A vacuum chamber sealing apparatus

Abstract

The utility model discloses a kind of vacuum chamber sealing equipment, belong to sealing equipment field, including vacuum chamber shell;The vacuum chamber shell is installed with the door sealing mechanism for being used to seal the vacuum chamber shell;Two groups of door sealing mechanism are symmetrically set in the front and rear ends of vacuum chamber shell before and after;Vacuum chamber shell is installed with the air tightness observation component for observing the air tightness in vacuum chamber;The door sealing mechanism includes door closing component and door sealing component;Door closing component and door sealing component are connected with vacuum chamber shell;Door closing component is connected with door sealing component;Door closing component is used to close the door to vacuum chamber shell;Door sealing component is used to seal door closing component. By the above-mentioned mode, the utility model can realize the sealing of vacuum chamber by door sealing mechanism, reduce the wear and tear when vacuum chamber door is closed, reduce maintenance cost.

Description

Technical Field

[0001] This utility model relates to the field of sealing equipment, specifically to a vacuum chamber sealing device. Background Technology

[0002] A vacuum chamber is a sealing device used to create and maintain a vacuum environment. It is typically made of high-strength materials (such as stainless steel or special alloys) and equipped with components such as a sealed door, observation window, and electrical feedthrough interface. Its core function is to remove internal gases through a pumping system to create a low-pressure or ultra-high vacuum state. It is widely used in semiconductor manufacturing, aerospace testing, materials science, and nuclear research. Key characteristics include excellent airtightness, pressure resistance, and corrosion resistance.

[0003] In existing technologies, the sealing of the vacuum chamber door during vacuuming mainly relies on mechanical closure via guide rails on both sides of the door. However, this method leads to the following problems:

[0004] The sliding seal of the guide rail is prone to failure to seal properly and the profile is easily deformed, resulting in a short service life. During the sliding process of the guide rail, the friction between the sealing strips is also prone to damage, and after wear, the airtightness fails to meet the standard, affecting the product quality.

[0005] Based on this, the present invention designs a vacuum chamber sealing device to solve the above problems. Utility Model Content

[0006] In view of the above-mentioned shortcomings of the existing technology, the present invention provides a vacuum chamber sealing device.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A vacuum chamber sealing device includes a vacuum chamber shell;

[0009] The vacuum chamber shell is equipped with a sliding door sealing mechanism for sealing the vacuum chamber shell; two sets of sliding door sealing mechanisms are symmetrically arranged at the front and rear ends of the vacuum chamber shell.

[0010] The vacuum chamber shell is equipped with an airtightness observation component for observing the airtightness of the vacuum chamber;

[0011] The sliding door sealing mechanism includes a door closing assembly and a sliding door sealing assembly; both the door closing assembly and the sliding door sealing assembly are connected to the vacuum chamber shell; the door closing assembly is connected to the sliding door sealing assembly; the door closing assembly is used to close the vacuum chamber shell; the sliding door sealing assembly is used to seal the door closing assembly.

[0012] Furthermore, the door closing assembly includes a door closing drive assembly, a door panel, and a limiting sliding assembly; the vacuum chamber shell and the limiting sliding assembly are both connected to the door closing drive assembly; the limiting sliding assembly and the door sealing assembly are both connected to the door panel; and sealing strips are fixedly installed on the sides of the door panel and the vacuum chamber shell that are close to each other.

[0013] Furthermore, the door closing drive assembly includes a door closing cylinder and a support frame, with the lower end of the support frame fixedly connected to the vacuum chamber shell; the door closing cylinder is fixedly connected to the support frame, and the drive end of the door closing cylinder is connected to the limit sliding assembly.

[0014] Furthermore, the door sealing assembly includes a door cylinder and a door limiting assembly; four door cylinders are symmetrically arranged left and right, and door cylinders on the same side are arranged vertically; the door cylinders are fixedly connected to the outer wall of the vacuum chamber shell, and the drive end of the door cylinder is connected to the door limiting assembly.

[0015] Furthermore, the door limiting assembly includes a limiting frame; two limiting frames are symmetrically arranged left and right, and the two door cylinder drive ends at the left and right ends of the vacuum chamber shell are fixedly connected to the limiting frames at the adjacent ends, and limiting grooves are provided on the limiting frames; the left and right ends of the door panel are respectively limited and slidably connected to the two limiting frames through the limiting grooves.

[0016] Furthermore, the airtightness observation component includes a limit reset component and a drive component; both the vacuum chamber shell and the drive component are connected to the limit reset component; the limit reset component is used to observe the vacuum sealing state and limit the drive component; the drive component is used to display the vacuum sealing state inside the vacuum chamber shell.

