A silicon material drying device
By combining centrifugal action with a vacuum environment, and utilizing a rotating and heating structure with an irregularly shaped quartz tube, the problem of low efficiency and high energy consumption in existing silicon drying devices has been solved, achieving rapid and efficient silicon drying and ensuring silicon purity and processing efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LESHAN TOPRAYCELL
- Filing Date
- 2025-10-28
- Publication Date
- 2026-07-21
AI Technical Summary
Existing silicon material drying equipment suffers from low drying efficiency, high energy consumption, and difficulty in quickly removing moisture from the internal pores of silicon material, which affects the purity of silicon material and processing efficiency.
By combining centrifugal force with a vacuum environment, and through the design of a rotating and heating structure using an irregularly shaped quartz tube, centrifugal force is used to accelerate the removal of water from the surface and internal pores of the silicon material. A vacuum environment is created by a vacuum pump to lower the boiling point of water and accelerate the evaporation rate.
It significantly improves the drying efficiency of silicon material, shortens the drying time, ensures the purity and processing efficiency of silicon material, and reduces energy consumption.
Smart Images
Figure CN224534663U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of silicon material processing technology, specifically to a silicon material drying device. Background Technology
[0002] In the silicon material processing of industries such as photovoltaics and semiconductors, silicon material needs to be dried after cleaning to remove moisture from the surface and internal pores, preventing moisture from adversely affecting subsequent processing steps (such as cutting and purification). Currently, common silicon material drying equipment on the market mainly includes hot air drying equipment and vacuum drying equipment.
[0003] Hot air drying devices dry silicon by introducing hot air into the drying chamber. However, this type of device suffers from low drying efficiency and high energy consumption. Furthermore, hot air easily carries impurities that adhere to the surface of the silicon, affecting its purity. Vacuum drying devices create a vacuum environment by extracting air from the drying chamber, lowering the boiling point of water and achieving low-temperature drying of the silicon. While this can avoid contamination to some extent, existing vacuum drying devices rely solely on the vacuum environment for moisture evaporation. After moisture evaporates from the silicon surface, it easily forms water vapor within the drying chamber. If not promptly removed, this leads to increased humidity within the drying chamber, further affecting the drying effect. Moreover, relying solely on a vacuum environment is insufficient to quickly remove moisture from the pores within the silicon, resulting in a long drying cycle and failing to meet the demands for large-scale, high-efficiency silicon drying. Therefore, there is an urgent need to design a silicon drying device with high drying efficiency, good drying effect, and guaranteed silicon purity to address the problems existing in current technologies. Utility Model Content
[0004] The technical problem to be solved by this utility model is to provide a silicon material drying device that combines centrifugal action with a vacuum environment to accelerate the removal of moisture from silicon material, improve drying efficiency and effect, and reduce energy consumption.
[0005] The technical solution adopted by this utility model to solve its technical problem is as follows: a silicon material drying device includes a housing base, and an equipment mounting plate is provided in the housing base through an angle adjustment structure;
[0006] The device mounting plate is provided with a cavity-shaped heating structure;
[0007] The device mounting plate is provided with an irregularly shaped quartz tube by a support structure and is located in the cavity of the heating structure. There is a gap between the irregularly shaped quartz tube and the inner wall of the cavity of the heating structure.
[0008] One end of the irregularly shaped quartz tube is closed, and the other end of the irregularly shaped quartz tube is provided with a rotary joint. The equipment mounting plate is provided with a drive structure for rotating the irregularly shaped quartz tube.
[0009] The rotating part of the rotary joint is connected to one end of the irregular quartz tube;
[0010] A vacuum pump is installed on the mounting plate of the equipment, and the vacuum pump is connected to the fixed part of the rotary joint through a vacuum tube.
[0011] Furthermore, the heating structure includes a first heating shell and a second heating shell, wherein the first heating shell and the second heating shell are semi-cylindrical grooves;
[0012] The first heating shell and the second heating shell each have a semi-circular groove at the center of their semi-circular sidewalls, and the diameter of the groove is larger than the diameter of the end of the irregular quartz tube.
[0013] The first heating housing is mounted on the equipment mounting plate by multiple support columns;
[0014] One end of the first heating shell and one end of the second heating shell are connected by a hinge structure and together form a cylindrical heating cavity;
[0015] The inner wall surfaces of both the first heating shell and the second heating shell are embedded with electric heating wires, which are evenly distributed along their length.
