Special gas valve distribution cabinet and special gas supply system
By installing a safety box and detection components in the special gas valve distribution cabinet, operation is only permitted when the pressure value of the gas supply branch reaches the set value, thus solving the problem of special gas leakage in the branch and achieving a safe and reliable supply of special gas.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGRAO JINKO SOLAR NO 3 INTELLIGENT MANUFACTURING CO LTD
- Filing Date
- 2025-09-22
- Publication Date
- 2026-07-21
AI Technical Summary
Valve distribution cabinets are prone to leakage of special gases in branch lines, which increases the risk of safety accidents.
A special gas valve distribution cabinet was designed, which includes a cabinet body, a safety box, a gas supply branch, and a detection device. The gas supply branch is located inside the safety box. The detection device is used to obtain the pressure value and open the safety box when the pressure reaches the preset range, ensuring that operation is only allowed when the pressure value of the gas supply branch reaches the set value.
This effectively prevented the leakage of special gases in the gas supply branches, reduced safety risks, and ensured production safety.
Smart Images
Figure CN224534053U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of special gas technology, and in particular to a special gas valve distribution cabinet and a special gas supply system. Background Technology
[0002] A special gas VMB (Valve Manifold Box) is a closed metal enclosure that integrates valves, pipelines, control systems, and safety devices. It is mainly used for the centralized distribution, control, and transportation of special gases, serving as a crucial bridge between the gas source and the production equipment.
[0003] In related technologies, valve distribution cabinets are prone to problems with leakage of special gases in branch circuits. Utility Model Content
[0004] Therefore, it is necessary to provide a special gas valve distribution cabinet and special gas supply system to address the problem of special gas leakage in branch circuits.
[0005] To achieve the above objectives, the technical solution adopted in this application is as follows:
[0006] In a first aspect, embodiments of this application provide a special gas valve distribution cabinet, comprising:
[0007] The cabinet has internal storage compartments;
[0008] A safety box is disposed within the receiving cavity;
[0009] The gas supply branch is located inside the safety box;
[0010] A detection device is installed on the gas supply branch and electrically connected to the safety box to obtain the pressure value on the corresponding gas supply branch.
[0011] The safety box is configured to open when the pressure value of the gas supply branch reaches a preset range.
[0012] In one embodiment of the first aspect, the safety box includes a safety lock and a door, the safety lock being electrically connected to the corresponding gas supply branch and opening the door when the pressure value of the corresponding gas supply branch reaches a preset range.
[0013] In one embodiment of the first aspect, the special gas valve distribution cabinet further includes a pressure regulating valve disposed on the gas supply branch and located inside the safety box.
[0014] In one embodiment of the first aspect, the special gas valve distribution cabinet further includes a pressure regulating valve disposed on the gas supply branch and located outside the safety box.
[0015] In one embodiment of the first aspect, the special gas valve distribution cabinet further includes a first hand valve and a second hand valve, which are distributed and installed at the input end of the gas supply branch.
[0016] In one embodiment of the first aspect, the special gas valve distribution cabinet further includes a first gas path valve and a second gas path valve, wherein the first manual valve, the second manual valve, the first gas path valve and the second gas path valve are distributed sequentially from the input end to the output end of the gas supply branch.
[0017] In one embodiment of the first aspect, the special gas valve distribution cabinet includes a plurality of safety boxes and a plurality of gas supply branches, each safety box being installed inside the cabinet and each gas supply branch being correspondingly arranged inside one of the safety boxes.
[0018] Secondly, embodiments of this application also provide a special gas supply system, including the special gas valve distribution cabinet described in any of the above embodiments.
[0019] In one embodiment of the second aspect, the special gas supply system further includes a special gas source, a safety gas source, and a purging assembly, wherein the special gas source and the safety gas source are respectively connected to the purging assembly, and the purging assembly is connected to the gas supply branch.
[0020] In one embodiment of the second aspect, the purging assembly is electrically connected to the safety box, and the safety box opens when the purging time of the purging assembly reaches a set value and the internal pressure of the air supply branch reaches a set value.
[0021] Compared to related technologies, the advantages of this application are as follows: This application provides a special gas valve distribution cabinet and a special gas supply system. The special gas valve distribution cabinet includes a cabinet body, a safety box, a gas supply branch, and a detection element. The gas supply branch is located inside the safety box, and during the cleaning process of the gas supply branch, the safety box can only be opened when the detection element detects that the pressure of the gas supply branch has reached a set value. In this way, this application can effectively prevent special gas leakage from the gas supply branch and reduce safety risks. Attached Figure Description
[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0023] Figure 1 This is a schematic diagram of the structure of the special gas valve distribution cabinet in some embodiments of this application;
[0024] Figure 2 The following are schematic diagrams of the structure of the safety box in some embodiments of this application;
[0025] Figure 3 This is a schematic diagram of the pressure regulating valve in some embodiments of this application. Figure 1 ;
[0026] Figure 4 This is a schematic diagram of the pressure regulating valve in some embodiments of this application. Figure 2 ;
[0027] Figure 5 This is a schematic diagram of the structure of the special gas supply system in some embodiments of this application.