[0017] Furthermore, the limit reset assembly includes a spring, a limit cylinder, and a sealing cylinder; the lower end of the limit cylinder is connected and fixedly connected to the interior of the vacuum chamber shell, the lower end of the sealing cylinder is fixedly connected and connected to the limit cylinder, and the lower end of the spring is fixedly connected to the lower end of the inner wall of the sealing cylinder; the upper end of the spring is connected to the drive assembly; the sealing cylinder is made of transparent acrylic material, and the outer side of the sealing cylinder is marked with graduations.

[0018] Furthermore, the drive assembly includes a slide rod and a piston; the slide rod is slidably connected to the inner wall of the limiting cylinder; a spring is sleeved on the outside of the slide rod, and the upper end of the spring is fixedly connected to the upper end of the slide rod; the lower end of the piston is fixedly connected to the slide rod; and the inner side of the sealing cylinder at the upper end of the piston is filled with air.

[0019] Compared with the prior art, the advantages of this utility model are as follows: 1. This utility model can achieve the sealing of the vacuum chamber through the sliding door sealing mechanism, reduce the wear of the vacuum chamber door when it is closed, and reduce maintenance costs;

[0020] 2. This utility model can realize the direct observation of the airtightness of the vacuum chamber after evacuation through the airtightness observation mechanism. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This utility model relates to a three-dimensional vacuum chamber sealing device. Figure 1 ;

[0023] Figure 2 This is a front view of a vacuum chamber sealing device according to the present invention;

[0024] Figure 3 This utility model relates to a three-dimensional vacuum chamber sealing device. Figure 2 ;

[0025] Figure 4 for Figure 3 Enlarged view of point A in the middle;

[0026] Figure 5 For along Figure 2 A stereoscopic view after a portion has been removed along the CC direction;

[0027] Figure 6 for Figure 5 Enlarged view of point B in the middle.

[0028] The labels in the diagram represent:

[0029] 1. Vacuum chamber shell; 2. Door sealing mechanism; 21. Door closing assembly; 211. Door closing cylinder; 212. Support frame; 213. Door panel; 215. Slide rail; 216. Slider; 22. Door sealing assembly; 221. Door closing cylinder; 222. Limit frame; 223. Limit slide groove; 3. Air tightness observation assembly; 31. Limit reset assembly; 311. Spring; 312. Limit cylinder; 313. Sealing cylinder; 32. Drive assembly; 321. Slide rod; 322. Piston. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0031] The terms "left," "right," "front," "back," "up," and "down" used in the following description refer to the orientation from the perspective of the front view.

[0032] Example 1: In some embodiments, please refer to the accompanying drawings. Figures 1-6 A vacuum chamber sealing device, comprising a vacuum chamber shell 1;

[0033] The vacuum chamber shell 1 is equipped with a sliding door sealing mechanism 2 for sealing the vacuum chamber shell 1; two sets of sliding door sealing mechanisms 2 are symmetrically arranged at the front and rear ends of the vacuum chamber shell 1.

[0034] An airtightness observation component 3 for observing the airtightness of the vacuum chamber is installed on the outer shell 1 of the vacuum chamber;

[0035] like Figure 2 As shown, the sliding door sealing mechanism 2 includes a door closing assembly 21 and a sliding door sealing assembly 22; both the door closing assembly 21 and the sliding door sealing assembly 22 are connected to the vacuum chamber shell 1; the door closing assembly 21 is connected to the sliding door sealing assembly 22; the door closing assembly 21 is used to close the vacuum chamber shell 1; the sliding door sealing assembly 22 is used to seal the door closing assembly 21.

[0036] In this invention, after the operator places the object to be reacted into the vacuum chamber shell 1, the operator activates the door closing assembly 21 to close the vacuum chamber. After the door closing assembly 21 has closed, the door sealing assembly 22 is activated, which drives the door closing assembly 21 to cooperate with the vacuum chamber shell 1 to seal, reducing wear when the vacuum chamber door is closed. After sealing, the reaction takes place inside the vacuum chamber shell 1. At the same time, the operator can observe the airtightness inside the vacuum chamber shell 1 through the airtightness observation assembly 3, realizing direct observation of the airtightness after the vacuum chamber is evacuated.

