A diaphragm pump system

Abstract

The utility model discloses a diaphragm pump system, diaphragm pump system includes diaphragm pump and with diaphragm pump connection's pump control module, and pump control module includes main control gas flow channel, main control valve unit, auxiliary control gas flow channel and auxiliary control valve unit, the diaphragm pump system of the utility model is provided with two sets of gas control assembly, and main control gas flow channel connects drive gas source and gas cavity, under the condition that main control valve unit opens, gas is guided to gas cavity or exports gas from gas cavity, and auxiliary control gas flow channel communicates with main control gas flow channel, can borrow part main control gas flow channel under the condition that main control valve unit does not open, auxiliary control valve unit opens, gas is guided to gas cavity or exports gas from gas cavity, set up like this, and main control valve unit and auxiliary control valve unit can control the deformation direction of diaphragm, and main control valve unit is mainly used under the normal working condition of diaphragm pump, and auxiliary control valve unit and auxiliary control gas flow channel can be used as spare or under specific circumstances.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a diaphragm pump system. Background Technology

[0002] In the chemical coating process of semiconductor manufacturing equipment, in order to coat the photoresist solution and other chemicals onto the semiconductor wafer in a predetermined amount each time, a diaphragm pump is used to draw the chemical solution contained in the chemical solution tank and coat the semiconductor wafer in a predetermined amount each time. During the wafer coating process, the photoresist needs to be controlled to maintain a stable flow rate and the coating amount within ±0.01ml. Therefore, a high-precision pneumatic coating pump is required. The core structure of the pneumatic coating pump consists of a diaphragm-partitioned chamber. One side of the diaphragm is a liquid chamber that serves as the pump chamber, and the other side is a gas chamber that serves as the working chamber. The gas pressure drives the liquid to eject the photoresist. The stability of the photoresist ejection speed and the repeatability of the coating mainly rely on the pressure stability of the gas chamber.

[0003] In existing technology, a pneumatic adhesive pump provides positive pressure for air intake or negative pressure for air extraction into its gas chamber. A first solenoid valve and a second solenoid valve are respectively installed on the gas flow channel for opening and closing control of air intake or extraction, thereby achieving positive and negative pressure control of the gas chamber of the pneumatic adhesive pump. This system works in conjunction with a diaphragm pump to form a complete diaphragm pump system. Specifically, when the diaphragm pump dispenses adhesive, it needs to provide positive pressure to the gas chamber. The first solenoid valve opens, and the second solenoid valve closes. The positive pressure air source fills the gas flow channel, driving the gas into the gas chamber and compressing the diaphragm. The diaphragm deforms under pressure, reducing the volume of the liquid chamber to expel the photoresist. When the diaphragm pump draws in adhesive, it needs to provide negative pressure to the gas chamber. The first solenoid valve closes, and the second solenoid valve opens. The negative pressure air source extracts air from the gas flow channel, expelling the gas from the gas chamber. The diaphragm deforms under pressure, expanding the volume of the liquid chamber to draw in the photoresist.

[0004] However, in actual use, it has been found that the reliability and accuracy stability of the diaphragm pump system can become poor. For example, when the diaphragm pump is first used, it provides negative pressure to the gas chamber to expand the volume of the liquid chamber, and the liquid chamber draws in photoresist until it is full. Afterwards, even though it does not provide positive pressure to the gas chamber to reduce the volume of the pump chamber, photoresist is already being discharged from the discharge line connected to the liquid outlet of the diaphragm pump, which seriously affects the control of the discharge accuracy.

[0005] Therefore, the diaphragm pump system needs to be optimized to solve the problem of accidental dispensing of adhesive that is prone to occur in the early stages of use of existing diaphragm pumps. Utility Model Content

[0006] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a diaphragm pump system that solves the problem of accidental dispensing of glue in the early stage of use of existing diaphragm pumps.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A diaphragm pump system includes a diaphragm pump and a pump control module connected to the diaphragm pump. The diaphragm pump includes a diaphragm and a liquid chamber and a gas chamber separated by the diaphragm. The pump control module is used to control the entry or exit of working gas into the gas chamber to control the deformation direction of the diaphragm to discharge or draw liquid.

[0009] The pump control module includes a main control gas channel, a main control valve unit, an auxiliary control gas channel, and an auxiliary control valve unit. One end of the main control gas channel is connected to the driving gas source, and the other end is connected to the gas chamber. The main control valve unit is located in the middle of the main control gas channel and the main control gas channel is connected to the main control valve unit so as to connect the gas chamber and the driving gas source in an openable and closable manner.

[0010] The auxiliary control gas flow channel is located on the main control gas flow channel between the main control valve unit and the gas chamber. The auxiliary control gas flow channel is connected to the main control gas flow channel and to the auxiliary control valve unit, so as to connect the gas chamber and the driving gas source in an openable and closable manner.

[0011] This utility model discloses a diaphragm pump system with two sets of gas control components: a main control gas channel and a main control valve unit, and an auxiliary control gas channel and an auxiliary control valve unit. The main control gas channel connects the drive gas source and the gas chamber. When the main control valve unit is open and the auxiliary control valve unit is closed, gas is introduced into or extracted from the gas chamber. The auxiliary control gas channel is connected to the main control gas channel, and can utilize a portion of the main control gas channel (the main control gas channel between the main control valve unit and the gas chamber) to achieve communication between the auxiliary control gas channel and the gas chamber. Compared to the auxiliary control gas channel... The direct connection of the main and auxiliary control gas channels to the gas chamber allows the auxiliary control gas channel to operate independently. The auxiliary control gas channel can connect the two channels by borrowing part of the main control gas channel. When the main control valve unit is closed and the auxiliary control valve unit is open, gas can be introduced into or exported from the gas chamber. The parallel connection of the main and auxiliary control gas channels achieves "dedicated channels for dedicated use", avoiding the contradiction of designing a single gas channel and selecting multiple solenoid valves on the channel to achieve different functions at the same time, thus ensuring the reliability and safety of the pump control module. Since both the main control valve unit and the auxiliary control valve unit can control the deformation direction of the diaphragm, the main control valve unit is mainly used under normal operating conditions of the diaphragm pump. The auxiliary control valve unit and the auxiliary control gas channel can be used as backups or in specific situations. In specific situations, the diaphragm stress relief operation is performed before the diaphragm pump is used normally. The auxiliary control gas channel and the auxiliary control valve unit can be used to simulate the suction or discharge function of the diaphragm pump to remove diaphragm stress. The auxiliary control valve unit uses a valve with a larger diameter and faster response, and uses a higher gas source pressure. It is different from the valve used in the main control valve unit that is adapted to the normal operation of the diaphragm pump. This allows the auxiliary control gas channel and the auxiliary control valve unit to have the function of diaphragm stress relief. Before the diaphragm pump is used normally, the excess stress of the diaphragm is fully released to prevent the diaphragm from moving due to excess stress and accidentally discharging glue.

[0012] Preferably, the main control gas flow channel includes a first inlet flow channel, a first exhaust flow channel, and an outlet flow channel. The first inlet flow channel is used to connect with a positive pressure gas source, and the first exhaust flow channel is used to connect with a negative pressure gas source. The main control valve unit includes a first control valve and a second control valve. The first control valve can open and close to connect the first inlet flow channel and the outlet flow channel, and the second control valve can open and close to connect the outlet flow channel and the first exhaust flow channel. The outlet flow channel is connected to the gas chamber.

[0013] The auxiliary control gas flow channel includes a second inlet flow channel, a second exhaust flow channel, and a branch flow channel. The second inlet flow channel is used to connect with a positive pressure gas source, and the second exhaust flow channel is used to connect with a negative pressure gas source. The auxiliary control valve unit includes a third control valve and a fourth control valve. The third control valve can open and close to connect the branch flow channel and the second inlet flow channel, and the fourth control valve can open and close to connect the branch flow channel and the second exhaust flow channel. The branch flow channel is connected to the outlet flow channel.