[0028] Explanation of reference numerals in the attached figures:
[0029] 1000. Special gas supply system;
[0030] 100. Special gas valve distribution cabinet; 110. Cabinet body; 111. Receiving cavity; 120. Safety box; 121. Safety lock; 122. Box door; 123. Box body; 130. Gas supply branch; 140. Detection piece; 150. Pressure regulating valve; 160. First manual valve; 170. Second manual valve; 180. First gas circuit valve; 190. Second gas circuit valve;
[0031] 200. Special gas source; 300. Purge assembly; 400. Safety gas source. Detailed Implementation
[0032] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.
[0033] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.
[0034] Furthermore, where the term "and / or" appears, "and / or" merely describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship. Where the terms "first" and "second" appear, these terms are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" can explicitly or implicitly include at least one of those features. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0035] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0036] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0037] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.
[0038] In the photovoltaic field, specialty gases are indispensable in processes such as thin-film deposition and doping diffusion of solar cells. They directly determine the conversion efficiency and performance level of the cells, making them key materials with extremely high technological content and added value in the entire industry chain. The safe management of specialty gases is extremely important, and it is essential to start with equipment self-protection to reduce or avoid unpredictable losses caused by human error. Among related technologies, VMB (Variable Metal Bulk Filter) gas has too many branch connection points, which can easily lead to misoperation, gas leaks, and serious safety accidents such as poisoning and fires.
[0039] See Figure 1 As shown, to improve the above-mentioned problems, an embodiment of this application provides a special gas valve distribution cabinet 100 to avoid special gas leakage accidents. The special gas valve distribution cabinet 100 includes a cabinet body 110, a safety box 120, a gas supply branch 130, and a detection element 140. The cabinet body 110 has a receiving cavity 111 inside. The safety box 120 is disposed within the receiving cavity 111 and is configured to open when the pressure value of the gas supply branch 130 reaches a preset range. The gas supply branch 130 is disposed within the safety box 120, and the detection element 140 is disposed on the gas supply branch 130 and electrically connected to the safety box 120 to obtain the pressure value of the corresponding gas supply branch 130.
[0040] For example, the special gas valve distribution cabinet 100 also includes a cabinet door, and the cabinet door is connected to the cabinet body 110 to seal all components within the receiving cavity 111 of the cabinet body 110. During the supply of special gases, the gas supply branch 130 is used to deliver the special gases to the production equipment. Both the cabinet body 110 and the gas supply branch 130 are made of stainless steel to ensure high cleanliness, excellent chemical compatibility, low gas adsorption, good sealing, and mechanical strength.
[0041] The detection component 140 is a digital pressure gauge with linkage communication function. The digital pressure gauge uses electronic sensor technology to measure pressure and directly displays the pressure value in digital form. Compared to traditional mechanical pressure gauges, the digital pressure gauge provides direct digital reading, eliminates visual errors, and is clear and intuitive. It also supports data integration, providing analog or digital communication signals for easy connection to PLC (Programmable Logic Controller) systems.
[0042] The safety box 120 can also be made of stainless steel, and the gas supply branch 130 is sealed inside the safety box 120. After the gas supply to the gas supply branch 130 is completed, high-purity nitrogen needs to be supplied to the gas supply branch 130 to purge the gas supply branch 130, so as to avoid the presence of special gas residue in the gas supply branch 130 and avoid safety accidents caused by special gas leakage. In this embodiment of the application, through the setting of the detection element 140 and the safety box 120, if the gas pressure in the gas supply branch 130 obtained by the detection element 140 does not reach the set pressure and the nitrogen purging time is insufficient, the safety box 120 cannot be opened, thereby maximizing production safety.
[0043] Continue reading Figure 1 As shown, the special gas valve distribution cabinet 100 further includes multiple safety boxes 120 and multiple gas supply branches 130. Each safety box 120 is installed inside the cabinet 110, and each gas supply branch 130 is correspondingly set in one safety box 120.
[0044] Understandably, the supply of specialty gases is not limited to a single type of gas or a single production device. The specialty gas valve distribution cabinet 100 is equipped with multiple gas supply branches 130 to meet the simultaneous supply of different specialty gases or the supply of specialty gases to multiple devices. Each gas supply branch 130 is equipped with a detection element 140 and a safety box 120, thereby ensuring that the gas supply branches 130 are isolated from each other and preventing specialty gas leakage from any gas supply branch 130. Furthermore, the specialty gas valve distribution cabinet 100 provided in this embodiment, through the isolation of each gas supply branch 130 by different safety boxes 120, keeps the gas circuit system orderly and avoids operational errors caused by valve mismatch.
