A liquid medicine supply system

Abstract

The utility model discloses a kind of chemical liquid supply systems, including liquid path component and valve control component, liquid path component includes liquid path passage, multiple pneumatic on-off valves being set on liquid path passage, it is characterized in that, valve control component and each pneumatic on-off valve one-to-one correspondence communication, valve control component includes valve control shell and multiple solenoid valves being installed in valve control shell;Valve control shell has with driving gas source communication one air inlet passage and for with multiple pneumatic on-off valves respectively one-to-one correspondence communication multiple air outlet passages, one air inlet passage via multiple solenoid valves and multiple air outlet passages openable and closable communication, reduce assembly difficulty and error probability, improve the space utilization of valve control component, simplify the structure of overall system, also significantly simplify installation, debugging and maintenance work, reduce maintenance cost and time.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a liquid medicine supply system. Background Technology

[0002] In the chemical coating process of semiconductor manufacturing equipment, in order to coat the semiconductor wafer with a predetermined amount of photoresist solution each time, a supply pump is needed to draw the solution contained in the solution tank and coat the semiconductor wafer with the predetermined amount each time. For example, a solution supply system as described in patent number JP4265820B2 has been proposed. During the wafer coating process, the photoresist needs to be controlled with a stable flow rate and the coating amount within ±0.01ml. Therefore, a more precise pneumatic glue pump is required. The core structure of the pneumatic glue pump consists of two chambers separated by a diaphragm. One side of the diaphragm is a liquid chamber and the other side is a gas chamber. The gas pressure drives the diaphragm to deform and dispense or draw in the photoresist. The stability of the photoresist speed and the repeatability of the coating mainly rely on the pressure stability of the gas chamber.

[0003] Meanwhile, multiple pneumatic on / off valves exist along the liquid flow path of the entire drug supply system to achieve system venting and control the direction of liquid flow. In particular, diaphragm valves are installed for both the inlet and outlet of the pneumatic glue pump. Generally, the pneumatic on / off valves in the drug supply system are normally closed valves, opening only when driving gas enters the valve and pushes the piston. To achieve precise control of each pneumatic on / off valve, multiple pneumatic on / off valves require corresponding multiple air paths and multiple solenoid valves. These structures are collectively referred to as the valve control components of the drug supply system. Each air path must be directly connected to the air source, and the on / off state of each air path is controlled by the corresponding solenoid valve, thereby controlling the corresponding pneumatic on / off valve.

[0004] However, setting up multiple air paths / pipelines in this way makes the air path structure complex, and each air path is difficult to cope with fluctuations in gas pressure. Once gas fluctuations occur, the opening time of individual pneumatic valves will fluctuate. This has a more severe impact on the pneumatic valves controlling the liquid outlet of the pump. If the opening time is different each time, it will lead to inaccurate glue output each time.

[0005] Therefore, the valve control components need to be optimized to solve the problem of complex air circuits for multiple pneumatic on / off valves in the existing drug supply system. Utility Model Content

[0006] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a liquid medicine supply system that solves the problems of complex gas paths and gas fluctuations corresponding to multiple pneumatic opening and closing valves in the existing liquid medicine supply system.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A liquid medicine supply system includes a liquid circuit assembly and a valve control assembly. The liquid circuit assembly includes a liquid circuit channel and a plurality of pneumatically operated on-off valves disposed on the liquid circuit channel.

[0009] The valve control assembly includes a valve control housing and a plurality of solenoid valves installed in the valve control housing, the number of solenoid valves being the same as the number of pneumatic on / off valves;

[0010] The valve control housing has an air inlet channel and multiple air outlet channels that are respectively connected to the multiple pneumatic on / off valves. The air inlet channel includes an air inlet section connected to the driving air source and a buffer section connected to the air inlet section.

[0011] The valve control housing also has a plurality of diversion holes corresponding to and communicating with the buffer section, and a plurality of diffuser holes corresponding to and communicating with the plurality of air outlet channels respectively. Each diversion hole corresponds to the first port of each solenoid valve, and each diffuser hole corresponds to the second port of each solenoid valve, so that one air inlet channel can be opened and closed to the plurality of air outlet channels via the plurality of solenoid valves.

[0012] The drug supply system of this utility model combines the original multiple air inlet pipes connected to the gas source at the front end of multiple solenoid valves into a single air inlet channel located inside the valve control housing. Then, the gas in the air inlet channel is distributed to the corresponding solenoid valves through various diversion holes, and then flows to the corresponding pneumatic opening and closing valves through various outlet channels to open the valves. That is, working gas is provided to all solenoid valves simultaneously through a single air inlet channel, realizing centralized management and efficient distribution of gas during gas intake.

[0013] Meanwhile, the gas undergoes uniform buffering and pressure stabilization within the buffer section of the intake channel to suppress pressure fluctuations. The buffer section also ensures that the gas source pressure obtained by all solenoid valves is basically consistent. This not only avoids pressure fluctuations in a single intake channel from affecting the fluctuations of multiple pneumatic on / off valves, but also ensures the consistency of the opening of multiple pneumatic on / off valves. In the original case where multiple solenoid valves are connected to the gas source through multiple pipelines, although multiple solenoid valves with corresponding pipelines can prevent gas fluctuations in one pipeline from affecting the gas in other pipelines, multiple pneumatic on / off valves need to be opened simultaneously when the liquid supply system is drawing or discharging liquid. For example, two pneumatic on / off valves need to be opened when drawing liquid. If the existing design of multiple solenoid valves with multiple pipelines is used, due to uncontrollable factors in pipeline manufacturing and installation, it is impossible to guarantee the uniformity of the two pipelines. If the gas fluctuations in one pipeline occur while the gas in the other pipeline is normal, the consistency of the two pneumatic on / off valves will be greatly affected, thus affecting the drawing of liquid. In summary, by combining a single air intake channel with its internal buffer section, not only can centralized gas supply management and efficient distribution be achieved, but also centralized buffering of air pressure fluctuations can be used to avoid affecting each pneumatic valve, while ensuring the consistency of opening of multiple pneumatic valves.

