A helium detection device for high voltage direct current relay ceramic assembly

Abstract

The utility model relates to high -voltage direct current relay ceramic assembly helium detection device, including machine table seal base, and the machine table seal cavity is opened, the machine table seal cavity is connected with first vacuum pump and leak detection gas source, machine table telescopic mechanism is towards machine table seal base setting, set up upper pressure seal cover on machine table telescopic mechanism, upper pressure cover lining is set in upper pressure seal cover, wherein, ceramic assembly sets up in machine table seal cavity, ceramic chamber's open end is towards upper pressure cover lining, when machine table telescopic mechanism stretches out, upper pressure seal cover covers and seals machine table seal cavity, upper pressure cover lining covers open end and seals ceramic chamber, ceramic chamber connects second vacuum pump and leak detector, the utility model discloses through upper pressure cover lining covers and seals ceramic chamber on machine table seal base, and simple operation greatly promotes the efficiency of ceramic chamber sealing.

Description

Technical Field

[0001] This utility model relates to the field of relay ceramic component manufacturing technology, and in particular to a helium detection device for high voltage DC relay ceramic components. Background Technology

[0002] High-voltage ceramic relays can operate at voltages of kilovolts or even tens of thousands of volts. To ensure stable performance and suppress arcing during switching, the internal components of high-voltage ceramic relays need to be filled with inert gas or kept in a high vacuum. Insufficient airtightness of the high-voltage ceramic relay will lead to leakage of internal inert gas or a decrease in vacuum.

[0003] Therefore, airtightness testing is required during the production of ceramic components (housing) for ceramic relays. The existing testing method involves sealing the ceramic chamber of the relay with silicone grease and a sheet metal plate, and then connecting a leak detector to this chamber. Subsequently, a gas to be tested is sprayed onto the outside of the ceramic relay using a spray gun. If the ceramic relay's seal is insufficient, the gas will be drawn in and detected by the leak detector. However, this method is cumbersome due to the sealing process, the need for silicone grease application, and its low testing efficiency.

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a helium detection device for high voltage DC relay ceramic components, so as to improve the detection efficiency of the airtightness of ceramic components.

[0006] The technical solution of this utility model is as follows:

[0007] A helium detection device for a high-voltage DC relay ceramic assembly is provided for detecting the ceramic assembly, wherein the ceramic assembly has a ceramic chamber, and the high-voltage DC relay ceramic assembly helium detection device comprises:

[0008] The machine tool sealing base has a machine tool sealing cavity; the machine tool sealing cavity is connected to a first vacuum pump and a leak detection gas source;

[0009] The machine tool telescopic mechanism is positioned toward the machine tool sealing base; an upper pressure sealing cover is provided on the machine tool telescopic mechanism;

[0010] The upper pressure cover liner is disposed inside the upper pressure sealing cover;

[0011] The ceramic component is disposed within the sealed cavity of the machine tool, with the opening end of the ceramic cavity facing the inner liner of the upper pressure cover; when the machine tool telescopic mechanism extends, the upper pressure sealing cover covers and seals the sealed cavity of the machine tool, and the inner liner of the upper pressure cover covers and seals the opening end of the ceramic cavity; the ceramic cavity is connected to a second vacuum pump and a leak detector.

[0012] A further technical solution is that the inner lining of the upper pressure cover is provided with a raised inner lining sealing pad on the surface near the machine tool sealing cavity; when the machine tool telescopic mechanism extends, the inner lining sealing pad covers the opening end and seals the ceramic cavity.

[0013] A further technical solution is that a sealing ring is fitted on the outer diameter of the machine tool sealing base; when the machine tool telescopic mechanism extends, the machine tool sealing base extends into the upper pressure sealing cover, and the sealing ring contacts the inner wall of the upper pressure sealing cover.

[0014] A further technical solution is that the leak detection gas source is a helium gas source, and the leak detector is a helium mass spectrometer leak detector.

