Target measurement device

Abstract

The utility model relates to the technical field of semiconductor manufacturing, especially a target material measuring device, including base, have the cooperation department for cooperating with the switch motor of platform, fastening frame is provided with two, and is connected to the opposite sides of base respectively, scale is detachably connected on fastening frame, and scale is parallel with horizontal direction parallelly arranged, support subassembly is provided with two, and is slidingly arranged on scale, and measuring slider is slidingly arranged on scale, and is located between two support subassembly, and measuring slider has at least measurement part. The utility model can measure the distance of the center line of target material and the center line of cleaning spare parts with the center axis respectively, thereby as adjustment basis, to the advantage of guaranteeing the coincidence rate of target material center line and cleaning spare parts center line, avoiding the abnormal phenomenon of target material discharge, causing target material scrapping.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a target material measuring device. Background Technology

[0002] In semiconductor manufacturing, sputtering is one of the key processes for semiconductor thin film preparation. The sputtering machine, as an important piece of equipment for realizing this process, uses high-energy particles to bombard the target material, causing atoms or molecules on the target surface to be sputtered out and deposited onto the wafer surface to form a thin film.

[0003] Currently, the alignment confirmation between the target centerline and the centerline of the cleaning spare parts (replaceable kits) in the inner wall of the machine chamber can only be roughly achieved by using the positioning pins installed on the chamber cover (upper electrode) and the alignment holes on the chamber. There is a lack of precise data-driven control methods, making precise control difficult. If the overlap between the target centerline and the cleaning spare parts centerline is low, the distance between them will be uneven, potentially causing target discharge due to insufficient spacing, leading to target failure and ultimately requiring maintenance and rework. Utility Model Content

[0004] The purpose of this invention is to provide a target material measuring device to solve the technical problem in the prior art where the centerline of the target material and the cleaning spare parts are difficult to coincide, resulting in the target material being scrapped due to discharge.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model provides a target material measuring device, the target material measuring device comprising:

[0007] The base has a mating part for engaging with the switching motor of the machine tool;

[0008] Two fastening brackets are provided and are respectively connected to opposite sides of the base;

[0009] A scale is detachably connected to the fastening frame, and the scale is set parallel to the horizontal direction;

[0010] Two support components are provided, and they are slidably mounted on the scale; and

[0011] A measuring slider is slidably disposed on the scale and located between the two support components, and the measuring slider has at least a measuring part.

[0012] In one embodiment of the present invention, the base includes a support portion and a mounting portion, the mating portion is a through groove provided on the support portion, the two mounting portions are respectively connected to opposite sides of the support portion, and each mounting portion is provided with a fastening bracket.

[0013] In one embodiment of the present invention, the fastening bracket is slidably disposed on the support portion, and the fastening bracket is provided with a first locking member so that the fastening bracket is locked on the support portion.

[0014] In one embodiment of the present invention, one end of the ruler has a ruler connecting part, and a limiting groove is provided on the fastening frame. The ruler is inserted into the limiting groove so that the ruler is connected to the fastening frame.

[0015] In one embodiment of the present invention, a second locking member is provided on the fastening frame. The second locking member extends into the limiting groove and abuts against the scale connecting part, so that the scale connecting part is locked on the fastening frame.

[0016] In one embodiment of the present invention, the support component includes a plurality of pads stacked along the extension direction of the scale, a connecting strip around the outer periphery of the plurality of pads, and fasteners locked onto the connecting strip, and each pad is movable in the vertical direction.

[0017] In one embodiment of the present invention, each of the gaskets has a gasket hole and is fitted onto the ruler through the gasket hole.

[0018] In one embodiment of the present invention, an observation window is provided on at least one side wall of the measuring slider that is parallel to the scale, and the observation window is provided with a marking line for reading the value during measurement.

[0019] In one embodiment of the present invention, the measuring unit includes a first housing and a plurality of connecting segments connected to the first housing, and each of the connecting segments can extend out of the first housing or retract into the first housing in stages, and a measuring head is provided on the connecting segment located at the front end.