[0037] The door closing assembly 21 includes a door closing drive assembly, a door panel 213, and a limiting sliding assembly; the vacuum chamber shell 1 and the limiting sliding assembly are both connected to the door closing drive assembly; the limiting sliding assembly and the sliding door sealing assembly 22 are both connected to the door panel 213; a sealing strip is fixedly installed on the side of the door panel 213 and the vacuum chamber shell 1 that are close to each other.

[0038] The door closing drive assembly includes a door closing cylinder 211 and a support frame 212. The lower end of the support frame 212 is fixedly connected to the vacuum chamber shell 1. The door closing cylinder 211 is fixedly connected to the support frame 212, and the drive end of the door closing cylinder 211 is connected to the limit sliding assembly.

[0039] The limiting sliding assembly includes a slide rail 215 and a slider 216; the lower end of the slide rail 215 is fixedly connected to the upper end of the door panel 213; the slider 216 is limited and slidably connected to the slide rail 215; the driving end of the door closing cylinder 211 is fixedly connected to the upper end of the slider 216.

[0040] The door sealing assembly 22 includes a door cylinder 221 and a door limiting assembly; four door cylinders 221 are symmetrically arranged on the left and right, and the door cylinders 221 on the same side are arranged vertically; the door cylinders 221 are fixedly connected to the outer wall of the vacuum chamber shell 1, and the driving end of the door cylinder 221 is connected to the door limiting assembly.

[0041] The door limiting assembly includes a limiting frame 222 and a limiting groove 223; the two limiting frames 222 are symmetrically arranged on the left and right sides, and the driving ends of the two door cylinders 221 at the left and right ends of the vacuum chamber shell 1 are fixedly connected to the limiting frames 222 at the adjacent ends. The limiting frames 222 are provided with limiting grooves 223; the left and right ends of the door panel 213 are respectively limited and slidably connected to the two limiting frames 222 through the limiting grooves 223.

[0042] In this invention, after the operator places the object to be reacted into the vacuum chamber shell 1, the closing cylinder 211 drives the support frame 212 to slide downward along the limiting slide groove 223 until the door panel 213 is completely closed. Then, the pulling cylinder 221 drives the door panel 213 to move closer to the vacuum chamber shell 1, while the sliding rail 215 and the slider 216 limit the sliding of the closing cylinder 211 to the driving end. This continues until the door panel 213 is tightly attached to the vacuum chamber shell 1, and the sealing strip on the door panel 213 and the vacuum chamber shell 1 is tightly attached to seal the vacuum chamber shell 1, thereby reducing wear when the vacuum chamber door is closed.

[0043] like Figure 2 and Figure 6 As shown, the airtightness observation component 3 includes a limit reset component 31 and a drive component 32; both the vacuum chamber shell 1 and the drive component 32 are connected to the limit reset component 31; the limit reset component 31 is used to observe the vacuum sealing state and limit the drive component 32; the drive component 32 is used to display the vacuum sealing state inside the vacuum chamber shell 1.

[0044] The limiting and resetting assembly 31 includes a spring 311, a limiting cylinder 312, and a sealing cylinder 313. The lower end of the limiting cylinder 312 is connected to and fixedly connected to the interior of the vacuum chamber shell 1. The lower end of the sealing cylinder 313 is fixedly connected to and communicates with the limiting cylinder 312. The lower end of the spring 311 is fixedly connected to the lower end of the inner sidewall of the sealing cylinder 313. The upper end of the spring 311 is connected to the driving assembly 32. The sealing cylinder 313 is made of transparent acrylic material, and the outer side of the sealing cylinder 313 is marked with scale.

[0045] The drive assembly 32 includes a slide rod 321 and a piston 322; the slide rod 321 is slidably connected to the inner wall of the limiting cylinder 312; a spring 311 is sleeved on the outside of the slide rod 321, and the upper end of the spring 311 is fixedly connected to the upper end of the slide rod 321; the lower end of the piston 322 is fixedly connected to the slide rod 321; the inner side of the sealing cylinder 313 at the upper end of the piston 322 is filled with air.

[0046] In this invention, the operator activates the closing cylinder 211 and the opening cylinder 221 to close and seal the vacuum chamber shell 1. Simultaneously, a vacuum is drawn into the vacuum chamber shell 1 through the suction pipe connected to it. Because air fills the space above the piston 322 in the sealing cylinder 313, there is a pressure difference between the inner side of the sealing cylinder 313 above the piston 322 and the inner side of the sealing cylinder 313 below the piston 322. Under the action of the pressure difference, the piston 322 drives the sliding rod 321 to slide downward. After the vacuum is drawn, the position of the piston 322 is fixed. The operator can then observe the sealing performance of the vacuum chamber shell 1 by observing the position of the piston 322 in the sealing cylinder 313. If the position of the piston 322 moves, the sealing performance is faulty, and the machine needs to be stopped for inspection.

