Water cooling mechanism of optical coating machine

Abstract

The utility model discloses a water cooling mechanism of optical coating machine, including base, transmission shaft and drive motor, the base is fixedly installed with auxiliary box, transmission shaft is fixedly installed with connecting shaft, connecting shaft is connected with drive motor through rotating mechanism, the inside of auxiliary box is equipped with rotating chamber and movable chamber, the rotating chamber is rotatably equipped with reciprocating lead screw, the outside of auxiliary box is rotatably equipped with the rotating shaft that is connected with reciprocating lead screw through support mechanism, the rotating shaft is connected with drive motor through transmission mechanism. The utility model through drive motor through gear group linkage transmission shaft and reciprocating lead screw, realize the integrated control of rotation and cooling cycle, reduce power assembly and equipment complexity and energy consumption. Can along with transmission shaft speed rise, synchronous promotion reciprocating lead screw rotation frequency and piston plate reciprocating times, increase cooling water circulation flow, dynamic matching heat production and heat dissipation, promote high load cooling efficiency.

Description

Technical Field

[0001] This utility model relates to the field of optical coating equipment technology, and in particular to the water cooling mechanism of an optical coating machine. Background Technology

[0002] In the field of optical coating machines, the performance of the water-cooling mechanism plays a decisive role in the stability of the equipment and the coating accuracy. As industries such as semiconductor manufacturing and precision optical device production continue to demand higher coating quality, the limitations of traditional water-cooling mechanisms are becoming increasingly apparent.

[0003] Currently, most optical coating machine water cooling systems employ an independent water circulation mode, relying on an additional water pump or external constant water pressure to drive the cooling water circulation. This approach has significant drawbacks: First, the cooling water circulation lacks a linkage mechanism with the operation of key heat-generating components such as the drive shaft, making it impossible to dynamically adjust the cooling intensity based on the actual heat generation of the equipment. For example, when the coating machine operates under high load for extended periods, causing the drive shaft speed to increase and heat generation to rise significantly, traditional water cooling systems still supply water at a fixed flow rate, failing to quickly remove the surge in heat. This can easily lead to localized overheating, affecting the performance of the magnetohydrodynamic sealing device and even causing bearing grease failure, thus reducing the equipment's lifespan. Second, traditional solutions do not effectively design the active entry of cooling water into the system; the cooling water passively flows in only under a fixed pressure, lacking flow regulation capabilities. During equipment startup, shutdown, or switching between different operating conditions, the cooling water volume cannot be adjusted in a timely manner, not only wasting water resources but also potentially causing equipment malfunctions due to untimely cooling, making it difficult to meet the stringent temperature control requirements of modern optical coating processes. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a water-cooling mechanism for an optical coating machine.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] The water-cooling mechanism of an optical coating machine includes a base, a drive shaft, and a drive motor. An auxiliary box is fixedly mounted on the base, and a connecting shaft is fixedly mounted on the drive shaft. The connecting shaft is connected to the drive motor via a rotating mechanism. The auxiliary box contains a rotating chamber and a movable chamber. A reciprocating screw is rotatably mounted in the rotating chamber. A rotating shaft connected to the reciprocating screw is rotatably mounted outside the auxiliary box via a support mechanism. The rotating shaft is connected to the drive motor via a transmission mechanism. A piston plate is slidably and sealed within the movable chamber. The piston plate is connected to the reciprocating screw via a connecting mechanism. An inlet pipe and an outlet pipe communicating with the movable chamber are mounted on the auxiliary box. A heat exchange channel is provided inside the base, and the outlet pipe communicates with the heat exchange channel. A water supply pipe communicating with the heat exchange channel is mounted on the base.

[0007] Preferably, the rotating mechanism includes a first gear fixedly mounted on the output shaft of the drive motor, and a second gear fixedly mounted on the connecting shaft, wherein the first gear meshes with the second gear.

[0008] Preferably, the support mechanism includes a support frame fixedly mounted on the auxiliary box, and the rotating shaft is rotatably connected to the support frame.

[0009] Preferably, the transmission mechanism includes a third gear fixedly mounted on the rotating shaft, and the first gear meshes with the third gear.

[0010] Preferably, the first gear and the second gear are the same size, and the size ratio of the first gear to the third gear is 1:4.

[0011] Preferably, the inlet pipe, outlet pipe and delivery pipe are all equipped with valves, and all three valves are one-way valves.

[0012] The beneficial effects of this utility model are:

[0013] 1. The drive motor drives the transmission shaft and reciprocating screw simultaneously through the gear set, realizing integrated control of rotational motion and cooling cycle, reducing independent power components, and lowering equipment complexity and energy consumption.

[0014] 2. The reduction gear ratio enables the reciprocating screw to run at low speed, avoiding excessively fast piston plate movement that could cause water flow impact and ensuring circulation stability.

