A melting furnace for high purity fused quartz powder

Abstract

The utility model relates to the technical field of melting furnace, specifically disclose a kind of high-purity fused quartz powder's melting furnace, including cover, the lower end of the cover is detachably connected with furnace body by bolt, the lower end of the furnace body is detachably connected with base by bolt, the inside of the furnace body is provided with temperature control device and mixing mechanism, the temperature control device includes the hexagonal support seat being arranged in the inside of furnace body, the inside of the hexagonal support seat is provided with multiple cavities, the inside of multiple cavities is all installed with infrared heater and thermocouple distributed in up and down, infrared heater directly radiates and heats quartz powder, combine thermocouple multipoint real-time monitoring and controller closed-loop regulation, realize the fast response of temperature in furnace, significantly reduce the problem that quartz powder is not fused fully due to local overheating or underheating, greatly improve the purity and microstructure uniformity of fused quartz.

Description

Technical Field

[0001] This utility model relates to the field of melting furnace technology, and specifically discloses a melting furnace for high-purity fused silica powder. Background Technology

[0002] In modern industry, high-purity fused silica powder is widely used in high-end manufacturing industries such as semiconductors, optical fiber communication, and precision ceramics due to its excellent chemical stability, low coefficient of expansion, and good electrical insulation properties. The performance of the melting furnace, as the core equipment for producing high-purity fused silica powder, directly affects product quality and production efficiency. Traditional fused silica powder melting furnaces have many limitations in practical applications. In terms of temperature control, most use a single heating method, which cannot achieve precise control of the furnace temperature, resulting in uneven heating of the silica powder during the melting process.

[0003] In terms of material mixing, traditional equipment typically relies on mechanical stirring, which results in low mixing efficiency and makes it difficult to ensure that the quartz powder is fully and uniformly mixed before melting. This leads to incomplete reaction of some materials during the melting process, reducing the performance and quality of the product. Therefore, a high-purity quartz powder melting furnace is needed to solve these problems. Utility Model Content

[0004] This invention proposes a melting furnace for high-purity fused silica powder. The silica powder is directly heated by infrared heaters, and combined with multi-point real-time monitoring by thermocouples and closed-loop regulation by controller, the furnace temperature can be rapidly responsive. The uniformly distributed high-frequency sound wave generators generate intense sound wave disturbances, and the bottom sound wave reflector extends the sound wave path and enhances the disturbance intensity, which powerfully breaks up the agglomeration of silica powder particles and promotes the full and rapid movement and mixing of the particles.

[0005] This utility model is implemented as follows: a melting furnace for high-purity fused silica powder includes a cover, the lower end of which is detachably connected to a furnace body by bolts, the lower end of which is detachably connected to a base by bolts, and the interior of the furnace body is equipped with a temperature control device and a mixing mechanism. The temperature control device includes a hexagonal support base disposed inside the furnace body. The hexagonal support base has multiple cavities inside, and each of the multiple cavities is equipped with an infrared heater and a thermocouple distributed vertically. The mixing mechanism includes an annular support ring fixedly connected to the inside of the cover body. The bottom end of the annular support ring has multiple evenly distributed internal threaded holes. Each of the multiple internal threaded holes is threaded with a sound wave generator. The bottom end of the base is fixedly connected with a sound wave reflector.

[0006] In a preferred embodiment of the high-purity fused silica powder melting furnace of this invention, the inner diameter of the base is smaller than the inner diameter of the furnace body.

[0007] As a preferred embodiment of the high-purity fused silica powder melting furnace of this utility model, the upper end of the furnace body and the upper end of the base are both provided with annular grooves, and the lower ends of the cover and the furnace body are both fixedly connected with sealing rings that tightly abut against the adjacent annular grooves.

[0008] As a preferred embodiment of the high-purity fused silica powder melting furnace of this utility model, the inner wall of the furnace body has a hexagonal structure, and the inner wall abuts against the outer wall of the hexagonal support base.

