A diamond growth temperature regulating device

By introducing a heat exchanger and a cooling pump into the MPCVD diamond growth unit, the problem of unstable substrate temperature was solved, ensuring a suitable diamond growth environment and improving production efficiency and economic benefits.

CN224531033UActive Publication Date: 2026-07-21LUOYANG YUXIN DIAMOND CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
LUOYANG YUXIN DIAMOND CO LTD
Filing Date
2025-08-25
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

During the MPCVD diamond growth process, as the crystal thickness increases, the distance between the crystal and the plasma ball decreases, leading to a rise in temperature. Existing cooling devices can cause the substrate temperature to be too low or too high, affecting the diamond growth effect.

Method used

A diamond growth temperature regulation device was designed. By setting up a heat exchanger and a cooling pump, the cooling water temperature is regulated, and heat exchange is carried out between the heat exchanger and the cooling water to maintain the base temperature within a suitable range.

Benefits of technology

It enables precise regulation of cooling water temperature, ensuring suitable base temperature, promoting diamond growth, and improving production efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a diamond growth temperature regulating device, including reactor, be provided with the base in the reactor, the clamping device is provided with above the base, the clamping device is fixed with diamond seed crystal, the upper portion of diamond seed crystal forms the plasma ball, the base bottom is connected with cooling assembly, the left side of cooling assembly water inlet pipe is connected with heat exchanger, the left side of heat exchanger is connected with first cooling pump water outlet pipe, the left side of first cooling pump water outlet pipe is connected with cooling pump, first cooling pump water outlet pipe still is connected with second cooling pump water outlet pipe, the terminal of second cooling pump water outlet pipe is connected with cooling assembly water inlet pipe, the right side below of heat exchanger is connected with heat pump water outlet pipe, the left side of heat pump water outlet pipe is connected with heat pump. The utility model can effectively solve the problem in the prior art, and create better economic benefits.
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Description

Technical Field

[0001] This utility model belongs to the field of diamond production technology, specifically relating to a diamond growth temperature regulation device. Background Technology

[0002] In chemical vapor deposition (CVD), microwave plasma CVD is the mainstream method for growing synthetic diamonds.

[0003] Diamond is obtained through plasma deposition, and temperature control is crucial for diamond growth during MPCVD diamond growth. As the crystal thickness increases, the distance between the crystal and the plasma sphere decreases, causing the crystal temperature to gradually rise and exceed the rated growth temperature. To address this issue, engineers have added cooling devices. However, existing cooling devices deliver cooling water that is in direct contact with the substrate, causing the substrate temperature to drop rapidly. Excessively low temperatures are also detrimental to diamond growth. Utility Model Content

[0004] To address the shortcomings and deficiencies of existing technologies, the inventors, drawing upon their extensive experience in diamond production technology, have developed a diamond growth temperature regulation device. This device utilizes a heat exchanger to regulate the temperature of the cooling water, allowing for adjustments based on the specific growth requirements of the diamond and thus meeting current production needs.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a diamond growth temperature regulating device, comprising a reactor, a base disposed inside the reactor, a clamping device disposed above the base, a diamond seed crystal fixed by the clamping device, a plasma sphere formed above the diamond seed crystal, a cooling component connected to the bottom of the base, a cooling component inlet pipe connected to the left side of the cooling component, a heat exchanger connected to the left side of the cooling component inlet pipe, a first cooling pump outlet pipe connected to the left side of the heat exchanger, a cooling pump connected to the left side of the first cooling pump outlet pipe, a second cooling pump outlet pipe connected to the first cooling pump outlet pipe, the end of the second cooling pump outlet pipe connected to the cooling component inlet pipe, a heat exchange pump outlet pipe connected to the lower right side of the heat exchanger, a heat exchange pump connected to the left side of the heat exchange pump outlet pipe, and a heat exchanger outlet pipe connected to the top of the heat exchanger shell.

[0006] Furthermore, the cooling assembly incorporates a V-shaped tube. The V-shaped tube effectively increases the heat exchange area, enabling the cooling assembly to achieve a better cooling effect.

