Phosphane cylinder storage device

Abstract

The utility model relates to a gas cylinder storage technology field, concretely is a kind of phosphine gas cylinder storage device, including storage tank, the bottom of storage tank is provided with annular guide rail, annular guide rail is connected with the bottle storage box, the bottom in bottle storage box is connected with the limit disc by electric telescopic link, the bottom of storage tank is connected with gas collection tank, and the top of gas collection tank is connected with suction pump, gas detection sensor, and the side wall of storage tank is hinged with movable plate, and movable plate inside is connected with electric push rod, and the output end of electric push rod is connected with support frame, and support frame is connected with support seat in it. The utility model is through the cooperation of annular guide rail and multi-station bottle storage box, and the cooperation of movable plate, the support seat connected with electric push rod, support frame and electric telescopic link and limit disc arranged in bottle storage box, the accurate positioning and quick access of gas cylinder are realized;Through gas detection sensor, suction pump and gas collection tank, the real-time monitoring of storage environment and emergency treatment after leakage are realized.

Description

Technical Field

[0001] This utility model relates to the field of gas cylinder storage technology, specifically a phosphine gas cylinder storage device. Background Technology

[0002] Phosphine is widely used as an important specialty gas feedstock in high-tech fields such as semiconductor manufacturing and the photovoltaic industry. However, phosphine is highly toxic, flammable, and explosive, making its storage safety a major concern. Traditional cylinder storage relies primarily on manual operation, which is inefficient and prone to collisions that can lead to leaks. Therefore, developing a phosphine cylinder storage device that automates loading and unloading and prevents leaks caused by collisions during storage is essential. Utility Model Content

[0003] To address the above technical problems, this utility model provides a phosphine cylinder storage device that can automate loading and unloading and avoid cylinder leakage caused by collisions during storage and retrieval, thereby solving the problem of low reliability and safety hazards in manual loading and unloading operations of existing storage devices.

[0004] To solve the above-mentioned technical problems, the present invention provides a phosphine gas cylinder storage device, comprising a storage tank, an annular conveying mechanism at the bottom of the storage tank, a plurality of storage cylinder boxes connected to the annular conveying mechanism, a limit plate fixedly connected to the bottom of the storage cylinder boxes via an electric telescopic rod, a gas collecting box fixedly connected to the bottom of the storage tank, a vacuum pump connected to the top of the gas collecting box via a connecting pipe, a gas detection sensor connected to the top of the gas collecting box, a movable plate hinged to the side wall of the storage tank, an electric push rod fixedly connected to the inner side of the movable plate, a support frame fixedly connected to the output end of the electric push rod, a support base rotatably connected inside the support frame, a gas detection sensor communicatingly connected to a controller, and a vacuum pump controlled by the controller.

[0005] Furthermore, two limiting rods are fixedly connected to the inner side of the movable plate, and the support frame is slidably connected to the limiting rods.

[0006] Furthermore, both the support frame and the support base are L-shaped. The horizontal side of the support frame is slidably connected to the limiting rod. The support base is rotatably connected to the upper part of the horizontal side of the support frame through a connector. The vertical side of the support frame is an arc-shaped plate. The outer side of the arc-shaped plate is fixedly connected to the output end of the electric push rod. Several arc-shaped grooves are evenly formed on the inner side of the arc-shaped plate. A limiting component is fixedly connected to the bottom of the vertical side of the support base. The limiting component matches the arc-shaped grooves.

[0007] Furthermore, the limiting component includes a fixed plate, a movable part, and springs. The fixed plate is rectangular, and the movable part is slidably sleeved on the fixed plate. Several springs are fixedly connected to the inner side of the movable part, and the other end of the springs is fixedly connected to the fixed plate.

[0008] Furthermore, the storage box is filled with sponge around its sides.

[0009] Furthermore, the bottom height of the movable plate is the same as the top height of the storage box.

[0010] Furthermore, the storage tank is equipped with a lid on top, casters on the bottom, and a handrail on one side.

[0011] Furthermore, the annular conveying mechanism includes an annular guide rail, which is driven by a servo motor. Slides are evenly spaced on the annular guide rail, and the storage box is fixedly connected to the slides.

[0012] This utility model has the following advantages compared with the prior art:

[0013] 1. This utility model uses a servo motor to drive the rotation of a ring guide rail, which in turn moves a multi-station storage box. This allows the storage box, which requires loading and unloading gas cylinders, to be accurately moved to the operating position. The support frame connected to the electric push rod on the movable plate enables the transport and movement of gas cylinders between the storage box and the ground. This avoids gas cylinder leakage caused by improper handling during manual handling, thus improving the safety of the gas cylinder storage process. In conjunction with the electric telescopic rod installed inside the storage box, the height of the limit plate is controlled, making it easy to adjust the height of the limit plate for storing and retrieving gas cylinders. This improves the automation level of gas cylinder storage and retrieval and reduces the trouble of manual loading and unloading.