[0020] In one embodiment of the present invention, the measuring part includes a second housing and a connecting line connected to the second housing. The free end of the connecting line is connected to a plumb bob, which is conical in shape and threaded to the bottom of the second housing.

[0021] In summary, the target material measuring device provided by this utility model has the following unexpected effects: Utilizing the central axis of the chamber switch motor built into the machine tool, a scale is set on the base, and a support component on the scale supports the scale during measurement. Measurement is performed through a measuring slider on the scale, allowing for the measurement of the distance between the centerline of the target material and the centerline of the cleaning spare parts and the central axis. This serves as an adjustment basis, ensuring the overlap rate between the centerline of the target material and the centerline of the cleaning spare parts, preventing abnormal discharge phenomena in the target material, and thus avoiding target material scrapping. Simultaneously, it also avoids machine downtime, reducing production losses, decreasing maintenance probability, reducing component wear, and effectively improving production capacity.

[0022] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0023] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0024] In the attached diagram:

[0025] Figure 1 This is a schematic diagram of a structure in the prior art where the center line of the target material and the center line of the cleaning spare parts do not coincide;

[0026] Figure 2 This is a schematic diagram of the overall structure of the target measuring device provided in one embodiment of the present invention.

[0027] Figure 3 This is a schematic diagram of the fastening frame provided in one embodiment of the present invention;

[0028] Figure 4 This is a schematic diagram of the scale provided in one embodiment of the present invention;

[0029] Figure 5 This is a schematic diagram of the structure of the support component provided in one embodiment of the present utility model;

[0030] Figure 6 This is a schematic diagram of the structure of the measuring slider provided in one embodiment of the present invention. Figure 1 ;

[0031] Figure 7 This is a schematic diagram of the structure of the measuring slider provided in one embodiment of the present invention. Figure 2 ;

[0032] Figure 8 This is a schematic diagram of the target measuring device provided in one embodiment of the present invention mounted on a machine base. Figure 1 ;

[0033] Figure 9 This is a schematic diagram of the target measuring device provided in one embodiment of the present invention mounted on a machine base. Figure 2 .

[0034] The attached figures are labeled as follows:

[0035] 100 - Target material; 200 - Cleaning spare parts; 300 - Chamber wall; 400 - Machine tool; 500 - Switch motor;

[0036] 600 - Target measuring device; A - Target centerline; B - Centerline of cleaning spare parts; C - Centerline;

[0037] 1-Base; 11-Support; 111-Matching part; 12-Mounting part;

[0038] 2-Fastening bracket; 21-Sliding groove; 22-First locking element; 23-Limiting groove; 24-Second locking element;

[0039] 3-Scale; 31-Scale connection part;

[0040] 4-Support assembly; 41-Gasket; 411-Gasket hole; 42-Connecting strap; 43-Fastener;

[0041] 5-Measuring slider;

[0042] 51-Measuring section; 511-First housing; 512-Connecting section; 513-Measuring head; 514-Second housing; 515-Connecting wire; 516-Plumb bob;

[0043] 52 - Observation window; 521 - Marker line;

[0044] 53-Slider locking component. Detailed Implementation

[0045] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0046] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. The drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0047] In the following description, numerous details are explored to provide a more thorough explanation of embodiments of the present invention. However, it will be apparent to those skilled in the art that embodiments of the present invention may be practiced without these specific details. In other embodiments, well-known structures and devices are shown in block diagram form rather than in detail to avoid obscuring embodiments of the present invention.

[0048] In sputtering coating equipment, such as Figure 1 As shown, if the center line A of the target 100 and the center line B of the cleaning spare part 200 in the inner wall 300 of the cavity have a low degree of overlap, the distance between them will be difficult to be uniform. This may lead to a discharge phenomenon in the target 100 due to the small distance, resulting in the scrapping of the target 100 and ultimately requiring maintenance and rework. The cleaning spare part is a replaceable kit that includes a variety of components.