[0014] The driving air source is divided into a positive pressure air source and a negative pressure air source. The positive pressure air source is used to provide positive pressure to make the gas flow towards the air chamber, and the negative pressure air source is used to provide negative pressure to make the gas in the air chamber flow outward. The first control valve and the second control valve control the opening and closing of the air intake and exhaust air paths, respectively. The third control valve and the fourth control valve control the opening and closing of the air intake and exhaust air paths, respectively, so as to realize independent control of air intake and exhaust and improve response efficiency.

[0015] Preferably, the airflow channel includes an airflow chamber and a ventilation channel, and the branch channel is directly connected to the airflow chamber or the ventilation channel;

[0016] A pressure sensor is connected to the air passage; and / or a flow sensor is connected to the air passage.

[0017] The pressure sensor can detect the pressure state in the gas chamber, and the flow sensor can record the amount of gas entering or leaving the gas chamber. With this setup, both the main control gas flow channel and the auxiliary control gas flow channel can determine the pressure state in the gas chamber and the degree of diaphragm deformation through the pressure sensor or flow sensor, thereby controlling the working state of the main control valve unit or the auxiliary control valve unit. The main control gas flow channel and the auxiliary control gas flow channel share the same set of detection structures, which simplifies the detection structure and helps to reduce costs.

[0018] Preferably, the auxiliary control valve unit is used to allow gas to flow into or out of the gas chamber through the auxiliary control gas flow channel, the gas outlet chamber, and the air passage, or to allow gas to flow into or out of the gas chamber through the auxiliary control gas flow channel and the air passage, causing the diaphragm to reciprocate and deform.

[0019] Furthermore, the gas pressure passing through the auxiliary control valve unit is greater than the gas pressure passing through the main control valve unit.

[0020] In this configuration, the auxiliary control valve unit and auxiliary control gas flow channel act as stress-relieving mechanisms for the diaphragm. Initially, before the diaphragm pump is used, they are connected to the gas chamber to simulate the diaphragm's adhesive intake and discharge processes. The gas pressure through the auxiliary control valve unit is greater than that through the main control valve unit, resulting in a greater force exerted by the gas on the diaphragm and more thorough deformation, which helps release residual stress. Specifically, during the adhesive intake simulation phase, the main control valve unit is closed, while the auxiliary control valve unit is open, driving the gas source to evacuate the gas chamber. This causes the diaphragm to deform towards the gas chamber, applying tensile and bending stresses towards the gas chamber side. During the adhesive discharge simulation phase, the main control valve unit is closed, while the auxiliary control valve unit is open, driving the gas source to inflate the gas chamber. This causes the diaphragm to deform towards the liquid chamber, applying thrust and bending stresses towards the liquid chamber side. This gentle but continuous periodic deformation is key to eliminating diaphragm stress, particularly in areas with uneven stress distribution within the diaphragm material. The diaphragm is "ironed" through repeated deformation, reducing the stress gradient and allowing it to adapt to the bending shape required for operation. This reduces internal friction and hysteresis losses caused by deformation in subsequent operations, effectively eliminating internal residual stress and stabilizing and optimizing the material properties of the diaphragm. The deformation of the diaphragm is completely related to the air intake or exhaust of the air chamber and is not affected by its own stress. This avoids the impact of the large rebound force of the diaphragm on the amount of adhesive discharged by the diaphragm pump, significantly improving the mechanical durability, deformation consistency, and long-term operational reliability and accuracy of the entire diaphragm pump system.

[0021] Preferably, the pump control module further includes a first mounting assembly and a second mounting assembly, wherein the main control valve unit and the first air intake channel, the first air extraction channel, and the air outlet chamber are located in the first mounting assembly, and the auxiliary control valve unit and the second air intake channel and the second air extraction channel are located in the second mounting assembly;

[0022] The diversion channel and the airflow channel are located within the second mounting assembly and are connected to each other. The airflow channel is connected to the air passage chamber through a hollow connector. Alternatively, the airflow channel is located within the second mounting assembly, and the diversion channel is partially located within the first mounting assembly and partially located within the second mounting assembly. The airflow channel and the portion of the diversion channel located within the second mounting assembly are both connected to the air passage chamber through connectors.

[0023] The pump control module is divided into a first mounting component and a second mounting component. The main control valve unit and most of the main control gas flow channel are located in the first mounting component, while the auxiliary control valve unit and most of the auxiliary control gas flow channel are located in the second mounting component. The first and second mounting components are modularized for easy separate management. They are detachably connected via connectors. The first mounting component becomes a standard part, which can communicate with the gas chamber without the need for a gas flow channel in some cases, enabling independent control of the diaphragm pump. The second mounting component becomes an adapter, which can be selectively connected to the first mounting component and the gas chamber as needed. For diaphragm pump systems that do not require stress relief or a backup control component, the second mounting component can be omitted without changing the structure of the first mounting component. This makes the pump control module more flexible and suitable for different application scenarios and requirements.

[0024] Preferably, the first mounting assembly further includes a pump control housing and a pump mounting plate that is sealed to the pump control housing, the first air inlet passage and the first air outlet passage are formed in the pump control housing, the air outlet chamber is formed between the pump control housing and the pump mounting plate, and the first control valve and the second control valve are mounted on the side of the pump mounting plate opposite to the pump control housing.

[0025] The second mounting assembly further includes a valve control housing, in which the second inlet air passage and the second exhaust air passage are formed. The diverter is connected to the exhaust chamber. The breaks of the diverter are located on opposite surfaces of the pump control housing and the valve control housing, and are sealed and connected by the connector. Part of the diverter is located inside the valve control housing, part is located inside the connector, and part is located inside the pump control housing.

[0026] The first mounting assembly is divided into a pump control housing and a pump mounting plate. The first inlet air passage and the first outlet air passage are directly machined in the pump control housing, which improves the airtightness of the flow passage. At the same time, the pump control housing and the pump mounting plate together form an air passage chamber. On the one hand, this greatly reduces the machining difficulty of the chamber, the machining method is flexible and efficient, the material selection is wide to adapt to different working conditions, the assembly is simple, the cost is low, and the maintenance and repair are easy. On the other hand, it eliminates external pipes and joints, greatly reduces the volume of the air passage, and makes the diaphragm pump assembly lighter and easier to carry and transport. The resulting air passages are all relatively flat chamber structures. The flat chambers can form a reasonable volume-to-surface area ratio in a limited space, avoiding response delay caused by excessive volume or insufficient buffering caused by insufficient volume.

[0027] The second mounting assembly includes a valve control housing, in which a second inlet gas channel, a second outlet gas channel, and a partial branch channel are directly machined, improving the airtightness of the flow channels. Then, another part of the branch channel is machined in the pump control housing. The part of the branch channel located in the pump control housing is directly connected to the gas passage chamber without the need for additional connecting pipes, further improving the airtightness of the flow channels. Then, the two parts of the branch channel are connected by a connector, realizing the function of connecting the branch channel to the gas passage chamber to connect the second inlet gas channel and the second outlet gas channel to the gas passage chamber. The structure is simple, requires fewer connectors, and can ensure the sealing performance of the auxiliary control gas flow channel and its connection with the main control gas flow channel.

[0028] Preferably, the flow channel includes a first flow channel located in the pump control housing, a second flow channel located in the valve control housing, a third flow channel located in the connector, and a fourth flow channel connecting the first flow channel and the air passage chamber. The fourth flow channel is located in the pump control housing and extends along the thickness direction of the pump control housing. The inner diameter of the second flow channel tends to increase towards the direction of the first flow channel.