[0015] A further technical solution is that the second vacuum pump and the leak detector pass through the inner lining of the upper pressure cover and connect to the ceramic chamber.

[0016] A further technical solution is to install a vacuum pressure sensor inside the sealed cavity of the machine tool.

[0017] A further technical solution is that multiple machine tool sealing cavities are connected in parallel; all machine tool sealing cavities are connected to the same first vacuum pump, and all ceramic chambers are connected to the same second vacuum pump and the same leak detector.

[0018] A further technical solution is that a first vacuum valve is provided between the first vacuum pump and the sealing cavities of different machine tools respectively; a second vacuum valve is provided between the second vacuum pump and the different ceramic chambers respectively; the leak detector and the second vacuum pump share a pipeline to connect the ceramic chambers.

[0019] A further technical solution is to provide a first nitrogen gas source; the first nitrogen gas source and the leak detection gas source share a pipe connected to the machine's sealing cavity.

[0020] A further technical solution is to provide a second nitrogen gas source; the second nitrogen gas source and the leak detector share a pipe connected to the ceramic chamber.

[0021] The beneficial technical effects of this utility model are as follows:

[0022] (1) The high-voltage DC relay ceramic component helium detection device of this utility model is equipped with a machine base sealing base and a machine telescopic mechanism. When the telescopic mechanism is extended, the inner liner of the upper pressure cover on the telescopic mechanism can cooperate to cover and seal the ceramic chamber on the machine base sealing base. The operation is simple and greatly improves the sealing efficiency of the ceramic chamber. In addition, an upper pressure sealing cover is also provided on the machine telescopic mechanism. While the inner liner of the upper pressure cover seals the ceramic chamber, the upper pressure sealing cover cooperates with the machine base sealing base to form a machine sealing cavity, and the ceramic chamber is set in the machine sealing cavity. When testing the sealing performance of the ceramic chamber, it is only necessary to fill the machine sealing cavity with the gas to be tested, which reduces the use of the gas to be tested, reduces the testing cost, and the machine sealing cavity and the ceramic chamber are sealed in the same extension action without adding any extra actions, ensuring the efficiency of the ceramic chamber airtightness test.

[0023] (2) Furthermore, a nitrogen source is also provided. After testing a ceramic component, nitrogen can be introduced through the nitrogen source to discharge the gas to be tested in the pipeline connected to the leak detection gas source and the leak detector, so as to avoid the residual gas to be tested from interfering with the airtightness test of the next ceramic component and improve the detection accuracy.

[0024] (3) Furthermore, multiple machine sealing cavities are connected to the same first vacuum pump, and multiple ceramic chambers are connected to the same second vacuum pump and the same leak detector, that is, multiple ceramic components are tested in parallel. This simplifies the structure of the testing device and reduces its cost. When testing ceramic components, multiple ceramic components can be tested together, completing the testing of multiple ceramic components in one step. If the leak detector does not provide feedback, the airtightness of all ceramic components tested in that batch is qualified. If the leak detector detects an abnormality, the ceramic components in that batch are tested one by one, significantly improving the testing efficiency of ceramic components. Attached Figure Description

[0025] Figure 1 An explosive structural diagram of a high-voltage DC relay ceramic component helium detection device according to an embodiment of the present disclosure is shown.

[0026] Figure 2 The diagram shows a layout of a high-voltage DC relay ceramic component helium detection device according to an embodiment of the present disclosure, in which multiple ceramic components are detected in parallel.