[0015] 3. The greater the power of the drive motor, the higher the speed of the transmission shaft, which in turn increases the rotation frequency of the reciprocating screw, increases the number of reciprocating strokes of the piston plate, and correspondingly increases the cooling water circulation flow rate, thereby achieving dynamic matching between heat generation and heat dissipation and improving the cooling efficiency under high load conditions.

[0016] 4. One-way valves in the inlet, outlet, and delivery pipes ensure unidirectional flow of cooling water, preventing backflow from contaminating the storage device or pressure fluctuations from affecting circulation, thus improving system reliability.

[0017] 5. The auxiliary box integrates the rotating chamber and the moving chamber, and the support frame and gear set are compactly laid out to reduce space occupation; the one-way valve design simplifies the pipeline logic and reduces maintenance complexity. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the water cooling mechanism of the optical coating machine proposed in this utility model;

[0019] Figure 2 for Figure 1 A schematic diagram of the structure viewed from below;

[0020] Figure 3 for Figure 1A schematic diagram of the vertical section structure;

[0021] Figure 4 for Figure 3 An enlarged schematic diagram of the structure at point A.

[0022] In the diagram: 1. Base, 2. Drive shaft, 3. Auxiliary box, 4. Inlet pipe, 5. Outlet pipe, 6. Water supply pipe, 7. Drive motor, 8. Support frame, 9. Rotating shaft, 10. Connecting shaft, 11. First gear, 12. Second gear, 13. Third gear, 14. Heat exchange channel, 15. Rotating chamber, 16. Moving chamber, 17. Reciprocating screw, 18. Piston plate, 19. Connecting frame. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0024] Reference Figure 1-4 In the innovative design of the water-cooling mechanism of this optical coating machine, its main structure comprises a base 1, a drive shaft 2, and a drive motor 7. For details regarding the specific connection method and sealing structure between the base 1 and the drive shaft 2, please refer to the published Chinese Utility Model Patent Publication No. CN207213173U, entitled "A Water-Cooling Structure for a Magnetohydrodynamic Sealing Device for an Optical Coating Machine." This technical solution focuses on optimizing and improving the water-cooling mechanism; therefore, the subsequent description will focus on the innovative points of the improved water-cooling system, while other parts not covered herein follow the technical solution disclosed in this existing patent.

[0025] An auxiliary box 3 is fixedly installed on the base 1, and a connecting shaft 10 is fixedly installed on the transmission shaft 2. The connecting shaft 10 is connected to the drive motor 7 through a rotating mechanism. The auxiliary box 3 has a rotating chamber 15 and a movable chamber 16 inside. A reciprocating screw 17 is rotatably installed in the rotating chamber 15. A rotating shaft 9 connected to the reciprocating screw 17 is rotatably installed outside the auxiliary box 3 through a support mechanism. The rotating shaft 9 is connected to the drive motor 7 through a transmission mechanism. A piston plate 18 is sealed and slidably installed in the movable chamber 16. The piston plate 18 is connected to the reciprocating screw 17 through a connecting mechanism. A water inlet pipe 4 and a water outlet pipe 5 connected to the movable chamber 16 are installed on the auxiliary box 3. A heat exchange channel 14 is provided inside the base 1. The heat exchange channel 14 is spiral-shaped to ensure the residence time of cold water in the heat exchange channel 14, thereby ensuring the cooling effect.

[0026] The water outlet pipe 5 is connected to the heat exchange channel 14, and the water supply pipe 6, which is connected to the heat exchange channel 14, is installed on the base 1.

[0027] The rotating mechanism includes a first gear 11 fixedly mounted on the output shaft of the drive motor 7, and a second gear 12 fixedly mounted on the connecting shaft 10. The first gear 11 and the second gear 12 mesh with each other. Relying on the first gear 11 and the second gear 12, the drive shaft 2 can be rotated after the drive motor 7 is started, in conjunction with the above-mentioned components.

[0028] The support mechanism includes a support frame 8 fixedly mounted on the auxiliary box 3, and a rotating shaft 9 rotatably connected to the support frame 8. The support frame 8 effectively supports the rotating shaft 9, preventing it from swaying.

[0029] The transmission mechanism includes a third gear 13 fixedly mounted on the rotating shaft 9, with the first gear 11 meshing with the third gear 13. The first gear 11 and the second gear 12 are the same size, and the size ratio of the first gear 11 to the third gear 13 is 1:4. The first gear 11 and the third gear 13 together realize the power transmission of the drive motor 7, enabling the rotating shaft 9 to rotate after the drive motor 7 is started. The aforementioned size ratio also enables a speed reduction operation, with the drive motor 7 driving the transmission shaft 2 at a high speed and the drive motor 7 driving the reciprocating screw 17 at a low speed.