[0029] With this configuration, the leakage point of the diversion channel is only at the connection between the connector and the pump control housing and valve control housing. Strengthening the seal at this point can ensure the sealing of the entire diversion channel. The structure is simple, and the processing and sealing methods are relatively convenient, which helps to reduce the production and maintenance costs of the entire pump control module. The second channel is close to the second inlet channel and the second outlet channel. Its near-conical structure can meet the flow requirements of large flow rates of gas. At the same time, it can cooperate with the outlet channel to stabilize the gas, thereby improving the stability of the gas chamber filling or evacuation, and stabilizing the diaphragm deformation and relieving stress.

[0030] Preferably, the second air intake passage includes a first groove formed in the valve control housing and a first connecting channel for connecting the first groove and the driving air source, the first groove being connected to the inlet of the third control valve, and the outlet of the third control valve being connected to the diversion passage by a second connecting channel;

[0031] The second air extraction channel includes a second groove formed in the valve control housing and a third connecting channel for connecting the second groove and the driving air source. The second groove is connected to the outlet of the fourth control valve, and the inlet of the fourth control valve is connected to the diversion channel by a fourth connecting channel.

[0032] The third and fourth control valves are directly fixed to the valve control housing. The inlet of the third control valve is sealed and connected to the first groove, and the outlet of the third control valve is sealed and connected to the second connecting channel. Thus, the second intake channel can be connected to the branch channel through the third control valve to achieve air intake. Similarly, the inlet of the fourth control valve is sealed and connected to the fourth connecting channel, and the outlet of the fourth control valve is sealed and connected to the second groove. Thus, the second exhaust channel can be connected to the branch channel through the fourth control valve to achieve air intake. Since the auxiliary control gas flow channel and the auxiliary control valve unit mainly serve as backup control components and stress relief components, and are connected to the gas flow chamber of the main control gas flow channel, the buffering effect of the gas flow chamber itself is sufficient to meet the usage requirements. The structure of the auxiliary control gas flow channel is relatively simple, and most of it is integrally formed in the valve control housing, which has high sealing performance and structural strength. The auxiliary control valve unit is directly sealed and connected to the valve control housing, which is simple in structure and reliable in sealing.

[0033] Preferably, the pump mounting plate has an air vent groove on the side facing the pump control housing, and the pump control housing has a shaped groove on the side facing the pump mounting plate. A shaped seal is installed in the shaped groove, and the shaped seal surrounds the outer circumference of the air vent groove so that the air vent groove and the side of the pump control housing facing the pump mounting plate form the air vent cavity.

[0034] The air venting groove includes a first groove extending along the length direction of the pump mounting plate and a second groove extending along the height direction of the pump mounting plate. The pump mounting plate has a sensor flow channel extending along the thickness direction of the pump mounting plate at the end corresponding to the second groove. The pressure sensor is provided on the side of the pump mounting plate away from the pump control housing, and the pressure sensor corresponds to the sensor flow channel.

[0035] The pump control housing and mounting plate together form the air passage chamber. Therefore, the seal between the pump control housing and the mounting plate is crucial to the sealing performance of the air passage chamber, and there are many places that need to be sealed. Therefore, setting an integrated irregular seal can not only improve the installation efficiency of the seal, but also avoid the risk of leakage caused by the individual seal lifting during installation, thus improving the sealing effect of the air passage chamber. At the same time, the irregular groove plays a positioning role for the irregular seal, preventing the irregular seal from shifting during installation and causing sealing failure.

[0036] The pressure sensor is connected to the air passage chamber, which is connected to the air chamber through the air passage. Therefore, the pressure sensor can detect the pressure value of the air chamber through the air passage chamber, and the pressure sensor can control the start and stop of the first control valve, the second control valve, the third control valve and the fourth control valve based on the detected pressure value.

[0037] In summary, compared with the prior art, the present invention has at least the following beneficial effects:

[0038] This utility model discloses a diaphragm pump system with two sets of gas control components: a main control gas channel and a main control valve unit, and an auxiliary control gas channel and an auxiliary control valve unit. The main control gas channel connects the drive gas source and the gas chamber. When the main control valve unit is open, it guides gas into the gas chamber or vents gas from the gas chamber. The auxiliary control gas channel is connected to the main control gas channel and can utilize part of the main control gas channel (mainly the main control gas channel between the main control valve unit and the gas chamber) to connect the drive gas source and the gas chamber. When the main control valve unit is closed and the auxiliary control valve unit is open, it guides gas into the gas chamber or vents gas from the gas chamber. With this configuration, both the main control valve unit and the auxiliary control valve unit can control the deformation direction of the diaphragm. The main control valve unit is mainly used under normal operating conditions of the diaphragm pump, while the auxiliary control valve unit and the auxiliary control gas channel can be used under specific conditions. Attached Figure Description

[0039] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the frame of the diaphragm pump system according to an embodiment of the present invention;

[0041] Figure 2 This is a schematic diagram of the pump control module according to an embodiment of the present invention;

[0042] Figure 3 This is a cross-sectional schematic diagram of the pump control module according to an embodiment of the present utility model;

[0043] Figure 4 This is a cross-sectional schematic diagram of the pump control module at the flow divider in an embodiment of the present invention;

[0044] Figure 5 This is a cross-sectional view of the pump control module at the diversion channel from another angle, according to an embodiment of the present invention.

[0045] Figure 6 This is a schematic diagram of the pump control housing according to an embodiment of the present invention;

[0046] Figure 7 This is a schematic diagram of the pump mounting plate according to an embodiment of the present utility model;

[0047] Figure 8 This is a schematic diagram of the valve control housing according to an embodiment of the present invention;

[0048] Figure 9This is a schematic diagram of the valve mounting plate according to an embodiment of the present utility model.

[0049] Explanation of reference numerals in the attached figures

[0050] 10. Diaphragm pump; 11. Diaphragm; 12. Gas chamber; 13. Liquid chamber;

[0051] 20. Main control gas flow channel; 21. First inlet gas flow channel; 22. First exhaust gas flow channel; 23. Outlet gas flow channel; 231. Outlet gas chamber; 232. Ventilation gas flow channel; 233. Outlet gas groove; 234. First groove; 235. Second groove;

[0052] 30. Auxiliary control gas flow channel; 31. Second inlet flow channel; 311. First groove; 312. First connecting channel; 32. Second exhaust flow channel; 321. Second groove; 322. Third connecting channel; 33. Flow branch channel; 331. First flow channel; 332. Second flow channel; 333. Third flow channel; 334. Fourth flow channel; 335. Second connecting channel; 336. Fourth connecting channel;

[0053] 40. Main control valve unit; 41. First control valve; 42. Second control valve;

[0054] 50. Auxiliary control valve unit; 51. Third control valve; 52. Fourth control valve;

[0055] 60. First mounting component; 61. First mounting groove; 62. Third mounting groove; 63. Pump control housing; 631. Irregular groove; 632. Irregular seal; 64. Pump mounting plate;

[0056] 70. Second mounting assembly; 71. Second mounting groove; 72. Fourth mounting groove; 73. Valve control housing; 731. Vent groove; 74. Valve mounting plate; 741. Sealing groove; 742. Detection channel;

[0057] 80. First connecting component; 81. First hollow flow channel;

[0058] 90. Second connector. Detailed Implementation

[0059] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0060] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0061] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0062] During actual use of the diaphragm pump, the inventor discovered that when the diaphragm pump is first used, negative pressure is provided to the gas chamber to expand the volume of the liquid chamber, and the liquid chamber draws in photoresist until it is full. Subsequently, even though positive pressure is not provided to the gas chamber to reduce the pump chamber volume for photoresist discharge, photoresist is already being discharged from the discharge line connected to the liquid outlet of the diaphragm pump, which seriously affects the control of the discharge accuracy. The specific reasons are as follows.