[0014] Furthermore, the valve control assembly achieves a one-to-one correspondence between the drive air source and each pneumatic on / off valve through multiple solenoid valves and an air inlet channel and multiple air outlet channels within the valve control housing. This highly integrates and simplifies the air path between the drive air source and each pneumatic on / off valve. By centrally installing multiple solenoid valves in a single valve control housing and using the pre-set air inlet channel, diversion orifice, diffuser orifice, and air outlet channel within the valve control housing, the solenoid valves control the openable and closable connection of the air inlet and outlet channels. This precisely controls the openable and closable connection of the air path between the drive air source and each pneumatic on / off valve, thereby greatly reducing the number and complexity of external air pipes, pipe fittings, and tees, lowering assembly difficulty and the probability of errors, improving the space utilization of the valve control assembly, simplifying the overall system structure, and significantly simplifying installation, commissioning, and maintenance work, thus reducing maintenance costs and time.

[0015] Preferably, the air intake channel includes an air intake section connected to the driving air source and a buffer section intersecting the air intake section. The buffer section includes a first buffer chamber and a second buffer chamber intersecting the first buffer chamber, and multiple flow dividers correspond to and are connected to the second buffer chamber.

[0016] This configuration, with the intake section and buffer section angled, forces the gas to impact the cavity wall, converting kinetic energy into static pressure. Simultaneously, it disperses the original flow stream, preventing high-speed airflow entering the intake section from directly impacting the downstream distribution orifice and causing pressure fluctuations. The airflow, after turning, forms vortices or turbulence, accelerating gas mixing within the buffer cavity and resulting in a more uniform pressure distribution, essentially ensuring consistent pressure across all distribution orifices. Simultaneously, the first buffer cavity forms a primary buffer cavity, capable of absorbing pressure fluctuations or airflow pulsations from the driving gas source, making the airflow entering the second buffer cavity more stable. The second buffer cavity, as a shared and relatively large chamber, forms a secondary pressure-stabilizing cavity and distributes gas. Its relatively large cross-sectional area and volume minimize the pressure impact of gas intake from one distribution orifice on other distribution orifices, greatly reducing mutual interference between the various solenoid valve branches.

[0017] Preferably, the valve control housing includes a valve air passage housing and a valve mounting plate covering the valve air passage housing. Each of the solenoid valves is mounted on the back side of the valve mounting plate away from the valve air passage housing. Multiple diversion holes are spaced through the valve mounting plate, and multiple diffuser holes are spaced through the valve mounting plate.

[0018] The valve air passage housing and the valve mounting plate are respectively provided with a first buffer groove and a second buffer groove intersecting the first buffer groove on their opposite surfaces along the thickness direction. The first buffer groove connects the air inlet section and the second buffer groove. The first buffer groove and the second buffer groove are respectively sealed and connected with the opposite surface of the other to form the first buffer cavity and the second buffer cavity.

[0019] This application sets the valve control housing as a split structure, and separates the air circuit part from the electrical control part through the valve mounting plate. This design greatly reduces the processing difficulty of each channel and hole, makes the processing method flexible and efficient, allows for a wide range of material selection to adapt to different working conditions, simplifies assembly, reduces costs, and facilitates maintenance and repair. On the other hand, by centrally mounting all solenoid valves on one side of the valve mounting plate, the entire plate of solenoid valves can be disassembled and assembled, greatly improving assembly efficiency, while achieving electrical isolation and reducing the failure rate of electronic components. At the same time, the sealing fit between the valve air circuit housing and the valve mounting plate forms the first buffer chamber and the second buffer chamber. The sealing failure only occurs at the planar joint, the fault point is clear and easy to detect, and the processing technology is simplified while meeting the sealing requirements of the intake air passage.

[0020] Preferably, the first buffer groove and the second buffer groove are both provided on the opposite surface of the valve air passage housing. The first buffer groove includes a first depth groove and a second depth groove. The air inlet section is connected to the first depth groove. The first depth groove has a recess depth of L1 along the thickness direction of the valve air passage housing, and the second depth groove has a recess depth of L2 along the thickness direction of the valve air passage housing, where L1 > L2.

[0021] With this configuration, after the high-speed airflow enters the deeper first depth slot from the intake section, the large volume of the first depth slot can absorb the airflow impact, the airflow diffuses and slows down, and the kinetic energy is converted into static pressure, which helps to weaken gas fluctuations. Then, the buffered gas enters the second depth slot, where the shallower depth creates appropriate flow resistance, finely adjusting the pressure distribution. At the same time, the second depth slot, with its reduced cross-sectional area, can appropriately increase the gas flow rate, so that the gas can quickly enter the subsequent second buffer chamber for balanced gas distribution.

[0022] Preferably, the second buffer groove has a recess depth of L3 along the thickness direction of the valve air passage housing, satisfying L1>L3>L2.

[0023] In this configuration, the first depth groove buffers the gas at high altitudes and reduces gas fluctuations, effectively absorbing gas source impacts and outputting a preliminary stable pressure. The second depth groove regulates pressure and increases gas flow rate, allowing the gas after the preliminary stable pressure to quickly enter the second buffer groove and rapidly fill the second buffer chamber. The second buffer groove corresponding to each diversion hole has a large volume, making it a natural pressure equalizer and a buffer kinetic energy reserve. If the depth of the second buffer groove is too deep, the volume will be too large, requiring too much gas and slowing down the gas flow rate, which is detrimental to the distant diversion holes. If it is too shallow, the volume will be too small, storing insufficient gas, causing the gas to quickly pass over the diversion holes, which is not conducive to the intake of the diversion holes. The second buffer chamber of this application balances response speed and buffering performance.