[0016] Furthermore, the support structure includes two support rods;
[0017] The lower end of each support rod is fixedly mounted on the equipment mounting plate, and the upper end of each support rod is equipped with a bearing seat;
[0018] Both ends of the irregularly shaped quartz tube are fitted with bearings, and the two bearings are respectively installed in two bearing seats.
[0019] Furthermore, the angle adjustment structure includes a driven slider disposed on the rear side of the lower surface of the equipment mounting plate, the driven slider being in the shape of an isosceles trapezoid.
[0020] The bottom of the housing base is provided with two active sliders in the shape of a right trapezoid, and the two active sliders slide in contact with the housing base;
[0021] The two active sliders are located on both sides of the driven slider, and the inclined surfaces of the two active sliders are respectively engaged with and slidingly fitted with the two inclined surfaces of the driven slider;
[0022] The bottom of the housing base is provided with a first drive motor, and a lead screw is provided on the output shaft of the first drive motor;
[0023] The two active sliders are respectively provided with a first threaded hole and a second threaded hole adapted to the lead screw, and the two have opposite helical directions. The lower end face of the driven slider is provided with a rectangular groove adapted to the lead screw.
[0024] The rear end of the lead screw passes sequentially through the first threaded hole, the rectangular groove and the second threaded hole, and is then mounted on the rear side wall of the housing base via a bearing.
[0025] The front end of the device mounting plate is mounted on the side wall of the housing base via a pivot.
[0026] Furthermore, the length of the driven slider and the two active sliders is equal to the width inside the housing base;
[0027] The thickness of the driven slider and the two active sliders is equal to the depth inside the housing base.
[0028] Furthermore, a controller is provided at the bottom of the housing base;
[0029] An angle sensor is provided on the rear side of the upper surface of the equipment mounting plate, and the angle sensor is connected to the controller signal.
[0030] The first drive motor is connected to the controller via a motor drive module.
[0031] Furthermore, the housing base is provided with a first fixing baffle, a second fixing baffle, and a third fixing baffle;
[0032] The first fixed baffle, the second fixed baffle, and the third fixed baffle are respectively disposed at the upper ends of the front side wall, the left side wall, and the rear side wall of the housing base;
[0033] A movable baffle is provided between the first fixed baffle and the third fixed baffle, and the lower end of the movable baffle is provided at the upper end of the right side wall of the housing base through a hinge structure;
[0034] The front and rear ends of the movable baffle are respectively detachably mounted on the first fixed baffle and the third fixed baffle via a pin structure.
[0035] Furthermore, the drive structure includes a second drive motor mounted on the device mounting plate;
[0036] A drive gear is fitted on the output shaft of the second drive motor, and a driven gear is fitted on the rear end of the irregular quartz tube. The drive gear and the driven gear are connected by a chain drive.
[0037] Furthermore, a vacuum gauge is installed at the end of the vacuum tube near the vacuum pump.
[0038] The beneficial effects of this utility model are as follows:
[0039] 1. During the drying process, the vacuum pump draws air from the shaped quartz tube to create a vacuum environment, which lowers the boiling point of water. At the same time, the drive structure rotates the shaped quartz tube, and centrifugal force is used to quickly remove moisture from the surface and internal pores of the silicon material. The heating structure heats the shaped quartz tube to accelerate the evaporation of moisture, which greatly improves the drying efficiency and shortens the drying time.