[0049] like Figure 8 and Figure 9 As shown, the switching motor 500 at the chamber cover of the machine tool 400 is a key driving component for controlling the opening and closing of the chamber cover. It drives the chamber cover to rotate, thereby opening and closing the chamber. Given the central axis C of the switching motor 500 of the machine tool 400, and assuming that the central axis C is located at the midpoint of the switching motor 500, a target material measuring device 600 is designed to measure the distances between the centerline of the target material 100 and the centerline of the cleaning spare part 200 and the central axis C of the switching motor 500, respectively. This ensures that the centerlines of the target material 100 and the cleaning spare part 200 coincide during target material 100 operation.

[0050] Please see Figure 2 , Figure 2This is a schematic diagram of the target measuring device provided in an embodiment of the present invention. The target measuring device 600 is used to be mounted on the switching motor 500 of the machine base 400. The target measuring device 600 includes a base 1, a fastening frame 2, a scale 3, a support assembly 4, and a measuring slider 5. The base 1 has a mating part 111 for cooperating with the switching motor 500 of the machine base 400. Two fastening frames 2 are provided and are respectively connected to opposite sides of the base 1. The scale 3 is detachably connected to the fastening frame 2 and is arranged parallel to the horizontal direction. Two support assemblies 4 are provided and are slidably mounted on the scale 3. The measuring slider 5 is slidably mounted on the scale 3 and is located between the two support assemblies 4. The measuring slider 5 has at least a measuring part 51.

[0051] Specifically, the target measuring device 600 is mounted on the switching motor 500 of the machine tool 400, ensuring that the device closely matches the actual measurement requirements during machine tool 400 operation. By using the midpoint of the switching motor 500 as the central axis C, the distances between the centerline of the target 100 and the central axis C of the switching motor 500, as well as the distances between the centerline of the cleaning spare part 200 and the central axis C of the switching motor 500, are easily measured. This ensures that the centerlines of the target 100 and the cleaning spare part 200 coincide during target 100 operation. This design fully utilizes the existing space structure of the machine tool 400, avoiding excessive additional space occupation.

[0052] The base 1 serves as the supporting structure for the entire target measuring device 600, supporting the fastening frame 2, scale 3, support assembly 4, and measuring slider 5. It can withstand the weight of each component and various external forces that may occur during measurement. The base 1 is mounted on the switching motor 500 via a mating part 111. For ease of installation and disassembly, the connection between the base 1 and the switching motor 500 can be made using methods such as bolted connections or snap-fit ​​connections, allowing operators to quickly and accurately install the measuring device onto the switching motor 500, or easily disassemble the device for maintenance, repair, or component replacement. In this example, the base 1 is bolted to the switching motor 500.

[0053] Continue reading Figure 2 Two fastening frames 2 are installed and connected to opposite sides of the base 1 to form a stable frame structure. This facilitates the installation of the scale 3 on both sides of the base 1, while ensuring the accuracy of the measurement centerline C.

[0054] Continue reading Figure 2The fastening bracket 2 provides a reliable connection point for the scale 3. This detachable connection facilitates the installation and replacement of the scale 3 while ensuring its stability during measurement. Furthermore, since the center lines of the target material 100 and the cleaning spare parts 200 need to be measured separately, the detachable connection between the scale 3 and the fastening bracket 2 allows for quick assembly, disassembly, and replacement.

[0055] Continue reading Figure 2 The scale 3 is set parallel to the horizontal direction, providing a precise linear measurement reference for the movement of the measuring slider 5. During the measurement process, the measuring slider 5 moves along the scale 3, and by reading the position information of the measuring slider 5 on the scale 3, the centerline position information of the target material 100 can be accurately obtained.

[0056] Continue reading Figure 2 Two support components 4 are slidably mounted on the scale 3, and the measuring slider 5 is located between the two support components 4. The support components 4 provide additional support for the scale 3, ensuring that the measuring slider 5 remains stable as it moves along the scale 3, without tilting or wobbling. This effectively reduces errors during the measurement process and improves the accuracy and reliability of the measurement.