[0045] Continue reading Figure 2 As shown, in some embodiments, the safety box 120 includes a safety lock 121 and a door 122. The safety lock 121 is electrically connected to the corresponding air supply branch 130 and opens the door 122 when the pressure value of the corresponding air supply branch 130 reaches a preset range.
[0046] For example, the safety lock 121 is communicatively connected to the detection element 140 to automatically unlock under the control of the PLC system based on the air pressure value and purging time obtained by the detection element 140. The cabinet door 122 can open the cabinet 123 to expose the air supply branch 130, facilitating air circuit operation by the user.
[0047] In one embodiment, the door 122 can be rotatably engaged with the body 123 via a hinge. The body 123 and the door 122 are respectively fixed to the two sides of the hinge, thereby enabling the door 122 to rotate relative to the body 123 to open or close the body 123.
[0048] In another embodiment, the door 122 can be slidably engaged with the box body 123. One of the box body 123 and the door 122 may be provided with a sliding groove, and the other may be provided with a corresponding slider, so that the box body 123 can be opened or closed by sliding the door 122.
[0049] Continue reading Figure 3 As shown, in some embodiments, the special gas valve distribution cabinet 100 further includes a pressure regulating valve 150, which is disposed on the gas supply branch 130 and located inside the safety box 120.
[0050] For example, by synchronously installing the pressure regulating valve 150 within the safety box 120, gas leakage accidents caused by accidental activation of the pressure regulating valve 150 during gas supply are avoided. The pressure regulating valve 150 is a valve that stabilizes fluctuating, higher input pressure to a lower, stable output pressure automatically or manually, thereby adjusting the pipeline delivery pressure of the gas supply branch 130 according to production needs. In this embodiment, the pressure regulating valve 150 is an automatic pressure regulating valve 150. Because the pressure regulating valve 150 is installed within the safety box 120, operators cannot open the safety box 120 to adjust the pressure during gas supply. Thus, the automatic pressure regulating valve 150 facilitates the operator's adjustment of the delivery pressure of the gas supply branch 130.
[0051] Furthermore, the pressure regulating valve 150 is located downstream of the gas supply branch 130 to maintain a stable outlet pressure when the special gas is output.
[0052] Continue reading Figure 4 As shown, in some embodiments, the special gas valve distribution cabinet 100 further includes a pressure regulating valve 150, which is disposed on the gas supply branch 130 and located outside the safety box 120.
[0053] In this embodiment, the pressure regulating valve 150 can be a manual pressure regulating valve 150. Since the pressure regulating valve 150 is located outside the safety box 120, the operator can manually adjust it, which can also meet the pressure regulation of the gas supply branch 130.
[0054] In some embodiments, the special gas valve distribution cabinet 100 further includes a first hand valve 160 and a second hand valve 170, which are distributed and installed at the input end of the gas supply branch 130.
[0055] For example, a manual valve refers to a valve that is opened, closed, or regulates fluid flow by manually operating a handwheel, handle, lever, or gear mechanism. It relies on human power and requires no external power source. Thus, after the gas supply branch 130 is purged, the first manual valve 160 and the second manual valve 170 can be manually closed, providing a physical, absolute disconnection and ensuring complete isolation of the gas supply branch 130 from the gas source during maintenance, commissioning, or emergencies. Simultaneously, the first manual valve 160 and the second manual valve 170 are easy to lock and tag, establishing a clear maintenance boundary and providing maintenance personnel with visible and operable safety locks 121. As a backup for the automatic valves, the manual valves still provide isolation functionality in the event of an automatic valve failure.
[0056] In some embodiments, the special gas valve distribution cabinet 100 further includes a first gas path valve 180 and a second gas path valve 190, and the first manual valve 160, the second manual valve 170, the first gas path valve 180 and the second gas path valve 190 are distributed sequentially from the input end to the output end along the gas supply branch 130.
[0057] For example, the gas path valve is used to control the direction, pressure, flow rate, and on / off state of the special gas flow within the gas supply branch 130, precisely transferring the kinetic energy of the special gas to the production equipment. Under the control of the PLC system, the first gas path valve 180 and the second gas path valve 190 can automatically control the delivery status of the special gas, meeting the continuous and precise process requirements of photovoltaic module manufacturing, and possessing safe and rapid remote cut-off capabilities to ensure the safety of personnel and the plant.
[0058] Continue reading Figure 5 As shown, embodiments of this application also provide a special gas supply system 1000, including the special gas valve distribution cabinet 100 in any of the above embodiments.