[0014] 2. This utility model uses a gas detection sensor to monitor the gas concentration in the device in real time, which can promptly detect gas cylinder leaks. In conjunction with a gas collection box connected to a vacuum pump, it can quickly respond to leaks, promptly absorb leaked gas, prevent toxic gas from leaking out and affecting the storage environment, and facilitate subsequent processing. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of this utility model.

[0016] Figure 2 This is a schematic diagram of the movable plate structure of this utility model.

[0017] Figure 3 This is a schematic diagram of the storage box structure of this utility model.

[0018] In the diagram: 1. Storage tank, 2. Circular guide rail, 3. Storage bottle box, 4. Electric telescopic rod, 5. Limiting plate, 6. Gas collection box, 7. Air pump, 8. Gas detection sensor, 9. Limiting component, 10. Electric push rod, 11. Support frame, 12. Support base, 13. Limiting rod, 14. Movable plate. Detailed Implementation

[0019] The present invention will be further described below with reference to the accompanying drawings.

[0020] like Figure 1 , Figure 2 , Figure 3 The phosphine cylinder storage device shown includes a storage tank 1. A ring conveying mechanism is provided at the bottom of the storage tank 1, and several storage cylinder boxes 3 are connected to the ring conveying mechanism. A limit plate 5 is fixedly connected to the bottom of the storage cylinder box 3 through an electric telescopic rod 4. A gas collection box 6 is also fixedly connected to the bottom of the storage tank 1. In order to prevent gas accumulation after the gas cylinder leaks, a vacuum pump 7 is connected to the top of the gas collection box 6 through a connecting pipe. In order to monitor the storage status of the gas cylinder in real time and detect leaks in time, a gas detection sensor 8 is also connected to the top of the gas collection box 6. To facilitate the automated storage and retrieval of the gas cylinder, a movable plate 14 is hinged to the side wall of the storage tank 1. An electric push rod 10 is fixedly connected to the inside of the movable plate 14. A support frame 11 is fixedly connected to the output end of the electric push rod 10. A support base 12 is rotatably connected inside the support frame 11. The gas detection sensor 8 is communicatively connected to the controller, and the vacuum pump 7 is controlled by the controller.

[0021] To ensure that the direction of gas cylinder movement is consistent with the expected direction during the gas cylinder storage and retrieval process, two limiting rods 13 are fixedly connected to the inner side of the movable plate 14, and the support frame 11 is slidably connected to the limiting rods 13.

[0022] To ensure the reliability of the device, both the support frame 11 and the support base 12 are L-shaped. The horizontal side of the support frame 11 is slidably connected to the limiting rod 13. The support base 12 is rotatably connected to the upper part of the horizontal side of the support frame 11 through a connector. The vertical side of the support frame 11 is an arc plate. The outer side of the arc plate is fixedly connected to the output end of the electric push rod 10. Several arc grooves are evenly opened on the inner side of the arc plate. The bottom of the vertical side of the support base 12 is fixedly connected to the limiting component 9, which matches the arc groove.

[0023] To ensure the stability of the gas cylinder storage and retrieval process, the limiting component 9 includes a fixed plate, a movable part, and springs. The fixed plate is rectangular, and the movable part is bell-shaped. The movable part is slidably sleeved on the fixed plate. Several springs are fixedly connected to the inner side of the movable part, and the other end of the springs is fixedly connected to the fixed plate. During the storage process, the support base 12 is adjusted to a horizontal state, and the bell-shaped movable part of the limiting component 9 is engaged in the corresponding arc-shaped groove of the support frame 11 under the action of the springs to form a stable support.

[0024] To prevent the gas cylinders inside the storage box from shaking violently and colliding with each other, the storage box 3 is filled with sponge around its perimeter.

[0025] To ensure the automation of gas cylinder storage and retrieval as much as possible, the bottom height of the movable plate 14 is the same as the top height of the storage box 3.

[0026] To ensure reliable use of the device and suitability for different storage needs, the main body of storage tank 1 is a straight-sided oval shape, with a lid connected to the top, casters connected to the bottom, and a handrail connected to one side.

[0027] To facilitate the storage and retrieval of gas cylinders, the annular conveying mechanism includes an annular guide rail 2, which is driven by a servo motor. The servo motor is fixedly connected to the bottom of the storage tank 1, and its output shaft passes through the bottom of the storage tank 1 and is connected to the transmission component to control the rotation of the annular guide rail 2. Slides are evenly spaced on the annular guide rail 2, and the storage cylinder box 3 is fixedly connected to the slide. By driving the annular guide rail 2 to rotate through the servo motor, the storage cylinder box 3 can be moved along the track, thereby controlling the corresponding storage cylinder box 3 to move to the corresponding storage and retrieval position.