[0057] Continue reading Figure 2 The support component 4 is slidably mounted on the scale 3, allowing the operator to flexibly adjust its position according to the actual size of the target 100 and the measurement range. This adjustability enables the target measuring device 600 to adapt to measurement tasks of targets 100 of different specifications and shapes, expanding its application range. For example, when measuring a larger target 100, the support component 4 can be moved to both sides to increase the movement range of the measuring slider 5; while when measuring a smaller target 100, the support component 4 can be moved closer to improve the accuracy and stability of the measurement.

[0058] Continue reading Figure 2 The measuring slider 5 can obtain the centerline information of the target material 100 through the measuring unit 51. The measuring slider 5 is slidably set on the scale 3, so that the operator can flexibly control the position of the measuring slider 5 as needed. This not only allows for quick and accurate measurement of the target material 100, improving measurement efficiency, but also enables measurement of different parts of the target material 100 or cleaning spare parts 200.

[0059] See Figure 8 and Figure 9The base 1, equipped with the fastening bracket 2, is installed on the switching motor 500. First, the scale 3, equipped with the support assembly 4 and the measuring slider 5, is installed on the first fastening bracket 2 of the base 1 (close to the measuring target 100). The measuring slider 5 is moved to measure the distance between the centerline of the target 100 and the central axis C of the switching motor 500. Then, the scale 3, equipped with the support assembly 4 and the measuring slider 5, is installed on the second fastening bracket 2 of the base 1 (close to the cleaning spare part 200). The measuring slider 5 is moved to measure the distance between the centerline of the cleaning spare part 200 and the central axis C of the switching motor 500. This serves as an adjustment basis to ensure the overlap rate between the centerline of the target 100 and the centerline of the cleaning spare part 200, preventing abnormal discharge of the target 100 and causing it to be scrapped. Simultaneously, it also prevents machine 400 from stopping, causing production losses; reduces the probability of maintenance, reduces component wear, and effectively increases production capacity.

[0060] Continue reading Figure 2 In some embodiments, the base 1 includes a support portion 11 and a mounting portion 12. The mating portion 111 is a through groove provided on the support portion 11. Two mounting portions 12 are respectively connected to opposite sides of the support portion 11, and each mounting portion 12 is provided with a fastening bracket 2. Specifically, the support portion 111 is provided with a mating portion 111, and the mating portion 111 is a U-shaped through groove, which facilitates the base 1 to straddle the switch motor 500, making full use of existing space while ensuring installation stability. By placing the two mounting portions 12 on opposite sides of the support portion 11, the installation force can be evenly distributed on both sides of the support portion 11 when the base 1 is installed on the switch motor 500. Furthermore, the mounting portions 12 on opposite sides provide operators with more convenient operating space, and the mounting portions 12 on both sides also provide stable support for the installation of the scale 3, with a more reasonable and compact layout. Each mounting section 12 is equipped with a fastening bracket 2, which allows the scale 3 to be detachably connected to the fastening bracket 2, thereby measuring the distance between the center line of the target material 100 and the center line of the cleaning spare part 200 and the central axis C of the switch motor 500 respectively.

[0061] See Figure 3In the above embodiment, the fastening bracket 2 is slidably mounted on the support portion 11, and a first locking member 22 is provided on the fastening bracket 2 to lock the fastening bracket 2 onto the support portion 11. Specifically, the fastening bracket 2 has a sliding groove 21, through which it is slidably mounted on the support portion 11. This allows the operator to flexibly adjust the position of the fastening bracket 2 on the support portion 11 according to specific measurement requirements, thereby changing the height of the scale 3 to suit different measurement scenarios. The first locking member 22 can firmly lock the fastening bracket 2 onto the support portion 11, preventing it from shifting during measurement due to factors such as vibration, external impact, or its own weight. After sliding and adjusting the fastening bracket 2 to a suitable position, the operator can quickly and easily use the first locking member 22 to lock it in place. In this example, the first locking member 22 can be a bolt.