[0030] Valves are installed in the inlet pipe 4, outlet pipe 5, and delivery pipe 6. All three valves are one-way valves. The one-way valves enable the unidirectional flow of cooling water. The cooling water in the cooling water storage device can only enter the active chamber 16 from the inlet pipe 4, can only enter the heat exchange channel 14 from the active chamber 16 and outlet pipe 5, and can only return to the cooling water storage device from the delivery pipe 6.

[0031] The cooling water is primarily cooled by plate heat exchangers (or shell-and-tube heat exchangers), and after cooling, it enters a tank for storage, which is the cooling water storage device mentioned in the above scheme. It is a conventional cooling device and will not be described in detail here.

[0032] Components not specifically described in this utility model are all standard parts and can be purchased from the market. The specific connection methods for each component all employ mature methods from the prior art, and will not be detailed here. Content not described in detail in this specification belongs to prior art known to those skilled in the art.

[0033] When the utility model is in use, through the power distribution of the driving motor 7, the linkage control of the rotation of the transmission shaft 2 and the cooling water circulation is realized. The specific process is as follows: the output shaft of the driving motor 7 drives the first gear 11 to rotate, and drives the connecting shaft 10 and the transmission shaft 2 to rotate at high speed through the meshing second gear 12. At the same time, the first gear 11 drives the rotating shaft 9 to rotate at a reduced speed through the meshing third gear 13, and drives the reciprocating screw 17 to rotate at a low speed. When the reciprocating screw 17 rotates, the piston plate 18 is driven to do reciprocating linear motion in the activity room 16 through the connecting mechanism. When the piston plate 18 moves upward, the air pressure in the activity room 16 decreases, and the one-way valve controls the water inlet pipe 4 to open, and the cooling water is sucked into the activity room 16 from the storage device; when the piston plate 18 moves in the reverse direction, the pressure in the activity room 16 increases, and the one-way valve controls the water outlet pipe 5 to open, and the cooling water is pressed into the heat exchange channel 14 of the base 1. After the cooling water in the heat exchange channel 14 absorbs the heat at the connection between the base 1 and the transmission shaft 2, it flows back to the storage device through the water supply pipe 6, and is cooled by the plate heat exchanger and then recycled.

[0034] The above is only the preferred specific implementation manner of the utility model, but the protection scope of the utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the utility model, according to the technical solution of the utility model and its inventive concept, makes equivalent substitutions or changes, and should be covered within the protection scope of the utility model.

Claims

1. A water-cooling mechanism for an optical coating machine, comprising a base (1), a drive shaft (2), and a drive motor (7), characterized in that, An auxiliary box (3) is fixedly installed on the base (1), and a connecting shaft (10) is fixedly installed on the transmission shaft (2). The connecting shaft (10) is connected to the drive motor (7) through a rotating mechanism. The auxiliary box (3) has a rotating chamber (15) and a movable chamber (16) inside. A reciprocating screw (17) is rotatably installed in the rotating chamber (15). A rotating shaft (9) connected to the reciprocating screw (17) is rotatably installed outside the auxiliary box (3) through a support mechanism. The rotating shaft (9) is connected to the transmission mechanism through a transmission mechanism. The structure is connected to the drive motor (7). A piston plate (18) is sealed and slidably provided in the active chamber (16). The piston plate (18) is connected to the reciprocating screw (17) through a connecting mechanism. A water inlet pipe (4) and a water outlet pipe (5) connected to the active chamber (16) are installed on the auxiliary box (3). A heat exchange channel (14) is provided inside the base (1). The water outlet pipe (5) is connected to the heat exchange channel (14). A water delivery pipe (6) connected to the heat exchange channel (14) is installed on the base (1).

2. The water-cooling mechanism of the optical coating machine according to claim 1, characterized in that, The rotating mechanism includes a first gear (11) fixedly mounted on the output shaft of the drive motor (7), and a second gear (12) fixedly mounted on the connecting shaft (10), wherein the first gear (11) meshes with the second gear (12).

3. The water-cooling mechanism of the optical coating machine according to claim 2, characterized in that, The support mechanism includes a support frame (8) fixedly installed on the auxiliary box (3), and the rotating shaft (9) is rotatably connected to the support frame (8).

4. The water-cooling mechanism of the optical coating machine according to claim 3, characterized in that, The transmission mechanism includes a third gear (13) fixedly mounted on the rotating shaft (9), and the first gear (11) meshes with the third gear (13).

5. The water-cooling mechanism of the optical coating machine according to claim 4, characterized in that, The first gear (11) and the second gear (12) are the same size, and the size ratio of the first gear (11) to the third gear (13) is 1:

4.

6. The water-cooling mechanism of the optical coating machine according to claim 5, characterized in that, The inlet pipe (4), outlet pipe (5) and delivery pipe (6) are all equipped with valves, and all three valves are one-way valves.

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