A single crystal furnace induction heater

Abstract

The utility model discloses a single crystal furnace induction heater, its characterized in that, including the solution, the quartz crucible, the crucible help, the induction heater coil, the core of the crucible, the supporting rod and the furnace bottom tray, the solution is supported in the quartz crucible, the quartz crucible is supported in the crucible help, be equipped with the core of the crucible on the crucible help, the induction heater coil sets up and is installed on the outer circumferential wall of the crucible help, be equipped with the supporting rod hole on the furnace bottom tray, and the supporting rod is connected with lower shaft through the furnace bottom tray. The utility model directly produces the eddy current heating in the workpiece through electromagnetic induction, can reach the target temperature in a few minutes, and the energy utilization rate can reach above 90%, reduces the energy consumption, and the contactless heating increases the safety performance, and there is no easy-to-damage consumable, and the operation and maintenance life time is long, and reduces the single crystal heat field use cost.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace heating technology, and in particular to a single crystal furnace induction heater. Background Technology

[0002] Existing single-crystal furnaces mainly rely on graphite heaters for resistance heating to melt silicon material, converting electrical energy into heat energy. Reaching the target stability usually takes a certain amount of time, resulting in a significant reduction in heating efficiency and serious energy waste. At the same time, there is a risk of arcing of the graphite electrodes, and the lifespan and maintenance time are short. Graphite heaters and graphite electrodes need to be replaced regularly, leading to high operating costs for single-crystal hot zones.

[0003] Therefore, it is necessary to provide a single-crystal furnace induction heater to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this section is to outline some aspects of the embodiments of the present invention and to briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section, as well as in the abstract and title of the invention, to avoid obscuring the purpose of this section, the abstract and the title of the invention. Such simplifications or omissions shall not be used to limit the scope of the present invention.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a single crystal furnace induction heater, characterized in that it includes a melt, a quartz crucible, crucible sides, an induction heater coil, a crucible core, a support rod, and a furnace bottom plate; the melt is supported in the quartz crucible, the quartz crucible is supported in the crucible sides, the crucible core is provided at the crucible sides, the induction heater coil is installed on the outer peripheral wall of the crucible sides, the furnace bottom plate is provided with a support rod hole, and the support rod is connected to the lower shaft through the furnace bottom plate.

[0006] In a preferred embodiment of the single crystal furnace induction heater of this invention, the crucible core is located at the center of the bottom of the crucible side.

[0007] In a preferred embodiment of the single crystal furnace induction heater of this utility model, the crucible side is mounted on the crucible support, and the crucible support is supported on the support rod.

[0008] In a preferred embodiment of the single-crystal furnace induction heater of this invention, the support rod is located at the center of the crucible support and the crucible center.

[0009] In a preferred embodiment of the single-crystal furnace induction heater described in this utility model, the induction heating coil is a spiral coil.

[0010] As a preferred embodiment of the single crystal furnace induction heater of this utility model, the furnace bottom plate is provided with an induction coil interface, and the induction heater coil is installed on the furnace bottom plate through the induction coil interface.

[0011] In a preferred embodiment of the single crystal furnace induction heater of this utility model, the induction heater coil is connected to the power output terminal through a copper tube or cable; the circuit resonant frequency of the induction heater coil is adjusted by a series / parallel capacitor bank to match the coil impedance with the power output characteristics.

[0012] As a preferred embodiment of the single crystal furnace induction heater of this utility model, the coil circulation water interface of the induction heater is sealed to an external cooling tower or chiller unit, and a flow alarm is configured to monitor abnormalities in real time.

[0013] As a preferred embodiment of the single crystal furnace induction heater of this utility model, the induction heater coil typically has 2-10 turns, and the coil diameter is 1.05-1.20 times the diameter of the crucible.

[0014] As a preferred embodiment of the single crystal furnace induction heater of this utility model, the induction heater coil is made of hollow copper tube and has circulating cooling water inside.

[0015] The beneficial effects of this utility model are as follows: The single crystal furnace induction heater of this utility model replaces the graphite heater, and the induction heating energy utilization rate is higher. The induction heater generates eddy current heating directly in the workpiece through electromagnetic induction, and can reach the target temperature in just a few minutes. The energy utilization rate can reach more than 90%, reducing energy consumption. It is a non-contact heating method, which increases safety performance. There are no easily damaged or consumable parts, and the maintenance life is long, reducing the cost of using the single crystal hot field. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0017] Figure 1 A cross-sectional view of the structure of the single crystal furnace induction heater according to an embodiment of this utility model;

[0018] Figure 2 A three-dimensional structural diagram of the single crystal furnace induction heater according to an embodiment of this utility model. Detailed Implementation

[0019] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0020] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0021] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0022] Furthermore, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0023] Example 1