[0024] Preferably, the diversion hole includes a mating groove and a connecting hole. The mating groove is formed on the opposite surface of the valve mounting plate and is used to communicate with the second buffer groove. The connecting hole extends through the valve mounting plate from the mating groove along the thickness direction of the valve mounting plate, and the inner diameter of the connecting hole is smaller than the inner diameter of the mating groove.

[0025] This configuration serves two purposes. First, the second buffer chamber is formed by the sealing of the second buffer groove and the opposing surfaces of the valve mounting plate. The diversion hole is located on the valve mounting plate. The mating groove is sealed to the second buffer groove, and the connecting hole is sealed to the solenoid valve. After the valve mounting plate is sealed to the valve air passage housing, the connecting hole is exposed on the outside, facilitating installation with the solenoid valve. However, the mating groove is not visible. Therefore, the inner diameter of the mating groove is appropriately increased to ensure that even if there is a slight misalignment between the valve mounting plate and the valve air passage housing, the mating groove can still seal to the second buffer groove, thus ensuring the air passage connection from the intake airway to the solenoid valve. Second, the mating groove can also serve as a pre-expansion chamber, allowing the airflow from the second buffer chamber to diffuse and slow down, converting kinetic energy into static pressure, further reducing pressure fluctuations at the intake end. Then, the connecting hole narrows its inner diameter, increasing the gas flow rate, allowing the gas to quickly enter the solenoid valve and improving response efficiency. When the solenoid valve starts or stops, the small-diameter connecting hole can also suppress the reverse propagation of pressure fluctuations to the second buffer chamber through the damping effect of the small orifice, preventing it from affecting the pressure stability of other solenoid valves.

[0026] Preferably, the first buffer groove extends along a first direction of the valve air passage housing, the second buffer groove extends along a second direction, the first direction is perpendicular to the second direction, the width of the mating groove along the first direction is D1, the width of the second buffer groove along the first direction is D2, and the inner diameter of the connecting hole is D3, satisfying that D1 > D2 > D3.

[0027] With this configuration, the second buffer groove is an elongated groove extending in the second direction. When the mating groove mates with the second buffer groove, its width in the first direction is appropriately increased. Even if there is a slight misalignment between the valve mounting plate and the valve air passage housing, the mating groove can still seal with the second buffer groove to ensure the air passage from the intake air passage to the solenoid valve is connected. The inner diameter of the connecting hole is smaller than the width of the second buffer groove. The purpose is to increase the gas flow rate by reducing the inner diameter of the connecting hole, and to make the connecting hole also serve to isolate pressure fluctuations.

[0028] Preferably, the plurality of air outlet channels are spaced apart in the valve control housing along the second direction, and the plurality of solenoid valves are arranged along the second direction.

[0029] With this arrangement, the solenoid valves are arranged in a linear and compact manner, corresponding to the second buffer chamber and the diversion orifice, which improves space utilization and makes the wiring of the solenoid valves neater, facilitating processing and maintenance. Similarly, each air outlet channel corresponds to the second port of each solenoid valve and is arranged at intervals along the second direction, so that all air outlet channels are located on the same side of the valve control housing, which facilitates processing and subsequent connection with each pneumatic on / off valve.

[0030] Preferably, the valve air passage housing is further provided with an exhaust groove on the opposite surface. The exhaust groove and the opposite surface of the valve mounting plate are sealed together to form an exhaust channel. The valve mounting plate has a plurality of exhaust holes that are arranged through the thickness direction of the valve mounting plate. Each of the exhaust holes is connected to the third port of each of the solenoid valves and the exhaust channel. The exhaust channel is connected to the exhaust channel via the solenoid valve in an openable and closable manner.

[0031] With this configuration, the pneumatic opening and closing valve needs to vent when it is closed. The separate venting channel ensures that the venting of a single pneumatic opening and closing valve does not need to return to the intake channel, thus ensuring that the venting and intake are independent and do not interfere with each other. Ultimately, this ensures the stability of the intake and exhaust, as well as the stability of the pneumatic opening and closing valve when it is open and closed.

[0032] Preferably, the valve air passage housing has a shaped groove on the side facing the valve mounting plate, and the shaped groove is fitted with a shaped sealing element. The shaped sealing element includes an integral surround, a first surround and a second surround. The two ends of the first surround are connected to the surround to form a first sealing ring, and the two ends of the second surround are connected to the first surround to form a second sealing ring.

[0033] The surrounding body surrounds and seals the first buffer groove and the second buffer groove. The openings of each of the diversion holes facing the buffer section are located inside the surrounding body. The first sealing ring surrounds and seals the outer periphery of the exhaust groove. The openings of each exhaust hole facing the exhaust groove are located inside the first sealing ring. The number of the second surrounding bodies is equal to the number of the air outlet channels. The second sealing ring surrounds and seals the outer periphery of the openings of each of the air outlet channels on the surface of the valve air passage housing. The diffuser holes and the openings facing the air outlet channels are located inside the second sealing ring.

[0034] With this configuration, the valve air passage housing and valve mounting plate together form the buffer section of the intake channel and the exhaust channel. Therefore, the seal between the valve air passage housing and valve mounting plate is crucial for the sealing performance of the buffer section and the exhaust channel, and there are many places that need to be sealed. Thus, using an integrated irregularly shaped seal not only improves the installation efficiency of the seal, but also avoids the risk of leakage caused by a single seal lifting up during installation, thereby improving the sealing effect of the buffer section and the exhaust channel. At the same time, the irregularly shaped groove plays a positioning role for the irregularly shaped seal, preventing the irregularly shaped seal from shifting during installation and causing sealing failure. The buffer section and the exhaust groove are set adjacent to each other, and the seals on their outer periphery share a common edge. Independent sealing of both can be achieved using the same irregularly shaped seal, optimizing the spatial design of the valve control housing.

