Pfa acid barrel dispensing fitting for semiconductor

Abstract

This utility model discloses a PFA acid tank dispensing connector for semiconductors. This utility model relates to the field of dispensing connector technology and includes: a dispensing tube connection end, a flexible sleeve, an extrusion assembly, a toothed plate, and positioning teeth. When installing the dispensing connector, the flexible sleeve tightly wraps around the PFA acid tank pipe. Then, pulling the rope simultaneously pulls two extrusion blocks downwards, gradually squeezing the flexible sleeve to position the connection end. When disassembling the dispensing connector, the positioning teeth are moved, causing them to flip and separate from the teeth of the toothed plate, thus releasing the lock and facilitating installation and disassembly. Furthermore, due to the elasticity of the flexible sleeve, its diameter can be expanded within a certain range, thereby adapting to PFA acid tank pipes of various diameters.

Description

Technical Field

[0001] This utility model relates to the field of dispensing connector technology, specifically a dispensing connector for PFA acid tanks used in semiconductors. Background Technology

[0002] PFA connectors are pipe fittings made of soluble polytetrafluoroethylene (PFA) material, primarily used to connect pipes or equipment, ensuring the sealing and stability of fluid transport. In semiconductor manufacturing, PFA connectors provide a high-purity transmission channel, preventing contamination of semiconductor wafers or processing fluids, and ensuring high cleanliness and reliability in chip manufacturing processes. They are suitable for the transmission of ultrapure water, chemical reagents, and specialty gases.

[0003] In the existing technology, the distribution joint is connected by threads. However, due to the strong corrosiveness of the liquid in the acid tank, a large force is generally required to tighten the distribution joint when it is installed. This may cause stripping of the threads and make disassembly difficult later.

[0004] In view of the above, this application is hereby submitted. Utility Model Content

[0005] The purpose of this invention is to provide a PFA acid tank dispensing connector for semiconductors to solve the problems mentioned in the background art.

[0006] This utility model provides a technical solution including a distribution pipe connection end, a flexible tube sleeve, an extrusion assembly, a toothed plate, and positioning teeth; One end of the distribution pipe connection is used to connect to the PFA acid tank, and the other end of the distribution pipe connection is connected to the first branch pipe and the second branch pipe respectively. Thus, the distribution pipe connection, the first branch pipe, and the second branch pipe form a three-way pipe. The first branch pipe and the second branch pipe divert the liquid in the PFA acid tank. The flexible sleeve and the distribution pipe are connected at the end of the connection, wherein the diameter of the end of the flexible sleeve connected to the distribution pipe is larger than the other end, and the diameter of the other end of the flexible sleeve is smaller than the pipe on the PFA acid tank. The number of extrusion components is two, and the two extrusion components are arranged opposite to each other on the distribution pipe connection end. Each extrusion component includes: an extrusion block, a transmission rod, and an assembly. The extrusion block faces the flexible tube sleeve, and the side facing the flexible tube sleeve is arc-shaped. The transmission rod is horizontally connected to the extrusion block. The assembly is U-shaped and has an inclined groove on its vertical wall. A rectangular slider is provided at the end of the transmission rod. The rectangular slider is nested into the two inclined grooves of the assembly. Initially, the rectangular slider is located at the end of the inclined groove and pushes the two extrusion blocks. The two extrusion blocks gradually extrude the flexible tube sleeve downwards. The number of toothed plates is at least two, and the two toothed plates are respectively arranged on one side of the assembly in the two extrusion components. The inclination angle of the toothed plates is the same as that of the inclined slide. Multiple teeth on the toothed plates are right-angled triangles. One side of the rectangular slider is connected to a connecting part, and a positioning tooth is movably connected to the connecting part. The positioning tooth can be rotated at a certain angle, and the lower end of the positioning tooth is engaged in the toothed plate.

[0007] Preferably, in one embodiment, two of the two extrusion blocks in the two extrusion assemblies are connected to ropes. By pulling the ropes, the two extrusion blocks can be moved to one side simultaneously, thereby gradually extruding the flexible sleeve downwards at an angle.

[0008] Preferably, in one embodiment, the flexible sleeve is made of silicone or rubber.

[0009] Preferably, in one embodiment, the number of toothed plates is four, and the four toothed plates are respectively disposed on both sides of the assembly in the two extrusion assemblies.

[0010] Preferably, in one embodiment, the number of connecting parts is four, and the four connecting parts are respectively connected to one side of the rectangular sliders in the two extrusion assemblies, and positioning teeth are respectively provided on the four connecting parts.

[0011] Preferably, in one embodiment, the ends of the two positioning teeth in the connecting portion are connected, so that the connection between the two positioning teeth can be flipped by moving the connection point of the two positioning teeth, thereby separating the positioning teeth from the tooth plate.

[0012] Preferably, in one embodiment, the rotation angle of the positioning tooth is five degrees.

[0013] Preferably, in one embodiment, the extrusion block is made of silicone or rubber.

