A damping steel frame and concrete slab combined structure precision instrument equipment anti-micro-vibration base table

Abstract

The utility model discloses a kind of damping steel frame and concrete slab combination structure precision instrument equipment anti-microvibration base, including concrete slab platform and damping steel frame. The concrete slab platform is formed by pouring ordinary concrete, inside steel reinforcement framework is equipped, outside cladding steel formwork is formed, both ensure flatness and rigidity, and it is convenient to be welded and fixed with lower frame. Damping steel frame is formed by welding steel column and steel beam arranged longitudinally, inside high-damping mortar is injected to improve energy dissipation capacity and anti-vibration performance;Its bottom is anchored to ground foundation by column foot and chemical anchor bolt, ensure overall stability. The base is sprayed with epoxy mortar coating outside, with corrosion resistance and cleanliness. Structure adopts modular design, can be used independently or spliced combination, suitable for space limited or large equipment array arrangement scene. Through the cooperation design of concrete high-quality mesa and damping steel frame, effectively weaken low-frequency resonance amplification effect, improve vibration isolation performance and adaptability, suitable for high-precision environment such as semiconductor manufacturing, optical detection and metrology test.

Description

Technical Field

[0001] This utility model relates to the field of anti-micro-vibration base, specifically to an anti-micro-vibration base for precision instruments and equipment with a combined structure of a damping steel frame and a concrete slab. Background Technology

[0002] Precision instruments and equipment are widely used in high-end industries such as semiconductor manufacturing, nanofabrication, optical inspection, and metrology. These devices are extremely sensitive to environmental vibrations. Even minor ground or floor vibrations can cause measurement errors, reduced resolution, or process failures. Therefore, it is common to install anti-vibration bases in equipment installation areas to reduce externally transmitted vibrations and ensure stable operation of the equipment. Existing anti-vibration measures typically rely on increasing mass and stiffness to reduce vibration response. While conventional top steel plates can provide a certain degree of flatness and strength, they require a large amount of steel, are difficult to handle, have long installation cycles, and place high demands on construction sites and hoisting conditions, making them unsuitable for use in space-constrained locations or where equipment is frequently replaced.

[0003] To address the aforementioned issues, the industry is gradually exploring modular steel frame structures. These structures form the lower frame through welded steel sections and joints, supplemented with damping materials to reduce vibration. However, traditional steel frames are often used in conjunction with steel plate platforms. While steel plates offer good flatness, their inherent damping performance is low, leading to amplification effects near the resonant frequency and an inability to effectively suppress low-frequency micro-vibrations. Concrete, due to its excellent molecular damping properties, can significantly improve the mass and energy dissipation capacity of the foundation. Using it as a platform can enhance vibration isolation while ensuring flatness. However, mature structural designs and standardized solutions are still lacking regarding how concrete slabs can work in conjunction with steel frames and how to achieve precise leveling during construction. Therefore, this paper proposes a micro-vibration-resistant foundation structure that organically combines a high-damping steel frame with a concrete slab. This structure meets the requirements of high stiffness, high quality, and high damping while also considering ease of installation and adaptability, providing a superior vibration foundation for modern precision manufacturing and testing environments. Utility Model Content

[0004] The purpose of this utility model is to provide a precision instrument and equipment anti-micro-vibration base with a combination structure of a damping steel frame and a concrete slab. Through the coordinated design of the concrete slab platform and the grouted steel frame, high damping, high stiffness and good flatness are achieved, solving the problems of excessive weight, insufficient damping and poor adaptability of traditional bases.

[0005] The technical solution of this utility model is implemented as follows:

[0006] A composite structure of a damping steel frame and a concrete slab for precision instruments and equipment, designed to prevent micro-vibrations, includes an upper concrete slab platform, a lower damping steel frame, and a foundation anchoring device. The damping steel frame is constructed by welding longitudinal and transverse steel sections into a frame structure, and is internally filled with high-damping grout to enhance energy dissipation and vibration isolation performance. The concrete slab platform possesses high mass, flatness, and rigidity, and can be directly used as a mounting surface for precision instruments. The concrete slab platform is welded and fixed to the damping steel frame using steel formwork to ensure overall structural stability. The damping steel frame has column feet at its base, which are anchored to the ground foundation using chemical anchors to ensure overall support stability.