[0063] During the research and development process, the inventors discovered that the cause of the accidental glue discharge lies in the stress present in the newly used diaphragm. The diaphragm is made of an elastic material, such as fluoropolymer, specifically PTFE. It has a thin sheet structure and a certain degree of elasticity. Possible sources of stress include internal inhomogeneities generated during material mixing, molding (e.g., compression molding, injection molding), and vulcanization / curing; the diaphragm's tendency to maintain a fixed posture for extended periods during packaging and long-term storage; and the pre-tightening force applied when installing the diaphragm pump. Due to the inherent stress of the diaphragm, taking the initial glue-drawing stage of the pump as an example, the gas in the gas chamber is expelled under negative pressure, causing the central part of the diaphragm to bend and deform towards the gas chamber. If the gas pressure in the gas chamber is unstable or lower than the predetermined pressure of the diaphragm, the force exerted by the gas on the diaphragm is less than the diaphragm's own stress. Consequently, the diaphragm will rebound towards the liquid chamber, reducing the volume of the liquid chamber and causing accidental glue discharge, rather than relying on the positive pressure of the gas chamber to deform the diaphragm towards the gas chamber and discharge glue.

[0064] Therefore, in order to solve this problem, such as Figure 1As shown, this utility model embodiment discloses a diaphragm pump system, including a diaphragm pump 10 and a pump control module connected to the diaphragm pump 10. The diaphragm pump 10 includes a diaphragm 11 and a liquid chamber 13 and a gas chamber 12 separated by the diaphragm 11. The pump control module is used to control the entry or exit of the working gas into or out of the gas chamber 12 to control the deformation direction of the diaphragm 11 to discharge or draw liquid. The specific structure of the diaphragm pump 10 is prior art. The working gas can be nitrogen or compressed air, etc., which will not be described in detail here.

[0065] The pump control module of this embodiment includes two sets of gas control components: one set is a main control gas channel 20 and a main control valve unit 40, and the other set is an auxiliary control gas channel 30 and an auxiliary control valve unit 50. One end of the main control gas channel 20 is connected to the driving gas source, and the other end is connected to the gas chamber 12. The main control valve unit 40 is located in the middle of the main control gas channel 20 and the main control gas channel 20 is connected to the main control valve unit 40, so as to connect the gas chamber 12 and the driving gas source in an openable and closable manner. When the main control valve unit 40 is open, the working gas is guided to the gas chamber 12 or the gas is discharged from the gas chamber 12. The auxiliary control gas flow channel 30 is located on the main control gas flow channel 20 between the main control valve unit 40 and the gas chamber 12. The auxiliary control gas flow channel 30 is connected to the main control gas flow channel 20 and to the auxiliary control valve unit 50, thus connecting the gas chamber 12 and the driving gas source in an openable and closable manner. When the main control valve unit 40 is not open and the auxiliary control valve unit 50 is open, the auxiliary control gas flow channel 30 can utilize part of the main control gas flow channel 20 (mainly the main control gas flow channel 20 between the main control valve unit 40 and the gas chamber 12) to connect the driving gas source and the gas chamber 12, guiding the working gas to the gas chamber 12 or exporting gas from the gas chamber 12. With this configuration, both the main control valve unit 40 and the auxiliary control valve unit 50 can control the deformation direction of the diaphragm 11. Therefore, the main control valve unit 40 is mainly used during the normal operation of the diaphragm pump 10 in suction or discharge, while the auxiliary control valve unit 50 and the auxiliary control gas flow channel 30 can be used as backups or in specific situations.

[0066] Specific situations include the stress relief step of the diaphragm 11 during the initial use of the diaphragm pump 10 and before its formal operation. The pump control module includes two sets of gas control components. The reason for setting up the auxiliary control valve unit 50 and auxiliary control gas channel 30 independently outside the main control valve unit 40 and the main control gas channel 20 is that the main control valve unit 40 and the auxiliary control valve unit 50 have different uses, different control accuracies, and different selection requirements. This is partly because the stress on the diaphragm 11 exceeding the predetermined gas pressure during the operation of the diaphragm pump 10 needs to be removed. On the other hand, during stress relief of the diaphragm 11, the solenoid valve needs to open and close frequently to achieve the predetermined gas pressure in the gas chamber 12. Furthermore, during the reciprocating deformation of the diaphragm 11, whether for liquid intake or discharge, the diaphragm 11 must be almost completely close to the bottom side of the pump housing recess of the diaphragm pump 10 to achieve the predetermined gas pressure in the gas chamber 12 and allow the diaphragm 11 to fully deform. However, during normal operation of the diaphragm pump 10, it is not required that the diaphragm 11 be almost completely close to the bottom side of the diaphragm pump 10. The bottom side of the pump housing recess is attached. For example, when the diaphragm pump 10 discharges liquid, it does not squeeze out almost all the liquid in the liquid chamber 13 at once. Instead, it squeezes out a predetermined amount of liquid each time and then fills it up again. The diaphragm 11 deforms a certain distance toward the liquid chamber 13. At this time, the diaphragm 11 is a certain length away from the bottom side of the pump housing recess of the diaphragm pump 10. Therefore, based on the above two aspects, the predetermined pressure of the working gas through the auxiliary control valve unit 50 is greater than the predetermined pressure of the working gas through the main control valve unit 40. Taking positive pressure dispensing as an example, that is, the predetermined positive pressure when the diaphragm 11 is relieved of stress is greater than the predetermined positive pressure when the diaphragm pump 10 discharges liquid. If a higher air pressure is used in conjunction with the main control valve unit 40 and the main control gas flow channel 20 to relieve stress on the diaphragm 11 before the diaphragm pump 10 is in normal use, the higher air pressure will not only damage the main control valve unit 40, but the premature and frequent high-frequency opening and closing of the main control valve unit 40 will also shorten its service life and affect the normal use of the main control valve unit 40. If the air pressure used during normal operation is used in conjunction with the main control valve unit 40 and the main control gas flow channel 20 to relieve stress on the diaphragm 11, it will be difficult to effectively remove the additional stress on the diaphragm 11.

[0067] After the pump control module is assembled, it is difficult to replace it with a valve unit suitable for stress relief pressure, and the replacement cost is high. If a valve unit suitable for stress relief pressure is used directly, then in terms of control, one system needs to control the auxiliary control valve unit to execute two sets of control commands, which is prone to misoperation and affects the control accuracy of the diaphragm pump.

[0068] The auxiliary control valve unit 50 and the auxiliary control gas flow channel 30 are configured as stress relief mechanisms for the diaphragm 11. In the initial stage of use of the diaphragm pump 10 and before formal operation, they are connected to the gas chamber 12 to simulate the process of adhesive suction and discharge of the diaphragm 11. The gas pressure through the auxiliary control valve unit 50 is greater than the gas pressure through the main control valve unit 40, which makes the gas exert a greater force on the diaphragm 11, and the deformation of the diaphragm 11 is more complete, which is conducive to releasing the residual stress of the diaphragm 11. During the simulated glue suction stage, the main control valve unit 40 is closed, while the auxiliary control valve unit 50 is open, driving the air source to evacuate the air chamber 12. This causes the diaphragm 11 to deform towards the air chamber 12, and the working gas applies tensile and bending stress to the diaphragm 11 towards the air chamber 12. During the simulated glue dispensing stage, the main control valve unit 40 is closed, while the auxiliary control valve unit 50 is open, driving the air source to inflate the air chamber 12. This causes the diaphragm 11 to deform towards the liquid chamber 13, and the working gas applies thrust and bending stress to the diaphragm 11 towards the liquid chamber 13. This gentle but continuous periodic deformation is key to eliminating stress in the diaphragm 11. The internal stress distribution of the diaphragm 11 material... Uneven areas are "ironed out" through repeated deformation, reducing the stress gradient. This allows the diaphragm 11 to adapt to the bending shape required for normal operation, reducing internal friction and hysteresis losses caused by deformation in subsequent operations. It effectively eliminates internal residual stress, making the material properties of the diaphragm 11 more stable and optimized. The deformation of the diaphragm 11 is completely related to the air intake or exhaust of the air chamber 12 and is not affected by its own stress. This avoids the influence of the large rebound force of the diaphragm 11 on the amount of adhesive discharged by the diaphragm 11 pump, significantly improving the mechanical durability, deformation consistency, and long-term operational reliability and accuracy of the entire diaphragm pump system.