[0062] See Figure 3 and Figure 4 As is understandable, one end of the scale 3 has a scale connecting part 31, and the fastening frame 2 has a limiting groove 23. The scale 3 is inserted into the limiting groove 23 to connect the scale 3 to the fastening frame 2. Specifically, the scale 3 is provided with graduations, which facilitates observation of the movement position when the sliding measuring slider 5 is slidable. The limiting groove 23 provided on the fastening frame 2 (located on the opposite side of the sliding groove 21) facilitates cooperation with the scale connecting part 31, allowing the scale 3 to be quickly installed onto the fastening frame 2. Furthermore, the scale connecting part 31 is confined within the limiting groove 23, preventing large-scale wobbling in the horizontal direction, ensuring that the scale 3 maintains a stable horizontal position during measurement and guaranteeing measurement accuracy.

[0063] See Figure 3 In this example, the limiting groove 23 passes through the fastening frame 2 in the vertical direction. The limiting groove 23 provides a precise positioning guide for the insertion of the scale connecting part 31. When installing the scale 3, the operator only needs to insert the scale connecting part 31 along the opening of the limiting groove 23 to ensure that the extension direction of the scale 3 is consistent with the horizontal direction, ensuring measurement consistency, and enabling the installation and disassembly of the scale 3 to be completed quickly, thus improving work efficiency.

[0064] See Figure 4In the above embodiment, a second locking member 24 is provided on the fastening frame 2. The second locking member 24 extends into the limiting groove 23 and abuts against the scale connecting part 31, so that the scale connecting part 31 is locked onto the fastening frame 2. Specifically, the second locking member 24 passes through the side wall of the limiting groove 23 of the fastening frame 2. The scale connecting part 31 is firmly locked onto the fastening frame 2 by the second locking member 24, which prevents the scale 3 from shifting due to loosening during the measurement process. The second locking member 24 ensures the stability of the scale connecting part 31, so that the measurement reference will not change due to the loosening of the scale 3. The locking or unlocking of the scale connecting part 31 is achieved by the second locking member 24 (e.g., a bolt), which is convenient to operate and shortens the installation and disassembly time of the scale 3.

[0065] See Figure 5 In some embodiments, the support assembly 4 includes a plurality of pads 41 stacked along the extension direction of the scale 3, a connecting band 42 surrounding the outer periphery of the plurality of pads 41, and fasteners 43 locked onto the connecting band 42, and each pad 41 is movable in the vertical direction. Specifically, the plurality of pads 41 are stacked along the extension direction of the scale 3, so that during measurement, the weight of the scale 3 and the force generated during the measurement process are evenly distributed to each pad 41, and each pad 41 can bear a portion of the pressure, avoiding damage to the pads 41 or tilting of the scale 3 due to pressure concentration.

[0066] Continue reading Figure 5 Each pad 41 is rectangular in shape, and multiple pads 41 are connected into a whole by connecting straps 42 (the number of pads 41 is at least greater than 50, and the more pads, the higher the support accuracy), further enhancing the structural stability of the support assembly 4. The connecting straps 42 are connected to the outermost pads 41 by fasteners 43. The connecting straps 42 can prevent lateral displacement between the pads 41, ensuring that the entire support assembly 4 can stably support the scale 3.

[0067] Multiple gaskets 41 are stacked together, possessing a certain thickness and rigidity. When subjected to lateral forces (such as collisions during measurement or lateral impacts from vibrations), the gaskets 41 compress and support each other, resisting the effects of lateral forces. Fasteners 43 apply pre-tightening force, causing the connecting strip 42 to tightly wrap around the gaskets 41, increasing the friction between the gaskets 41 and thus better resisting interference from lateral forces.

[0068] Since each pad 41 can move vertically, when the support assembly 4 is placed at the outer edge of the target 100 or the cleaning spare part 200, gravity allows the bottom of each pad 41 to fit into the target 100 or the cleaning spare part 200, thus enabling it to be supported at the outer edge of the target 100 or the cleaning spare part 200, thereby providing reliable support for the scale 3 and ensuring the stability of the scale 3 during measurement.

[0069] Continue reading Figure 5 It should be noted that each gasket 41 has a gasket hole 411, and is fitted onto the scale 3 through the gasket hole 411. The gasket hole 411 penetrates the wall thickness of the gasket 41 and extends along the length of the gasket 41. The gasket hole 411 is set as a strip hole, which facilitates the fitting of the gasket 41 onto the scale 3 and allows it to move within a certain range in the vertical direction.

