (113), which extends through the air diffuser plate (3) to the bottom of the air diffuser plate (3), and a locking nut (13) is provided on the stud (113) on the lower side of the air diffuser plate (3).

6. The tooling for CVD coating deposition on the surface of cylindrical products according to claim 5, characterized in that: The diameter of the stud (113) is less than or equal to the diameter of the air vent (31) on the air vent plate (3).

7. The tooling for CVD coating deposition on the surface of cylindrical products according to claim 1, characterized in that: The support rod (12) adopts a split structure and is connected into a whole by splicing.

8. The tooling for CVD coating deposition on the surface of cylindrical products according to claim 1, characterized in that: Each row of support rods (12) is provided with several reinforcing support rods (14), and the reinforcing support rods (14) are provided with support holes for accommodating the support rods (12).

9. The tooling for CVD coating deposition on the surface of cylindrical products according to claim 8, characterized in that: The reinforcing rod (14) is composed of several reinforcing columns (141) spliced ​​together, and each of the reinforcing columns (141) is provided with a support hole for accommodating the supporting rod (12).

10. The tooling for CVD coating deposition on the surface of cylindrical products according to claim 9, characterized in that: The lower end of the reinforcing column (141) is provided with a second splicing insertion hole (1411), and the upper end of the reinforcing column (141) is provided with an insertion boss (1412).

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