[0024] Reference Figures 1-2The first embodiment of this utility model discloses an induction heater for a single crystal furnace, characterized in that it includes a melt 2, a quartz crucible 3, a crucible side 4, an induction heater coil 1, a crucible core 5, a support rod 7, and a furnace bottom plate 8. The melt 2 is supported in the quartz crucible 3, which is supported in the crucible side 4. The crucible core 5 is located on the crucible side 4. The induction heater coil 1 is mounted on the outer peripheral wall of the crucible side 4. The furnace bottom plate 8 has a support rod hole, and the support rod 7 is connected to a lower shaft through the furnace bottom plate 8. Specifically, the induction heater coil 1 is connected to the power output terminal via a copper pipe or cable to convert the industrial frequency AC power into a medium-to-high frequency current. The furnace bottom plate 8 has an induction coil interface 9, through which the induction heater coil 1 is mounted on the furnace bottom plate 8. The crucible core 5 is located at the center of the bottom of the crucible side 4. The crucible side 4 is mounted on a crucible support 6, which is supported by the support rod 7. To enhance the stability of the quartz crucible 3, it is installed in the crucible side 4. A crucible core 5 is located at the center of the bottom of the crucible side 4. The crucible side 4 is installed in the crucible support 6, which is connected to a support rod 7. The crucible support 6 rests on the support rod 7. The position of the crucible core 5 is perpendicular to the position of the support rod 7. Simultaneously, the furnace bottom plate 8 has a support rod hole, and the support rod 7 is connected to the lower shaft through the furnace bottom plate 8. The furnace bottom plate 8 has an induction coil interface 9. The melt 2 is supported in the quartz crucible 3. The quartz crucible 3 is supported in the crucible side 4. The crucible side 4 has the crucible core 5. The furnace bottom plate 8 has a support rod hole, and the support rod 7 is connected to the lower shaft through the furnace bottom plate 8. The crucible support 6 rests on the support rod 7. The crucible side 4 and the crucible core 5 rest on the crucible support 6. The induction heater coil 1 is connected to the power output terminal through a copper pipe or cable. The induction heating coil 1 is a spiral coil. The furnace bottom plate 8 has an induction coil interface 9. The induction heater coil 1 adjusts the circuit resonant frequency through a series / parallel capacitor bank to match the coil impedance with the power supply output characteristics, maximizing energy transfer efficiency. The induction heater coil 1 typically has 2-10 turns, and its diameter is 1.05-1.20 times the crucible diameter. The circulating water interface of the induction heater coil 1 is sealed to an external cooling tower or chiller unit, and a flow alarm is configured to monitor for abnormalities in real time. The induction heater coil 1 is preferably wound with hollow copper tubing, with circulating cooling water flowing inside. The cross-sectional shape of the induction heater coil 1 can be circular, square, or rectangular. This invention does not impose any limitations. To improve the heating effect of the induction heater coil 1, the induction heater coil 1 is concentric with the crucible side 4; the crucible side 4 is concentric with the quartz crucible 3.

[0025] In summary, this application overcomes the energy waste and arcing risk caused by relying on graphite heaters or resistance heating in the prior art, and can improve energy utilization, reduce energy consumption, provide non-contact heating, increase safety performance, eliminate easily damaged or consumable parts, extend maintenance life, and reduce the cost of using single crystal thermal fields.

[0026] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or rearranged according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structural equivalents but also equivalent structures. Without departing from the scope of this invention, other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0027] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to the implementation of the present invention) may be omitted.

[0028] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0029] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A single-crystal furnace induction heater, characterized in that, The furnace includes a melt (2), a quartz crucible (3), a crucible side (4), an induction heater coil (1), a crucible core (5), a support rod (7), and a furnace bottom plate (8). The melt (2) is supported in the quartz crucible (3), the quartz crucible (3) is supported in the crucible side (4), the crucible core (5) is provided on the crucible side (4), the induction heater coil (1) is installed on the outer peripheral wall of the crucible side (4), and the furnace bottom plate (8) is provided with a support rod hole. The support rod (7) is connected to the lower shaft through the furnace bottom plate (8).

2. The single crystal furnace induction heater according to claim 1, characterized in that, The crucible core (5) is located at the center of the bottom of the crucible side (4).

3. The single-crystal furnace induction heater according to claim 1, characterized in that, The crucible side (4) is installed on the crucible support (6), and the crucible support (6) is supported on the support rod (7).

4. The single crystal furnace induction heater according to claim 3, characterized in that, The support rod (7) is located at the center of the crucible support (6) and the crucible center (5).

5. The single crystal furnace induction heater according to claim 1, characterized in that, The induction heater coil (1) is a spiral coil.

6. The single-crystal furnace induction heater according to claim 1, characterized in that, The furnace bottom plate (8) is provided with an induction coil interface (9), and the induction heater coil (1) is installed on the furnace bottom plate (8) through the induction coil interface (9).

7. The single-crystal furnace induction heater according to claim 1, characterized in that, The induction heater coil (1) is connected to the power output terminal through a copper pipe or cable; the induction heater coil (1) adjusts the circuit resonant frequency through a series / parallel capacitor bank so that the coil impedance matches the power output characteristics.

8. The single crystal furnace induction heater according to claim 1, characterized in that, The circulating water interface of the induction heater coil (1) is sealed to an external cooling tower or chiller unit and is equipped with a flow alarm to monitor abnormalities in real time.

9. The single-crystal furnace induction heater according to claim 1, characterized in that, The induction heater coil (1) has 2-10 turns, and the coil diameter is 1.05-1.20 times the diameter of the crucible.

10. The single-crystal furnace induction heater according to claim 1, characterized in that, The induction heater coil (1) is made of hollow copper tube and has circulating cooling water inside.

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