[0040] 2. By adjusting the angle of the device mounting plate, the rear end of the device is raised to a certain angle, so that the irregular quartz tube is tilted. When the irregular quartz tube rotates, it is easy for the water to be separated, collected downwards, and extracted. Attached Figure Description
[0041] Figure 1 This is a schematic diagram of the structure of the silicon material drying device described in this utility model;
[0042] Figure 2 This is a schematic diagram of the silicon material drying device described in this utility model from another perspective;
[0043] Figure 3 This is a schematic diagram of the heating structure of the silicon material drying device described in this utility model in the open state;
[0044] Figure 4 This is a schematic diagram of the combined structure of the housing base, equipment mounting plate and angle sensor described in this utility model;
[0045] Figure 5 This is a bottom view of the internal structure of the housing base described in this utility model;
[0046] Figure 6 This is a side view of the drive structure described in this utility model;
[0047] Figure 7 This is a schematic diagram of the driven slider described in this utility model;
[0048] Figure 8 This is a structural schematic diagram of a specific embodiment of the present utility model;
[0049] The markings in the diagram are as follows: 1. Housing base; 2. Equipment mounting plate; 3. Heating structure; 3. First heating housing; 301. Second heating housing; 302. Semi-circular groove; 303. Electric heating wire; 304. Support column; 305. Support structure; 4. Support rod; 401. Bearing seat; 402. Rotary joint; 5. Vacuum pump; 6. Vacuum tube; 7. Driven slider; 8. Active slider; 9. First drive motor; 10. Lead screw; 11. Rectangular groove; 12. Rotating shaft; 13. Controller; 14. Angle sensor; 15. Motor drive module; 16. First fixed baffle; 17. Second fixed baffle; 18. Third fixed baffle; 19. Movable baffle; 20. Drive structure; 21. Second drive motor; 2101. Drive gear; 2102. Driven gear; 2103. Chain; 2104. Vacuum gauge; 22. Irregular quartz tube; 23. Detailed Implementation
[0050] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0051] It should be noted that all directional indicator terms such as "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" in the embodiments of this application indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. They are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indication will also change accordingly.
[0052] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0053] Furthermore, if the embodiments of this application involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the meaning of "and / or" throughout the text includes three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.
[0054] like Figure 1-7 As shown, the silicon material drying device includes a housing base 1, which is composed of a bottom plate and four side plates, facilitating the installation of related components inside. The housing base 1 is equipped with an equipment mounting plate 2 through an angle adjustment structure, which is used to adjust the equipment mounting plate 2 from a horizontal state to an inclined state.
[0055] The device mounting plate 2 is provided with a cavity-shaped heating structure 3;
[0056] The device mounting plate 2 is provided with an irregularly shaped quartz tube 23 by a support structure 4 and is located in the cavity of the heating structure 3. The irregularly shaped quartz tube 23 is thick in the middle and thin at both ends. The cleaned silicon material is placed in the irregularly shaped quartz tube 23. There is a gap between the irregularly shaped quartz tube 23 and the inner wall of the cavity of the heating structure 3. That is, the irregularly shaped quartz tube 23 is only located in the cavity of the heating structure 3 and the two are not in direct contact. The heating structure 3 is only used to heat the irregularly shaped quartz tube 23 to accelerate the evaporation of moisture.
[0057] One end of the irregular quartz tube 23 is closed, and the other end of the irregular quartz tube 23 is provided with a rotary joint 5. The equipment mounting plate 2 is provided with a drive structure 21 for rotating the irregular quartz tube 23. The irregular quartz tube 23 is driven to rotate by the drive structure 21, and centrifugal force is used to quickly remove moisture from the surface and internal pores of the silicon material.
[0058] The rotating part of the rotary joint 5 is connected to one end of the irregular quartz tube 23;
[0059] A vacuum pump 6 is installed on the equipment mounting plate 2. The vacuum pump 6 is connected to the fixed part of the rotary joint 5 through a vacuum tube 7. The rotary joint 5 allows the shaped quartz tube 23 to rotate without causing interference from the vacuum tube 7. Heating and drying the silicon material in a vacuum environment can lower the boiling point of water, accelerate the evaporation rate of water, and reduce oxidation and other problems. In other words, the vacuum pump 6 draws air from the shaped quartz tube 23 to create a vacuum environment, lowering the boiling point of water. At the same time, the drive structure 21 drives the shaped quartz tube 23 to rotate, using centrifugal force to quickly remove moisture from the surface and internal pores of the silicon material. The heating structure 3 heats the shaped quartz tube 23 to accelerate the evaporation rate of water, greatly improving the drying efficiency and shortening the drying time.
[0060] like Figure 1 , Figure 3 As shown, in this embodiment, preferably, the heating structure 3 includes a first heating shell 301 and a second heating shell 302, wherein the first heating shell 301 and the second heating shell 302 are semi-cylindrical grooves.