[0009] In a preferred embodiment of the high-purity fused silica powder melting furnace of this utility model, the upper end of the hexagonal support base abuts against the lower end of the annular support ring, and the lower end of the hexagonal support base abuts against the upper end of the base.

[0010] As a preferred embodiment of the high-purity fused silica powder melting furnace of this utility model, the outer wall of the base is connected to a discharge pipe with a valve.

[0011] As a preferred embodiment of the high-purity fused silica powder melting furnace of this utility model, a controller is installed on the outer wall of the base.

[0012] The beneficial effects of this utility model are: (1) Precise and efficient melting temperature control: The infrared heater directly radiates and heats the quartz powder. Combined with the thermocouple multi-point real-time monitoring and the controller closed-loop regulation, the furnace temperature can be quickly responded to, and the problem of insufficient melting of quartz powder caused by local overheating or underheating can be significantly reduced, thereby greatly improving the purity and microstructure uniformity of the molten quartz.

[0013] (2) Efficient and uniform material mixing: The uniformly distributed high-frequency sound wave generator generates intense sound wave disturbance. Combined with the bottom sound wave reflector plate to extend the sound wave action path and enhance the disturbance intensity, it strongly breaks the agglomeration of quartz powder particles, promotes the particles to move and mix fully and quickly, and achieves a high degree of uniform distribution of materials before melting, effectively avoiding the problem of insufficient local reaction caused by uneven material mixing. Attached Figure Description

[0014] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0015] Figure 1 This is an overall structural diagram of a melting furnace for high-purity fused silica powder according to the present invention.

[0016] Figure 2 This is a cross-sectional view of the overall structure of this utility model.

[0017] Figure 3 This is a partial structural diagram of the present invention; Figure 4 This is a structural diagram of the furnace body of this utility model.

[0018] The markings in the diagram are: 1. Cover; 2. Furnace body; 3. Base; 4. Annular support ring; 5. Sound wave generator; 6. Hexagonal support base; 7. Sound wave reflector; 8. Discharge pipe; 9. Infrared heater; 10. Thermocouple; 11. Internal threaded hole; 12. Cavity; 13. Sealing ring. Detailed Implementation

[0019] The present invention will be further described below with reference to the accompanying drawings and specific embodiments to aid in understanding its content. Unless otherwise specified, the methods used in this invention are conventional methods; the raw materials and apparatus used, unless otherwise specified, are conventional commercially available products.

[0020] Please see Figure 1-4 A high-purity fused silica powder melting furnace includes a cover 1, a furnace body 2 detachably connected to the lower end of the cover 1 by bolts, a base 3 detachably connected to the lower end of the furnace body 2 by bolts, and a temperature control device and a mixing mechanism are provided inside the furnace body 2. The temperature control device includes a hexagonal support base 6 installed inside the furnace body 2. The hexagonal support base 6 has multiple cavities 12 inside, and each of the multiple cavities 12 is equipped with an infrared heater 9 and a thermocouple 10 distributed vertically. The mixing mechanism includes an annular support ring 4 fixedly connected inside the cover 1. The bottom end of the annular support ring 4 has multiple evenly distributed internal threaded holes 11. Each of the multiple internal threaded holes 11 is threaded with a sound wave generator 5. The bottom end of the base 3 is fixedly connected with a sound wave reflector plate 7.

[0021] In this embodiment, the hexagonal support 6 of the temperature control device fits tightly against the inner wall of the furnace body 2. Infrared heaters 9 and thermocouples 10 installed in multiple cavities 12 within the support work together to achieve precise temperature control. The infrared heaters 9 emit infrared radiation, enabling rapid and efficient heating of the quartz powder inside the furnace. Simultaneously, the thermocouples 10 monitor the temperature of each area within the furnace in real time and transmit the temperature data to the controller. When a temperature deviation occurs, the controller adjusts the power of the infrared heaters 9 in real time according to preset temperature parameters to ensure that the furnace temperature is uniform and stable within the precise temperature range required for quartz powder melting, avoiding problems such as impurity residue and uneven particle size caused by uneven heating.