[0007] Furthermore, the clamping device includes a fixing block, an elastic element, and a clamping block. The elastic element is connected to the right side of the fixing block, and the clamping block is connected to the right side of the elastic element. The fixing block, elastic element, and clamping block are symmetrically arranged with the center point of the base as the reference point. The elastic element is preferably a spring made of a high-temperature resistant material and commercially available.

[0008] Furthermore, a vacuum tube is connected to the lower right side of the reactor, and a vacuum pump is connected to the end of the vacuum tube.

[0009] Furthermore, a first self-regulating valve is installed on the outlet pipe of the first cooling pump, a second self-regulating valve is installed on the inlet pipe of the cooling component, a third self-regulating valve is installed on the outlet pipe of the second cooling pump, a fourth self-regulating valve is installed on the outlet pipe of the heat exchange pump, and a fifth self-regulating valve is installed on the outlet pipe of the heat exchanger.

[0010] Furthermore, the first end of the second cooling pump outlet pipe is connected between the cooling pump and the first automatic control valve, and the second end of the second cooling pump outlet pipe is connected to the right side of the second automatic control valve.

[0011] Furthermore, the heat exchanger is arranged horizontally and includes a left end cap, a shell, and a right end cap. The right end of the outlet pipe of the first cooling pump is connected to the left end cap, and the left end of the inlet pipe of the cooling component is connected to the right end cap. A drain valve is provided on the left side of the bottom of the shell.

[0012] Furthermore, a heat exchange pump inlet pipe is connected to the left side of the heat exchange pump, and a heat exchange water tank is connected to the left side of the heat exchange pump inlet pipe. A cooling pump inlet pipe is connected to the left side of the cooling pump inlet pipe, and a cooling water tank is connected to the left side of the cooling pump inlet pipe. The temperature of the heat exchange water tank is higher than the temperature of the cooling water tank.

[0013] Compared with existing technologies, the beneficial effects of this invention are as follows: By incorporating a heat exchanger, a cooling pump, and a heat exchange pump, this invention can regulate the temperature of the cooling water. When cooling water flows into the cooling assembly to cool the base, the heat exchange pump can be activated, and the hot water in the heat exchange tank is transported to the heat exchanger. The hot water then flows out from the heat exchanger's outlet pipe, exchanging heat with the cooling water inside the heat exchanger, thereby increasing the temperature of the cooling water and preventing excessively cold cooling water from flowing into the cooling assembly. This invention effectively solves the problems in existing technologies and creates better economic benefits. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model.

[0015] Figure 2 This is a schematic diagram of the cooling components, cooling pump, heat pump, and heat exchanger.

[0016] Figure 3 This is a schematic diagram of the base, clamping device, and diamond seed crystal.

[0017] Figure 4 This is a schematic diagram of the clamping device and the diamond seed crystal.

[0018] Figure 5 This is a schematic diagram of the clamping device.

[0019] Reference numerals: 1. Reactor; 2. Plasma sphere; 3. Base; 4. Diamond seed crystal; 5. Clamping device; 501. Fixing block; 502. Elastic element; 503. Clamping block; 6. Cooling assembly; 7. Drain valve; 8. Cooling water tank; 9. Cooling pump inlet pipe; 10. Cooling pump; 11. First cooling pump outlet pipe; 12. First automatic control valve; 13. Heat exchanger; 14. Cooling assembly inlet pipe; 15. Second automatic control valve; 16. V-tube; 17. Cooling assembly outlet pipe; 18. Second cooling pump outlet pipe; 19. Third automatic control valve; 20. Heat exchanger tank; 21. Heat exchanger inlet pipe; 22. Heat exchanger; 23. Heat exchanger outlet pipe; 24. Fourth automatic control valve; 25. Heat exchanger outlet pipe; 26. Fifth automatic control valve; 27. Vacuum tube; 28. Vacuum pump. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0021] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0022] like Figures 1-5As shown, a diamond growth temperature regulating device includes a reactor 1, a base 3 inside the reactor 1, a clamping device 5 above the base 3, a diamond seed crystal 4 fixed in the clamping device 5, a plasma ball 2 formed above the diamond seed crystal 4, a cooling component 6 connected to the bottom of the base 1, a cooling component inlet pipe 14 connected to the left side of the cooling component 6, a heat exchanger 13 connected to the left side of the cooling component inlet pipe 14, a first cooling pump outlet pipe 11 connected to the left side of the heat exchanger 13, a cooling pump 10 connected to the left side of the first cooling pump outlet pipe 11, a second cooling pump outlet pipe 18 connected to the first cooling pump outlet pipe 11, the end of the second cooling pump outlet pipe 18 connected to the cooling component inlet pipe 14, a heat exchange pump outlet pipe 23 connected to the lower right side of the heat exchanger 13, a heat exchange pump 22 connected to the left side of the heat exchange pump outlet pipe 23, and a heat exchanger outlet pipe 25 connected to the upper left side of the heat exchanger 13.

