High efficiency vacuum air extraction system

Abstract

The utility model provides a kind of efficient vacuum air extraction system, including first suction pipeline, its upstream end is communicated with the cavity to be suctioned, downstream end is communicated with main pipeline of external discharge, first valve, rear stage pump and third valve are sequentially arranged from upstream to downstream;Second suction pipeline, its upstream end is communicated with the cavity to be suctioned, downstream end is communicated with main pipeline of external discharge, fourth valve and front stage pump are sequentially arranged from upstream to downstream;Third suction pipeline, one end is communicated to the pipe section between rear stage pump and third valve, the other end is communicated to the pipe section between fourth valve and front stage pump.The utility model has realized the double-path parallel exhaust of coarse extraction stage, greatly improved coarse extraction efficiency, solved the problem of low coarse extraction efficiency of prior art front stage pump, while, rear stage pump is started simultaneously and used as coarse extraction pump after coarse extraction stage, rear stage pump just completes acceleration and directly enters fine extraction stage when coarse extraction is completed, so as to save acceleration time, realize the parallel of coarse extraction and acceleration.

Description

Technical Field

[0001] This utility model relates to the field of vacuum pumping system technology, specifically to a high-efficiency vacuum pumping system. Background Technology

[0002] In existing vacuum pumping systems, especially high-vacuum pumping systems, they are typically divided into two parts: a backstage pump and a backstage pump. The backstage pump mainly includes dry vacuum pumps, oil rotary vane pumps, and slide valve pumps, while the backstage pump mainly includes turbomolecular pumps, oil diffusion pumps, and cold pumps. When the system is operating, the backstage pump must first pump the system pressure to a preset, lower pressure level (usually tens of Pascals; this stage is called the roughing stage) before starting the backstage pump or opening its main valve.

[0003] However, existing backing pumps generally suffer from insufficient pumping speed, resulting in low efficiency during the roughing stage and hindering high-efficiency production. Furthermore, without a main valve, the downstream pumps will need to be started and stopped frequently, and the time spent on acceleration and deceleration will further reduce overall operating efficiency. Utility Model Content

[0004] In view of the deficiencies in the existing technology, the purpose of this utility model is to provide a high-efficiency vacuum pumping system.

[0005] The high-efficiency vacuum pumping system provided by this utility model includes: The first suction pipeline has its upstream end connected to the cavity to be suctioned and its downstream end connected to the main discharge pipeline. The first suction pipeline is equipped with a first valve, a downstream pump and a third valve in sequence from upstream to downstream. The second suction pipeline has its upstream end connected to the cavity to be suctioned and its downstream end connected to the main discharge pipeline. The second suction pipeline is equipped with a fourth valve and a pre-pump from upstream to downstream. The third suction line has one end connected to the section between the downstream pump and the third valve in the first suction line, and the other end connected to the section between the fourth valve and the upstream pump in the second suction line.

[0006] The high-efficiency vacuum pumping system provided by this utility model includes: The first suction pipeline has its upstream end connected to the cavity to be suctioned and its downstream end connected to the main discharge pipeline. The first suction pipeline is equipped with a downstream pump and a third valve in sequence from upstream to downstream. The second suction pipeline has its upstream end connected to the cavity to be suctioned and its downstream end connected to the main discharge pipeline. The second suction pipeline is equipped with a fourth valve and a pre-pump from upstream to downstream. The third suction line has one end connected to the section between the downstream pump and the third valve in the first suction line, and the other end connected to the section between the fourth valve and the upstream pump in the second suction line.

[0007] Preferably, a second valve is provided on the third suction pipe.

[0008] Preferably, the backing pump includes any one of a dry pump, an oil vane pump, and a slide valve pump.

[0009] Preferably, the post-stage pump includes any one of a molecular pump, a diffusion pump, and a cold pump.

[0010] Preferably, it also includes a controller and a pressure sensor; The pressure sensor is installed inside the cavity to detect the air pressure inside the cavity; The controller is electrically connected to the pressure sensor, the third valve, and the fourth valve, and is configured to close the third valve and the fourth valve when the pressure sensor detects that the air pressure in the cavity has dropped to a preset threshold.

[0011] Preferably, the controller is electrically connected to the second valve and is further configured to: control the second valve to open when the pressure sensor detects that the air pressure in the cavity has dropped to a preset threshold.

[0012] Preferably, the first valve is located between the cavity and the air inlet of the subsequent pump.

[0013] Preferably, the third valve is located between the outlet of the downstream pump and the main exhaust pipe.

[0014] Preferably, the fourth valve is located between the cavity and the air inlet of the pre-pump.