[0022] The mixing mechanism utilizes a sound wave generator 5 and a sound wave reflector 7 to achieve efficient mixing. An annular support ring 4 is fixed inside the cover 1, with multiple sound wave generators 5 evenly distributed on it, emitting high-frequency sound waves into the furnace during operation. As the sound waves propagate within the furnace, they interact with the quartz powder particles, causing them to vibrate and move violently, breaking up any agglomeration. The sound wave reflector 7 at the bottom of the base 3 reflects the sound waves back into the furnace, extending the propagation path and duration of the sound waves, further enhancing the disturbance effect on the quartz powder, promoting thorough mixing of the quartz powder particles, and thus improving product performance and quality.

[0023] As a technical optimization of this utility model, the inner diameter of the base 3 is smaller than the inner diameter of the furnace body 2.

[0024] In this embodiment, the inner diameter of the base 3 is smaller than the inner diameter of the furnace body 2, which facilitates the support of the bottom of the hexagonal support base 6.

[0025] As a technical optimization of this utility model, annular grooves are provided at the upper end of the furnace body 2 and the upper end of the base 3, and sealing rings 13 that are tightly abutted against the adjacent annular grooves are fixedly connected to the lower end of the cover 1 and the furnace body 2.

[0026] In this embodiment, the sealing ring 13 can seal the connection between the furnace body 2 and the cover 1, as well as the connection between the furnace body 2 and the base 3.

[0027] As a technical optimization of this utility model, the inner wall of the furnace body 2 is a hexagonal structure, and the inner wall abuts against the outer wall of the hexagonal support base 6.

[0028] In this embodiment, the hexagonal structural design increases the contact area between the hexagonal support base 6 and the inner wall of the furnace body 2, improving the stability of the hexagonal support base 6 installation and preventing it from easily shaking or shifting during operation.

[0029] As a technical optimization of this utility model, the upper end of the hexagonal support base 6 abuts against the lower end of the annular support ring 4, and the lower end of the hexagonal support base 6 abuts against the upper end of the base 3.

[0030] In this embodiment, the hexagonal support base 6 can be limited by the annular support ring 4 and the base 3, which further increases the stability of the hexagonal support base 6.

[0031] As a technical optimization of this utility model, the outer wall of the base 3 is connected to a discharge pipe 8 with a valve.

[0032] In this embodiment: during the production process, after the quartz powder has melted and turned into a liquid at a high temperature, the valve on the discharge pipe 8 is opened, and the molten liquid is discharged through the discharge pipe 8.

[0033] As a technical optimization of this utility model, a controller is installed on the outer wall of the base 3.

[0034] In this embodiment, the controller is connected to the infrared heater 9, thermocouple 10, acoustic generator 5, and acoustic reflector 7 via wiring. During operation, the thermocouple 10 transmits real-time furnace temperature data to the controller, which intelligently adjusts the power of the infrared heater 9 based on preset temperature parameters. Simultaneously, the controller can also control parameters such as the operating frequency and duration of the acoustic generator 5 to achieve optimal mixing. The controller is mounted on the outer wall of the base 3 for easy operation and monitoring by personnel, enabling timely adjustments to equipment operating parameters based on production conditions. This ensures stable and efficient operation of the melting furnace, producing high-quality fused silica powder.