[0035] In summary, compared with the prior art, the present invention has at least the following beneficial effects:

[0036] The valve control assembly of this utility model achieves one-to-one communication with each pneumatic on / off valve through multiple solenoid valves and an air inlet channel and multiple air outlet channels within the valve control housing. This highly integrates and simplifies the air path between the driving air source and each pneumatic on / off valve. Multiple solenoid valves are centrally installed in a valve control housing, and the solenoid valves control the openable and closable connection between the air inlet channel and the air outlet channel through the pre-set air inlet channel, diversion hole, diffuser hole, and air outlet channel in the valve control housing. This precisely controls the openable and closable conduction of the air path between the driving air source and each pneumatic on / off valve, thereby greatly reducing the number and complexity of external air pipes, pipe joints, tees, and other connecting parts, reducing assembly difficulty and error probability, improving the space utilization of the valve control assembly, simplifying the overall system structure, and significantly simplifying installation, debugging, and maintenance work, reducing maintenance costs and time.

[0037] Meanwhile, the air inlet channel, diversion hole, diffuser hole, and outlet channel located in the valve control housing can ensure airtightness, improve system reliability and reduce leakage points. They can also avoid external forces from interfering with and damaging the air path inside the valve control housing, resulting in stronger structural stability. Moreover, compared with external air pipes, the gas transmission distance is greatly shortened, effectively reducing the air path volume and flow resistance, enabling the pneumatic on / off valve to obtain driving air pressure (opening) and exhaust air (closing) more quickly, thereby improving the switching response speed and control accuracy of the pneumatic on / off valve.

[0038] More preferably, this utility model combines multiple air inlet pipes of multiple solenoid valves into a single air inlet channel, and then distributes the air to the corresponding solenoid valve through each diversion hole, and then to the corresponding pneumatic on / off valve through each outlet channel. That is, the working gas is provided to all solenoid valves simultaneously through a single air inlet channel, realizing centralized management and efficient distribution of gas during air intake, ensuring that the air source pressure obtained by all solenoid valves is consistent, and further simplifying the air path of the valve control component. Attached Figure Description

[0039] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the drug supply system according to an embodiment of the present invention;

[0041] Figure 2 This is a schematic diagram of the valve control assembly according to an embodiment of the present invention;

[0042] Figure 3This is a cross-sectional schematic diagram of the valve control assembly according to an embodiment of the present utility model;

[0043] Figure 4 This is a cross-sectional schematic diagram of the air intake channel in an embodiment of the present utility model;

[0044] Figure 5 This is a schematic diagram of the valve air passage housing according to an embodiment of the present utility model;

[0045] Figure 6 This is a schematic diagram of the valve mounting plate according to an embodiment of the present utility model;

[0046] Figure 7 This is a schematic diagram of the other side of the valve mounting plate in an embodiment of the present utility model;

[0047] Figure 8 for Figure 4 Enlarged view of point B in the image.

[0048] Explanation of reference numerals in the attached figures

[0049] 10. Hydraulic circuit assembly; 11. Supply pump; 12. Inlet assembly; 13. Drain assembly; 14. Pneumatic on / off valve;

[0050] 20. Valve control housing; 21. Inlet passage; 211. Inlet section; 212. Buffer section; 213. First buffer chamber; 214. Second buffer chamber; 22. Outlet passage; 23. Diverter hole; 231. Connecting groove; 232. Connecting hole; 24. Diffuser hole; 25. Valve air passage housing; 251. First buffer groove; 252. Second buffer groove; 253. First depth groove; 254. Second depth groove; 255. Exhaust groove; 256. Irregular groove; 26. Valve mounting plate; 261. Exhaust hole; 27. Exhaust passage; 28. Irregular seal; 281. Surrounding body; 282. First surrounding body; 283. Second surrounding body;

[0051] 30. Solenoid valve. Detailed Implementation

[0052] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0053] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0054] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0055] like Figure 1 As shown, the liquid supply system of this utility model embodiment includes a liquid circuit assembly 10 and a valve control assembly. The liquid circuit assembly 10 includes a supply pump 11, an inlet assembly 12 for supplying liquid to the supply pump 11, and a drain assembly 13 for conveying the liquid flowing out of the supply pump 11 to the next process. The liquid circuit channel includes channels through which the liquid in the inlet assembly 12 and the drain assembly 13 flows. The multiple pneumatic on / off valves 14 disposed on the liquid circuit channel include at least an inlet pneumatic on / off valve 14 in the inlet assembly 12 and a drain pneumatic on / off valve 14 in the drain assembly 13. The valve control assembly is connected to each pneumatic on / off valve 14 in a one-to-one correspondence. The pneumatic on / off valve is specifically a pneumatic diaphragm valve. The valve control assembly of this embodiment is highly integrated and simplifies the air circuit between the driving air source and each pneumatic on / off valve 14. Multiple solenoid valves 30 are centrally installed in a valve control housing 20, which improves the space utilization of the valve control assembly, simplifies the structure of the overall system, and significantly simplifies the installation, debugging and maintenance work, reducing maintenance costs and time.

[0056] like Figure 2As shown, the valve control assembly includes a valve control housing 20 and multiple solenoid valves 30 installed within the valve control housing 20. The valve control housing 20 has an air inlet channel 21 connected to a driving air source and multiple air outlet channels 22 connected to multiple pneumatic on / off valves 14 respectively. The air inlet channel 21 includes an air inlet section 211 connected to the driving air source and a buffer section 212 intersecting with the air inlet section 211. The valve control housing 20 also has multiple diversion holes 23 connected to a buffer section 212 and multiple diffuser holes 24 connected to multiple air outlet channels 22 respectively. Each diversion hole 23 corresponds to a first port of each solenoid valve 30, where the first port represents a valve inlet. Each diffuser hole 24 corresponds to a second port of each solenoid valve 30, where the second port represents a valve outlet. The air inlet channel 21 is connected to the multiple air outlet channels 22 via multiple solenoid valves 30 in an openable / closeable manner. It should be noted that when the liquid supply system is drawing or discharging liquid, the supply pump 11 is equipped with a reservoir, filter, exhaust channel and other structures. Since there are multiple pneumatic valves controlling the liquid inlet, the diaphragm pump will need multiple pneumatic valves to be opened at the same time. For example, two pneumatic valves need to be opened when drawing liquid, or multiple pneumatic valves in the system need to be opened at the same time before using the entire liquid supply system. It is not necessarily limited to multiple pneumatic valves at the front end of the diaphragm pump.

