Anti-collision device in czochralski furnace

Abstract

The utility model relates to single crystal furnace technical field, concretely relates to a kind of anti-collision device in Czochralski method single crystal furnace, including furnace body, heat preservation cylinder, heat preservation felt, heat dissipation mechanism and anti-collision mechanism, heat preservation cylinder is fixedly installed in the inboard of furnace body, heat preservation felt is fixedly installed in the inboard of furnace body, and heat preservation felt is located between furnace body and heat preservation cylinder, heat dissipation mechanism is used to heat dissipation to furnace body inside, anti-collision mechanism is used to the protection effect to heat dissipation mechanism, anti-collision mechanism includes shell and anti-collision ring, shell is fixedly installed on heat preservation felt, anti-collision ring is fixedly installed in the bottom of shell, anti-collision mechanism further includes filler block, filler block is fixedly installed in the inboard of shell, and the material of filler block is made of graphite soft felt. The anti-collision device in the Czochralski method single crystal furnace, through the anti-collision mechanism set, can avoid crystal to produce when shaking, directly impact on water-cooled screen, can simultaneously block and absorb the kinetic energy generated when crystal collision.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, specifically to an anti-collision device in a Czochralski single crystal furnace. Background Technology

[0002] The Czochralski method is one of the most commonly used techniques for preparing single-crystal materials such as silicon, sapphire, and gallium arsenide. The core of the Czochralski method is to gradually arrange atoms from a disordered molten state into an ordered single-crystal structure through the melting and crystallization process. After the raw material is heated to a molten state in a crucible of a single-crystal furnace, a seed crystal fixed on a rotating axis is used to contact the surface of the melt, causing the end of the seed crystal to melt. The seed crystal is then slowly lifted and rotated, and the melt gradually cools and crystallizes on the surface of the seed crystal. The crystallization direction strictly follows the crystal orientation of the seed crystal, eventually forming a complete single crystal.

[0003] A single crystal furnace is a specialized piece of equipment that melts polycrystalline raw materials in a controlled inert gas environment using a heating system, and then grows single crystals using the Czochralski method. Its core function is to provide stable environmental conditions such as temperature, pressure, and gas atmosphere for single crystal growth, and to achieve automated and large-scale preparation of single crystals by precisely controlling the rotation, lifting, and other movements of the seed crystal and crucible.

[0004] When using the Czochralski method to grow single-crystal silicon in existing single-crystal furnaces, water-cooled screens are usually placed around the crystal to assist in cooling it down, thereby increasing the temperature gradient at the solid-liquid interface and improving the crystal growth rate. However, when encountering natural disasters such as earthquakes or collisions with the single-crystal furnace by the external environment, the pulled crystal is prone to shaking, which may cause it to collide with the water-cooled screen, resulting in damage to the water-cooled screen and potentially leading to serious safety accidents. This reduces the safety and performance of the single-crystal furnace. Utility Model Content

[0005] The purpose of this invention is to provide an anti-collision device for a Czochralski single crystal furnace.

[0006] To achieve this objective, the present invention adopts the following technical solution: A collision prevention device is provided for a Czochralski single crystal furnace, including a furnace body, an insulation cylinder, an insulation felt, a heat dissipation mechanism, and a collision prevention mechanism. The insulation cylinder is fixedly installed inside the furnace body, and the insulation felt is fixedly installed inside the furnace body, with the insulation felt located between the furnace body and the insulation cylinder. The heat dissipation mechanism is used to dissipate heat from the inside of the furnace body, and the collision prevention mechanism is used to protect the heat dissipation mechanism. The anti-collision mechanism includes a housing and an anti-collision ring. The housing is fixedly installed on the insulation felt, and the anti-collision ring is fixedly installed at the bottom of the housing. The housing and anti-collision ring protect the water-cooled screen from impact when the crystal vibrates, reducing the impact force of the crystal on the screen.

