Dual seal flow passage block assembly
By designing a double-sealed flow channel block assembly, the problem of difficult deep hole machining of flow channel blocks was solved, improving production efficiency and ensuring the sealing and flowability of the fluid.
CN224533455UActive Publication Date: 2026-07-21SHENZHEN PSEUDO-SHENZHEN HIGH PRECISION EQUIPMENT CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN PSEUDO-SHENZHEN HIGH PRECISION EQUIPMENT CO LTD
- Filing Date
- 2025-08-04
- Publication Date
- 2026-07-21
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Figure CN224533455U_ABST
Abstract
The utility model discloses a kind of double-sealing flow channel block assemblies, it is related to the field of semiconductor processing, wherein, double-sealing flow channel block assembly includes: flow channel block body, opening deep hole flow channel and the connecting channel being communicated with the deep hole flow channel, the inner wall of the deep hole flow channel has polishing surface, the flow channel block body also opens opening, the opening is communicated with the connecting channel;And sealing element, with the connecting channel screw connection, and the sealing element is also sealed with the connecting channel connection, to limit the fluid in deep hole flow channel into the connecting channel.The double-sealing flow channel block assembly of utility model technical scheme can facilitate the processing of internal flow channel, simplify processing difficulty, improve production efficiency.
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