[0061] The first heating shell 301 and the second heating shell 302 are provided with semi-circular grooves 303 at the center of their semi-circular sidewalls, and the diameter of the grooves is larger than the diameter of the end of the irregular quartz tube 23. The two semi-circular grooves 303 on the corresponding sides are combined to form a circular groove, which ensures that the thinner parts at both ends of the irregular quartz tube 23 are accommodated and there is a gap between them, so as not to interfere with the rotation of the irregular quartz tube 23, and can also effectively reduce heat loss.
[0062] The first heating housing 301 is mounted on the equipment mounting plate 2 by a plurality of support columns 305;
[0063] One end of the first heating shell 301 and one end of the second heating shell 302 are connected by a hinge structure and together form a cylindrical heating cavity;
[0064] The inner wall surfaces of the first heating shell 301 and the second heating shell 302 are each embedded with an electric heating wire 304 and are evenly distributed along their length. The electric heating wire 304 generates heat and transfers it to the irregular quartz tube 23, thereby accelerating the evaporation of moisture, greatly improving the drying efficiency and shortening the drying time.
[0065] like Figure 1-3 As shown, in this embodiment, preferably, the support structure 4 includes two support rods 401;
[0066] The lower end of each support rod 401 is fixedly mounted on the equipment mounting plate 2, and the upper end of each support rod 401 is provided with a bearing seat 402;
[0067] Bearings are fitted at both ends of the irregular quartz tube 23. The two bearings are respectively installed in two bearing seats 402. Through the cooperation of the bearing seats 402 and the bearings, the irregular quartz tube 23 can be supported and fixed, and the irregular quartz tube 23 can be rotated to generate centrifugal force.
[0068] like Figure 4-7 As shown, in this embodiment, preferably, the angle adjustment structure includes a driven slider 8 disposed on the rear side of the lower surface of the device mounting plate 2. The driven slider 8 is in the shape of an isosceles trapezoid with the end face containing the longer side located at the top.
[0069] The bottom of the housing base 1 is provided with two active sliders 9 in the shape of a right trapezoid, and the two active sliders 9 slide in contact with the housing base 1;
[0070] The two active sliders 9 are located on both sides of the driven slider 8, and the inclined surfaces of the two active sliders 9 respectively fit and slide with the two inclined surfaces of the driven slider 8.
[0071] The bottom of the housing base 1 is provided with a first drive motor 10. Preferably, the first drive motor 10 is a stepper motor, and a lead screw 11 is provided on the output shaft of the first drive motor 10.
[0072] The two active sliders 9 are respectively provided with a first threaded hole and a second threaded hole adapted to the lead screw 11, and the lower end face of the driven slider 8 is provided with a rectangular groove 12 adapted to the lead screw 11;
[0073] The rear end of the lead screw 11 passes through the first threaded hole, the rectangular groove 12 and the second threaded hole in sequence, and is then mounted on the rear side wall of the housing base 1 by a bearing.
[0074] The front end of the device mounting plate 2 is mounted on the side wall of the housing base 1 via a rotating shaft 13. The first drive motor 10 drives the lead screw 11 to rotate, which in turn drives the two active sliders 9 to move closer together and press the driven slider 8 upward along the inclined plane of the two active sliders 9. Since the front end of the device mounting plate 2 is fixed by the rotating shaft 13, the rear end of the device mounting plate 2 is lifted and rotated at an inclined angle. The angle of inclination is greater than or equal to 5 degrees and less than or equal to 15 degrees. The preferred angle of inclination is 10 degrees. The inclination of the device mounting plate 2 makes the irregular quartz tube 23, the heating structure 3 and the driving structure 21 tilt as a whole without affecting their transmission connection relationship. This makes it convenient for the irregular quartz tube 23 to be collected and extracted downward after the moisture is removed when it rotates. In addition, after the drying is completed, the first drive motor 10 rotates in the opposite direction, causing the two active sliders 9 to move away from each other in opposite directions. Under the action of gravity, the driven slider 8 moves downward along the inclined plane of the two active sliders 9 until it contacts the bottom of the housing base 1. At this time, the device mounting plate 2 is in a horizontal state, which makes it convenient to remove and install the irregular quartz tube 23.
[0075] In this embodiment, preferably, the length of the driven slider 8 and the two active sliders 9 is equal to the width inside the housing base 1. This allows the housing base 1 to limit their movement and maximizes the contact area, making the driven slider 8 move up and down more smoothly.