[0027] Marked in the attached diagram:

[0028] 1. Machine telescopic mechanism; 11. Cylinder connecting block; 12. Upper pressure sealing cover; 2. Upper pressure cover liner; 21. Liner sealing gasket; 3. Machine sealing base; 31. Sealing ring; 32. Machine sealing cavity; 4. Ceramic component; 41. Ceramic chamber; 5. Leak detector; 51. Vacuum pressure sensor; 52. Leak detection gas source; 53. First nitrogen source; 54. Second nitrogen source; 61. First vacuum valve; 62. First vacuum pump; 63. Second vacuum valve; 64. Second vacuum pump; 65. Gas filling valve; 66. Leak detection valve; 67. Helium discharge valve; 68. First nitrogen filling valve; 69. Second nitrogen filling valve. Detailed Implementation

[0029] To make the objectives, features, and advantages of this utility model more apparent and understandable, please refer to the accompanying drawings. It should be noted that the structures, proportions, sizes, etc., depicted in the accompanying drawings are merely for illustrative purposes and to aid those skilled in the art in understanding and reading the content disclosed herein. They are not intended to limit the implementation conditions of this utility model and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0030] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0031] Example 1

[0032] Figure 1 An explosive structural diagram of a high-voltage DC relay ceramic component helium detection device according to an embodiment of the present disclosure is shown. Figure 2 This diagram illustrates a layout of a high-voltage DC relay ceramic component helium detection device according to an embodiment of the present disclosure, used for parallel detection of multiple ceramic components. Please refer to... Figure 1 and Figure 2A high-voltage DC relay ceramic component helium detection device is disclosed, used to detect ceramic component 4. The ceramic component 4 has a ceramic chamber 41. The high-voltage DC relay ceramic component helium detection device includes a machine base sealing base 3 with a machine base sealing cavity 32. The machine base sealing cavity 32 is connected to a first vacuum pump 62 and a leak detection gas source 52. A machine base telescopic mechanism 1 is positioned facing the machine base sealing base 3. The machine base telescopic mechanism 1 can be a cylinder. A cylinder connecting block 11 is provided on the machine base telescopic mechanism 1, and an upper pressure sealing cover 12 is provided on the cylinder connecting block 11. An upper pressure cover liner 2 is disposed inside the upper pressure sealing cover 12.

[0033] The ceramic component 4 is housed within the machine tool sealing cavity 32, with the opening of the ceramic chamber 41 facing the inner liner of the upper pressure cover 2. The ceramic chamber 41 connects to the second vacuum pump 64 and the leak detector 5. Specifically, the machine tool sealing cavity 32 is connected to the first vacuum pump 62, the machine tool sealing cavity 32 to the leak detection gas source 52, the ceramic chamber 41 to the second vacuum pump 64, and the ceramic chamber 41 to the leak detector 5 via bellows (not shown in the figure). The bellows can be connected to the machine tool sealing cavity 32 and to the ceramic chamber 41 via flanges (not shown in the figure). The bellows can be connected to the second vacuum pump 64, the leak detector 5, the first vacuum pump 62, and the leak detection gas source 52 via threads, and PTFE tape (not shown in the figure) and sealant (not shown in the figure) are provided at the connection points. When the machine's telescopic mechanism 1 extends, the upper pressure sealing cover 12 covers the sealing chamber 32 of the machine, and the upper pressure cover liner 2 covers the open end of the sealing ceramic chamber 41. This simple operation greatly improves the sealing efficiency of the ceramic chamber 41. Simultaneously, the upper pressure cover liner 2 covers and seals the ceramic chamber 41, while the upper pressure sealing cover 12, together with the machine's sealing base 3, forms the machine's sealing chamber 32, within which the ceramic chamber 41 is located. When testing the sealing performance of the ceramic chamber 41, only the test gas needs to be filled into the machine's sealing chamber 32, reducing the use of the test gas and lowering testing costs. Furthermore, the sealing of the machine's sealing chamber 32 and the ceramic chamber 41 is completed within the same extension action, without any additional steps, ensuring the efficiency of the ceramic chamber 41's airtightness testing.

[0034] Please refer to Figure 1 and Figure 2 The inner liner 2 of the upper pressure cover has a raised inner sealing gasket 21 on its surface near the machine tool sealing cavity 32. When the machine tool telescopic mechanism 1 extends, the inner sealing gasket 21 covers the opening end of the sealing ceramic cavity 41. The upper pressure cover liner 2 and the upper pressure sealing cover 12 can be an interference fit, and the inner sealing gasket 21 can be made of silicone. Silicone has strong chemical stability, high compression rebound rate, and is not easily deformed after long-term compression. A slot (not marked in the figure) can be provided in the machine tool sealing cavity 32 to fix the position of the ceramic component 4, which facilitates the alignment of the ceramic component 4 and the inner sealing gasket 21.