[0014] Compared with the prior art, the beneficial effects of this utility model are: 1. When installing the distribution connector, the flexible sleeve tightly wraps around the pipe of the PFA acid tank. Then, pull the rope. By pulling the rope, the two extrusion blocks can be pulled downwards and gradually squeeze the flexible sleeve to position the connection end. When it is necessary to disassemble the distribution connector, the positioning teeth are turned and separated from the teeth of the tooth plate to release the lock, thus facilitating installation and disassembly.

[0015] 2. Due to the elasticity of the flexible sleeve, its diameter can be expanded within a certain range, thus adapting to PFA acid tank pipes of various diameters. Attached Figure Description

[0016] Figure 1 A schematic diagram of the overall mechanism of a PFA acid tank dispensing connector for semiconductors; Figure 2 A detailed view of one side mechanism of a PFA acid tank dispensing connector for semiconductors; Figure 3 A top view detailing the mechanism of a PFA acid tank dispensing connector for semiconductors.

[0017] Figure 4 A detailed drawing of the positioning mechanism of a PFA acid tank dispensing connector for semiconductors.

[0018] In the diagram: 1. Distribution pipe connection end; 11. First branch pipe; 12. Second branch pipe; 2. Flexible pipe sleeve; 3. Extrusion assembly; 31. Extrusion block; 32. Transmission rod; 33. Assembly parts; 4. Tooth plate; 41. Connecting part; 42. Positioning tooth. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Please see Figure 1 , Figure 2 , Figure 3 This utility model provides a technical solution: including a distribution pipe connection end 1, a flexible tube sleeve 2, an extrusion assembly 3, a toothed plate 4, and positioning teeth 42; like Figure 1 , Figure 2 , Figure 3 As shown, one end of the distribution pipe connection 1 is used to connect to the PFA acid tank, and the other end of the distribution pipe connection 1 is connected to the first branch pipe 11 and the second branch pipe 12 respectively. Thus, the distribution pipe connection 1, the first branch pipe 11, and the second branch pipe 12 form a three-way pipe, and the first branch pipe 11 and the second branch pipe 12 divert the liquid in the PFA acid tank. like Figure 1 , Figure 2 , Figure 3 As shown, the flexible sleeve 2 and the distribution pipe connection end 1 are connected to each other at the end, wherein the diameter of the end of the flexible sleeve 2 connected to the distribution pipe connection end 1 is larger than the other end, and the diameter of the other end of the flexible sleeve 2 is smaller than the pipe on the PFA acid tank. like Figure 1 , Figure 2 , Figure 3As shown, there are two extrusion components 3, which are arranged opposite to each other on the distribution pipe connection end 1. Each extrusion component 3 includes an extrusion block 31, a transmission rod 32, and an assembly 33. The extrusion block 31 faces the flexible sleeve 2, and the side facing the flexible sleeve 2 is arc-shaped. The transmission rod 32 is horizontally connected to the extrusion block 31. The assembly 33 is U-shaped and has an inclined groove on its vertical wall. A rectangular slider is provided at the end of the transmission rod 32. The rectangular slider is nested into the two inclined grooves of the assembly 33. Initially, the rectangular slider is located at the end of the inclined groove, pushing the two extrusion blocks 31. The two extrusion blocks 31 gradually extrude the flexible sleeve 2 downwards. like Figure 4 As shown, there are at least two toothed plates 4, and the two toothed plates 4 are respectively arranged on one side of the fitting 33 in the two extrusion assemblies 3. The inclination angle of the toothed plates 4 is the same as that of the inclined slide. The multiple teeth on the toothed plates 4 are right-angled triangles. One side of the rectangular slider is connected to a connecting part 41. A positioning tooth 42 is movably connected to the connecting part 41. The positioning tooth 42 can be rotated at a certain angle. The lower end of the positioning tooth 42 is engaged in the toothed plate 4.

[0021] Preferably, in one embodiment, such as Figures 1-4 As shown, ropes are connected to the two extrusion blocks 31 of the two extrusion assemblies 3. By pulling the ropes, the two extrusion blocks 31 can be pulled to one side at the same time, thereby gradually extruding the flexible sleeve 2 downwards.

[0022] Preferably, in one embodiment, such as Figures 1-4 As shown, the flexible sleeve 2 is made of silicone or rubber.

[0023] Preferably, in one embodiment, such as Figures 1-4 As shown, there are four toothed plates 4, which are respectively arranged on both sides of the fittings 33 in the two extrusion assemblies 3.

[0024] Preferably, in one embodiment, such as Figures 1-4 As shown, there are four connecting parts 41. The four connecting parts 41 are respectively connected to one side of the rectangular sliders in the two extrusion assemblies 3, and positioning teeth 42 are respectively provided on the four connecting parts 41.

[0025] Preferably, in one embodiment, such as Figures 1-4 As shown, the ends of the two positioning teeth 42 in the connecting part 41 are connected, so that the connection between the two positioning teeth 42 can be flipped by moving the connection point of the two positioning teeth 42, thereby separating the positioning teeth 42 from the tooth plate 4.