[0076] The thickness of the driven slider 8 and the two active sliders 9 is equal to the depth inside the housing base 1, ensuring the stability of the equipment mounting plate 2 when it is in a horizontal state.
[0077] like Figure 4 , Figure 5 As shown, in this embodiment, in order to precisely adjust the tilt angle of the irregular quartz tube 23, a controller 14 is provided at the bottom of the housing base 1;
[0078] An angle sensor 15 is provided on the rear side of the upper surface of the equipment mounting plate 2, and the angle sensor 15 is signal connected to the controller 14.
[0079] The first drive motor 10 is connected to the controller 14 via the motor drive module 16. The controller 14 presets the angle value, such as 10 degrees. The angle sensor 15 monitors the angle in real time. When the monitored angle reaches 10 degrees, the controller 14 controls the first drive motor 10 to stop rotating, ensuring accurate rotation of the angle.
[0080] like Figure 8 As shown, in this embodiment, in order to avoid damage caused by accidental contact by personnel during operation, the housing base 1 is provided with a first fixed baffle 17, a second fixed baffle plate 18, and a third fixed baffle 19.
[0081] The first fixed baffle 17, the second fixed baffle 18, and the third fixed baffle 19 are respectively disposed on the upper ends of the front side wall, the left side wall, and the rear side wall of the housing base 1;
[0082] A movable baffle 20 is provided between the first fixed baffle 17 and the third fixed baffle 19. The lower end of the movable baffle 20 is provided at the upper end of the right side wall of the housing base 1 through a hinge structure.
[0083] The front and rear ends of the movable baffle 20 are detachably mounted on the first fixed baffle 17 and the third fixed baffle 19 via a pin structure. When the device is running, it is enclosed by the first fixed baffle 17, the second fixed baffle 18, the third fixed baffle 19 and the movable baffle 20 to prevent personnel from contacting it. After the drying operation is completed, the movable baffle can be opened by the pin structure to facilitate subsequent operations.
[0084] like Figure 1-3 As shown, in this embodiment, preferably, the drive structure 21 includes a second drive motor 2101 disposed on the device mounting plate 2;
[0085] A drive gear 2102 is sleeved on the output shaft of the second drive motor 2101, and a driven gear 2103 is sleeved on the rear end of the irregular quartz tube 23. The drive gear 2102 and the driven gear 2103 are connected by a chain 2104. The second drive drives the drive gear 2102 to rotate, which in turn drives the driven gear 2103, which in turn drives the irregular quartz tube 23 to rotate, so that it generates centrifugal force to facilitate the removal of moisture from the silicon material.
[0086] In this embodiment, in order to accurately and intuitively grasp the evacuation pressure, a vacuum gauge 22 is provided at one end of the vacuum tube 7 near the vacuum pump 6. The vacuum gauge 22 displays the evacuation pressure in real time, which is convenient for viewing and adjustment.
[0087] In this embodiment, in order to accurately control the temperature, a temperature sensor is embedded in the inner wall of the first heating shell 301 or the second heating shell 302 and is connected to the controller 14. A display screen is embedded in the outer surface of the first fixed baffle 17 and is connected to the controller 14. The temperature inside the heating cavity is monitored in real time by the temperature sensor and displayed on the display screen, which facilitates the control of the heating temperature.
[0088] The above are merely preferred embodiments of this application and do not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.
Claims
1. A silicon material drying device, comprising a housing base (1), characterized in that: The housing base (1) is equipped with an equipment mounting plate (2) through an angle adjustment structure. The device mounting plate (2) is provided with a cavity-shaped heating structure (3); The device mounting plate (2) is provided with a shaped quartz tube (23) through a support structure (4) and is located in the cavity of the heating structure (3). There is a gap between the shaped quartz tube (23) and the inner wall of the cavity of the heating structure (3). One end of the irregular quartz tube (23) is closed, and the other end of the irregular quartz tube (23) is provided with a rotary joint (5). The equipment mounting plate (2) is provided with a drive structure (21) for rotating the irregular quartz tube (23). The rotating part of the rotary joint (5) is connected to one end of the irregular quartz tube (23); A vacuum pump (6) is provided on the equipment mounting plate (2), and the vacuum pump (6) is connected to the fixed part of the rotary joint (5) through a vacuum tube (7).