[0007] Furthermore, the anti-collision mechanism also includes a filler block, which is fixedly installed on the inside of the shell and is made of graphite felt. The filler block provides insulation for the shell.

[0008] Furthermore, a through hole is provided in the middle of the shell, and the through hole is inverted conical. The top of the shell is conical, and the shell is made of graphite hard felt.

[0009] Furthermore, the outer wall of the bumper ring is inverted conical, and the bumper ring is made of titanium alloy. Titanium alloy is an impact-resistant material that can block and absorb the energy generated during crystal collisions.

[0010] Furthermore, the heat dissipation mechanism includes a water-cooled screen, an inlet pipe, an outlet pipe, and a cleaning mechanism. The water-cooled screen is fixedly installed on the insulation cylinder, and a water-cooling groove is opened on the water-cooled screen. The inlet pipe passes through the water-cooled screen and is connected to the cleaning mechanism. The cleaning mechanism is used to clean the inside of the water-cooled screen. The outlet pipe is connected to the water-cooling groove and passes through the furnace body.

[0011] Furthermore, the cleaning mechanism includes a cylinder, multiple blades, and a rotating shaft. The cylinder is fixedly installed inside the water-cooling tank by a support rod. The cylinder is connected to the water inlet pipe, and a drain outlet is provided at the bottom of the cylinder. The rotating shaft is rotatably mounted on the cylinder, and the multiple blades are all fixedly mounted on the rotating shaft, with the blades distributed circumferentially along the rotating shaft. The impact force of the cooling water on the blades drives the rotating shaft to rotate.

[0012] Furthermore, the cleaning mechanism also includes a gear, a protective cover, a circular sleeve, and a ring rack. The gear is fixedly mounted on a rotating shaft that passes through the water-cooled screen. The protective cover is fixedly mounted on the water-cooled screen, and the circular sleeve is fixedly mounted on the water-cooled screen and connected to the protective cover. The ring rack is rotatably mounted on the circular sleeve and meshes with the gear. The rotation of the rotating shaft drives the gear to rotate, which in turn drives the ring rack to rotate.

[0013] Furthermore, the cleaning mechanism also includes a cleaning rod, which is fixedly mounted on a ring rack via a connecting plate, and the cleaning rod contacts the inner side of the water-cooled screen. The rotation of the ring rack moves the cleaning rod, thereby cleaning the inner side of the water-cooled screen.

[0014] The beneficial effects of this utility model are as follows: The anti-collision device in the Czochralski single crystal furnace can prevent the crystal from directly impacting the water-cooled screen when it shakes. At the same time, it can block and absorb the kinetic energy generated when the crystal collides. In addition, the cleaning mechanism in the heat dissipation mechanism can drive the blades and rotating shaft to rotate by the impact force of the cooling water, thereby driving the gear and ring rack to rotate, and then driving the cleaning rod to rotate, so as to scrape and clean the silicon spots attached to the inside of the water-cooled screen. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments of this utility model will be briefly introduced below.

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a schematic cross-sectional view of the furnace body of this utility model; Figure 3 This is a schematic diagram of the main structure of the anti-collision mechanism of this utility model; Figure 4 This is a cross-sectional view of the anti-collision mechanism of this utility model; Figure 5 This is a cross-sectional view of the water-cooled screen structure of this utility model; Figure 6 This is a schematic diagram of the cylindrical structure of this utility model; Figure 7 This is a schematic diagram of the internal main structure of the water-cooled screen of this utility model; Figure 8 This is a schematic diagram of the disassembled structure of the annular rack and the circular sleeve of this utility model; Figure 9 For the present utility model Figure 5 Enlarged structural diagram of section A.