[0057] By using the pre-set air inlet channel 21, diversion hole 23, diffuser hole 24, and outlet channel 22 in the valve control housing 20, the solenoid valve 30 controls the openable and closable connection between the air inlet channel 21 and the outlet channel 22, thereby precisely controlling the openable and closable connection of the air path between the driving air source and each pneumatic on / off valve 14. This greatly reduces the number and complexity of external air pipes, pipe joints, and tees, reducing assembly difficulty and the probability of errors. At the same time, the air inlet channel 21, diversion hole 23, diffuser hole 24, and outlet channel 22 located in the valve control housing 20 can ensure airtightness, improve system reliability and reduce leakage points, and also avoid external forces from interfering with and damaging the air path inside the valve control housing 20, resulting in stronger structural stability. Moreover, compared with external air pipes, the gas transmission distance is greatly shortened, effectively reducing the air path volume and flow resistance, enabling the pneumatic on / off valve 14 to obtain driving air pressure (opening) and exhaust air (closing) more quickly, thereby improving the switching response speed and control accuracy of the pneumatic on / off valve 14.

[0058] More preferably, this utility model combines the air intake pipes of multiple solenoid valves 30 into a single air intake channel 21, and then distributes the air to the corresponding solenoid valve 30 through each diversion hole 23, and then to the corresponding pneumatic on / off valve 14 through each outlet channel 22. That is, the working gas is provided to all solenoid valves 30 simultaneously through a single air intake channel 21, realizing centralized management and efficient distribution of gas intake, ensuring that the air source pressure obtained by all solenoid valves 30 is consistent, and further simplifying the air path of the valve control component.

[0059] like Figure 3 As shown, the intake section 211 and the buffer section 212 are arranged intersectingly. The buffer section 212 includes a first buffer chamber 213 and a second buffer chamber 214 that is arranged intersecting with the first buffer chamber 213. Multiple diversion holes 23 correspond to and are connected to the second buffer chamber 214.

[0060] The cross-configuration refers to the fact that the intake section 211 and the buffer section 212 are set at an angle, so that the gas turns when it enters the buffer section 212 from the intake section 211. Similarly, the first buffer chamber 213 and the second buffer chamber 214 are set at an angle, so that the gas turns when it enters the second buffer chamber 214 from the first buffer chamber 213. The angle is not limited to 90°. Preferably, the intake section 211 and the buffer section 212 are perpendicular, and the first buffer chamber 213 and the second buffer chamber 214 are perpendicular. Thus, the intake section 211, the first buffer chamber 213, and the second buffer chamber 214 form a similar configuration. Shape structure.

[0061] Fluctuations in the gas source can affect the opening and closing time of the pneumatic valve 14 when gas enters the inlet channel, leading to reduced control accuracy. In this embodiment, the inlet section 211 and the buffer section 212 are angled, forcing the gas to impact the cavity wall, converting kinetic energy into static pressure, and simultaneously dispersing the original flow stream. This prevents the high-speed airflow entering the inlet section 211 from directly impacting the downstream diversion hole 23, causing pressure fluctuations. After the airflow turns, it forms vortices or turbulence, accelerating gas mixing in the buffer cavity, resulting in a more uniform pressure distribution and ensuring consistent pressure across all diversion holes 23. Secondly, the first buffer cavity 213 forms a primary buffer cavity, capable of accommodating and absorbing the driving gas source. Pressure fluctuations or airflow pulsations make the airflow entering the second buffer chamber 214 more stable. The second buffer chamber 214, as a shared and relatively large chamber, forms a secondary pressure stabilizing chamber and distributes gas. Its relatively large cross-sectional area and volume minimize the pressure impact of taking gas from one branch orifice 23 on other branch orifices 23, greatly reducing the mutual interference between the branches of each solenoid valve 30. Especially when multiple solenoid valves 30 are opened simultaneously or rapidly and continuously, the instantaneous flow demand increases dramatically. The existence of the second buffer chamber 214 provides a local gas source reserve, reduces the immediate impact of the pressure drop in the intake channel 21 caused by the increase in instantaneous flow on the pneumatic on-off valve 14, and maintains pressure stability.

[0062] In some embodiments, the valve control housing 20 is an integral housing, with the air inlet channel 21, the flow divider 23, the flow diffuser 24, and the air outlet channel 22 directly formed inside and on the surface of the valve control housing 20, which has extremely high airtightness and structural strength, ensuring the stability of the air path.

[0063] In such Figures 4 to 7In this embodiment, the valve control housing 20 includes a valve air passage housing 25 and a valve mounting plate 26 covering the valve air passage housing 25. Each solenoid valve 30 is mounted on the back side of the valve mounting plate 26 away from the valve air passage housing 25. Multiple diversion holes 23 are spaced through the valve mounting plate 26, and multiple diffuser holes 24 are spaced through the valve mounting plate 26. The valve control housing 20 is designed as a split structure, and the air passage part and the electrical control part are separated by the valve mounting plate 26. This design greatly reduces the processing difficulty of each channel and hole, makes the processing method flexible and efficient, allows for a wide range of material selection to adapt to different working conditions, simplifies assembly, reduces costs, and facilitates maintenance and repair. On the other hand, by concentrating all the solenoid valves 30 on the back side of the valve mounting plate 26, the entire plate of solenoid valves 30 can be disassembled and assembled, greatly improving assembly efficiency, while also achieving electrical isolation and reducing the failure rate of electronic components.