[0070] See Figure 6 As is understandable, the measuring slider 5 is provided with a slider locking member 53 for locking. The slider locking member 53 passes through the top of the measuring slider 5. After the measuring slider 5 slides into place, it abuts against the scale 3 through the slider locking member 53 to lock the measuring slider 5 onto the scale 3. When it is necessary to slide the measuring slider 5, the slider locking member 53 can be unlocked.

[0071] Continue reading Figure 6 In some embodiments, an observation window 52 is provided on at least one side wall parallel to the scale 3 of the measuring slider 5. The observation window 52 has marking lines 521 for reading values ​​during measurement. Specifically, the observation window 52 allows the operator to directly observe the scale on the scale 3 and precisely align the marking lines 521 on the observation window 52 with the scale on the scale 3 to facilitate reading the measurement value. During the measurement process, if the position of the measuring slider 5 needs to be adjusted, the operator can observe the relative positional changes of the marking lines 521 and the scale on the scale 3 in real time through the observation window 52, ​​thereby accurately controlling the adjustment amount.

[0072] Continue reading Figure 6In some embodiments, the measuring unit 51 includes a first housing 511 and a plurality of connecting segments 512 connected to the first housing 511. Each connecting segment 512 can extend out of or retract into the first housing 511 in stages. A measuring head 513 is provided on the connecting segment 512 at the front end. Specifically, the outer diameter of each connecting segment 512 gradually decreases in the direction away from the first housing 511, and the measuring head 513 can be used for precise alignment during measurement. The ability of multiple connecting segments 512 to extend out of the first housing 511 in stages greatly expands the measuring range of the measuring unit 51. When performing small-range or fine measurements, only part of the connecting segments 512 needs to be retracted into the first housing 511, keeping the measuring unit 51 at a shorter effective length. The gradual extension and retraction of the connecting segments 512 allows the measuring unit 51 to flexibly adjust its length to adapt to different spatial dimensions.

[0073] During measurement, multiple connecting sections 512 can be extended step by step to align with the center line of the target material 100 or the cleaning spare part 200. When not in use, each connecting section 512 of the measuring unit 51 can be retracted step by step into the first housing 511, significantly reducing the overall size of the measuring unit 51, decreasing its storage volume, and occupying less storage space. The step-by-step extension and retraction of the connecting sections 512 is simple to operate, allowing operators to complete the deployment and retraction of the measuring unit 51 in a short time, thus improving work efficiency.

[0074] See Figure 7 In other embodiments, the measuring unit 51 includes a second housing 514 and a connecting line 515 connected within the second housing 514. A plumb bob 516 is connected to the free end of the connecting line 515. The plumb bob 516 is conical and threaded to the bottom of the second housing 514. Specifically, during measurement, the conical structure of the plumb bob 516 enables precise alignment. When the plumb bob 516 hangs naturally, it hangs stably in the vertical direction due to gravity, providing a precise vertical reference for measurement.

[0075] Continue reading Figure 7 The plumb bob 516 is threaded to the bottom of the second housing 514, allowing for quick and easy installation and removal by the operator. When the plumb bob 516 is needed for measurement, simply unscrew it from the second housing 514, and it will hang down naturally under gravity. After measurement, the connecting wire 515 can be easily stored back into the second housing 514, and the plumb bob 516 can be screwed back onto the second housing 514.