[0023] In this embodiment, the cooling assembly 6 has a built-in V-shaped tube 16.

[0024] In this embodiment, the clamping device 5 includes a fixing block 501, an elastic element 502, and a clamping block 503. The right side of the fixing block 501 is connected to the elastic element 502, and the right side of the elastic element 502 is connected to the clamping block 503. With the center point of the base 3 as the base point, the fixing block 501, the elastic element 502, and the clamping block 503 are arranged symmetrically.

[0025] In this embodiment, a vacuum tube 27 is connected to the lower right side of the reactor 1, and a vacuum pump 28 is connected to the end of the vacuum tube 27.

[0026] In this embodiment, a first self-regulating valve 12 is installed on the first cooling pump outlet pipe 11, a second self-regulating valve 15 is installed on the cooling component inlet pipe 14, a third self-regulating valve 19 is installed on the second cooling pump outlet pipe 18, a fourth self-regulating valve 24 is installed on the heat exchange pump outlet pipe 23, and a fifth self-regulating valve 26 is installed on the heat exchanger outlet pipe 25.

[0027] In this embodiment, the first end of the second cooling pump outlet pipe 18 is connected between the cooling pump 10 and the first automatic control valve 12, and the end of the second cooling pump outlet pipe 18 is connected to the right side of the second automatic control valve 15.

[0028] In this embodiment, the heat exchanger 13 is arranged horizontally and includes a left end cap, a shell and a right end cap. The right end of the first cooling pump outlet pipe 11 is connected to the left end cap, the left end of the cooling component inlet pipe 14 is connected to the right end cap, and a drain valve 7 is provided on the left side of the bottom of the shell.

[0029] In this embodiment, the heat exchange pump 22 is connected to a heat exchange pump inlet pipe 21 on its left side, and a heat exchange water tank 20 is connected to the left side of the heat exchange pump 21 inlet pipe. The cooling pump 10 is connected to a cooling pump inlet pipe 9 on its left side, and a cooling water tank 8 is connected to the left side of the cooling pump inlet pipe 9. The temperature of the heat exchange water tank 20 is higher than the temperature of the cooling water tank 8.

[0030] In practical use, when the base 3 needs to be cooled, the heat exchange pump 22 is first started, and the hot water in the hot water tank 20 is transported to the heat exchanger 13. Then the cooling pump 10 is started, and the cooling water in the cooling water tank 8 is transported to the heat exchanger 13. After the two complete the heat exchange, the cooling water enters the cooling component 6 through the cooling component inlet pipe 14 to cool the base 3. The temperature of the cooling water can be adjusted by observing the temperature change of the base 3. When the temperature of the base 3 continues to rise, the opening of the fourth automatic control valve 24 can be gradually reduced until it is completely closed, and then the heat exchange pump 22 can be stopped. When the temperature of the base 3 continues to fall, the opening of the fourth automatic control valve 24 can be gradually opened until it is fully open. When the opening of the fourth automatic control valve 24 is fully open and the temperature of the base 3 continues to fall, the first automatic control valve 12 can be gradually closed. When the temperature of the base 3 tends to stabilize and no longer falls, the opening of the first automatic control valve 12 can be increased in a timely manner according to the requirements of the process parameters.