[0007] Furthermore, the concrete platform is cast using ordinary concrete and has an internal steel reinforcement skeleton to improve the overall load-bearing capacity and control cracking performance.

[0008] Furthermore, the concrete platform is covered with a steel formwork, which not only ensures the geometric accuracy and flatness of the platform, but also serves as a welding connection interface.

[0009] Furthermore, the concrete platform and the lower damping steel frame are directly welded together using steel formwork to form an integrated rigid connection structure.

[0010] Furthermore, the damping steel frame is a frame structure welded from longitudinally and transversely arranged steel sections, and its interior is filled with a high-damping injection material with energy dissipation characteristics.

[0011] Furthermore, the high-damping grouting material is a high-damping mortar, which dissipates energy through interfacial friction and internal viscous deformation under vibration, thereby reducing the response amplitude of the structure near the resonant frequency.

[0012] Furthermore, the foundation anchoring device is a chemical anchor, which achieves a stable connection by mechanically engaging the threads or expansion joint of the chemical anchor with the borehole wall after drilling holes in the ground foundation. This anchoring method allows for installation with minimal construction interference and ensures the stability and safety of the base during long-term use.

[0013] Furthermore, both the concrete platform and the outer surface of the steel frame are coated with an epoxy mortar coating, which has corrosion resistance, chemical resistance, and wear resistance, and also has good surface cleaning performance.

[0014] Furthermore, the modular frame design allows the base to be used independently as a unit, or it can be assembled into a continuous installation platform through welding or mechanical connection to meet the array layout requirements of large equipment.

[0015] Beneficial Effects: This invention, through a combination of a concrete slab platform and a damping steel frame, achieves high damping, high stiffness, and good flatness. The platform provides sufficient mass to lower the natural frequency while enhancing overall damping characteristics and preventing resonance amplification. Compared to traditional steel plate bases, this solution offers superior platform damping performance, making it suitable for low-frequency vibration control needs; compared to a solid concrete base, it provides greater flexibility and construction efficiency. This base can be widely used in micro-vibration sensitive applications such as semiconductor manufacturing, optical inspection, and precision measurement. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0017] Figure 2 This is a bottom plan view of this utility model;

[0018] Figure 3 This is a top plan view of this utility model;

[0019] Figure 4 This is a side view of the damping steel frame of this utility model;

[0020] Figure 5 This is the damping steel frame beam-column joint of this utility model;

[0021] In the diagram: 1. Steel plate platform; 2. Damping steel frame; 3. Steel column; 4. Steel beam. Detailed Implementation

[0022] The following will be combined with the appendix Figures 1-5 This utility model will be described in detail, and the technical solutions in the embodiments of this utility model will be clearly and completely described. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0023] like Figures 1-5 As shown, a damping steel frame and concrete slab combined structure precision instrument and equipment anti-micro-vibration base includes an upper concrete slab 1, a lower damping steel frame 2, steel columns 3 and steel beams 4.

[0024] In this invention, the concrete platform 1 is integrally cast using ordinary concrete. During the casting process, a steel reinforcement frame is installed to enhance the overall load-bearing capacity and crack resistance of the platform. The platform is covered with a precast steel formwork, which not only restrains the concrete during the casting stage to ensure geometric dimensions and flatness, but also serves as a structural shell in the finished product, providing additional rigidity to the platform.

[0025] The concrete platform 1 is directly welded to the lower damping steel frame 2 via an outer steel formwork, forming an integrated rigid connection interface without the need for an additional isolation layer or leveling pad. This direct welding method reduces the number of intermediate components, improves overall rigidity, and facilitates rapid on-site installation and subsequent maintenance.

[0026] The damping steel frame 2 is a frame structure welded from longitudinally and transversely arranged steel sections, forming the main load-bearing skeleton of the base. The frame is filled with high-damping grouting material, which significantly reduces the dynamic response of the structure under vibration through internal friction and viscous energy dissipation mechanisms, especially near the resonant frequency.