[0017] In the diagram: 1. Furnace body; 2. Insulation cylinder; 3. Insulation felt; 4. Heat dissipation mechanism; 41. Water-cooled screen; 42. Water inlet pipe; 43. Water outlet pipe; 44. Water-cooled tank; 45. Cleaning mechanism; 451. Cylinder; 452. Blade; 453. Rotating shaft; 454. Gear; 455. Protective cover; 456. Circular sleeve; 457. Circular rack; 458. Connecting plate; 459. Cleaning rod; 4510. Support rod; 4511. Drain outlet; 5. Anti-collision mechanism; 51. Shell; 52. Filler block; 53. Anti-collision ring; 54. Through hole. Detailed Implementation

[0018] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0019] The accompanying drawings are for illustrative purposes only and are schematic diagrams, not actual images. They should not be construed as limiting the scope of this patent. To better illustrate the embodiments of this utility model, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0020] Reference Figure 1 and Figure 2 The diagram illustrates an anti-collision device in a Czochralski single crystal furnace, comprising a furnace body 1, an insulation cylinder 2, an insulation felt 3, a heat dissipation mechanism 4, and an anti-collision mechanism 5. The insulation cylinder 2 is fixedly installed inside the furnace body 1, serving to fix the insulation felt 3 and also providing insulation. The insulation felt 3 is fixedly installed inside the furnace body 1, located between the furnace body 1 and the insulation cylinder 2. The insulation felt 3 is made of graphite carbon felt and serves to provide heat resistance and insulation. The heat dissipation mechanism 4 dissipates heat from the interior of the furnace body 1. The core function of the heat dissipation mechanism 4 is to ensure the stability of single crystal growth and crystal quality through precise temperature control and thermal field regulation. The anti-collision mechanism 5 protects the heat dissipation mechanism 4, preventing the crystal from shaking due to external influences and causing impact damage to the heat dissipation mechanism 4.

[0021] Reference Figures 2 to 4 Specifically, the anti-collision mechanism 5 includes a housing 51 and an anti-collision ring 53. The housing 51 is fixedly installed on the insulation felt 3, serving a supporting and fixing function while also providing heat resistance and insulation. The anti-collision ring 53 is fixedly installed at the bottom of the housing 51. When the crystal shakes, the anti-collision ring 53 is the first to be impacted by the crystal, thus blocking and absorbing the kinetic energy generated during the crystal impact, protecting the water-cooled screen 41. The anti-collision mechanism 5 also includes a filling block 52, which is fixedly installed on the inner side of the housing 51. The filling block 52 is made of graphite soft felt, a carbon-based material with high temperature resistance and low thermal conductivity, providing excellent heat resistance and insulation.

[0022] Reference Figure 3 and Figure 4 More specifically, a through hole 54 is provided in the middle of the shell 51, and the through hole 54 is inverted conical. Because the through hole 54 is inverted conical, after the crystal is pulled out to a certain length, the inverted conical through hole 54 can limit the shaking effect of the crystal, thereby preventing the excessively long crystal from contacting the water-cooled screen 41. The top of the shell 51 is conical, and the shell 51 is made of graphite hard felt. By setting the top of the shell 51 to be conical, it can fit more closely to the inner wall of the furnace body 1. At the same time, graphite hard felt is a material with a certain rigidity made of graphite fiber and carbon-based binder. It not only has the high temperature resistance and low thermal conductivity of graphite soft felt, but also has good strength and rigidity.

[0023] Reference Figure 3 and Figure 4More specifically, the outer wall of the anti-collision ring 53 is an inverted cone shape, and the anti-collision ring 53 is made of titanium alloy. By setting the outer wall of the anti-collision ring 53 to an inverted cone shape, the anti-collision ring 53 can fit more closely to the inner side of the water-cooled screen 41. At the same time, titanium alloy is an alloy containing titanium and other chemical elements, which has the characteristics of high melting point and high strength, as well as good high temperature resistance and chemical stability, thus enabling the anti-collision ring 53 to withstand impact.