[0064] A first buffer groove 251 and a second buffer groove 252 intersecting the first buffer groove 251 are recessed along the thickness direction on the opposite surface of one of the valve air passage housing 25 and the valve mounting plate 26. The first buffer groove 251 and the second buffer groove 252 respectively seal and connect with the opposite surface of the other to form a first buffer cavity 213 and a second buffer cavity 214. It can be understood that the opposite surface is the surface of the two components facing each other, that is, the surface facing each other. That is, the first buffer groove 251 and the second buffer groove 252 can be provided on the valve air passage housing 25 or on the valve mounting plate 26. The first buffer groove 251 connects the air intake section 211 and the second buffer groove 252. The first buffer cavity 213 and the second buffer cavity 214 are formed by the sealing fit between the opposite surfaces of the valve air passage housing 25 and the valve mounting plate 26. The sealing failure only occurs at the planar joint, the fault point is clear and easy to detect, and the manufacturing process is simplified while meeting the sealing requirements of the air intake passage.

[0065] Preferred, such as Figure 5 In the embodiment shown, the first buffer groove 251 and the second buffer groove 252 are disposed on the valve air passage housing 25, and the two form an L-shape on the opposite surface of the valve air passage housing 25. At the same time, the air inlet section 211 is disposed on the valve air passage housing 25 and directly connects with the first buffer groove 251 to improve the continuity of the air passage.

[0066] like Figure 4 and Figure 8As shown, the first buffer groove 251 includes a first depth groove 253 and a second depth groove 254. The air inlet section 211 is connected to the first depth groove 253. The first depth groove 253 has a recess depth of L1 along the thickness direction of the valve air passage housing 25, and the second depth groove 254 has a recess depth of L2 along the thickness direction of the valve air passage housing 25, where L1 > L2. With this configuration, the first depth groove 253 has a large volume. After the high-speed airflow enters the deeper first depth groove 253 from the air inlet section 211, the large volume of the first depth groove 253 can absorb the airflow impact, diffuse and slow down the airflow, and convert kinetic energy into static pressure, which is beneficial to weakening gas fluctuations. At the same time, the first depth groove 253 has the function of turning the gas. After the gas is turned and buffered, it enters the second depth groove 254. The second depth groove 254 is shallower, forming a moderate flow resistance and finely adjusting the pressure distribution. At the same time, the second depth groove 254, with its reduced cross-sectional area, can appropriately increase the gas flow rate so that the gas can quickly enter the subsequent second buffer chamber 214 for balanced gas distribution. The second buffer groove 252 has a recess depth of L3 along the thickness direction of the valve gas passage housing 25, satisfying L1 > L3 > L2. With this setting, the first depth groove 253 plays the role of buffering high-pressure gas and reducing gas fluctuations, which can strongly absorb the gas source impact and output a preliminary stable pressure. The second depth groove 254 plays the role of regulating pressure and increasing gas flow rate, so that the gas after the preliminary stable pressure quickly enters the second buffer groove 252 and quickly fills the second buffer chamber 214. The second buffer groove 252 corresponding to each diversion hole 23 has a large volume, making it a natural pressure equalizer and a buffer kinetic energy reserve pool. If the recess depth of the second buffer groove 252 is too deep, the volume is too large, the required gas volume is too large, the gas flow rate is slowed down, which is not good for the distant diversion hole 23. If it is too shallow, the volume is too small, the stored gas volume is insufficient, and the gas quickly passes over the diversion hole 23, which is not good for the diversion hole 23 to enter. The second buffer chamber 214 of this application takes into account both response speed and buffer performance.

[0067] like Figure 2 As shown, the first buffer groove 251 extends along the first direction of the valve air passage housing 25, and the second buffer groove 252 extends along the second direction. The first direction is perpendicular to the second direction. In other words, the first direction is the width direction of the valve air passage housing 25. Figure 2 The horizontal direction is the first direction, and the second direction is the length direction of the valve air passage housing 25. Figure 2 In the vertical direction, the second buffer groove 252 is an elongated groove extending in the second direction. Multiple solenoid valves 30 are arranged along the second direction. In this arrangement, the arrangement of the solenoid valves 30 corresponds to the arrangement of the second buffer chamber 214 and the diversion hole 23, which is linear and compact, improving space utilization. The wiring of the solenoid valves 30 can be neater, which is convenient for processing and maintenance.

[0068] Based on the arrangement of multiple solenoid valves 30, each air outlet channel 22 corresponds to the second port of each solenoid valve 30. Therefore, multiple air outlet channels 22 are spaced apart in the valve control housing 20 along the second direction, so that all air outlet channels 22 are located on the same side of the valve control housing 20, which facilitates processing and subsequent connection with each pneumatic on / off valve 14.

[0069] like Figure 4 , Figure 6 and Figure 7 As shown, in order to achieve a sealed connection between the diversion hole 23 and the second buffer groove 252, the diversion hole 23 includes a docking groove 231 and a connecting hole 232. The docking groove 231 is formed on the opposite surface of the valve mounting plate 26 and is used to communicate with the second buffer groove 252. The connecting hole 232 extends through the valve mounting plate 26 from the docking groove 231 along the thickness direction of the valve mounting plate 26. The inner diameter of the connecting hole 232 is smaller than the inner diameter of the docking groove 231. Preferably, the width of the docking groove 231 along the first direction is D1, the width of the second buffer groove 252 along the first direction is D2, and the inner diameter of the connecting hole 232 is D3, satisfying that D1 > D2 > D3.