[0027] The steel column 3 is a vertical load-bearing component, and the steel beam 4 is a horizontal connecting component; the two are welded together to form a spatial frame. The bottom of the steel column has a column base structure, which is fixed to the ground foundation by chemical anchors. These chemical anchors are secured by injecting resin adhesive after drilling holes in the foundation, creating a dual fixation of adhesive bonding and mechanical interlocking between the anchor and the concrete hole wall, ensuring the stability of the foundation during long-term use.

[0028] The entire concrete platform and the outer surface of the damping steel frame are coated with epoxy mortar, resulting in a smooth surface that is easy to clean and maintain, making it suitable for cleanrooms, laboratories, and other places with high environmental cleanliness requirements.

[0029] Preferably, the steel frame column grid is evenly distributed according to the total dimensions of the machine platform, and the column grid spacing is no more than 550mm.

[0030] Preferably, the steel column 3 is a rectangular steel tube with a side length of 300mm, and the steel beam 4 is a rectangular steel tube with a side length of 250mm. Both are made of Q235B steel, which has excellent strength performance and machinability.

[0031] Preferably, in this embodiment, a total of 25 steel columns 3 are provided, which are evenly distributed to ensure the stable support of the anti-vibration foundation; steel beams 4 are provided on both the upper and lower layers of the frame to form a frame force-bearing system with the steel columns.

[0032] This invention employs a modular design, where individual base units can be flexibly customized to suit the dimensions of precision instruments. Multiple units can be joined laterally via welding or bolting to form a continuous platform, suitable for large equipment array layouts. The modular design also facilitates transportation and phased installation, adapting to environments with limited space or complex construction conditions.

[0033] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A damping steel frame and concrete slab composite structure precision instrument and equipment anti-micro-vibration base, comprising a concrete slab platform, a damping steel frame, and a foundation anchoring device, characterized in that: The concrete slab platform is set on the upper part of the anti-micro-vibration base to support precision instruments and equipment, and is welded and fixed to the damping steel frame to form an integral structure. The damping steel frame is a frame structure composed of longitudinally and transversely arranged steel columns and steel beams. The frame is filled with high-damping grouting material to improve energy dissipation performance and vibration isolation effect. The bottom of the damping steel frame is provided with column feet, which are anchored to the ground foundation through foundation anchoring devices to ensure overall stability.

2. The anti-micro-vibration base for precision instruments and equipment with a damping steel frame and concrete slab composite structure according to claim 1, characterized in that: The concrete slab platform is cast using ordinary concrete and has a steel reinforcement frame inside to improve its overall load-bearing capacity and crack resistance.

3. The anti-micro-vibration base for precision instruments and equipment with a damping steel frame and concrete slab composite structure according to claim 1, characterized in that: The concrete slab platform is externally covered with a steel formwork, which serves both to ensure the geometric accuracy and flatness of the platform and as a connection interface for welding with the damping steel frame.

4. The anti-micro-vibration base for precision instruments and equipment with a damping steel frame and concrete slab composite structure according to claim 1, characterized in that: The high-damping grouting material is a high-damping mortar, which can reduce resonance response through internal friction and viscous energy dissipation.

5. The anti-micro-vibration base for precision instruments and equipment with a damping steel frame and concrete slab composite structure according to claim 1, characterized in that: The basic anchoring device is a chemical anchor, which is formed by injecting adhesive into the hole after drilling a hole in the ground foundation to bond with the hole wall and form a stable anchoring connection.

6. The anti-micro-vibration base for precision instruments and equipment with a damping steel frame and concrete slab composite structure according to claim 1, characterized in that: The outer surfaces of both the concrete slab platform and the damping steel frame are coated with epoxy mortar to provide corrosion resistance, chemical resistance, and a clean surface.

7. The anti-micro-vibration base for precision instruments and equipment with a damping steel frame and concrete slab composite structure according to claim 1, characterized in that: The damping steel frame adopts a modular design, which can be used as a single unit or combined into a continuous installation platform by welding and bolting to meet the layout requirements of large precision instrument arrays.

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