[0024] Reference Figure 2 and Figure 5 Specifically, the heat dissipation mechanism 4 includes a water-cooled screen 41, an inlet pipe 42, an outlet pipe 43, and a cleaning mechanism 45. The water-cooled screen 41 is fixedly installed on the insulation cylinder 2, and a water-cooled tank 44 is provided on the water-cooled screen 41. Circulating cooling water enters the water-cooled tank 44, which can remove the latent heat of crystallization absorbed by the water-cooled screen 41, thereby accelerating the crystal growth rate and controlling the temperature gradient. The inlet pipe 42 passes through the water-cooled screen 41 and is connected to the cleaning mechanism 45. The inlet pipe 42 is used to transport cooling water to the cleaning mechanism 45. The cleaning mechanism 45 is used to clean the inside of the water-cooled screen 41 to prevent silicon dots from adhering to the water-cooled screen 41 and affecting the heat dissipation effect of the water-cooled screen 41. The outlet pipe 43 is connected to the water-cooled tank 44 and passes through the furnace body 1. The cooling water in the water-cooled tank 44 is discharged outward through the outlet pipe 43, so that the cooling water can circulate in the water-cooled tank 44.

[0025] Reference Figure 5 and Figure 6 Specifically, the cleaning mechanism 45 includes a cylinder 451, multiple blades 452, and a rotating shaft 453. The cylinder 451 is fixedly installed inside the water-cooling tank 44 by a support rod 4510, which supports and fixes the cylinder 451. The cylinder 451 is connected to the water inlet pipe 42, and a drain outlet 4511 is provided at the bottom of the cylinder 451. Cooling water is transported into the cylinder 451 through the water inlet pipe 42 and discharged into the water-cooling tank 44 through the drain outlet 4511. The rotating shaft 453 is rotatably installed on the cylinder 451. Multiple blades 452 are fixedly installed on the rotating shaft 453 and are distributed circumferentially along the rotating shaft 453. When cooling water is transported into the cylinder 451, it impacts the blades 452, thereby driving the rotating shaft 453 to rotate.

[0026] Reference Figures 5 to 8More specifically, the cleaning mechanism 45 also includes a gear 454, a protective cover 455, a circular sleeve 456, and a ring rack 457. The gear 454 is fixedly installed on the rotating shaft 453, which passes through the water-cooled screen 41. The rotation of the rotating shaft 453 drives the gear 454 to rotate. The protective cover 455 is fixedly installed on the water-cooled screen 41 and protects the gear 454. The circular sleeve 456 is fixedly installed on the water-cooled screen 41 and is fixedly connected to the protective cover 455. The circular sleeve 456 protects the ring rack 457. The ring rack 457 is rotatably installed on the circular sleeve 456 and meshes with the gear 454. The rotation of the gear 454 drives the ring rack 457 to rotate.

[0027] Reference Figure 7 and Figure 9 Specifically, the cleaning mechanism 45 also includes a cleaning rod 459, which is fixedly installed on the annular rack 457 via a connecting plate 458. The cleaning rod 459 contacts the inner side of the water-cooled screen 41. Through the rotation of the annular rack 457, the connecting plate 458 can be moved, thereby moving the cleaning rod 459 to scrape and clean the silicon dots and other stains attached to the inner side of the water-cooled screen 41.

[0028] Reference Figures 1 to 9 This anti-collision device in a Czochralski single crystal furnace can prevent the crystal from directly impacting the water-cooled screen when it shakes. It can also block and absorb the kinetic energy generated when the crystal collides. In addition, the cleaning mechanism in the heat dissipation mechanism can drive the blades and rotating shaft to rotate by the impact force of the cooling water, which in turn drives the gears and ring rack to rotate, and then drives the cleaning rod to rotate, scraping and cleaning the silicon spots attached to the inside of the water-cooled screen.

[0029] It should be stated that the above-described specific embodiments are merely preferred embodiments of this utility model and the technical principles employed. Those skilled in the art should understand that various modifications, equivalent substitutions, and variations can be made to this utility model. However, such variations, as long as they do not depart from the spirit of this utility model, should be within the protection scope of this utility model. Furthermore, some terminology used in this application specification and claims is not limiting, but merely for ease of description.