[0026] Preferably, in one embodiment, such as Figures 1-4 As shown, the rotation angle of the positioning tooth 42 is five degrees.

[0027] Preferably, in one embodiment, such as Figures 1-4 As shown, the extrusion block 31 is made of silicone or rubber.

[0028] Working principle: When installing the distribution connector, the flexible sleeve 2 is nested inside the pipe on the PFA acid tank. The flexible sleeve 2 tightly wraps around the pipe of the PFA acid tank. Then, the rope is pulled, which simultaneously pulls the two extrusion blocks 31 to one side, thereby gradually squeezing the flexible sleeve 2 downwards to position the distribution pipe connection end 1. During this process, the positioning teeth 42 mesh with the teeth on the tooth plate 4 to achieve positioning. When it is necessary to disassemble the distribution connector, the positioning teeth 42 are moved, and the positioning teeth 42 flip and separate from the teeth on the tooth plate 4 to release the lock.

Claims

1. A PFA acid tank dispensing connector for semiconductors, characterized in that: Includes a distribution pipe connection end (1), a flexible tube sleeve (2), an extrusion assembly (3), a toothed plate (4), and positioning teeth (42); One end of the distribution pipe connection end (1) is used to connect to the PFA acid tank, and the other end of the distribution pipe connection end (1) is connected to the first branch pipe (11) and the second branch pipe (12) respectively. Thus, the distribution pipe connection end (1), the first branch pipe (11), and the second branch pipe (12) form a three-way pipe, and the first branch pipe (11) and the second branch pipe (12) divert the liquid in the PFA acid tank. The flexible sleeve (2) and the distribution pipe connection end (1) are connected to each other at the end, wherein the diameter of one end of the flexible sleeve (2) connected to the distribution pipe connection end (1) is larger than the other end, and the diameter of the other end of the flexible sleeve (2) is smaller than the pipe on the PFA acid tank. The number of the extrusion components (3) is two, and the two extrusion components (3) are arranged opposite to each other on the distribution pipe connection end (1). The extrusion component (3) includes: an extrusion block, a transmission rod (32), and an assembly (33). The extrusion block faces the flexible sleeve (2), and the side facing the flexible sleeve (2) is arc-shaped. The transmission rod (32) is horizontally connected to the extrusion block. The assembly (33) is U-shaped. The assembly (33) is provided with an inclined groove relative to the vertical wall. The end of the transmission rod (32) is provided with a rectangular slider. The rectangular slider is nested into the two inclined grooves of the assembly (33). Initially, the rectangular slider is located at the end of the inclined groove, pushing the two extrusion blocks. The two extrusion blocks gradually extrude the flexible sleeve (2) downwards. The number of toothed plates (4) is at least two. The two toothed plates (4) are respectively set on one side of the fitting (33) in the two extrusion assemblies (3). The tilt angle of the toothed plates (4) is the same as that of the tilted slide. The multiple teeth on the toothed plates (4) are right-angled triangles. One side of the rectangular slider is connected to a connecting part (41). The connecting part (41) is movably connected to a positioning tooth (42). The positioning tooth (42) can be rotated at a certain angle. The lower end of the positioning tooth (42) is engaged in the toothed plate (4).

2. The semiconductor PFA acid tank dispensing connector as described in claim 1, characterized in that: Two of the two extrusion blocks in the two extrusion assemblies (3) are connected to ropes. By pulling the ropes, the two extrusion blocks can be pulled to one side at the same time, thereby gradually extruding the flexible sleeve (2) downwards.

3. The semiconductor PFA acid tank dispensing connector as described in claim 1, characterized in that: The flexible sleeve (2) is made of silicone or rubber.

4. A semiconductor PFA acid tank dispensing connector as described in claim 1, characterized in that: The number of toothed plates (4) is four, and the four toothed plates (4) are respectively arranged on both sides of the fittings (33) in the two extrusion assemblies (3).

5. A semiconductor PFA acid tank dispensing connector as described in claim 1, characterized in that: The number of the connecting parts (41) is four. The four connecting parts (41) are respectively connected to one side of the rectangular slider in the two extrusion assemblies (3). The four connecting parts (41) are respectively provided with positioning teeth (42).

6. A semiconductor PFA acid tank dispensing connector as described in claim 1, characterized in that: The ends of the two positioning teeth (42) in the connecting part (41) are connected, so that the connection of the two positioning teeth (42) can be flipped by moving the connection point of the two positioning teeth (42), thereby separating the positioning teeth (42) from the tooth plate (4).

7. A semiconductor PFA acid tank dispensing connector as described in claim 1, characterized in that: The rotation angle of the positioning tooth (42) is five degrees.

8. A semiconductor PFA acid tank dispensing connector as described in claim 1, characterized in that: The extrusion block is made of silicone or rubber.

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