[0015] Compared with the prior art, the present invention has the following beneficial effects: This invention achieves parallel exhaust during the coarse pumping stage by setting up a first suction pipe, a second suction pipe, and a third suction pipe, and arranging corresponding valves on each pipe. This significantly improves the coarse pumping efficiency and solves the problem of low coarse pumping efficiency caused by insufficient pumping speed of the existing fore-pump. At the same time, the post-pump starts simultaneously during the coarse pumping stage and is used as the coarse pump. When the coarse pumping is completed, the post-pump has just completed acceleration and directly enters the fine pumping stage, thus saving acceleration time and realizing the parallel operation of coarse pumping and acceleration. Attached Figure Description

[0016] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1This is a schematic diagram of the overall structure of this utility model.

[0017] The diagram shows: Detailed Implementation

[0018] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the present invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0019] This utility model discloses a high-efficiency vacuum pumping system. By setting up a first suction pipe, a second suction pipe, and a third suction pipe, and arranging corresponding valves on each pipe, it realizes dual-path parallel exhaust during the coarse pumping stage, which greatly improves the coarse pumping efficiency and solves the problem of low coarse pumping efficiency caused by insufficient pumping speed of the existing back pump. At the same time, the back pump starts simultaneously during the coarse pumping stage and is used as the coarse pumping pump. When the coarse pumping is completed, the back pump has just completed acceleration and directly enters the fine pumping stage, thereby saving acceleration time and realizing the parallel operation of coarse pumping and acceleration.

[0020] According to the high-efficiency vacuum pumping system provided by this utility model, such as Figure 1 As shown, it includes a suction chamber 1, an external discharge main pipe 6, and multiple suction pipes connecting the two.

[0021] The multi-channel suction pipeline includes two gas paths. The upstream end of the first suction pipeline is connected to the suction chamber 1, and the downstream end is connected to the main discharge pipeline 6. From upstream to downstream, the first suction pipeline is equipped with a first valve 2, a downstream pump 3, and a third valve 5. The upstream end of the second suction pipeline is connected to the suction chamber 1, and the downstream end is connected to the main discharge pipeline 6. From upstream to downstream, the second suction pipeline is equipped with a fourth valve 8 and a upstream pump 7. In addition, a third suction pipeline is provided. One end of the third suction pipeline is connected to the section between the downstream pump 3 and the third valve 5 in the first suction pipeline, and the other end is connected to the section between the fourth valve 8 and the upstream pump 7 in the second suction pipeline. In a preferred embodiment, the third suction pipeline is equipped with a second valve 4.

[0022] The specific positional relationships of the above components are as follows: First valve 2 is located between the suction chamber 1 and the air inlet of the downstream pump 3. Third valve 5 is located between the air outlet of the downstream pump 3 and the main exhaust pipe 6. Fourth valve 8 is located between the suction chamber 1 and the air inlet of the upstream pump 7.

[0023] In a preferred embodiment, the backing pump 7 can be any one of a dry pump, an oil rotary vane pump, and a slide valve pump. When the vacuum requirement of the suction chamber 1 is not very high (e.g., 100 Pa to 100 Pa), - (Within the range of ³Pa), the forestage pump 7 can be a conventional roughing pump as described above, and the post-stage pump 3 can achieve the target vacuum level with only a slight effort. When a higher target vacuum level is required (e.g., 10 Pa), - ³Pa to 10 -7 When the pressure is 10 Pa, the backing pump 7 is preferably a high-vacuum scroll dry pump, such as the Edwards EX500 high-vacuum scroll dry pump or the high-vacuum magnetic levitation scroll dry pump from Shanghai Zeo Electromechanical Technology Co., Ltd. The ultimate pressure of this type of pump can reach 10 Pa. - ³Pa to 10 -4 Pa is ideal as a backing pump for high vacuum and ultra-high vacuum equipment.

[0024] In a preferred embodiment, the post-stage pump 3 can be any one of a molecular pump, a diffusion pump, and a cold pump. As a preferred option, the post-stage pump 3 uses a fusion pump from Shanghai Zeo Electromechanical Technology Co., Ltd., which combines roughing and fine pumping functions. When the chamber pressure is high, it acts as a roughing pump, directly discharging to the atmosphere; when the chamber pressure is low, it acts as a molecular pump for fine pumping. The specific structure of the fusion pump can be found in the high compression ratio and high pumping speed compound multi-compression mechanism vacuum pump disclosed in patent document CN120140176B.

[0025] To achieve automatic control, the system preferably also includes a controller and a pressure sensor. The pressure sensor is installed inside the suction chamber 1 to detect the air pressure inside the chamber 1 in real time. The controller is electrically connected to the pressure sensor, the third valve 5, the fourth valve 8, and the second valve 4, respectively.

[0026] When evacuation begins, valves 2 (first), 5 (third), and 8 (fourth) open. Valve 4 can be opened or closed depending on the actual operating conditions (it is generally set to closed to prevent cross-contamination). The pre-pump 7 and post-pump 3 start simultaneously, forcing the gas to exit through two paths to the main exhaust pipe 6: the first path is the first suction line, i.e., valve 2 → post-pump 3 → valve 5 → main exhaust pipe 6; the second path is the second suction line, i.e., valve 8 → pre-pump 7 → main exhaust pipe 6. During this stage, post-pump 3 is used as a roughing pump (low vacuum pump) during acceleration.