[0076] See Figure 2 , Figure 8 and Figure 9When using the target measuring device 600, first install the base 1 of the target measuring device 600 on the switch motor 500 of the machine tool 400, and install the fastening brackets 2 on both sides of the base 1 respectively; then install the scale 3, which is equipped with the support components 4 and the measuring slider 5, on the fastening bracket 2 on the first side of the base 1. By adjusting the position of the fastening bracket 2 on the base 1, the two support components 4 can be locked onto the outer edge of the target 100, thus supporting the scale 3. Pull out (or unscrew) the measuring part 51, and move the measuring slider 5 on the scale 3 to align the measuring part 51 with the center line of the target 100. The first measurement value can be read through the observation window 52; then install the scale 3 equipped with the support components 4 and the measuring slider 5... 3. The fastening bracket 2 is installed on the second side (opposite to the first side) of the base 1. By adjusting the position of the fastening bracket 2 on the base 1, the two support components 4 can be locked onto the outer edge of the cleaning spare part 200, which serves to support the scale 3. The measuring part 51 is pulled out (or screwed out). By moving the measuring slider 5 on the scale 3, the measuring part 51 is aligned with the center line of the measuring slider 5, and the second measurement value can be read through the observation window 52. According to the first measurement value and the second measurement value, the position of the target material 100 or the cleaning spare part 200 can be adjusted to ensure the overlap rate between the center line of the target material 100 and the center line of the cleaning spare part 200 when the target material 100 is in operation, so as to avoid the abnormal discharge phenomenon of the target material 100.

[0077] In summary, the target material measuring device 600 provided by this utility model has the following unexpected effects: Utilizing the central axis C of the chamber switch motor 500 built into the machine tool 400, by setting the scale 3 on the base 1, and using the support component 4 on the auxiliary scale 3 to support the scale 3 during measurement, the distance between the centerline of the target material 100 and the centerline of the cleaning spare part 200 and the central axis C can be measured through the measuring slider 5 on the scale 3. This provides an adjustment basis to ensure the overlap rate between the centerline of the target material 100 and the centerline of the cleaning spare part 200, avoiding abnormal discharge phenomena in the target material 100 and causing it to be scrapped. At the same time, it can also avoid machine tool 400 downtime, resulting in production losses; reduce maintenance probability, reduce component wear, and effectively improve production capacity.

[0078] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A target material measuring device, characterized in that, include: The base has a mating part for engaging with the switching motor of the machine tool; Two fastening brackets are provided and are respectively connected to opposite sides of the base; A scale is detachably connected to the fastening frame, and the scale is set parallel to the horizontal direction; There are two support components, which are slidably mounted on the scale. as well as A measuring slider is slidably disposed on the scale and located between the two support components, and the measuring slider has at least a measuring part.

2. The target measuring device according to claim 1, characterized in that, The base includes a support part and a mounting part. The mating part is a through groove provided on the support part. The two mounting parts are respectively connected to opposite sides of the support part. Each mounting part is provided with a fastening bracket.

3. The target measuring device according to claim 2, characterized in that, The fastening bracket is slidably disposed on the support portion, and the fastening bracket is provided with a first locking member to lock the fastening bracket onto the support portion.

4. The target measuring device according to claim 1, characterized in that, One end of the scale has a scale connection part, and a limiting groove is provided on the fastening frame. The scale is inserted into the limiting groove so that the scale is connected to the fastening frame.

5. The target measuring device according to claim 4, characterized in that, The fastening frame is provided with a second locking member, which extends into the limiting groove and abuts against the scale connecting part, so that the scale connecting part is locked onto the fastening frame.

6. The target measuring device according to claim 1, characterized in that, The support assembly includes a plurality of pads stacked along the extension direction of the scale, a connecting band around the periphery of the plurality of pads, and fasteners locked onto the connecting band, and each pad is movable in a vertical direction.

7. The target measuring device according to claim 6, characterized in that, Each of the gaskets has a gasket hole, and is fitted onto the ruler through the gasket hole.

8. The target measuring device according to claim 1, characterized in that, An observation window is provided on at least one side wall of the measuring slider that is parallel to the scale, and the observation window is provided with marking lines for reading values ​​during measurement.

9. The target measuring device according to claim 1 or 8, characterized in that, The measuring unit includes a first housing and a plurality of connecting segments connected to the first housing, and each of the connecting segments can extend out of the first housing or retract into the first housing in stages, and a measuring head is provided on the connecting segment located at the front end.

10. The target measuring device according to claim 1 or 8, characterized in that, The measuring unit includes a second housing and a connecting line connected to the second housing. A plumb bob is connected to the free end of the connecting line. The plumb bob is conical and threaded to the bottom of the second housing.

Images