[0069] The driving air source is divided into a positive pressure air source and a negative pressure air source. The positive pressure air source provides positive pressure to make the working gas flow towards the air chamber 12, and the negative pressure air source provides negative pressure to make the working gas in the air chamber 12 be drawn outwards. Figure 1 , 3As shown in Figure 9, the main control gas flow channel 20 includes a first inlet flow channel 21, a first exhaust flow channel 22, and an outlet flow channel 23. The first inlet flow channel 21 is used to connect with a positive pressure gas source, and the first exhaust flow channel 22 is used to connect with a negative pressure gas source. The main control valve unit 40 includes a first control valve 41 and a second control valve 42. The first control valve 41 can open and close to connect the first inlet flow channel 21 and the outlet flow channel 23, and the second control valve 42 can open and close to connect the outlet flow channel 23 and the first exhaust flow channel 22. The outlet flow channel 23 is connected to the gas chamber 12. The auxiliary control gas flow channel 30 includes a second inlet flow channel 31, a second exhaust flow channel 32, and a branch flow channel 33. The second inlet flow channel 31 is used to connect with a positive pressure gas source, and the second exhaust flow channel 32 is used to connect with a negative pressure gas source. The auxiliary control valve unit 50 includes a third control valve 51 and a fourth control valve 52. The third control valve 51 can be opened and closed to connect the branch flow channel 33 and the second inlet flow channel 31, and the fourth control valve 52 can be opened and closed to connect the branch flow channel 33 and the second exhaust flow channel 32. The branch flow channel 33 is connected to the outflow channel 23.

[0070] The first control valve 41 and the second control valve 42 control the opening and closing of the air intake and exhaust paths of the main control gas flow channel 20, respectively. The third control valve 51 and the fourth control valve 52 control the opening and closing of the air intake and exhaust paths of the auxiliary control gas flow channel 30, respectively, so as to realize independent control of air intake and exhaust and improve response efficiency.

[0071] In some embodiments of stress relief applications of the diaphragm 11, the auxiliary control gas flow channel 30 is directly connected to the gas flow chamber 231 in the gas flow channel 23, and the auxiliary control valve unit 50 is used to allow the working gas to flow into or out of the gas chamber 12 through the auxiliary control gas flow channel 30 and the gas flow chamber 231, causing the diaphragm 11 to reciprocate and deform. In other embodiments, the auxiliary control gas flow channel 30 is connected to the air passage 232, and the auxiliary control valve unit 50 is used to allow the gas to flow into or out of the gas chamber 12 through the auxiliary control gas flow channel 30 and the air passage 232, causing the diaphragm 11 to reciprocate and deform.

[0072] Specifically, in some embodiments, the airflow channel 23 is a single channel that can be directly connected to the gas chamber 12 via a connector. The branch channel 33 of the auxiliary control gas flow channel 30 is directly connected to the airflow channel 23, thereby achieving communication with the gas. Compared to the branch channel 33 being directly connected to the gas chamber 12 of the diaphragm pump 10, the branch channel 33 utilizes part of the airflow channel 23, which not only reduces the size of the pump control module but also allows the auxiliary control gas flow channel 30 and the auxiliary control valve unit 50 to be detected and controlled by pressure sensors, flow sensors, etc.

[0073] Specifically, in some other embodiments, the airflow channel 23 includes an airflow chamber 231 and a ventilation channel 232. The airflow chamber 231 can stabilize the airflow, buffer pressure fluctuations, and reduce the impact on the air chamber 12. Compared with the original airflow pipeline, the airflow chamber 231 can force the airflow to diffuse and change its direction, thereby generating a turbulence effect, eliminating gas pressure fluctuations, suppressing pressure oscillations, achieving pressure equalization, and improving control stability. Especially for applications with high requirements for flow stability, it can reduce flow fluctuations caused by pulsation.

[0074] Since the airflow channel 23 includes two parts, the first control valve 41 is connected between the first inlet airflow channel 21 and the airflow chamber 231, and the second control valve 42 is connected between the first exhaust airflow channel 22 and the airflow chamber 231, the branch channel 33 is connected to the airflow chamber 231 or the ventilation airflow channel 232, which are both connected to the main control gas flow channel 20 between the main control valve unit 40 and the air chamber 12.

[0075] A detection structure can be connected to the air passage 23 or the air outlet 231. For example, a pressure sensor can be installed on the air outlet 231, and a flow sensor can be installed on the air passage 23 to determine the pressure state in the air chamber 12 and the degree of deformation of the diaphragm 11. The main control gas flow channel 20 and the auxiliary control gas flow channel 30 share the same set of detection structures, which simplifies the detection structure. Both can control the working state of the main control valve unit 40 or the auxiliary control valve unit 50, which helps to reduce costs. The auxiliary control valve unit 50 can be started before the diaphragm pump system is put into operation. The auxiliary control valve unit 50 introduces or extracts gas into the air chamber 12, causing the diaphragm 11 to deform repeatedly. This allows the diaphragm 11 to eliminate its own stress as much as possible, so as to avoid the influence of the large rebound force of the diaphragm 11 on the dispensing volume of the diaphragm 11 pump.

[0076] like Figure 2 and Figure 3 As shown, the pump control module also includes a first mounting assembly 60 and a second mounting assembly 70. The main control valve unit 40, the first inlet air passage 21, the first outlet air passage 22, and the outlet air chamber 231 are all located in the first mounting assembly 60. In some embodiments, the first mounting assembly 60 and its internal components can be directly connected to and control the gas flow in the air chamber 12, that is, the first mounting assembly 60 and its internal components become standard parts, realizing the function of independently controlling the diaphragm pump 10 to draw and discharge liquid.

[0077] Figure 3 In the diagram, the red line represents the auxiliary control gas flow channel 30, and the blue line represents the main control gas flow channel 20. Figure 3In the illustrated embodiment, the air passage 232 is located within the second mounting assembly 70. That is, most of the main control gas passage 20 is located in the first mounting assembly 60, and a small portion is located in the second mounting assembly 70. Other optional functional modules can be configured on the air passage 232 and communicate with the air chamber 231 and the air chamber 12 to improve detection capabilities or achieve other functions. With this configuration, the optional functional modules will not affect the control of the diaphragm pump 10 by the first mounting assembly 60 and its internal components, thus providing greater flexibility and versatility. The second mounting assembly 70 and its internal components become adapters, selectively connecting to the first mounting assembly 60 and the air chamber 12 as needed. For diaphragm pump systems that do not require optional functional modules, the second mounting assembly 70 can be omitted without altering the structure of the first mounting assembly 60, making the pump control module more flexible and suitable for different application scenarios and requirements.

[0078] In some embodiments, the auxiliary control valve unit 50, the second inlet air passage 31, and the second exhaust air passage 32 are located in the second mounting assembly 70. The branch passage 33 and the ventilation passage 232 are located in the second mounting assembly 70 and are connected. The ventilation passage 232 is connected to the air passage chamber 231 through a hollow connector. The branch passage 33 is directly connected to the ventilation passage 232. A flow sensor is connected to the ventilation passage 232. During stress relief, the flow sensor can detect the amount of gas flowing through it, determine the amount of gas in the air chamber 12 and the degree of deformation of the diaphragm 11, and thus determine whether the stress of the diaphragm 11 has been completely removed.