[0070] After the valve mounting plate 26 and the valve air passage housing 25 are sealed and connected, the connecting hole 232 is exposed on the outside, which is convenient for docking and installation with the solenoid valve 30. However, the docking groove 231 is not visible. Therefore, the inner diameter of the docking groove 231 is appropriately increased to ensure that even if the valve mounting plate 26 and the valve air passage housing 25 are slightly misaligned, the docking groove 231 can still be sealed and connected with the second buffer groove 252 to ensure the air passage from the inlet air passage to the solenoid valve 30 is connected. On the other hand, the docking groove 231 can also serve as a pre-expansion chamber, so that the airflow from the second buffer chamber 214 first diffuses and slows down, converting kinetic energy into static pressure, further reducing the pressure fluctuation at the inlet end. Then, the inner diameter of the connecting hole 232 is reduced to increase the gas flow rate, so that the gas can quickly enter the solenoid valve 30 and improve the response efficiency. When the solenoid valve 30 is started and stopped, the small inner diameter of the connecting hole 232 can also suppress the reverse propagation of air pressure fluctuation to the second buffer chamber 214 through the small diameter damping effect, so as to avoid affecting the pressure stability of other solenoid valves 30.

[0071] like Figure 5As shown, an exhaust groove 255 is also provided on the opposite surface of the valve air passage housing 25. The exhaust groove 255 and the opposite surface of the valve mounting plate 26 are sealed and connected to form an exhaust channel 27. The valve mounting plate 26 has multiple exhaust holes 261 that are arranged through the thickness direction of the valve mounting plate 26. Each exhaust hole 261 is connected to the third port of each solenoid valve 30 and the exhaust channel 27. The third port represents another outlet of the valve. The exhaust channel 22 is connected to the exhaust channel 27 via the solenoid valve 30 and can be opened and closed. The pneumatic opening and closing valve 14 needs to exhaust when it is closed. A separate exhaust groove 255 is provided so that when a single pneumatic opening and closing valve 14 exhausts, it does not need to return to the intake channel 21, ensuring that the exhaust is independent and the intake is independent, and they do not interfere with each other. Ultimately, this ensures the stability of intake and exhaust, as well as the stability of the pneumatic opening and closing valve 14 when it is open and closed.

[0072] The solenoid valve 30 can be a normally closed two-position three-way single-electric control solenoid valve 30. When energized, the solenoid valve 30 connects the diverting orifice 23 and the diffuser orifice 24. Gas enters the intake channel 21 from the driving gas source, then enters the solenoid valve 30 through the diverting orifice 23, and then enters the outlet channel 22 through the diffuser orifice 24. Finally, it enters the pneumatic on / off valve 14 to drive the valve to open. When de-energized, the solenoid valve 30 connects the diffuser orifice 24 and the exhaust port 261. The gas in the pneumatic on / off valve 14 enters the exhaust channel 27 through the exhaust port 261 and is discharged to drive the valve to close.

[0073] The valve air passage housing 25 and the valve mounting plate 26 together form the buffer section 212 of the intake passage 21 and the exhaust passage 27. Therefore, the seal between the valve air passage housing 25 and the valve mounting plate 26 is crucial to the sealing performance of the buffer section 212 and the exhaust passage 27. Figure 3As shown, a shaped groove 256 is formed on the side of the valve air passage housing 25 facing the valve mounting plate 26. A shaped sealing element 28 is fitted to the shaped groove 256. The shaped sealing element 28 includes an integral surround 281, a first surround 282, and a second surround 283. The surround 281 surrounds and seals the first buffer groove 251 and the second buffer groove 252. Each diversion hole 23 faces the opening of the buffer section 212, i.e., the mating groove 231 is located inside the surround 281. Thus, when the opposite surface of the valve mounting plate 26 abuts against the shaped sealing element 28, the mating groove 231 and the second buffer groove 252 are sealed and connected. The first buffer groove 251 and the second buffer groove 252 are L-shaped, and the shape of the surround 281 matches the shape of the first buffer groove 251 and the second buffer groove 252. The two ends of the first surround 282 are connected to... A first sealing ring is formed on the surrounding body 281, which surrounds the outer periphery of the sealing exhaust groove 255. The openings of each exhaust hole 261 facing the exhaust groove 255 are located inside the first sealing ring. Thus, when the opposite face of the valve mounting plate 26 seals against the irregular seal 28, the exhaust hole 261 and the exhaust groove 255 are sealed and connected. The two ends of the second surrounding body 283 are connected to the first surrounding body 282 to form a second sealing ring. The number of second surrounding bodies 283 is equal to the number of exhaust channels 22. The second sealing ring surrounds the outer periphery of the openings of each exhaust channel 22 on the surface of the valve air passage housing 25. The diffuser hole 24 and the opening facing the exhaust channel 22 are located inside the second sealing ring. Thus, when the opposite face of the valve mounting plate 26 seals against the irregular seal 28, the diffuser hole 24 and the exhaust channel 22 are sealed and connected.

[0074] As can be seen from the above, there are many places that need to be sealed in this embodiment. The integrated irregular-shaped seal 28 can not only improve the installation efficiency of the seal, but also avoid the risk of leakage caused by the individual seal lifting during installation, and improve the sealing effect on the buffer section 212 and the exhaust channel 27. At the same time, the irregular groove 256 plays a positioning role for the irregular-shaped seal 28, preventing the irregular-shaped seal 28 from shifting during installation and causing sealing failure. The buffer section 212 and the exhaust channel 255 are arranged adjacent to each other, and the seals on their outer periphery share a common edge. The independent sealing of the two can be achieved by using the same irregular-shaped seal 28, which optimizes the spatial design of the valve control shell 20.