[0031] During normal production, if the heat exchanger 13 malfunctions and the cooling water cannot cool the base 3, the outlet pipe 18 of the second cooling pump can be temporarily opened to allow the cooling water to directly cool the base 3. However, special attention should be paid to the temperature of the base 3 at this time. If the temperature of the base 3 drops too quickly and does not meet the requirements of the process parameters, the on-site personnel can stop the diamond production equipment and resume production after the heat exchanger 13 is repaired.

[0032] Finally, it should be noted that the above embodiments are merely preferred embodiments of this utility model used to illustrate the technical solutions of this utility model, and are not intended to limit it, nor are they intended to limit the patent scope of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model. That is to say, any changes or refinements made to the main design concept and spirit of this utility model that are not of substantial significance, but whose technical problems are still consistent with those of this utility model, should be included within the protection scope of this utility model. In addition, the direct or indirect application of the technical solutions of this utility model to other related technical fields are similarly included within the patent protection scope of this utility model.

Claims

1. A diamond growth temperature control device, characterized in that: The device includes a reactor, inside which is a base. A clamping device is positioned above the base, and a diamond seed crystal is fixed to the clamping device. A plasma sphere is formed above the diamond seed crystal. A cooling assembly is connected to the bottom of the base. A cooling assembly inlet pipe is connected to the left side of the cooling assembly. A heat exchanger is connected to the left side of the cooling assembly inlet pipe. A first cooling pump outlet pipe is connected to the left side of the heat exchanger. A cooling pump is connected to the left side of the first cooling pump outlet pipe. A second cooling pump outlet pipe is also connected to the first cooling pump outlet pipe. The end of the second cooling pump outlet pipe is connected to the cooling assembly inlet pipe. A heat exchange pump outlet pipe is connected to the lower right side of the heat exchanger. A heat exchange pump is connected to the left side of the heat exchange pump outlet pipe. A heat exchanger outlet pipe is connected to the upper left side of the heat exchanger.

2. The diamond growth temperature regulating device according to claim 1, characterized in that: The cooling assembly has a built-in V-shaped tube.

3. The diamond growth temperature regulating device according to claim 1, characterized in that: The clamping device includes a fixing block, an elastic element, and a clamping block. The right side of the fixing block is connected to the elastic element, and the right side of the elastic element is connected to the clamping block. The fixing block, the elastic element, and the clamping block are symmetrically arranged with the center point of the base as the reference point.

4. The diamond growth temperature regulating device according to claim 1, characterized in that: A vacuum tube is connected to the lower right side of the reactor, and a vacuum pump is connected to the end of the vacuum tube.

5. The diamond growth temperature regulating device according to claim 1, characterized in that: A first self-regulating valve is installed on the outlet pipe of the first cooling pump, a second self-regulating valve is installed on the inlet pipe of the cooling component, a third self-regulating valve is installed on the outlet pipe of the second cooling pump, a fourth self-regulating valve is installed on the outlet pipe of the heat exchange pump, and a fifth self-regulating valve is installed on the outlet pipe of the heat exchanger.

6. The diamond growth temperature regulating device according to claim 1, characterized in that: The first end of the second cooling pump outlet pipe is connected between the cooling pump and the first automatic control valve, and the second end of the second cooling pump outlet pipe is connected to the right side of the second automatic control valve.

7. The diamond growth temperature regulating device according to claim 1, characterized in that: The heat exchanger is arranged horizontally and includes a left end cap, a shell and a right end cap. The right end of the outlet pipe of the first cooling pump is connected to the left end cap, and the left end of the inlet pipe of the cooling component is connected to the right end cap. A drain valve is provided on the left side of the bottom of the shell.

8. The diamond growth temperature regulating device according to claim 1, characterized in that: The heat exchange pump is connected to a heat exchange pump inlet pipe on its left side, and a heat exchange water tank is connected to the left side of the heat exchange pump inlet pipe. The cooling pump is connected to a cooling pump inlet pipe on its left side, and a cooling water tank is connected to the left side of the cooling pump inlet pipe. The temperature of the heat exchange water tank is higher than the temperature of the cooling water tank.