[0059] In the production process of photovoltaic modules, the special gas supply system 1000 can stably and safely deliver special gases to the production equipment to ensure the performance of the solar cells. This embodiment has the special gas valve distribution cabinet 100 of any of the above embodiments, and therefore has all the beneficial effects of the special gas valve distribution cabinet 100 of any of the above embodiments, which will not be described in detail here.
[0060] In some embodiments, the special gas supply system 1000 further includes a special gas source 200, a safety gas source 400, and a purging assembly 300, wherein the special gas source 200 and the safety gas source 400 are respectively connected to the purging assembly 300, and the purging assembly 300 is connected to the gas supply branch 130.
[0061] For example, the purging assembly 300 includes multiple gas lines and control valves to control the flow of different gases into the gas supply branch 130, thereby meeting the supply of special gases and the purging requirements of the gas supply branch 130.
[0062] Specialty gas source 200 is a specialty gas storage device that can supply the specialty gases required for the process to the purging assembly 300 and the gas supply branch 130. The types of specialty gases may include phosphorus oxychloride required for PN junction manufacturing, silane required for silicon nitride deposition, and carbon tetrafluoride required for etching, etc. Understandably, different specialty gas storage devices are connected to the purging assembly 300 to distribute the gas to the corresponding gas supply branch 130 via the purging unit.
[0063] The safety gas source 400 is a nitrogen storage device. Nitrogen is distributed in an orderly manner through the purging component 300 to meet the requirements of leak detection of the gas supply branch 130 before the special gas is supplied, maintaining the gas supply pressure during the special gas supply, and purging the pipeline after the gas supply is completed.
[0064] In some embodiments, the purging assembly 300 is electrically connected to the safety box 120, and the safety box 120 opens when the purging time of the purging assembly 300 and the internal pressure of the air supply branch 130 reach a set value.
[0065] For example, after the supply of special gas ends, some special gas remains in the gas supply branch 130. Direct disassembly during maintenance of the gas supply branch 130 would cause a leakage safety accident. Therefore, the gas supply needs to be purged. After closing the connection valve between the special gas source 200 and the gas supply branch 130, the purging assembly 300 continuously supplies nitrogen to the gas supply branch 130 to remove the special gas and reduce the internal pressure of the gas line, facilitating subsequent maintenance and disassembly. Understandably, the purging time and pressure settings for the gas supply branch 130 differ for different special gases to ensure complete removal. The safety box 120 can only be opened when the purging time and the pipeline pressure of the gas supply branch 130 reach the set values, greatly ensuring the safety of operators.
[0066] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0067] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.
Claims
1. A special gas valve distribution cabinet, characterized in that, include: The cabinet has internal storage compartments; A safety box is disposed within the receiving cavity; The gas supply branch is located inside the safety box; A detection device is installed on the gas supply branch and electrically connected to the safety box to obtain the pressure value on the corresponding gas supply branch. The safety box is configured to open when the pressure value of the gas supply branch reaches a preset range.
2. The special gas valve distribution cabinet according to claim 1, characterized in that, The safety box includes a safety lock and a door. The safety lock is electrically connected to the corresponding gas supply branch and opens the door when the pressure value of the corresponding gas supply branch reaches a preset range.
3. The special gas valve distribution cabinet according to claim 1, characterized in that, The special gas valve distribution cabinet also includes a pressure regulating valve, which is installed on the gas supply branch and located inside the safety box.
4. The special gas valve distribution cabinet according to claim 1, characterized in that, The special gas valve distribution cabinet also includes a pressure regulating valve, which is installed on the gas supply branch and located outside the safety box.
5. The special gas valve distribution cabinet according to claim 1, characterized in that, The special gas valve distribution cabinet also includes a first hand valve and a second hand valve, which are distributed and installed at the input end of the gas supply branch.
6. The special gas valve distribution cabinet according to claim 5, characterized in that, The special gas valve distribution cabinet also includes a first gas path valve and a second gas path valve. The first manual valve, the second manual valve, the first gas path valve, and the second gas path valve are distributed sequentially from the input end to the output end of the gas supply branch.
7. The special gas valve distribution cabinet according to claim 1, characterized in that, The special gas valve distribution cabinet includes multiple safety boxes and multiple gas supply branches. Each safety box is installed inside the cabinet, and each gas supply branch is correspondingly set in one of the safety boxes.
8. A special gas supply system, characterized in that, The special gas valve distribution cabinet includes any one of claims 1 to 7.
9. The special gas supply system according to claim 8, characterized in that, The special gas supply system also includes a special gas source, a safety gas source, and a purging assembly. The special gas source and the safety gas source are respectively connected to the purging assembly, and the purging assembly is connected to the gas supply branch.
10. The special gas supply system according to claim 9, characterized in that, The purging assembly is electrically connected to the safety box. When the purging time of the purging assembly reaches the set value and the internal pressure of the air supply branch reaches the set value, the safety box opens.