[0035] The working principle and usage of this utility model are as follows: The hexagonal support base 6 of the temperature control device fits tightly against the inner wall of the furnace body 2. Infrared heaters 9 and thermocouples 10 installed in multiple cavities 12 inside the device work together to achieve precise temperature control. The infrared heaters 9 emit infrared radiation, which can quickly and efficiently heat the quartz powder inside the furnace. Simultaneously, the thermocouples 10 monitor the temperature of each area inside the furnace in real time and transmit the temperature data to the controller. When a temperature deviation occurs, the controller adjusts the power of the infrared heaters 9 in real time according to preset temperature parameters to ensure that the temperature inside the furnace is uniform and stable within the precise temperature range required for quartz powder melting, avoiding problems such as impurity residue and uneven particle size caused by uneven heating. The mixing mechanism utilizes a sound wave generator 5 and a sound wave reflector 7 to achieve efficient mixing. An annular support ring 4 is fixed inside the cover 1, with multiple sound wave generators 5 evenly distributed on it, emitting high-frequency sound waves into the furnace during operation. As the sound waves propagate within the furnace, they interact with the quartz powder particles, causing them to vibrate and move violently, breaking up any agglomeration. The sound wave reflector 7 at the bottom of the base 3 reflects the sound waves back into the furnace, extending the propagation path and duration of the sound waves, further enhancing the disturbance effect on the quartz powder, promoting thorough mixing of the quartz powder particles, ensuring uniform material distribution before melting, and preventing insufficient reaction due to inadequate mixing, thereby improving product performance and quality. The design of the cover 1, furnace body 2, and base 3 being detachably connected by bolts facilitates the installation, maintenance, and repair of the equipment. At the same time, the sealing ring 13 ensures the airtightness of the furnace body, preventing heat loss and the entry of external impurities, and providing a stable environment for the melting process of quartz powder.

[0036] In the description of this utility model, it should be understood that the terms "left", "right", "up", "down", "top", "bottom", "front", "back", "inner", "outer", "back", "middle", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0037] However, the above description is only a specific embodiment of this utility model and should not be construed as limiting the scope of implementation of this utility model. Therefore, any substitution of equivalent components or equivalent changes and modifications made in accordance with the scope of protection of this utility model should still fall within the scope of the claims of this utility model.

Claims

1. A melting furnace for high-purity fused silica powder, comprising a cover (1), characterized in that: The lower end of the cover (1) is detachably connected to the furnace body (2) by bolts, and the lower end of the furnace body (2) is detachably connected to the base (3) by bolts. The furnace body (2) is equipped with a temperature control device and a mixing mechanism. The temperature control device includes a hexagonal support base (6) disposed inside the furnace body (2). The hexagonal support base (6) has multiple cavities (12) inside, and each of the multiple cavities (12) is equipped with an infrared heater (9) and a thermocouple (10) distributed vertically. The mixing mechanism includes an annular support ring (4) fixedly connected inside the cover (1). The bottom end of the annular support ring (4) is provided with multiple evenly distributed internal threaded holes (11). The internal threaded holes (11) are threaded with sound wave generators (5). The bottom end of the base (3) is fixedly connected with a sound wave reflector plate (7).

2. The melting furnace for high-purity fused silica powder according to claim 1, characterized in that: The inner diameter of the base (3) is smaller than the inner diameter of the furnace body (2).

3. The melting furnace for high-purity fused silica powder according to claim 1, characterized in that: The upper end of the furnace body (2) and the upper end of the base (3) are provided with annular grooves, and the lower ends of the cover (1) and the furnace body (2) are fixedly connected with sealing rings (13) that closely abut against the adjacent annular grooves.

4. The melting furnace for high-purity fused silica powder according to claim 1, characterized in that: The inner wall of the furnace body (2) is a hexagonal structure, and the inner wall abuts against the outer wall of the hexagonal support base (6).

5. The melting furnace for high-purity fused silica powder according to claim 1, characterized in that: The upper end of the hexagonal support base (6) abuts against the lower end of the annular support ring (4), and the lower end of the hexagonal support base (6) abuts against the upper end of the base (3).

6. The melting furnace for high-purity fused silica powder according to claim 1, characterized in that: The outer wall of the base (3) is connected to a discharge pipe (8) with a valve.

7. The melting furnace for high-purity fused silica powder according to claim 1, characterized in that: A controller is installed on the outer wall of the base (3).

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