2. The silicon material drying apparatus according to claim 1, characterized in that: The heating structure (3) includes a first heating shell (301) and a second heating shell (302), wherein the first heating shell (301) and the second heating shell (302) are semi-cylindrical grooves; The first heating shell (301) and the second heating shell (302) each have a semi-circular groove (303) at the center of their semi-circular sidewalls, and the diameter of the groove is larger than the diameter of the end of the irregular quartz tube (23). The first heating housing (301) is mounted on the equipment mounting plate (2) by a plurality of support columns (305); One end of the first heating shell (301) and one end of the second heating shell (302) are connected by a hinge structure and together form a cylindrical heating cavity; The inner wall surfaces of the first heating shell (301) and the second heating shell (302) are each embedded with an electric heating wire (304) and are evenly distributed along their length.
3. The silicon material drying apparatus according to claim 1, characterized in that: The support structure (4) includes two support rods (401). The lower end of each support rod (401) is fixedly mounted on the equipment mounting plate (2), and the upper end of each support rod (401) is provided with a bearing seat (402). Both ends of the irregular quartz tube (23) are fitted with bearings, and the two bearings are respectively installed in two bearing seats (402).
4. The silicon material drying apparatus according to claim 1, characterized in that: The angle adjustment structure includes a driven slider (8) disposed on the rear side of the lower surface of the equipment mounting plate (2), the driven slider (8) being in the shape of an isosceles trapezoid; The bottom of the housing base (1) is provided with two active sliders (9) and they are in the shape of a right trapezoid. The two active sliders (9) are in sliding contact with the housing base (1). The two active sliders (9) are located on both sides of the driven slider (8), and the inclined surfaces of the two active sliders (9) are respectively engaged with the two inclined surfaces of the driven slider (8) and slide together. The bottom of the housing base (1) is provided with a first drive motor (10), and a lead screw (11) is provided on the output shaft of the first drive motor (10). The two active sliders (9) are respectively provided with a first threaded hole and a second threaded hole that are adapted to the lead screw (11) and the two have opposite helical directions. The lower end face of the driven slider (8) is provided with a rectangular groove (12) that is adapted to the lead screw (11). The rear end of the lead screw (11) passes through the first threaded hole, the rectangular groove (12) and the second threaded hole in sequence, and is then mounted on the rear side wall of the housing base (1) by a bearing; The front end of the device mounting plate (2) is mounted on the side wall of the housing base (1) via a pivot (13).
5. A silicon material drying apparatus according to claim 4, characterized in that: The length of the driven slider (8) and the two active sliders (9) is equal to the width inside the housing base (1); The thickness of the driven slider (8) and the two active sliders (9) is equal to the depth inside the housing base (1).
6. A silicon material drying apparatus according to claim 5, characterized in that: A controller (14) is provided at the bottom of the housing base (1). An angle sensor (15) is provided on the rear side of the upper surface of the device mounting plate (2), and the angle sensor (15) is connected to the controller (14) by signal. The first drive motor (10) is connected to the controller (14) via a motor drive module (16).
7. A silicon material drying apparatus according to claim 1, characterized in that: The housing base (1) is provided with a first fixed baffle (17), a second fixed baffle plate (18), and a third fixed baffle (19). The first fixed baffle (17), the second fixed baffle (18), and the third fixed baffle (19) are respectively installed on the upper ends of the front side wall, the left side wall, and the rear side wall of the housing base (1); A movable baffle (20) is provided between the first fixed baffle (17) and the third fixed baffle (19). The lower end of the movable baffle (20) is provided on the upper end of the right side wall of the housing base (1) through a hinge structure. The front and rear ends of the movable baffle (20) are respectively detachably mounted on the first fixed baffle (17) and the third fixed baffle (19) via a pin structure.
8. A silicon material drying apparatus according to claim 1, characterized in that: The drive structure (21) includes a second drive motor (2101) mounted on the device mounting plate (2). A drive gear (2102) is fitted on the output shaft of the second drive motor (2101), and a driven gear (2103) is fitted on the rear end of the irregular quartz tube (23). The drive gear (2102) and the driven gear (2103) are connected by a chain (2104).
9. A silicon material drying apparatus according to claim 1, characterized in that: A vacuum gauge (22) is installed at one end of the vacuum tube (7) near the vacuum pump (6).