[0027] When the pressure sensor detects that the gas pressure inside the suction chamber 1 has dropped to a preset threshold (e.g., kilopascals, hundreds of pallas, or lower), the controller outputs a control signal, simultaneously closing the third valve 5 and the fourth valve 8, while opening the second valve 4. At this point, the gas path switches to: first valve 2 → post-pump 3 → second valve 4 → pre-pump 7 → main exhaust pipe 6. At this time, the post-pump 3 has completed acceleration and is being used as a molecular pump (high vacuum pump).

[0028] Through the aforementioned valve linkage switching, the system achieves automatic conversion from coarse pumping mode to fine pumping mode. The dual-path parallel exhaust during the coarse pumping stage significantly improves the efficiency of coarse pumping. At the same time, the acceleration process of the downstream pump 3 runs parallel to the coarse pumping process. When the coarse pumping is completed, the downstream pump 3 has just completed its acceleration and directly enters the fine pumping stage, thus saving the time of separate acceleration.

[0029] In other embodiments of this utility model, the first valve 2 can be omitted to save hardware costs. In this case, the subsequent pump 3 needs to be started and stopped frequently according to process requirements. However, it should be noted that after omitting the first valve 2, the acceleration and deceleration time of the subsequent pump 3 will be included in the overall pumping cycle, and the system efficiency will be reduced. However, it still has practical value in application scenarios with limited costs.

[0030] Furthermore, the type of backing pump 7 can be flexibly configured according to the target vacuum level of the cavity 1 to be pumped. When the vacuum requirement is not high, the backing pump 7 can be a dry pump, an oil rotary vane pump, a slide valve pump, or a conventional scroll dry pump; when the vacuum requirement is high, the backing pump 7 can be a high-vacuum scroll dry pump. The power pump 3 is preferably a fusion pump to fully utilize its advantages of having both low and high vacuum characteristics.

[0031] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0032] The specific embodiments of this utility model have been described above. It should be understood that this utility model is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the substantive content of this utility model. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A high-efficiency vacuum pumping system, characterized in that, include: The first suction pipeline has its upstream end connected to the cavity to be suctioned (1) and its downstream end connected to the main discharge pipeline (6). The first suction pipeline is equipped with a downstream pump (3) and a third valve (5) from upstream to downstream. The second suction pipeline has its upstream end connected to the cavity to be suctioned (1) and its downstream end connected to the main discharge pipeline (6). The second suction pipeline is equipped with a fourth valve (8) and a front pump (7) from upstream to downstream. The third suction pipeline has one end connected to the section between the downstream pump (3) and the third valve (5) in the first suction pipeline, and the other end connected to the section between the fourth valve (8) and the upstream pump (7) in the second suction pipeline.

2. The high-efficiency vacuum pumping system according to claim 1, characterized in that, A first valve (2) is also provided upstream of the downstream pump (3).

3. The high-efficiency vacuum pumping system according to claim 1 or 2, characterized in that, A second valve (4) is installed on the third suction pipe.

4. The high-efficiency vacuum pumping system according to claim 1 or 2, characterized in that, The fore-pump (7) includes any one of a dry pump, an oil vane pump, and a slide valve pump.

5. The high-efficiency vacuum pumping system according to claim 1 or 2, characterized in that, The post-stage pump (3) includes any one of a molecular pump, a diffusion pump, and a cold pump.

6. The high-efficiency vacuum pumping system according to claim 3, characterized in that, It also includes a controller and a pressure sensor; The pressure sensor is installed inside the cavity (1) to detect the air pressure inside the cavity (1); The controller is electrically connected to the pressure sensor, the third valve (5) and the fourth valve (8) respectively, and is configured to control the third valve (5) and the fourth valve (8) to close when the pressure sensor detects that the air pressure in the cavity (1) drops to a preset threshold.

7. The high-efficiency vacuum pumping system according to claim 6, characterized in that, The controller is electrically connected to the second valve (4) and is also configured to control the second valve (4) to open when the pressure sensor detects that the air pressure in the cavity (1) drops to a preset threshold.

8. The high-efficiency vacuum pumping system according to claim 2, characterized in that, The first valve (2) is located between the cavity (1) and the air inlet of the downstream pump (3).

9. The high-efficiency vacuum pumping system according to claim 1 or 2, characterized in that, The third valve (5) is located between the outlet of the downstream pump (3) and the main exhaust pipe (6).

10. The high-efficiency vacuum pumping system according to claim 1 or 2, characterized in that, The fourth valve (8) is located between the cavity (1) and the air inlet of the pre-pump (7).

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