[0075] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A liquid medicine supply system, comprising a liquid circuit assembly (10) and a valve control assembly, wherein the liquid circuit assembly (10) includes a liquid circuit channel and a plurality of pneumatically operated on / off valves (14) disposed on the liquid circuit channel, characterized in that, The valve control assembly includes a valve control housing (20) and a plurality of solenoid valves (30) installed in the valve control housing (20), the number of solenoid valves (30) being the same as the number of pneumatic on / off valves (14); The valve control housing (20) has an air inlet channel (21) and multiple air outlet channels (22) that are respectively connected to the multiple pneumatic on / off valves (14). The air inlet channel (21) includes an air inlet section (211) connected to the driving air source and a buffer section (212) connected to the air inlet section (211). The valve control housing (20) also has a plurality of diversion holes (23) corresponding to the buffer section (212) and a plurality of diffuser holes (24) corresponding to the plurality of air outlet channels (22). Each diversion hole (23) corresponds to the first port of each solenoid valve (30), and each diffuser hole (24) corresponds to the second port of each solenoid valve (30), so that one air inlet channel (21) can be opened and closed to communicate with the plurality of air outlet channels (22) via the plurality of solenoid valves (30).

2. The drug supply system as described in claim 1, characterized in that, The intake section (211) and the buffer section (212) are arranged intersectingly. The buffer section (212) includes a first buffer chamber (213) and a second buffer chamber (214) that is arranged intersecting with the first buffer chamber (213). Multiple diversion holes (23) are corresponding to and connected to the second buffer chamber (214).

3. The liquid medicine supply system as described in claim 2, characterized in that, The valve control housing (20) includes a valve air passage housing (25) and a valve mounting plate (26) covering the valve air passage housing (25). Each of the solenoid valves (30) is mounted on the back side of the valve mounting plate (26) away from the valve air passage housing (25). Multiple diversion holes (23) are spaced through the valve mounting plate (26), and multiple diffuser holes (24) are spaced through the valve mounting plate (26). The valve air passage housing (25) and the valve mounting plate (26) are respectively provided with a first buffer groove (251) and a second buffer groove (252) intersecting the first buffer groove (251) on their opposite surfaces along the thickness direction. The first buffer groove (251) connects the air inlet section (211) and the second buffer groove (252). The first buffer groove (251) and the second buffer groove (252) are respectively sealed and connected with the opposite surfaces of the other to form the first buffer cavity (213) and the second buffer cavity (214).

4. The liquid medicine supply system as described in claim 3, characterized in that, The first buffer groove (251) and the second buffer groove (252) are both provided on the opposite surface of the valve air passage housing (25). The first buffer groove (251) includes a first depth groove (253) and a second depth groove (254). The air inlet section (211) is connected to the first depth groove (253). The first depth groove (253) has a recess depth of L1 along the thickness direction of the valve air passage housing (25), and the second depth groove (254) has a recess depth of L2 along the thickness direction of the valve air passage housing (25). L1 > L2.

5. The liquid medicine supply system as described in claim 4, characterized in that, The second buffer groove (252) has a recess depth of L3 along the thickness direction of the valve air passage housing (25), satisfying L1>L3>L2.

6. The liquid medicine supply system as described in claim 3, characterized in that, The diversion hole (23) includes a docking groove (231) and a connecting hole (232). The docking groove (231) is formed on the opposite surface of the valve mounting plate (26) and is used to communicate with the second buffer groove (252). The connecting hole (232) extends through the valve mounting plate (26) from the docking groove (231) along the thickness direction of the valve mounting plate (26). The inner diameter of the connecting hole (232) is smaller than the inner diameter of the docking groove (231).

7. The liquid medicine supply system as described in claim 6, characterized in that, The first buffer groove (251) extends along the first direction of the valve air passage housing (25), the second buffer groove (252) extends along the second direction, the first direction is perpendicular to the second direction, the width of the mating groove (231) along the first direction is D1, the width of the second buffer groove (252) along the first direction is D2, and the inner diameter of the connecting hole (232) is D3, satisfying that D1 > D2 > D3.

8. The liquid medicine supply system according to any one of claims 1 to 6, characterized in that, Multiple air outlet channels (22) are spaced apart in the valve control housing (20) along the second direction, and multiple solenoid valves (30) are arranged along the second direction.

9. The liquid medicine supply system as described in claim 3, characterized in that, The valve air passage housing (25) is also provided with an exhaust groove (255) on the opposite surface. The exhaust groove (255) and the valve mounting plate (26) are sealed together to form an exhaust channel (27). The valve mounting plate (26) has a plurality of exhaust holes (261) that are provided through the thickness direction of the valve mounting plate (26). Each exhaust hole (261) is connected to the third port of each solenoid valve (30) and the exhaust channel (27). The exhaust channel (22) is connected to the exhaust channel (27) via the solenoid valve (30) in an openable and closable manner.

10. The liquid medicine supply system as described in claim 9, characterized in that, The valve air passage housing (25) has a shaped groove (256) on the side facing the valve mounting plate (26). The shaped groove (256) is fitted with a shaped sealing element (28). The shaped sealing element (28) includes an integral surround (281), a first surround (282), and a second surround (283). The two ends of the first surround (282) are connected to the surround (281) to form a first sealing ring. The two ends of the second surround (283) are connected to the first surround (282) to form a second sealing ring. The surrounding body (281) surrounds and seals the first buffer groove (251) and the second buffer groove (252). The openings of each of the diversion holes (23) facing the buffer section (212) are located inside the surrounding body (281). The first sealing ring surrounds and seals the outer periphery of the exhaust groove (255). The openings of each of the exhaust holes (261) facing the exhaust groove (255) are located inside the first sealing ring. The number of the second surrounding bodies (283) is equal to the number of the air outlet channels (22). The second sealing ring surrounds and seals the outer periphery of the openings of each of the air outlet channels (22) on the surface of the valve air passage housing (25). The diffuser holes (24) and the openings facing the air outlet channels (22) are located inside the second sealing ring.

Images