[0028] It should be noted that in this embodiment, the annular guide rail 2 is an existing device, and its specific structure will not be described in detail here.

[0029] The working process of this embodiment is as follows:

[0030] When storing gas cylinders, open the movable plate 14, adjust the support base 12 to a horizontal position to form a temporary placement platform, place the gas cylinder in the cylinder holder, and use the electric push rod 10 to push the support frame 11 along the limiting rod 13 to the end near the storage box 3. Simultaneously, the servo motor drives the annular guide rail 2 to rotate, aligning the target storage box 3 with the access port. Then, stop the servo motor operation. At the same time, the electric telescopic rod 4 drives the limiting plate 5 to rise to the same height as the opening of the storage box 3, placing the gas cylinder into the corresponding storage box 3. The electric telescopic rod 4 then drives the limiting plate 5 to descend to its original position, reliably limiting the gas cylinder. At this point, the electric push rod 10 retracts, driving the support frame 11 back to its original position. Repeating the above process allows for the storage of other gas cylinders. The storage of the gas cylinders is as follows: When it is necessary to remove the gas cylinder, first control the servo motor to drive the ring guide rail 2 to rotate so that the target storage box 3 is aligned with the storage port. The electric telescopic rod 4 drives the limit plate 5 to rise and lift the gas cylinder. At the same time, the electric push rod 10 pushes the support frame 11 to move to the side close to the gas cylinder. The gas cylinder is then removed and placed on the support frame 11. The limit plate 5 and the support frame 11 are then controlled to return to their original positions, and the gas cylinder can be removed. Throughout the storage process, the gas detection sensor 8 monitors the leakage situation in real time. Once a leakage is detected, the vacuum pump 7 is immediately started to draw the dangerous gas into the gas collection box 6. During the storage and retrieval process, the device can be moved to any position using the handle and casters. The storage situation can be observed at any time by removing the top cover, and the device can be adjusted in a timely manner.

Claims

1. A phosphine gas cylinder storage device, comprising a storage tank (1), characterized in that: The storage tank (1) is equipped with a ring conveying mechanism at the bottom. Several storage bottles (3) are connected to the ring conveying mechanism. The bottom of the storage bottles (3) is fixedly connected to a limit plate (5) via an electric telescopic rod (4). The bottom of the storage tank (1) is also fixedly connected to a gas collection box (6). The top of the gas collection box (6) is connected to a vacuum pump (7) via a connecting pipe. The top of the gas collection box (6) is also connected to a gas detection sensor (8). A movable plate (14) is hinged to the side wall of the storage tank (1). An electric push rod (10) is fixedly connected to the inside of the movable plate (14). A support frame (11) is fixedly connected to the output end of the electric push rod (10). A support seat (12) is rotatably connected inside the support frame (11). The gas detection sensor (8) is communicatively connected to the controller. The vacuum pump (7) is controlled by the controller.

2. The phosphine gas cylinder storage device according to claim 1, characterized in that: Two limiting rods (13) are fixedly connected to the inner side of the movable plate (14), and the support frame (11) is slidably connected to the limiting rods (13).

3. The phosphine gas cylinder storage device according to claim 2, characterized in that: The main body of the support frame (11) and the support base (12) are both "L" shaped. The horizontal side of the support frame (11) is slidably connected to the limiting rod (13). The support base (12) is rotatably connected to the upper part of the horizontal side of the support frame (11) through a connector. The vertical side of the support frame (11) is an arc plate. The outer side of the arc plate is fixedly connected to the output end of the electric push rod (10). Several arc grooves are evenly opened on the inner side of the arc plate. The bottom of the vertical side of the support base (12) is fixedly connected to a limiting component (9). The limiting component (9) matches the arc groove.

4. The phosphine gas cylinder storage device according to claim 3, characterized in that: The limiting component (9) includes a fixed plate, a movable part, and a spring. The fixed plate is rectangular, and the movable part is slidably sleeved on the fixed plate. Several springs are fixedly connected to the inner side of the movable part, and the other end of the spring is fixedly connected to the fixed plate.

5. The phosphine gas cylinder storage device according to claim 1, characterized in that: The storage box (3) is filled with sponge around its sides.

6. The phosphine gas cylinder storage device according to claim 5, characterized in that: The bottom height of the movable plate (14) is the same as the top height of the storage box (3).

7. The phosphine gas cylinder storage device according to claim 1, characterized in that: The storage tank (1) has a lid on top, wheels on the bottom, and a handrail on one side.

8. The phosphine gas cylinder storage device according to claim 1, characterized in that: The annular conveying mechanism includes an annular guide rail (2), which is driven by a servo motor. Slides are provided at equal intervals on the annular guide rail (2), and the storage box (3) is fixedly connected to the slides.

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