[0035] Preferably, a sealing ring 31 is fitted onto the outer diameter of the machine tool sealing base 3. The sealing ring 31 can be made of silicone material. When the machine tool telescopic mechanism 1 extends, the machine tool sealing base 3 extends into the upper pressure sealing cover 12, and the sealing ring 31 contacts the inner wall of the upper pressure sealing cover 12. The sealing ring 31 fills the gap between the machine tool sealing base 3 and the upper pressure sealing cover 12 to seal the machine tool sealing cavity 32.

[0036] More preferably, the second vacuum pump 64 and the leak detector 5 pass through the inner liner of the upper pressure cover 2 and connect to the ceramic chamber 41. The inner liner of the upper pressure cover 2 may have through holes to connect to the ceramic chamber 41 and be provided with flanges to connect the pipes of the second vacuum pump 64 and the leak detector 5.

[0037] Please refer to Figure 1 and Figure 2 The leak detection gas source 52 is a helium gas source, and the leak detector 5 is a helium mass spectrometer leak detector 5. Helium molecules are small and diffuse quickly, allowing them to pass through nanoscale leaks. Combined with the high sensitivity of the helium mass spectrometer, it can detect a wide range of leak types. Furthermore, helium is an inert gas and does not react with the ceramic component 4. The helium mass spectrometer can be a commercially available Pratt & Whitney Vacuum ASM 340 helium mass spectrometer.

[0038] Preferably, a vacuum pressure sensor 51 is installed inside the machine tool's sealed cavity 32. The vacuum pressure sensor 51 can be a commercially available Yunhao PT2301 pressure transmitter. The vacuum pressure sensor 51 monitors the pressure inside the machine tool's sealed cavity 32 and quickly determines whether the machine tool's sealed cavity 32 has been evacuated.

[0039] Please refer to Figure 1 and Figure 2 A first nitrogen gas source is also provided. The first nitrogen gas source and the leak detection gas source 52 share a pipe connecting to the machine's sealed cavity 32. After testing a ceramic component 4, nitrogen can be introduced through the first nitrogen gas source to expel the gas to be tested from the pipe connecting the leak detection gas source 52 to the machine's sealed cavity 32. This prevents residual gas in the pipe from interfering with the airtightness testing of the next ceramic component 4, thereby improving the testing accuracy.

[0040] More preferably, a second nitrogen source is also provided. The second nitrogen source and the leak detector 5 share a pipe connected to the ceramic chamber 41. After testing one ceramic component 4, nitrogen can be introduced through the second nitrogen source to expel the gas to be tested from the pipe connected to the leak detector 5, thus preventing residual gas from interfering with the airtightness test of the next ceramic component 4 and improving the test accuracy.

[0041] The specific workflow of this embodiment is as follows:

[0042] Place the ceramic component 4 with the opening facing upward inside the machine table sealing cavity 32. Drive the telescopic mechanism 1 of the machine table to extend until the inner lining sealing soft pad 21 contacts the ceramic chamber 41. At this time, the ceramic component 4 is clamped by the machine table sealing base 3 and the inner lining sealing soft pad 21. The inner lining sealing soft pad 21 covers the opening end of the ceramic chamber 41, and the inner lining sealing soft pad 21 seals the ceramic chamber 41. At the same time, the upper pressure sealing cover 12 is also sleeved on the machine table sealing base 3, and the sealing ring 31 fills the gap between the upper pressure sealing cover 12 and the machine table sealing base 3, and the machine table sealing cavity 32 is sealed. Then start the first vacuum pump 62 to pump the air in the machine table sealing cavity 32, and start the second vacuum pump 64 to pump the air in the ceramic chamber 41. After all the air is pumped out, start the leak detection gas source 52 to fill the machine table sealing cavity 32 with the gas to be detected, and start the detector to continuously detect the ceramic chamber 41. After a certain period of time, if the detector detects the gas to be detected, the airtightness of the ceramic component 4 is unqualified. If the detector never detects the gas to be detected, the airtightness of the ceramic component 4 is qualified.