[0079] like Figure 3 In the illustrated embodiment, the air passage 232 is located within the second mounting assembly 70, and the branch passage 33 is partially located within the first mounting assembly 60 and partially within the second mounting assembly 70. Both the air passage 232 and the branch passage 33 located within the second mounting assembly 70 are connected to the air passage chamber 231 via hollow connectors. The branch passage 33 is directly connected to the air passage chamber 231. A pressure sensor is connected to the air passage chamber 231, and a flow sensor is connected to the air passage 232. The two detection structures can assist each other to verify the detection results and improve the detection accuracy. When the diaphragm 11 is stress-relieved, the pressure sensor and the flow sensor can detect the pressure state in the air chamber 12 and record the flow rate to determine the degree of deformation of the diaphragm 11, thereby determining whether the stress of the diaphragm 11 has been completely removed.

[0080] like Figure 4In the embodiment shown, the air passage 232 and the air passage 231 are connected by a first connector 80. Specifically, a first hollow passage 81 is provided in the first connector 80, which connects the air passage 232 and the air passage 231. The opposite surfaces of the first mounting component 60 and the second mounting component 70 are respectively provided with a first mounting groove 61 and a second mounting groove 71. The two sections of the first connector 80 are respectively sealed and inserted into the first mounting groove 61 and the second mounting groove 71. The flow channel 33 includes a first flow channel 331 located in the first mounting assembly 60 and a second flow channel 332 located in the second mounting assembly 70. The first flow channel 331 and the second flow channel 332 are connected by a second connector 90. The second connector 90 has a second hollow flow channel, which is the third flow channel 333 in the flow channel 33. The opposing surfaces of the first mounting assembly 60 and the second mounting assembly 70 are respectively provided with a third mounting groove 62 and a fourth mounting groove 72. The two ends of the second connector 90 are respectively sealed and inserted into the third mounting groove 62 and the fourth mounting groove 72. The leakage point of the flow channel 33 is only at the connection between the second connector 90 and the pump control housing 63 and the valve control housing 73. Strengthening the seal at this point can ensure the sealing performance of the entire flow channel 33. The structure is simple, and the processing and sealing methods are relatively convenient, which helps to reduce the production and maintenance costs of the entire pump control module. The flow channel 33 also includes a fourth flow channel 334 that connects the first flow channel 331 and the airflow channel 23. The fourth flow channel 334 is located in the pump control housing 63 and extends along the thickness direction of the pump control housing 63.

[0081] like Figure 5 As shown, the inner diameter of the second flow channel 332 tends to increase towards the direction of the first flow channel 331. The second flow channel 332 is relatively close to the second inlet flow channel 31 and the second exhaust flow channel 32. Its approximately conical structure can meet the flow requirements of large flow of gas, and at the same time can cooperate with the outflow channel 23 to stabilize the gas, so as to improve the stability of the gas chamber 12 for filling or exhausting, and make the diaphragm 11 deform stably and relieve stress.

[0082] like Figures 4 to 6As shown, the first mounting assembly 60 also includes a pump control housing 63 and a pump mounting plate 64 that is sealed to the pump control housing 63. A first air inlet channel 21 and a first air outlet channel 22 are formed in the pump control housing 63. An air outlet chamber 231 is formed between the pump control housing 63 and the pump mounting plate 64. A first control valve 41 and a second control valve 42 are mounted on the side of the pump mounting plate 64 that is away from the pump control housing 63. The first inlet air passage 21 and the first outlet air passage 22 are directly machined into the pump control housing 63, which improves the airtightness of the flow passage. At the same time, the pump control housing 63 and the pump mounting plate 64 together form the air passage chamber 231. On the one hand, it can greatly reduce the processing difficulty of the chamber, the processing method is flexible and efficient, the material selection is wide to adapt to different working conditions, the assembly is simple, the cost is low, and the maintenance and repair are easy. On the other hand, it eliminates external pipes and joints, greatly reduces the volume of the air passage, and makes the whole diaphragm 11 pump assembly lighter and easier to carry and transport. The resulting air passage 233 are all relatively flat chamber structures, which not only help gas diffusion and buffering, but the flat chamber can also form a reasonable volume to surface area ratio in a limited space, avoiding response delay caused by excessive volume or insufficient buffering caused by insufficient volume.

[0083] like Figure 5 As shown, the second mounting assembly 70 also includes a valve control housing 73, a second air intake channel 31 and a second air extraction channel 32 formed in the valve control housing 73, a diversion channel 33 communicating with the air outlet chamber 231, the breaks of the diversion channel 33 being located on the opposite surfaces of the pump control housing 63 and the valve control housing 73 respectively, and being sealed and connected by the second connector 90, the diversion channel 33 being partially located in the valve control housing 73, partially located in the second connector 90, and partially located in the pump control housing 63. The second inlet gas channel 31, the second exhaust gas channel 32, and a partial branch channel 33 are directly machined in the valve control housing 73, which improves the airtightness of the flow channel. Then, another part of the branch channel 33 is machined in the pump control housing 63. The part of the branch channel 33 located in the pump control housing 63 is directly connected to the air passage chamber 231 without the need for additional connecting pipes, which further improves the airtightness of the flow channel. Then, the two parts of the branch channel 33 are connected by the second connector 90, realizing the function of the branch channel 33 connecting the air passage chamber 231 to connect the second inlet gas channel 31 and the second exhaust gas channel 32 to the air chamber 12. The structure is simple, requires fewer connectors, and can ensure the sealing performance of the auxiliary control gas flow channel 30 and its connection with the main control gas flow channel 20.

[0084] like Figure 9As shown, the second mounting assembly 70 also includes a valve mounting plate 74 that covers and seals the valve control housing 73. The valve mounting plate 74 covers part of the valve control housing 73. The valve control housing 73 has a vent groove 731 on the side facing the valve mounting plate 74. The valve mounting plate 74 has a sealing groove 741 on the side facing the valve control housing 73. The sealing groove 741 surrounds the vent groove 731 to seal and form a venting channel 232. The valve mounting plate 74 also has a detection channel 742 that connects the flow sensor and the venting channel 232.

[0085] like Figure 3 As shown, the third control valve 51 and the fourth control valve 52 extend above the valve mounting plate 74, optimizing the spatial layout within the second mounting assembly 70 and improving the space utilization within the second mounting assembly 70. Specifically, as... Figure 8 As shown, the second inlet air passage 31 includes a first groove 311 formed in the valve control housing 73 and a first connecting channel 312 for connecting the first groove 311 and the driving air source. The first groove 311 is connected to the inlet of the third control valve 51, and the outlet of the third control valve 51 is connected to the diversion channel 33 by a second connecting channel 335. The second exhaust air passage 32 includes a second groove 321 formed in the valve control housing 73 and a third connecting channel 322 for connecting the second groove 321 and the driving air source. The second groove 321 is connected to the outlet of the fourth control valve 52, and the inlet of the fourth control valve 52 is connected to the diversion channel 33 by a fourth connecting channel 336. The third control valve 51 and the fourth control valve 52 are directly fixed to the valve control housing 73. The inlet of the third control valve 51 is sealed and connected to the first groove 311, and the outlet of the third control valve 51 is sealed and connected to the second connecting channel 335. Thus, the second intake channel 31 can be opened and closed through the third control valve 51 and the diversion channel 33 to achieve air intake. Similarly, the inlet of the fourth control valve 52 is sealed and connected to the fourth connecting channel 336, and the outlet of the fourth control valve 52 is sealed and connected to the second groove 321. Thus, the second exhaust channel 32... The auxiliary control gas flow channel 30 and the auxiliary control valve unit 50 can be connected to the flow channel 33 in an openable and closable manner through the fourth control valve 52. Since the auxiliary control gas flow channel 30 and the auxiliary control valve unit 50 mainly serve as backup control components and have the stress relief function of the diaphragm 11, and are connected to the gas passage chamber 231 of the main control gas flow channel 20, the buffering function of the gas passage chamber 231 is sufficient to meet the usage requirements. The structure of the auxiliary control gas flow channel 30 is relatively simple, and most of it is integrally formed in the valve control housing 73, which has high sealing performance and structural strength. The auxiliary control valve unit 50 is directly sealed to the valve control housing 73, which has a simple structure and reliable sealing.

