A damping support steel frame and concrete slab combined structure precision instrument equipment anti-micro-vibration base table

By combining a damped support steel frame with a concrete slab structure, along with high-damping grouting materials and a modular design, the problem of high stiffness and low-frequency vibration attenuation in high-precision semiconductor manufacturing of existing anti-micro-vibration bases has been solved. This enables rapid deployment and vibration control of the bases, making them suitable for harsh environments such as cleanrooms.

CN224533336UActive Publication Date: 2026-07-21THE IT ELECTRONICS ELEVENTH DESIGN & RES INST SCI & TECHNOLOGICAL ENG
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
THE IT ELECTRONICS ELEVENTH DESIGN & RES INST SCI & TECHNOLOGICAL ENG
Filing Date
2025-09-26
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

Existing anti-vibration bases are difficult to simultaneously meet the requirements of high rigidity, low-frequency vibration attenuation, and modular installation in high-precision semiconductor manufacturing. Furthermore, traditional solutions have limited effectiveness in controlling low-frequency vibrations and cannot meet the vibration requirements of advanced lithography and exposure equipment.

Method used

The structure adopts a combination of a damped support steel frame and a concrete slab. Through high-damping grouting materials and modular design, combined with the frame support system, it achieves low-frequency vibration control and rapid deployment. This includes filling the inside of the steel columns and beams with high-damping mortar, welding the concrete platform to the steel frame into an integrated structure, and fixing it to the foundation through column base connecting plates.

Benefits of technology

It significantly reduces the vibration response of the base, adapts to the needs of multiple equipment layouts, facilitates transportation and maintenance, is suitable for harsh environments such as clean rooms, and has good construction adaptability and maintainability.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN224533336U_ABST
    Figure CN224533336U_ABST
Patent Text Reader

Abstract

The utility model discloses a kind of damping support steel frame and concrete slab combination structure precision instrument equipment anti-microvibration base, including concrete platform, damping steel frame and column foot connecting plate.The concrete platform is formed by ordinary concrete pouring, inside steel reinforcement framework is equipped, and outer package section steel shell provides both forming constraint and as welded connection interface.The damping steel frame is formed by vertical steel column and longitudinal and transverse steel beam, and support component is arranged to form stable space frame, and high-damping mortar is injected in frame interior to improve energy dissipation capacity and low-frequency anti-vibration performance.Column foot connecting plate is equipped in base bottom, and it is anchored to foundation by chemical anchor bolt, to realize reliable fixing and convenient construction.Integral appearance is sprayed epoxy mortar coating, with corrosion resistance and clean characteristics.This base is cooperatively designed through concrete mesa and damping steel frame, with high stiffness and high damping, suitable for semiconductor manufacturing, optical detection, metrology test and other high-precision vibration control scenes.
Need to check novelty before this filing date? Find Prior Art