[0043] Embodiment 2

[0044] Please refer to Figure 1 and Figure 2 , the structure and working process of Embodiment 2 are mostly the same as those of Embodiment 1. The difference is that in Embodiment 2, a parallel structure of multiple machine table sealing cavities 32 is provided. All the machine table sealing cavities 32 are connected to the same first vacuum pump 62, and all the ceramic chambers 41 are connected to the same second vacuum pump 64 and the same leak detector 5. That is, multiple ceramic components 4 are detected in parallel. The structure of the detection device is simplified, and the cost of the detection device is reduced. When detecting the ceramic component 4, multiple ceramic components 4 can be detected together, and the detection of multiple ceramic components 4 is completed in one step. If there is no feedback from the leak detector 5, the airtightness of all the ceramic components 4 detected in this batch is qualified. If the leak detector 5 detects an abnormality, then detect the ceramic components 4 in this batch one by one, which significantly improves the detection efficiency of the ceramic components 4.

[0045] Preferably, a first vacuum valve 61 is respectively provided between the first vacuum pump 62 and different machine table sealing cavities 32. A second vacuum valve 63 is respectively provided between the second vacuum pump 64 and different ceramic chambers 41. The leak detector 5 and the second vacuum pump 64 share a pipeline to connect to the ceramic chamber 41. The leak detector 5 simultaneously detects all the ceramic components 4 in parallel. When there is a leak, the connection between a machine table sealing cavity 32 and the first vacuum pump 62 can be separately disconnected through the first vacuum valve 61, and the connection between a ceramic chamber 41 and the leak detector 5 and the second vacuum pump 64 can be disconnected through the second vacuum valve 63 to detect one or a specific several of the ceramic chambers 41 among all the parallel ceramic chambers 41, and quickly determine which ceramic chamber 41 has a leak and the airtightness is unqualified.

[0046] Take Figure 2For example, when using helium gas to test the airtightness of ceramic chamber 41, the following steps are performed:

[0047] Install the workpiece: Place the ceramic chamber 41 inside the machine tool sealing chamber 32.

[0048] Machine sealing cavity 32 inspection: The first vacuum valve 61 and the first vacuum pump 62 are opened to evacuate the machine sealing cavity 32. During this process, the vacuum level inside the machine sealing cavity 32 is monitored by the vacuum pressure sensor 51. If the vacuum level inside the machine sealing cavity 32 does not reach the preset value within a preset time, the sealing performance of the machine sealing cavity 32 is abnormal, and the monitoring process ends. If the vacuum level inside the machine sealing cavity 32 reaches the preset value within a preset time, the sealing performance of the machine sealing cavity 32 is normal, and the monitoring process continues.

[0049] Evacuation of the workpiece: Open the second vacuum valve 63 and the second vacuum pump 64 to evacuate the ceramic chamber 41. After evacuation is complete, close the first vacuum valve 61, the first vacuum pump 62, and the second vacuum pump 64.

[0050] Helium filling of workpiece: Open the filling valve 65 and the leak detection gas source 52 to fill helium (gas to be tested) into the machine tool sealing cavity 32.

[0051] Workpiece micro-leakage monitoring: Open leak detection valve 66 and leak detector 5 to check whether there is helium in ceramic chamber 41; if leak detector 5 detects that the helium in ceramic chamber 41 exceeds the set value within the set leak detection time, the airtightness of ceramic chamber 41 is unqualified; if leak detector 5 detects that the helium in ceramic chamber 41 does not exceed the set value within the set leak detection time, the airtightness of ceramic chamber 41 is qualified; after the test, close gas filling valve 65 and leak detection valve 66.