[0086] like Figure 6 and Figure 7As shown, the pump mounting plate 64 has an air vent groove 233 on the side facing the pump control housing 63, and the pump control housing 63 has a shaped groove 631 on the side facing the pump mounting plate 64. A shaped seal 632 is installed in the shaped groove 631. The shaped seal 632 surrounds the outer circumference of the air vent groove 233 so that the air vent groove 233 and the side of the pump control housing 63 facing the pump mounting plate 64 form an air vent cavity 231. Therefore, the seal between the pump control housing 63 and the mounting plate is crucial to the sealing performance of the air vent cavity 231. The shape of the shaped seal 632 is adapted to the shape of the air vent groove 233, and the area of ​​the shaped groove 631 in which it is located also corresponds to the outer circumference of the air vent groove 233. When the pump control housing 63 and the pump mounting plate 64 are connected, the shaped seal 632 surrounds the outer circumference of the air vent groove 233 so that the air vent groove 233 and the side of the pump control housing 63 facing the pump mounting plate 64 form an air vent cavity 231.

[0087] Specifically, the air vent 233 includes a first vent 234 extending along the length of the pump mounting plate 64 and a second vent 235 extending along the height of the pump mounting plate 64. Simultaneously, the air vent 233 needs to avoid the inlet and outlet of the first control valve 41 and the second control valve 42 that connect to the air vent 233. Therefore, the air vent 233 can be shaped like a "7" or a "T". The shaped and other similar structures fully utilize the surface area of ​​the pump mounting plate 64, allowing for a more compact installation of the first control valve 41 and the second control valve 42, resulting in a smaller overall size of the diaphragm pump assembly. Also based on the shape of this air passage groove 233, which requires sealing in many areas, an integrated irregularly shaped seal 632 is used. This not only improves the installation efficiency of the seal but also avoids the risk of leakage due to individual seals lifting during installation, thus improving the sealing effect on the air passage chamber 231. Simultaneously, the irregularly shaped groove 631 positions the irregularly shaped seal 632, preventing displacement of the seal 632 during installation and thus preventing seal failure.

[0088] The pressure sensor is connected to the air passage chamber 231, which is connected to the air chamber 12 via the air passage channel 232. Therefore, the pressure sensor can detect the pressure value of the air chamber 12 through the air passage chamber 231. Based on the detected pressure value, the pressure sensor can control the opening and closing of the first control valve 41, the second control valve 42, the third control valve 51, and the fourth control valve 52. The communication ports of the first control valve 41 and the second control valve 42 with the air passage chamber 231 are both located in the first groove 234. The detection flow channel 742, which is connected to the second groove 235, is at a certain distance to avoid pressure fluctuations when the first control valve 41 and the second control valve 42 are opened and closed, which may interfere with the detection accuracy of the pressure sensor. Similarly, the connection between the diversion channel 33 and the air passage groove 233 is relatively far away from the detection flow channel 742 to avoid excessive fluctuations in the gas flowing in or out of the diversion channel 33, which may interfere with the detection accuracy of the pressure sensor.

[0089] Based on the supply system of the above embodiments, this utility model embodiment also provides a method of using the supply system, including the following steps: Positive pressure stress relief step: controlling the main control valve unit 40 to be in a closed state, controlling the auxiliary control valve unit 50, so that the auxiliary control gas flow channel 30 is connected to the driving gas source so that the gas flows into the gas chamber 12 of the diaphragm pump 10 through the auxiliary control gas flow channel 30 and part of the main control gas flow channel 20, causing the diaphragm 11 to deform towards the liquid chamber 13 of the diaphragm pump 10 until the predetermined conditions are met; Negative pressure stress relief step: controlling the main control valve unit 40 to be in a closed state, controlling the auxiliary control valve unit 50, so that the auxiliary control gas flow channel 30 is connected to the driving gas source so that the gas in the gas chamber 12 of the diaphragm pump 10 flows out through the auxiliary control gas flow channel 30 and part of the main control gas flow channel 20, causing the diaphragm 11 to deform towards the gas chamber 12 of the diaphragm pump 10 until the predetermined conditions are met.

[0090] Through the stress relief steps described above, the diaphragm 11 inside the diaphragm pump 10 is fully stress-relieved before it officially starts working, thus avoiding any impact on the glue dispensing accuracy of the diaphragm pump 10. Whether it is positive pressure stress relief or negative pressure stress relief, the principle is the same: the gas in the gas chamber 12 applies a unilateral force to the diaphragm 11, causing the diaphragm 11 to bend and deform. During the reciprocating motion, the diaphragm 11 undergoes creep (slow plastic deformation). The periodic pressure of the reciprocating motion can accelerate the slippage and rearrangement of molecular chains, gradually releasing the internal stress generated during processing or assembly. At the same time, the dynamic stress redistribution on the diaphragm 11 and the periodic deformation can break the original stress balance inside the material. Through dynamic load, the stress in the stress concentration area (such as the edge or hole) is diffused to the low stress area, making the force distribution on the diaphragm 11 more uniform. In addition, the diaphragm 11 will locally heat up due to friction during the reciprocating motion (usually <100℃), which, although far below the annealing temperature, can improve the mobility of molecular chains and assist in stress release, ultimately achieving the purpose of removing the stress from the diaphragm 11.

[0091] Specifically, the pre-booking conditions include:

[0092] The auxiliary control valve unit 50 is opened, and gas passes through the auxiliary control valve unit 50 at a predetermined pressure, entering or flowing out of the air chamber 12 of the diaphragm pump 10, until the pressure sensor detects that the pressure in the air chamber 12 of the diaphragm pump 10 meets the predetermined value, and the auxiliary control valve unit 50 is closed; or;

[0093] The auxiliary control valve unit 50 is opened, and gas passes through the auxiliary control valve unit 50 at a predetermined pressure, entering or exiting the gas chamber 12 of the diaphragm pump 10, until the cumulative value of the flow sensor no longer increases, that is, when the gas flow rate through the flow sensor is 0 or less (under negative pressure), the auxiliary control valve unit 50 is closed; or

[0094] The auxiliary control valve unit 50 is opened, and gas passes through the auxiliary control valve unit 50 at a predetermined pressure, entering or flowing out of the gas chamber 12 of the diaphragm pump 10 until it continues to be open for a predetermined time. Then the auxiliary control valve unit 50 is closed. The predetermined opening time can be an empirical value or a measured value, which can be set by the user.

[0095] The three different predetermined conditions described above can be used individually or in combination in different embodiments.

[0096] Taking the use of pressure sensor detection data as a predetermined condition as an example, the specific usage method of the supply system is as follows:

[0097] Before the supply system officially starts operating, a stress relief step is performed on the diaphragm 11. This stress relief step includes a positive pressure stress relief step and a negative pressure stress relief step, which are not sequential. Specifically, the first control valve 41 and the second control valve 42 are always closed, while the third control valve 51 or the fourth control valve 52 is opened. Gas enters or flows out of the gas chamber 12 of the diaphragm pump 10 at a predetermined pressure through the auxiliary control valve unit 50 until the pressure sensor detects that the pressure in the gas chamber 12 of the diaphragm pump 10 meets the predetermined value. At this point, the auxiliary control valve unit 50 is closed, and the diaphragm... 11. Under positive or negative pressure, the diaphragm pump 10 undergoes a back-and-forth bending deformation motion to remove stress. It should be noted that the predetermined values ​​of the pressure sensors can be the same or different in the positive and negative pressure stress relief steps, depending on the actual structure of the diaphragm pump 10. Then, the supply system officially starts working, always keeping the third control valve 51 and the fourth control valve 52 closed, and opening the first control valve 41 and the second control valve 42, so that the gas passes through the main control gas flow channel 20 and enters or flows out of the gas chamber 12 of the diaphragm pump 10 to complete the suction or discharge of adhesive.