Claims

1. A collision prevention device in a Czochralski single crystal furnace, characterized in that, The furnace includes a furnace body (1), an insulation cylinder (2), an insulation felt (3), a heat dissipation mechanism (4), and an anti-collision mechanism (5). The insulation cylinder (2) is fixedly installed on the inside of the furnace body (1), and the insulation felt (3) is fixedly installed on the inside of the furnace body (1) and located between the furnace body (1) and the insulation cylinder (2). The heat dissipation mechanism (4) is used to dissipate heat from the inside of the furnace body (1), and the anti-collision mechanism (5) is used to protect the heat dissipation mechanism (4). The anti-collision mechanism (5) includes a housing (51) and an anti-collision ring (53). The housing (51) is fixedly installed on the thermal insulation felt (3), and the anti-collision ring (53) is fixedly installed on the bottom of the housing (51).

2. The anti-collision device in a Czochralski single crystal furnace according to claim 1, characterized in that, The anti-collision mechanism (5) also includes a filling block (52), which is fixedly installed on the inner side of the housing (51). The filling block (52) is made of graphite soft felt.

3. The anti-collision device in a Czochralski single crystal furnace according to claim 2, characterized in that, The housing (51) has a through hole (54) in the middle, and the through hole (54) is an inverted cone shape. The top of the housing (51) is cone-shaped, and the housing (51) is made of graphite hard felt.

4. The anti-collision device in a Czochralski single crystal furnace according to claim 2, characterized in that, The outer wall of the anti-collision ring (53) is inverted conical, and the anti-collision ring (53) is made of titanium alloy.

5. The anti-collision device in a Czochralski single crystal furnace according to claim 1, characterized in that, The heat dissipation mechanism (4) includes a water-cooled screen (41), an inlet pipe (42), an outlet pipe (43), and a cleaning mechanism (45). The water-cooled screen (41) is fixedly installed on the insulation cylinder (2), and a water-cooled groove (44) is provided on the water-cooled screen (41). The inlet pipe (42) passes through the water-cooled screen (41), and the inlet pipe (42) is connected to the cleaning mechanism (45). The cleaning mechanism (45) is used to clean the inside of the water-cooled screen (41). The outlet pipe (43) is connected to the water-cooled groove (44), and the outlet pipe (43) passes through the furnace body (1).

6. The anti-collision device in a Czochralski single crystal furnace according to claim 5, characterized in that, The cleaning mechanism (45) includes a cylinder (451), multiple blades (452) and a rotating shaft (453). The cylinder (451) is fixedly installed on the inner side of the water-cooled tank (44) by a support rod (4510). The cylinder (451) is connected to the water inlet pipe (42), and a drain outlet (4511) is provided at the bottom of the cylinder (451). The rotating shaft (453) is rotatably installed on the cylinder (451). Multiple blades (452) are fixedly installed on the rotating shaft (453), and multiple blades (452) are distributed circumferentially along the rotating shaft (453).

7. The anti-collision device in a Czochralski single crystal furnace according to claim 6, characterized in that, The cleaning mechanism (45) further includes a gear (454), a protective cover (455), a ring sleeve (456), and a ring rack (457). The gear (454) is fixedly installed on a rotating shaft (453), and the rotating shaft (453) passes through the water-cooled screen (41). The protective cover (455) is fixedly installed on the water-cooled screen (41). The ring sleeve (456) is fixedly installed on the water-cooled screen (41), and the ring sleeve (456) is fixedly connected to the protective cover (455). The ring rack (457) is rotatably installed on the ring sleeve (456), and the ring rack (457) meshes with the gear (454).

8. The anti-collision device in a Czochralski single crystal furnace according to claim 7, characterized in that, The cleaning mechanism (45) also includes a cleaning rod (459), which is fixedly installed on the annular rack (457) via a connecting plate (458), and the cleaning rod (459) contacts the inner side of the water-cooled screen (41).

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