[0047] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A vacuum chamber sealing apparatus comprising a vacuum chamber housing (1), characterized in that: It also includes a door sealing mechanism (2) and a gas tightness observation assembly (3); The vacuum chamber shell (1) is provided with a door sealing mechanism (2) for sealing the vacuum chamber shell (1); two sets of door sealing mechanisms (2) are symmetrically arranged at the front and rear ends of the vacuum chamber shell (1); The vacuum chamber shell (1) is provided with a gas tightness observation assembly (3) for observing the vacuum chamber sealing performance. The door sealing mechanism (2) includes a door closing assembly (21) and a door sealing assembly (22); the door closing assembly (21) and the door sealing assembly (22) are connected with the vacuum chamber shell (1); the door closing assembly (21) is connected with the door sealing assembly (22); the door closing assembly (21) is used for closing the door of the vacuum chamber shell (1); the door sealing assembly (22) is used for sealing the door closing assembly (21).

2. The vacuum chamber sealing apparatus of claim 1, wherein, The door closing assembly (21) includes a door closing driving assembly, a door plate (213) and a limiting sliding assembly; the vacuum chamber shell (1) and the limiting sliding assembly are connected with the door closing driving assembly; the limiting sliding assembly and the door sealing assembly (22) are connected with the door plate (213); the door plate (213) and the vacuum chamber shell (1) are both fixedly installed with sealing strips on the side close to each other.

3. The vacuum chamber sealing apparatus of claim 2, wherein, The door closing driving assembly includes a door closing cylinder (211) and a support frame (212); the lower end of the support frame (212) is fixedly connected with the vacuum chamber shell (1); the door closing cylinder (211) is fixedly connected with the support frame (212), and the driving end of the door closing cylinder (211) is connected with the limiting sliding assembly.

4. The vacuum chamber sealing apparatus of claim 3, wherein, The door sealing assembly (22) includes a door cylinder (221) and a box door limiting assembly; four door cylinders (221) are symmetrically arranged left and right, and the door cylinders (221) on the same side are arranged up and down; the door cylinder (221) is fixedly connected with the outer side wall of the vacuum chamber shell (1), and the driving end of the door cylinder (221) is connected with the box door limiting assembly.

5. The vacuum chamber sealing apparatus of claim 4, wherein, The box door limiting assembly includes a limiting frame (222); two limiting frames (222) are symmetrically arranged left and right, the driving ends of the two door cylinders (221) at the left and right ends of the vacuum chamber shell (1) are fixedly connected with the limiting frames (222) at the adjacent ends, and a limiting sliding groove (223) is formed in the limiting frame (222); the left and right ends of the door plate (213) are limitingly and slidably connected with the two limiting frames (222) through the limiting sliding grooves (223).

6. The vacuum chamber sealing apparatus of claim 5, wherein, The gas tightness observation assembly (3) includes a limiting reset assembly (31) and a driving assembly (32); the vacuum chamber shell (1) and the driving assembly (32) are connected with the limiting reset assembly (31); the limiting reset assembly (31) is used for observing the vacuum sealing state and limiting the driving assembly (32); the driving assembly (32) is used for displaying the vacuum sealing state inside the vacuum chamber shell (1).

7. The vacuum chamber sealing apparatus of claim 6, wherein, The limiting reset assembly (31) includes a spring (311), a limiting cylinder (312) and a sealing cylinder (313); the lower end of the limiting cylinder (312) is in communication with the inside of the vacuum chamber shell (1) and is fixedly connected, the lower end of the sealing cylinder (313) is fixedly connected and communicated with the limiting cylinder (312), and the lower end of the inner side wall of the sealing cylinder (313) is fixedly connected with the spring (311); the upper end of the spring (311) is connected with the driving assembly (32); the sealing cylinder (313) is made of transparent acrylic material, and the outer side of the sealing cylinder (313) is marked with a scale.

8. The vacuum chamber sealing apparatus of claim 7, wherein, The driving assembly (32) includes a sliding rod (321) and a piston (322); the sliding rod (321) is limitingly and slidingly connected with the inner side wall of the limiting cylinder (312); the spring (311) is sleeved outside the sliding rod (321), and the upper end of the spring (311) is fixedly connected with the upper end of the sliding rod (321); the lower end of the piston (322) is fixedly connected with the sliding rod (321); the inside of the sealing cylinder (313) of the upper end of the piston (322) is filled with air.

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