[0098] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A diaphragm pump system, comprising a diaphragm pump (10) and a pump control module connected to the diaphragm pump (10), the diaphragm pump (10) comprising a diaphragm (11) and a liquid chamber (13) and a gas chamber (12) separated by the diaphragm (11), the pump control module being used to control the entry or exit of working gas into the gas chamber (12) to control the deformation direction of the diaphragm (11) for discharging or drawing liquid; characterized in that, The pump control module includes a main control gas flow channel (20), a main control valve unit (40), an auxiliary control gas flow channel (30), and an auxiliary control valve unit (50). One end of the main control gas flow channel (20) is connected to the driving gas source, and the other end is connected to the gas chamber (12). The main control valve unit (40) is located in the middle of the main control gas flow channel (20), and the main control gas flow channel (20) is connected to the main control valve unit (40) so as to connect the gas chamber (12) and the driving gas source in an openable and closable manner. The auxiliary control gas flow channel (30) is located on the main control gas flow channel (20) between the main control valve unit (40) and the gas chamber (12). The auxiliary control gas flow channel (30) is connected to the main control gas flow channel (20) and the auxiliary control valve unit (50) so as to connect the gas chamber (12) and the driving gas source in an openable and closable manner.

2. The diaphragm pump system as described in claim 1, characterized in that, The main control gas flow channel (20) includes a first inlet flow channel (21), a first exhaust flow channel (22), and an outlet flow channel (23). The first inlet flow channel (21) is used to connect with a positive pressure gas source, and the first exhaust flow channel (22) is used to connect with a negative pressure gas source. The main control valve unit (40) includes a first control valve (41) and a second control valve (42). The first control valve (41) can open and close to connect the first inlet flow channel (21) and the outlet flow channel (23). The second control valve (42) can open and close to connect the outlet flow channel (23) and the first exhaust flow channel (22). The outlet flow channel (23) is connected to the gas chamber (12). The auxiliary control gas flow channel (30) includes a second inlet flow channel (31), a second exhaust flow channel (32), and a branch flow channel (33). The second inlet flow channel (31) is used to connect with a positive pressure gas source, and the second exhaust flow channel (32) is used to connect with a negative pressure gas source. The auxiliary control valve unit (50) includes a third control valve (51) and a fourth control valve (52). The third control valve (51) can open and close to connect the branch flow channel (33) and the second inlet flow channel (31). The fourth control valve (52) can open and close to connect the branch flow channel (33) and the second exhaust flow channel (32). The branch flow channel (33) is connected to the outflow channel (23).

3. The diaphragm pump system as described in claim 2, characterized in that, The airflow channel (23) includes an airflow chamber (231) and a flow channel (232), and the branch channel (33) is directly connected to the airflow chamber (231) or the flow channel (232); A pressure sensor is connected to the air passage (231); and / or a flow sensor is connected to the air passage (232).

4. The diaphragm pump system as described in claim 3, characterized in that, The auxiliary control valve unit (50) is used to allow gas to flow into or out of the gas chamber (12) through the auxiliary control gas flow channel (30), the gas outlet chamber (231), and the air passage (232), or to allow gas to flow into or out of the gas chamber (12) through the auxiliary control gas flow channel (30) and the air passage (232), so that the diaphragm (11) reciprocates. Furthermore, the gas pressure through the auxiliary control valve unit (50) is greater than the gas pressure through the main control valve unit (40).

5. The diaphragm pump system as described in claim 3, characterized in that, The pump control module further includes a first mounting assembly (60) and a second mounting assembly (70). The main control valve unit (40) and the first air intake channel (21), the first air extraction channel (22), and the air outlet chamber (231) are located in the first mounting assembly (60). The auxiliary control valve unit (50) and the second air intake channel (31) and the second air extraction channel (32) are located in the second mounting assembly (70). The diversion channel (33) and the air passage (232) are located within the second mounting assembly (70) and are connected to each other. The air passage (232) is connected to the air outlet chamber (231) through a hollow connector. Alternatively, the air passage (232) is located within the second mounting assembly (70), and the diversion channel (33) is partially located within the first mounting assembly (60) and partially located within the second mounting assembly (70). The air passage (232) and the portion of the diversion channel (33) located within the second mounting assembly (70) are both connected to the air passage chamber (231) via connectors.

6. The diaphragm pump system as described in claim 5, characterized in that, The first mounting assembly (60) further includes a pump control housing (63) and a pump mounting plate (64) that is sealed to the pump control housing (63). The first air inlet passage (21) and the first air outlet passage (22) are formed in the pump control housing (63). The air outlet chamber (231) is formed between the pump control housing (63) and the pump mounting plate (64). The first control valve (41) and the second control valve (42) are mounted on the side of the pump mounting plate (64) facing away from the pump control housing (63). The second mounting assembly (70) further includes a valve control housing (73), the second air intake passage (31) and the second air extraction passage (32) are formed in the valve control housing (73), the diversion passage (33) communicates with the air outlet chamber (231), the breaks of the diversion passage (33) are respectively located on the opposite surfaces of the pump control housing (63) and the valve control housing (73), and are sealed and connected by the connector, the diversion passage (33) is partially located in the valve control housing (73), partially located in the connector, and partially located in the pump control housing (63).

7. The diaphragm pump system as described in claim 6, characterized in that, The flow channel (33) includes a first flow channel (331) located in the pump control housing (63), a second flow channel (332) located in the valve control housing (73), a third flow channel (333) located in the connector, and a fourth flow channel (334) connecting the first flow channel (331) and the air passage (231). The fourth flow channel (334) is located in the pump control housing (63) and extends along the thickness direction of the pump control housing (63). The inner diameter of the second flow channel (332) tends to increase in the direction closer to the first flow channel (331).

8. The diaphragm pump system as described in claim 7, characterized in that, The second air inlet channel (31) includes a first groove (311) formed in the valve control housing (73) and a first connecting channel (312) for connecting the first groove (311) and the driving air source. The first groove (311) is connected to the inlet of the third control valve (51), and the outlet of the third control valve (51) is connected to the second flow channel (332) by a second connecting channel (335). The second air extraction channel (32) includes a second groove (321) formed in the valve control housing (73) and a third connecting channel (322) for connecting the second groove (321) and the driving air source. The second groove (321) is connected to the outlet of the fourth control valve (52), and the inlet of the fourth control valve (52) is connected to the second flow channel (332) by a fourth connecting channel (336).

9. The diaphragm pump system as claimed in claim 6, characterized in that, The pump mounting plate (64) has an air vent groove (233) on the side facing the pump control housing (63), and the pump control housing (63) has a shaped groove (631) on the side facing the pump mounting plate (64). A shaped seal (632) is installed in the shaped groove (631), and the shaped seal (632) surrounds the outer circumference of the air vent groove (233) so that the air vent groove (233) and the side of the pump control housing (63) facing the pump mounting plate (64) form the air vent cavity (231). The air passage (233) includes a first groove (234) extending along the length direction of the pump mounting plate (64) and a second groove (235) extending along the height direction of the pump mounting plate (64). The pump mounting plate (64) has a sensor flow channel extending along the thickness direction of the pump mounting plate (64) at the end corresponding to the second groove (235). The pressure sensor is provided on the side of the pump mounting plate (64) away from the pump control housing (63), and the pressure sensor corresponds to the sensor flow channel.

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