[0052] Helium release: Open helium release valve 67, first nitrogen charging valve 68, second nitrogen charging valve 69, first nitrogen source 53, and second nitrogen source 54; first nitrogen source 53 and second nitrogen source 54 fill nitrogen into the machine's sealed cavity 32 along the pipeline, and the nitrogen discharges the residual helium in the pipeline connecting the leak detection gas source 52 and the leak detector 5. The nitrogen mixed with the residual helium is discharged along helium release valve 67;

[0053] Unload the workpiece: Remove the ceramic chamber 41 from the sealed cavity 32 of the machine tool.

[0054] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0055] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A helium detection device for a high-voltage DC relay ceramic assembly, used for detecting the ceramic assembly, wherein the ceramic assembly has a ceramic chamber, characterized in that, The high-voltage DC relay ceramic component helium detection device includes: The machine tool sealing base has a machine tool sealing cavity; the machine tool sealing cavity is connected to a first vacuum pump and a leak detection gas source; The machine tool telescopic mechanism is positioned toward the machine tool sealing base; an upper pressure sealing cover is provided on the machine tool telescopic mechanism; The upper pressure cover liner is disposed inside the upper pressure sealing cover; The ceramic component is disposed within the sealed cavity of the machine tool, with the opening end of the ceramic cavity facing the inner liner of the upper pressure cover; when the machine tool telescopic mechanism extends, the upper pressure sealing cover covers and seals the sealed cavity of the machine tool, and the inner liner of the upper pressure cover covers and seals the opening end of the ceramic cavity; the ceramic cavity is connected to a second vacuum pump and a leak detector.

2. The high-voltage DC relay ceramic component helium detection device as described in claim 1, characterized in that: The inner lining of the upper pressure cover is provided with a raised inner sealing pad on the surface near the sealing cavity of the machine tool; when the telescopic mechanism of the machine tool extends, the inner sealing pad covers the opening end and seals the ceramic cavity.

3. The high-voltage DC relay ceramic component helium detection device as described in claim 1, characterized in that: A sealing ring is fitted on the outer diameter of the machine tool sealing base; when the machine tool telescopic mechanism extends, the machine tool sealing base extends into the upper pressure sealing cover, and the sealing ring contacts the inner wall of the upper pressure sealing cover.

4. The high-voltage DC relay ceramic component helium detection device as described in claim 1, characterized in that: The leak detection gas source is a helium gas source, and the leak detector is a helium mass spectrometer leak detector.

5. The high-voltage DC relay ceramic component helium detection device as described in claim 1, characterized in that: The second vacuum pump and the leak detector pass through the inner lining of the upper pressure cover and communicate with the ceramic chamber.

6. The helium detection device for high-voltage DC relay ceramic components as described in claim 1, characterized in that: A vacuum pressure sensor is installed inside the sealed cavity of the machine tool.

7. The high-voltage DC relay ceramic component helium detection device as described in claim 1, characterized in that: Multiple machine tool sealing cavities are connected in parallel; all machine tool sealing cavities are connected to the same first vacuum pump, and all ceramic chambers are connected to the same second vacuum pump and the same leak detector.

8. The high-voltage DC relay ceramic component helium detection device as described in claim 7, characterized in that: A first vacuum valve is provided between the first vacuum pump and each of the different machine tool sealing cavities; a second vacuum valve is provided between the second vacuum pump and each of the different ceramic chambers; the leak detector and the second vacuum pump share a pipeline to connect the ceramic chambers.

9. The high-voltage DC relay ceramic component helium detection device as described in claim 1, characterized in that: A first nitrogen gas source is also provided; the first nitrogen gas source and the leak detection gas source share a pipe connected to the machine's sealing cavity.

10. The high-voltage DC relay ceramic component helium detection device as described in claim 9, characterized in that: A second nitrogen gas source is also provided; the second nitrogen gas source and the leak detector share a pipe connected to the ceramic chamber.

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